Search results for: Triaxial MEMS force sensor
Commenced in January 2007
Frequency: Monthly
Edition: International
Paper Count: 1619

Search results for: Triaxial MEMS force sensor

1619 Valuation on MEMS Pressure Sensors and Device Applications

Authors: Nurul Amziah Md Yunus, Izhal Abdul Halin, Nasri Sulaiman, Noor Faezah Ismail, Ong Kai Sheng

Abstract:

The MEMS pressure sensor has been introduced and presented in this paper. The types of pressure sensor and its theory of operation are also included. The latest MEMS technology, the fabrication processes of pressure sensor are explored and discussed. Besides, various device applications of pressure sensor such as tire pressure-monitoring system, diesel particulate filter and others are explained. Due to further miniaturization of the device nowadays, the pressure sensor with nanotechnology (NEMS) is also reviewed. The NEMS pressure sensor is expected to have better performance as well as lower in its cost. It has gained an excellent popularity in many applications.

Keywords: Pressure sensor, diaphragm, MEMS, automotive application, biomedical application, NEMS.

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1618 A Ring-Shaped Tri-Axial Force Sensor for Minimally Invasive Surgery

Authors: Beibei Han, Yong-Jin Yoon, Muhammad Hamidullah, Angel Tsu-Hui Lin, Woo-Tae Park

Abstract:

This paper presents the design of a ring-shaped tri-axial fore sensor that can be incorporated into the tip of a guidewire for use in minimally invasive surgery (MIS). The designed sensor comprises a ring-shaped structure located at the center of four cantilever beams. The ringdesign allows surgical tools to be easily passed through which largely simplified the integration process. Silicon nanowires (SiNWs) are used aspiezoresistive sensing elementsembeddedon the four cantilevers of the sensor to detect the resistance change caused by the applied load.An integration scheme with new designed guidewire tip structure having two coils at the distal end is presented. Finite element modeling has been employed in the sensor design to find the maximum stress location in order to put the SiNWs at the high stress regions to obtain maximum output. A maximum applicable force of 5 mN is found from modeling. The interaction mechanism between the designed sensor and a steel wire has been modeled by FEM. A linear relationship between the applied load on the steel wire and the induced stress on the SiNWs were observed.

Keywords: Triaxial MEMS force sensor, Ring shape, Silicon Nanowire, Minimally invasive surgery.

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1617 Designing and Analyzing Sensor and Actuator of a Nano/Micro-System for Fatigue and Fracture Characterization of Nanomaterials

Authors: Mohammad Reza Zamani Kouhpanji

Abstract:

This paper presents a MEMS/NEMS device for fatigue and fracture characterization of nanomaterials. This device can apply static loads, cyclic loads, and their combinations in nanomechanical experiments. It is based on the electromagnetic force induced between paired parallel wires carrying electrical currents. Using this concept, the actuator and sensor parts of the device were designed and analyzed while considering the practical limitations. Since the PWCC device only uses two wires for actuation part and sensing part, its fabrication process is extremely easier than the available MEMS/NEMS devices. The total gain and phase shift of the MEMS/NEMS device were calculated and investigated. Furthermore, the maximum gain and sensitivity of the MEMS/NEMS device were studied to demonstrate the capability and usability of the device for wide range of nanomaterials samples. This device can be readily integrated into SEM/TEM instruments to provide real time study of the mechanical behaviors of nanomaterials as well as their fatigue and fracture properties, softening or hardening behaviors, and initiation and propagation of nanocracks.

Keywords: Sensors and actuators, MEMS/NEMS devices, fatigue and fracture nanomechanical testing device, static and cyclic nanomechanical testing device.

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1616 Studying the Dynamical Response of Nano-Microelectromechanical Devices for Nanomechanical Testing of Nanostructures

Authors: Mohammad Reza Zamani Kouhpanji

Abstract:

Characterizing the fatigue and fracture properties of nanostructures is one of the most challenging tasks in nanoscience and nanotechnology due to lack of a MEMS/NEMS device for generating uniform cyclic loadings at high frequencies. Here, the dynamic response of a recently proposed MEMS/NEMS device under different inputs signals is completely investigated. This MEMS/NEMS device is designed and modeled based on the electromagnetic force induced between paired parallel wires carrying electrical currents, known as Ampere’s Force Law (AFL). Since this MEMS/NEMS device only uses two paired wires for actuation part and sensing part, it represents highly sensitive and linear response for nanostructures with any stiffness and shapes (single or arrays of nanowires, nanotubes, nanosheets or nanowalls). In addition to studying the maximum gains at different resonance frequencies of the MEMS/NEMS device, its dynamical responses are investigated for different inputs and nanostructure properties to demonstrate the capability, usability, and reliability of the device for wide range of nanostructures. This MEMS/NEMS device can be readily integrated into SEM/TEM instruments to provide real time study of the fatigue and fracture properties of nanostructures as well as their softening or hardening behaviors, and initiation and/or propagation of nanocracks in them.

Keywords: Ampere’s force law, dynamical response, fatigue and fracture characterization, paired wire actuators and sensors, MEMS/NEMS devices.

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1615 A Micro-Watt Second Order Filter for a Chopper Stabilized MEMS Pressure Sensor Interface

Authors: Arup K. George, Wai Pan Chan, Zhi Hui Kong, Minkyu Je

Abstract:

This paper describes a low-power second-order filter for a continuous-time chopper stabilized capacitive sensor interface, integrated with a fully differential post-CMOS surface-micromachined MEMS pressure sensor. The circuit uses a single-ended folded-cascode operational amplifier and two GM-C filters connected in cascade. The circuit is realized in a 0.18 μm CMOS process and offers differential to single-ended conversion. The novelty of the scheme is the cascade of two GM-C filters to achieve a second-order filter while minimizing power dissipation. The simulated filter cutoff frequency is 1.14 kHz at common-mode voltage 1.65 V, operating from a 3.3 V supply while dissipating 172μW of power. The filter achieves an operating range of 1V for an output load of 1MOhm and 10pF.

Keywords: Chopper Stabilization, MEMS, Pressure Sensors, Low Pass Filter

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1614 Realization of Autonomous Guidance Service by Integrating Information from NFC and MEMS

Authors: Dawei Cai

Abstract:

In this paper, we present an autonomous guidance service by combinating the position information from NFC and the orientation information from 6 a 6 axis acceleration and terrestrial magnetism sensor. We developed an algorithm to calculate the device orientation  based on the data from acceleration and terrestrial magnetism sensor.With this function, a autonomous guidance service can be provided, according the visitors's position and orientation. This service may be convient for old people or disables or children.

Keywords: NFC, Ubiquitous Computing, Guide Sysem, MEMS.

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1613 Earphone Style Wearable Device for Automatic Guidance Service with Position Sensing

Authors: Dawei Cai

Abstract:

This paper describes a design of earphone style wearable device that may provide an automatic guidance service for visitors. With both position information and orientation information obtained from NFC and terrestrial magnetism sensor, a high level automatic guide service may be realized. To realize the service, a algorithm for position detection using the packet from NFC tags, and developed an algorithm to calculate the device orientation based on the data from acceleration and terrestrial magnetism sensors called as MEMS. If visitors want to know some explanation about an exhibit in front of him, what he has to do is only move to the object and stands for a moment. The identification program will automatically recognize the status based on the information from NFC and MEMS, and start playing explanation content about the exhibit. This service should be useful for improving the understanding of the exhibition items and bring more satisfactory visiting experience without less burden.

Keywords: Wearable device, MEMS sensor, NFC, ubiquitous computing, guide system.

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1612 Research of Ring MEMS Rate Integrating Gyroscopes

Authors: Hui Liu, Haiyang Quan

Abstract:

This paper To get the angle value with a MEMS rate gyroscope in some specific field, the usual method is to make an integral operation to the rate output, which will lead the error cumulating effect. So the rate gyro is not suitable. MEMS rate integrating gyroscope (MRIG) will solve this problem. A DSP system has been developed to implement the control arithmetic. The system can measure the angle of rotation directly by the control loops that make the sensor work in whole-angle mode. Modeling the system with MATLAB, desirable results of angle outputs are got, which prove the feasibility of the control arithmetic.

Keywords: Rate gyroscope, Rate integrating gyroscope, Whole angle mode, MATLAB modeling, DSP control.

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1611 Robotic End-Effector Impedance Control without Expensive Torque/Force Sensor

Authors: Shiuh-Jer Huang, Yu-Chi Liu, Su-Hai Hsiang

Abstract:

A novel low-cost impedance control structure is proposed for monitoring the contact force between end-effector and environment without installing an expensive force/torque sensor. Theoretically, the end-effector contact force can be estimated from the superposition of each joint control torque. There have a nonlinear matrix mapping function between each joint motor control input and end-effector actuating force/torques vector. This new force control structure can be implemented based on this estimated mapping matrix. First, the robot end-effector is manipulated to specified positions, then the force controller is actuated based on the hall sensor current feedback of each joint motor. The model-free fuzzy sliding mode control (FSMC) strategy is employed to design the position and force controllers, respectively. All the hardware circuits and software control programs are designed on an Altera Nios II embedded development kit to constitute an embedded system structure for a retrofitted Mitsubishi 5 DOF robot. Experimental results show that PI and FSMC force control algorithms can achieve reasonable contact force monitoring objective based on this hardware control structure.

Keywords: Robot, impedance control, fuzzy sliding mode control, contact force estimator.

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1610 Estimation of the External Force for a Co-Manipulation Task Using the Drive Chain Robot

Authors: Sylvain Devie, Pierre-Philippe Robet, Yannick Aoustin, Maxime Gautier

Abstract:

The aim of this paper is to show that the observation of the external effort and the sensor-less control of a system is limited by the mechanical system. First, the model of a one-joint robot with a prismatic joint is presented. Based on this model, two different procedures were performed in order to identify the mechanical parameters of the system and observe the external effort applied on it. Experiments have proven that the accuracy of the force observer, based on the DC motor current, is limited by the mechanics of the robot. The sensor-less control will be limited by the accuracy in estimation of the mechanical parameters and by the maximum static friction force, that is the minimum force which can be observed in this case. The consequence of this limitation is that industrial robots without specific design are not well adapted to perform sensor-less precision tasks. Finally, an efficient control law is presented for high effort applications.

Keywords: Control, Identification, Robot, Co-manipulation, Sensor-less.

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1609 A Calibration Device for Force-Torque Sensors

Authors: Nicolay Zarutskiy, Roman Bulkin

Abstract:

The paper deals with the existing methods of force-torque sensor calibration with a number of components from one to six, analyzed their advantages and disadvantages, the necessity of introduction of a calibration method. Calibration method and its constructive realization are also described here. A calibration method allows performing automated force-torque sensor calibration both with selected components of the main vector of forces and moments and with complex loading. Thus, two main advantages of the proposed calibration method are achieved: the automation of the calibration process and universality.

Keywords: Automation, calibration, calibration device, calibration method, force-torque sensors.

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1608 Development of a System for Measuring the Three-Axis Pedal Force in Cycling and Its Applications

Authors: Joo-Hack Lee, Jin-Seung Choi, Dong-Won Kang, Jeong-Woo Seo, Ju-Young Kim, Dae-Hyeok Kim, Seung-Tae Yang, Gye-Rae Tack

Abstract:

For cycling, the analysis of the pedal force is one of the important factors in the study of exercise ability assessment and overuse injuries. In past studies, a two-axis measurement sensor was used at the sagittal plane to measure the force only in the anterior, posterior, and vertical directions and to analyze the loss of force and the injury on the frontal plane due to the forces in the right and left directions. In this study, which is a basic study on diverse analyses of the pedal force that consider the forces on the sagittal plane and the frontal plane, a three-axis pedal force measurement sensor was developed to measure the anterior-posterior (Fx), medio-lateral (Fz), and vertical (Fy) forces. The sensor was fabricated with a size and shape similar to those of the general flat pedal, and had a 550g weight that allowed smooth pedaling. Its measurement range was ±1000 N for Fx and Fz and ±2000 N for Fy, and its non-linearity, hysteresis, and repeatability were approximately 0.5%. The data were sampled at 1000 Hz using a signal collector. To use the developed sensor, the pedaling efficiency (index of efficiency, IE) and the range of left and right (medio-lateral, ML) forces were measured with two seat heights (low and high). The results of the measurement showed that the IE was higher and the force range in the ML direction was lower with the high position than with the low position. The developed measurement sensor and its application results will be useful in understanding and explaining the complicated pedaling technique, and will enable diverse kinematic analyses of the pedal force on the sagittal plane and the frontal plane.

Keywords: Cycling, Index of effectiveness, Pedal force.

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1607 The Design, Development, and Optimization of a Capacitive Pressure Sensor Utilizing an Existing 9 DOF Platform

Authors: Andrew Randles, Ilker Ocak, Cheam Daw Don, Navab Singh, Alex Gu

Abstract:

Nine Degrees of Freedom (9 DOF) systems are already in development in many areas. In this paper, an integrated pressure sensor is proposed that will make use of an already existing monolithic 9 DOF inertial MEMS platform. Capacitive pressure sensors can suffer from limited sensitivity for a given size of membrane. This novel pressure sensor design increases the sensitivity by over 5 times compared to a traditional array of square diaphragms while still fitting within a 2 mm x 2 mm chip and maintaining a fixed static capacitance. The improved design uses one large diaphragm supported by pillars with fixed electrodes placed above the areas of maximum deflection. The design optimization increases the sensitivity from 0.22 fF/kPa to 1.16 fF/kPa. Temperature sensitivity was also examined through simulation.

Keywords: Capacitive pressure sensor, 9 DOF, 10 DOF, sensor, capacitive, inertial measurement unit, IMU, inertial navigation system, INS.

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1606 Mathematical Modeling of Switching Processes in Magnetically Controlled MEMS Switches

Authors: Sergey M. Karabanov, Dmitry V. Suvorov, Dmitry Yu. Tarabrin

Abstract:

The operating principle of magnetically controlled microelectromechanical system (MEMS) switches is based on controlling the beam movement under the influence of a magnetic field. Currently, there is a MEMS switch design with a flexible ferromagnetic electrode in the form of a fixed-terminal beam, with an electrode fastened on a straight or cranked anchor. The basic performance characteristics of magnetically controlled MEMS switches (service life, sensitivity, contact resistance, fast response) are largely determined by the flexible electrode design. To ensure the stable and controlled motion of the flexible electrode, it is necessary to provide the optimal design of a flexible electrode.

Keywords: MEMS switch, magnetic sensitivity, magnetic concentrator.

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1605 Electrical Equivalent Analysis of Micro Cantilever Beams for Sensing Applications

Authors: B. G. Sheeparamatti, J. S. Kadadevarmath

Abstract:

Microcantilevers are the basic MEMS devices, which can be used as sensors, actuators and electronics can be easily built into them. The detection principle of microcantilever sensors is based on the measurement of change in cantilever deflection or change in its resonance frequency. The objective of this work is to explore the analogies between mechanical and electrical equivalent of microcantilever beams. Normally scientists and engineers working in MEMS use expensive software like CoventorWare, IntelliSuite, ANSYS/Multiphysics etc. This paper indicates the need of developing electrical equivalent of the MEMS structure and with that, one can have a better insight on important parameters, and their interrelation of the MEMS structure. In this work, considering the mechanical model of microcantilever, equivalent electrical circuit is drawn and using force-voltage analogy, it is analyzed with circuit simulation software. By doing so, one can gain access to powerful set of intellectual tools that have been developed for understanding electrical circuits Later the analysis is performed using ANSYS/Multiphysics - software based on finite element method (FEM). It is observed that both mechanical and electrical domain results for a rectangular microcantlevers are in agreement with each other.

Keywords: Electrical equivalent circuit analogy, FEM analysis, micro cantilevers, micro sensors.

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1604 Coverage Strategies for Wireless Sensor Networks

Authors: Nor Azlina Ab. Aziz, Kamarulzaman Ab. Aziz, Wan Zakiah Wan Ismail

Abstract:

Coverage is one of the main research interests in wireless sensor networks (WSN), it is used to determine the quality of service (QoS) of the networks. Therefore this paper aims to review the common strategies use in solving coverage problem in WSN. The strategies studied are used during deployment phase where the coverage is calculated based on the placement of the sensors on the region of interest (ROI). The strategies reviewed are categorized into three groups based on the approaches used, namely; force based, grid based or computational geometry based approach.

Keywords: Computational geometry, coverage, Delaunay triangulation, force, grid, Voronoi diagram, wireless sensor networks.

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1603 Three Dimensional MEMS Supercapacitor Fabricated by DRIE on Silicon Substrate

Authors: Wei Sun, Ruilin Zheng, Xuyuan Chen

Abstract:

Micro power sources are required to be used in autonomous microelectromechanical system (MEMS). In this paper,  we designed and fabricated a three dimensional (3D) MEMS supercapacitor, which is consisting of conformal silicon  dioxide/titanium/polypyrrole (PPy) layers on silicon substrate. At first, ''through-structure'' was fabricated on the silicon substrate by high-aspect-ratio deep reactive ion etching (DRIE) method, which enlarges the available surface area significantly. Then the SiO2/Ti/PPy layers grew sequentially on the ³through-structure´. Finally, the supercapacitor was investigated by electrochemical methods.

Keywords: MEMS, Supercapacitor, DRIE, 3D.

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1602 A 3 Dimensional Simulation of the Repeated Load Triaxial Test

Authors: Bao Thach Nguyen, Abbas Mohajerani

Abstract:

A typical flexible pavement structure consists of the surface, base, sub-base and subgrade soil. The loading traffic is transferred from the top layer with higher stiffness to the layer below with less stiffness. Under normal traffic loading, the behaviour of flexible pavement is very complex and can be predicted by using the repeated load triaxial test equipment in the laboratory. However, the nature of the repeated load triaxial testing procedure is considered time-consuming, complicated and expensive, and it is a challenge to carry out as a routine test in the laboratory. Therefore, the current paper proposes a numerical approach to simulate the repeated load triaxial test by employing the discrete element method. A sample with particle size ranging from 2.36mm to 19.0mm was constructed. Material properties, which included normal stiffness, shear stiffness, coefficient of friction, maximum dry density and particle density, were used as the input for the simulation. The sample was then subjected to a combination of deviator and confining stress and it was found that the discrete element method is able to simulate the repeated load triaxial test in the laboratory.

Keywords: Discrete element method, repeated load triaxial, pavement materials.

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1601 Mechanical Modeling Issues in Optimization of Dynamic Behavior of RF MEMS Switches

Authors: Suhas K, Sripadaraja K

Abstract:

This paper details few mechanical modeling and design issues of RF MEMS switches. We concentrate on an electrostatically actuated broad side series switch; surface micromachined with a crab leg membrane. The same results are extended to any complex structure. With available experimental data and fabrication results, we present the variation in dynamic performance and compliance of the switch with reference to few design issues, which we find are critical in deciding the dynamic behavior of the switch, without compromise on the RF characteristics. The optimization of pull in voltage, transient time and resonant frequency with regard to these critical design parameters are also presented.

Keywords: Microelectromechanical Systems (MEMS), RadioFrequency MEMS, Modeling, Actuators

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1600 Accuracy of Displacement Estimation and Selection of Capacitors for a Four Degrees of Freedom Capacitive Force Sensor

Authors: Chisato Murakami, Makoto Takahashi

Abstract:

Force sensor has been used as requisite for knowing information on the amount and the directions of forces on the skin surface. We have developed a four-degrees-of-freedom capacitive force sensor (approximately 20×20×5 mm3) that has a flexible structure and sixteen parallel plate capacitors. An iterative algorithm was developed for estimating four displacements from the sixteen capacitances using fourth-order polynomial approximation of characteristics between capacitance and displacement. The estimation results from measured capacitances had large error caused by deterioration of the characteristics. In this study, effective capacitors had major information were selected on the basis of the capacitance change range and the characteristic shape. Maximum errors in calibration and non-calibration points were 25%and 6.8%.However the maximum error was larger than desired value, the smallness of averaged value indicated the occurrence of a few large error points. On the other hand, error in non-calibration point was within desired value.

 

Keywords: Force sensors, capacitive sensors, estimation, iterative algorithms.

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1599 Development of Highly Sensitive System for Measurement and Monitoring of Small Impacts

Authors: Priyanka Guin, Dibyendu Chatterjee, Arijit Roy

Abstract:

Developing electronic system for detecting low energy impacts using open source hardware such as Arduino is challenging. A highly efficient loadcell is designed and fabricated. A commercial polyvinylidene fluoride (PVDF) piezoelectric film is used as primary sensor for sensing small impacts. Without modifying hardware, the Arduino board is configured by programming to capture the signal from the film sensor with a resolution better than 1.1 mV. By our system, impact energy as low as 1.8 µJ (corresponds to impact force of 39.9 mN) is reliably and monitored. In the linear zone, sensitivity of the system found to be as high as 20.7 kV/J or 3.3 V/N with a measurement frequency of 500 Hz. The various characteristics such as linearity, hysteresis, repeatability and spectrum analysis are discussed. After calibration, measurements of unknown impact energy and impact force are investigated and results are found to agree well.

Keywords: Arduino, impact energy, impact force, measurement system, PVDF film sensor.

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1598 Performance Evaluation of Purely Mechanical Wireless In-Mould Sensor for Injection Moulding

Authors: Florian Müller, Christian Kukla, Thomas Lucyshyn, Clemens Holzer

Abstract:

In this paper, the influencing parameters of a novel purely mechanical wireless in-mould injection moulding sensor were investigated. The sensor is capable of detecting the melt front at predefined locations inside the mould. The sensor comprises a movable pin which acts as the sensor element generating structure-borne sound triggered by the passing melt front. Due to the sensor design, melt pressure is the driving force. For pressure level measurement during pin movement a pressure transducer located at the same position as the movable pin. By deriving a mathematical model for the mechanical movement, dominant process parameters could be investigated towards their impact on the melt front detection characteristic. It was found that the sensor is not affected by the investigated parameters enabling it for reliable melt front detection. In addition, it could be proved that the novel sensor is in comparable range to conventional melt front detection sensors.

Keywords: Injection Moulding, In-Mould Sensor, Structure-Borne Sound, Wireless Sensor

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1597 Study of Fast Etching of Silicon for the Fabrication of Bulk Micromachined MEMS Structures

Authors: V. Swarnalatha, A. V. Narasimha Rao, P. Pal

Abstract:

The present research reports the investigation of fast etching of silicon for the fabrication of microelectromechanical systems (MEMS) structures using silicon wet bulk micromachining. Low concentration tetramethyl-ammonium hydroxide (TMAH) and hydroxylamine (NH2OH) are used as main etchant and additive, respectively. The concentration of NH2OH is varied to optimize the composition to achieve best etching characteristics such as high etch rate, significantly high undercutting at convex corner for the fast release of the microstructures from the substrate, and improved etched surface morphology. These etching characteristics are studied on Si{100} and Si{110} wafers as they are most widely used in the fabrication of MEMS structures as wells diode, transistors and integrated circuits.

Keywords: KOH, MEMS, micromachining, silicon, TMAH, wet anisotropic etching.

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1596 A Real Time Collision Avoidance Algorithm for Mobile Robot based on Elastic Force

Authors: Kyung Hyun, Choi, Minh Ngoc, Nong, M. Asif Ali, Rehmani

Abstract:

This present paper proposes the modified Elastic Strip method for mobile robot to avoid obstacles with a real time system in an uncertain environment. The method deals with the problem of robot in driving from an initial position to a target position based on elastic force and potential field force. To avoid the obstacles, the robot has to modify the trajectory based on signal received from the sensor system in the sampling times. It was evident that with the combination of Modification Elastic strip and Pseudomedian filter to process the nonlinear data from sensor uncertainties in the data received from the sensor system can be reduced. The simulations and experiments of these methods were carried out.

Keywords: Collision avoidance, Avoidance obstacle, Elastic Strip, Real time collision avoidance.

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1595 Functionally Graded MEMS Piezoelectric Energy Harvester with Magnetic Tip Mass

Authors: M. Derayatifar, M. Packirisamy, R.B. Bhat

Abstract:

Role of piezoelectric energy harvesters has gained interest in supplying power for micro devices such as health monitoring sensors. In this study, in order to enhance the piezoelectric energy harvesting in capturing energy from broader range of excitation and to improve the mechanical and electrical responses, bimorph piezoelectric energy harvester beam with magnetic mass attached at the end is presented. In view of overcoming the brittleness of piezo-ceramics, functionally graded piezoelectric layers comprising of both piezo-ceramic and piezo-polymer is employed. The nonlinear equations of motions are derived using energy method and then solved analytically using perturbation scheme. The frequency responses of the forced vibration case are obtained for the near resonance case. The nonlinear dynamic responses of the MEMS scaled functionally graded piezoelectric energy harvester in this paper may be utilized in different design scenarios to increase the efficiency of the harvester.

Keywords: Energy harvesting, functionally graded piezoelectric material, magnetic force, MEMS piezoelectric, perturbation method.

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1594 Compact Optical Sensors for Harsh Environments

Authors: Branislav Timotijevic, Yves Petremand, Markus Luetzelschwab, Dara Bayat, Laurent Aebi

Abstract:

Optical miniaturized sensors with remote readout are required devices for the monitoring in harsh electromagnetic environments. As an example, in turbo and hydro generators, excessively high vibrations of the end-windings can lead to dramatic damages, imposing very high, additional service costs. A significant change of the generator temperature can also be an indicator of the system failure. Continuous monitoring of vibrations, temperature, humidity, and gases is therefore mandatory. The high electromagnetic fields in the generators impose the use of non-conductive devices in order to prevent electromagnetic interferences and to electrically isolate the sensing element to the electronic readout. Metal-free sensors are good candidates for such systems since they are immune to very strong electromagnetic fields and given the fact that they are non-conductive. We have realized miniature optical accelerometer and temperature sensors for a remote sensing of the harsh environments using the common, inexpensive silicon Micro Electro-Mechanical System (MEMS) platform. Both devices show highly linear response. The accelerometer has a deviation within 1% from the linear fit when tested in a range 0 – 40 g. The temperature sensor can provide the measurement accuracy better than 1 °C in a range 20 – 150 °C. The design of other type of sensors for the environments with high electromagnetic interferences has also been discussed.

Keywords: Accelerometer, harsh environment, optical MEMS, pressure sensor, remote sensing, temperature sensor.

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1593 Fabless Prototyping Methodology for the Development of SOI based MEMS Microgripper

Authors: H. M. Usman Sani, Shafaat A. Bazaz, Nisar Ahmed

Abstract:

In this paper, Fabless Prototyping Methodology is introduced for the design and analysis of MEMS devices. Conventionally Finite Element Analysis (FEA) is performed before system level simulation. In our proposed methodology, system level simulation is performed earlier than FEA as it is computationally less extensive and low cost. System level simulations are based on equivalent behavioral models of MEMS device. Electrostatic actuation based MEMS Microgripper is chosen as case study to implement this methodology. This paper addresses the behavioral model development and simulation of actuator part of an electrostatically actuated Microgripper. Simulation results show that the actuator part of Microgripper works efficiently for a voltage range of 0-45V with the corresponding jaw displacement of 0-4.5425μm. With some minor changes in design, this range can be enhanced to 15μm at 85V.

Keywords: MEMS Actuator, Behavioral Model, CoventorWare, Microgripper, SOIMUMPs, System Level Simulation

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1592 FEM Analysis of the Interaction between a Piezoresistive Tactile Sensor and Biological Tissues

Authors: Ahmad Atieh, Masoud Kalantari, Roozbeh Ahmadi, Javad Dargahi, Muthukumaran Packirisamy, Mehrdad Hosseini Zadeh

Abstract:

The present paper presents a finite element model and analysis for the interaction between a piezoresistive tactile sensor and biological tissues. The tactile sensor is proposed for use in minimally invasive surgery to deliver tactile information of biological tissues to surgeons. The proposed sensor measures the relative hardness of soft contact objects as well as the contact force. Silicone rubbers were used as the phantom of biological tissues. Finite element analysis of the silicone rubbers and the mechanical structure of the sensor were performed using COMSOL Multiphysics (v3.4) environment. The simulation results verify the capability of the sensor to be used to differentiate between different kinds of silicone rubber materials.

Keywords: finite element analysis, minimally invasive surgery, Neo-Hookean hyperelastic materials, tactile sensor.

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1591 Vibration Base Identification of Impact Force Using Genetic Algorithm

Authors: R. Hashemi, M.H.Kargarnovin

Abstract:

This paper presents the identification of the impact force acting on a simply supported beam. The force identification is an inverse problem in which the measured response of the structure is used to determine the applied force. The identification problem is formulated as an optimization problem and the genetic algorithm is utilized to solve the optimization problem. The objective function is calculated on the difference between analytical and measured responses and the decision variables are the location and magnitude of the applied force. The results from simulation show the effectiveness of the approach and its robustness vs. the measurement noise and sensor location.

Keywords: Genetic Algorithm, Inverse problem, Optimization, Vibration.

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1590 Experimental Study on Smart Anchor Head

Authors: Young-Jun You, Ki-Tae Park, Kyu-Wan Lee

Abstract:

Since prestressed concrete members rely on the tensile strength of the prestressing strands to resist loads, loss of even few them could result catastrophic. Therefore, it is important to measure present residual prestress force. Although there are some techniques for obtaining present prestress force, some problems still remain. One method is to install load cell in front of anchor head but this may increase cost. Load cell is a transducer using the elastic material property. Anchor head is also an elastic material and this might result in monitoring monitor present prestress force. Features of fiber optic sensor such as small size, great sensitivity, high durability can assign sensing function to anchor head. This paper presents the concept of smart anchor head which acts as load cell and experiment for the applicability of it. Test results showed the smart anchor head worked good and strong linear relationship between load and response.

Keywords: SHM, prestress force, anchor head, fiber optic sensor

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