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Authors: H. M. Usman Sani, Shafaat A. Bazaz, Nisar Ahmed

Abstract:

In this paper, Fabless Prototyping Methodology is introduced for the design and analysis of MEMS devices. Conventionally Finite Element Analysis (FEA) is performed before system level simulation. In our proposed methodology, system level simulation is performed earlier than FEA as it is computationally less extensive and low cost. System level simulations are based on equivalent behavioral models of MEMS device. Electrostatic actuation based MEMS Microgripper is chosen as case study to implement this methodology. This paper addresses the behavioral model development and simulation of actuator part of an electrostatically actuated Microgripper. Simulation results show that the actuator part of Microgripper works efficiently for a voltage range of 0-45V with the corresponding jaw displacement of 0-4.5425μm. With some minor changes in design, this range can be enhanced to 15μm at 85V.

Keywords: MEMS Actuator, Behavioral Model, CoventorWare, Microgripper, SOIMUMPs, System Level Simulation

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Authors: B. G. Sheeparamatti, J. S. Kadadevarmath

Abstract:

Microcantilevers are the basic MEMS devices, which can be used as sensors, actuators and electronics can be easily built into them. The detection principle of microcantilever sensors is based on the measurement of change in cantilever deflection or change in its resonance frequency. The objective of this work is to explore the analogies between mechanical and electrical equivalent of microcantilever beams. Normally scientists and engineers working in MEMS use expensive software like CoventorWare, IntelliSuite, ANSYS/Multiphysics etc. This paper indicates the need of developing electrical equivalent of the MEMS structure and with that, one can have a better insight on important parameters, and their interrelation of the MEMS structure. In this work, considering the mechanical model of microcantilever, equivalent electrical circuit is drawn and using force-voltage analogy, it is analyzed with circuit simulation software. By doing so, one can gain access to powerful set of intellectual tools that have been developed for understanding electrical circuits Later the analysis is performed using ANSYS/Multiphysics - software based on finite element method (FEM). It is observed that both mechanical and electrical domain results for a rectangular microcantlevers are in agreement with each other.

Keywords: Electrical equivalent circuit analogy, FEM analysis, micro cantilevers, micro sensors.

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