WASET
    V. Swarnalatha and  A. V. Narasimha Rao and  P. Pal,  Study of Fast Etching of Silicon for the Fabrication of Bulk Micromachined MEMS Structures .   journal   = {International Journal of Materials and Metallurgical Engineering}, [online]. World Academy of Science, Engineering and Technology.
    November 2017, vol. 132(12). 823 - 826
    [viewed 27 April 2024]. Available from: https://publications.waset.org/pdf/10008313.