Wei Sun and  Ruilin Zheng and  Xuyuan Chen,  Three Dimensional MEMS Supercapacitor Fabricated by DRIE on Silicon Substrate.   journal   = {International Journal of Electrical and Computer Engineering}, [online]. World Academy of Science, Engineering and Technology.
    October 2009, vol. 34(10). 1785 - 1788
    [viewed 29 January 2020]. Available from: https://publications.waset.org/pdf/12040.