Search results for: MEMS piezoelectric

Authors: M. Derayatifar, M. Packirisamy, R.B. Bhat

Abstract:

Role of piezoelectric energy harvesters has gained interest in supplying power for micro devices such as health monitoring sensors. In this study, in order to enhance the piezoelectric energy harvesting in capturing energy from broader range of excitation and to improve the mechanical and electrical responses, bimorph piezoelectric energy harvester beam with magnetic mass attached at the end is presented. In view of overcoming the brittleness of piezo-ceramics, functionally graded piezoelectric layers comprising of both piezo-ceramic and piezo-polymer is employed. The nonlinear equations of motions are derived using energy method and then solved analytically using perturbation scheme. The frequency responses of the forced vibration case are obtained for the near resonance case. The nonlinear dynamic responses of the MEMS scaled functionally graded piezoelectric energy harvester in this paper may be utilized in different design scenarios to increase the efficiency of the harvester.

Keywords: Energy harvesting, functionally graded piezoelectric material, magnetic force, MEMS piezoelectric, perturbation method.

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Authors: Chiang-Ho Cheng, An-Shik Yang, Hong-Yih Cheng

Abstract:

This paper applies the MEMS technology to design and fabricate a micro-bubble generator by a piezoelectric actuator. Coupled with a nickel nozzle plate, an annular piezoelectric ceramic was utilized as the primary structure of the generator. In operations, the piezoelectric element deforms transversely under an electric field applied across the thickness of the generator. The surface of the nozzle plate can expand or contract because of the induction of radial strain, resulting in the whole structure to bend, and successively transport oxygen micro-bubbles into the blood flow for enhancing the oxygen content in blood. In the tests, a high magnification microscope and a high speed CCD camera were employed to photograph the time evolution of meniscus shape of gaseous bubbles dispensed from the micro-bubble generator for flow visualization. This investigation thus explored the bubble formation process including the influences of inlet gas pressure along with driving voltage and resonance frequency on the formed bubble extent.

Keywords: Micro-bubble, nozzle, oxygenator, piezoelectric.

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Authors: J. Mendoza-López, S. Sánchez-Solano, J. L. Huertas-Díaz

Abstract:

An array of piezoelectric micro actuators can be used for radiation of an ultrasonic carrier signal modulated in amplitude with an acoustic signal, which yields audio frequency applications as the air acts as a self-demodulating medium. This application is known as the parametric array. We propose a parametric array with array elements based on existing piezoelectric micro ultrasonic transducer (pMUT) design techniques. In order to reach enough acoustic output power at a desired operating frequency, a proper ratio between number of array elements and array size needs to be used, with an array total area of the order of one cm square. The transducers presented are characterized via impedance, admittance, noise figure, transducer gain and frequency responses.

Keywords: Pizeoelectric, Microspeaker, MEMS, pMUT, Parametric Array

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Authors: C. Worakitjaroenphon, A. Oonsivilai

Abstract:

The study of piezoelectric material in the past was in T-Domain form; however, no one has studied piezoelectric material in the S-Domain form. This paper will present the piezoelectric material in the transfer function or S-Domain model. S-Domain is a well known mathematical model, used for analyzing the stability of the material and determining the stability limits. By using S-Domain in testing stability of piezoelectric material, it will provide a new tool for the scientific world to study this material in various forms.

Keywords: Piezoelectric, Stability, S-Domain, Transfer function

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Authors: Sergey M. Karabanov, Dmitry V. Suvorov, Dmitry Yu. Tarabrin

Abstract:

The operating principle of magnetically controlled microelectromechanical system (MEMS) switches is based on controlling the beam movement under the influence of a magnetic field. Currently, there is a MEMS switch design with a flexible ferromagnetic electrode in the form of a fixed-terminal beam, with an electrode fastened on a straight or cranked anchor. The basic performance characteristics of magnetically controlled MEMS switches (service life, sensitivity, contact resistance, fast response) are largely determined by the flexible electrode design. To ensure the stable and controlled motion of the flexible electrode, it is necessary to provide the optimal design of a flexible electrode.

Keywords: MEMS switch, magnetic sensitivity, magnetic concentrator.

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Authors: Thomas Jin-Chee Liu, Yu-Shen Chen, Hsi-Yang Ho, Jyun-Ting Liu, Chih-Chun Lee

Abstract:

This paper discusses some notes on the vibration design for the piezoelectric cooling fan. After reviewing the fundamental formulas of the cantilever Euler beam, it is not easy to find the optimal design of the piezoelectric fan. The experiments also show the complicated results of the vibration behavior and air flow.

Keywords: Piezoelectric cooling fan, vibration, cantilever Euler beam, air flow.

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Authors: Thomas Jin-Chee Liu, Yu-Shen Chen

Abstract:

Using the numerical and experimental methods, this paper discusses some primary studies on the vibration and cooling performances of the piezoelectric cooling fan with the rectangular blade. When the fan works at its natural frequency, the vibrating displacement is largest and the cooling performance is best. Due to the vibration behavior, the cooling performance is affected by the geometry, material property, and working frequency of the piezoelectric cooling fan. 

Keywords: Piezoelectric cooling fan, finite element, vibration, natural frequency.

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Authors: D. G. Piliposyan

Abstract:

Propagation of electro-elastic waves in a piezoelectric waveguide with finite stacks and a defect layer is studied using a modified transfer matrix method. The dispersion equation for a periodic structure consisting of unit cells made up from two piezoelectric materials with metallized interfaces is obtained. An analytical expression, for the transmission coefficient for a waveguide with finite stacks and a defect layer, that is found can be used to accurately detect and control the position of the passband within a stopband. The result can be instrumental in constructing a tunable waveguide made of layers of different or identical piezoelectric crystals and separated by metallized interfaces.

Keywords: Defect mode, Bloch waves, periodic phononic crystal, piezoelectric composite waveguide.

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Authors: Nurul Amziah Md Yunus, Izhal Abdul Halin, Nasri Sulaiman, Noor Faezah Ismail, Ong Kai Sheng

Abstract:

The MEMS pressure sensor has been introduced and presented in this paper. The types of pressure sensor and its theory of operation are also included. The latest MEMS technology, the fabrication processes of pressure sensor are explored and discussed. Besides, various device applications of pressure sensor such as tire pressure-monitoring system, diesel particulate filter and others are explained. Due to further miniaturization of the device nowadays, the pressure sensor with nanotechnology (NEMS) is also reviewed. The NEMS pressure sensor is expected to have better performance as well as lower in its cost. It has gained an excellent popularity in many applications.

Keywords: Pressure sensor, diaphragm, MEMS, automotive application, biomedical application, NEMS.

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Authors: J. H. Kim, J. H. Kwon, J. S. Park, K. J. Lim

Abstract:

This paper has been investigated a technique that predicts the performance of a bar-type unimorph piezoelectric vibration actuator depending on the frequency. This paper has been proposed an equivalent circuit that can be easily analyzed for the bar-type unimorph piezoelectric vibration actuator. In the dynamic analysis, rigidity and resonance frequency, which are important mechanical elements, were derived using the basic beam theory. In the equivalent circuit analysis, the displacement and bandwidth of the piezoelectric vibration actuator depending on the frequency were predicted. Also, for the reliability of the derived equations, the predicted performance depending on the shape change was compared with the result of a finite element analysis program.

Keywords: Actuator, performance, piezoelectric, unimorph.Actuator, performance, piezoelectric, unimorph.

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Authors: C. Panya-Isara, T. Kulworawanichpong, P. Pao-La-Or

Abstract:

Piezoelectric transformers are electronic devices made from piezoelectric materials. The piezoelectric transformers as the name implied are used for changing voltage signals from one level to another. Electrical energy carried with signals is transferred by means of mechanical vibration. Characterizing in both electrical and mechanical properties leads to extensively use and efficiency enhancement of piezoelectric transformers in various applications. In this paper, study and analysis of electrical and mechanical properties of multi-layer piezoelectric transformers in forms of potential and displacement distribution throughout the volume, respectively. This paper proposes a set of quasi-static mathematical model of electromechanical coupling for piezoelectric transformer by using a set of partial differential equations. Computer-based simulation utilizing the three-dimensional finite element method (3-D FEM) is exploited as a tool for visualizing potentials and displacements distribution within the multi-layer piezoelectric transformer. This simulation was conducted by varying a number of layers. In this paper 3, 5 and 7 of the circular ring type were used. The computer simulation based on the use of the FEM has been developed in MATLAB programming environment.

Keywords: Multi-layer Piezoelectric Transformer, 3-D Finite Element Method (3-D FEM), Electro-mechanical Coupling, Mechanical Vibration

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Authors: Wei Sun, Ruilin Zheng, Xuyuan Chen

Abstract:

Micro power sources are required to be used in autonomous microelectromechanical system (MEMS). In this paper,  we designed and fabricated a three dimensional (3D) MEMS supercapacitor, which is consisting of conformal silicon  dioxide/titanium/polypyrrole (PPy) layers on silicon substrate. At first, ''through-structure'' was fabricated on the silicon substrate by high-aspect-ratio deep reactive ion etching (DRIE) method, which enlarges the available surface area significantly. Then the SiO2/Ti/PPy layers grew sequentially on the ³through-structure´. Finally, the supercapacitor was investigated by electrochemical methods.

Keywords: MEMS, Supercapacitor, DRIE, 3D.

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Authors: Suhas K, Sripadaraja K

Abstract:

This paper details few mechanical modeling and design issues of RF MEMS switches. We concentrate on an electrostatically actuated broad side series switch; surface micromachined with a crab leg membrane. The same results are extended to any complex structure. With available experimental data and fabrication results, we present the variation in dynamic performance and compliance of the switch with reference to few design issues, which we find are critical in deciding the dynamic behavior of the switch, without compromise on the RF characteristics. The optimization of pull in voltage, transient time and resonant frequency with regard to these critical design parameters are also presented.

Keywords: Microelectromechanical Systems (MEMS), RadioFrequency MEMS, Modeling, Actuators

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Authors: Hailu Dessalegn, T. Srinivas

Abstract:

We propose new multiple-channel piezoelectric (PZT) actuated tunable optical filter based on racetrack multi-ring resonators for wavelength de-multiplexing network applications. We design tunable eight-channel wavelength de-multiplexer consisting of eight cascaded PZT actuated tunable multi-ring resonator filter with a channel spacing of 1.6nm. The filter for each channel is basically structured on a suspended beam, sandwiched with piezoelectric material and built in integrated ring resonators which are placed on the middle of the beam to gain uniform stress and linearly varying longitudinal strain. A reference single mode serially coupled multi stage racetrack ring resonator with the same radii and coupling length is designed with a line width of 0.8974nm with a flat top pass band at 1dB of 0.5205nm and free spectral range of about 14.9nm. In each channel, a small change in the perimeter of the rings is introduced to establish the shift in resonance wavelength as per the defined channel spacing. As a result, when a DC voltage is applied, the beams will elongate, which involves mechanical deformation of the ring resonators that induces a stress and a strain, which brings a change in refractive index and perimeter of the rings leading to change in the output spectrum shift providing the tunability of central wavelength in each channel. Simultaneous wave length shift as high as 45.54pm/

Keywords: Optical MEMS, piezoelectric (PZT) actuation, tunable optical filter, wavelength de-multiplexer.

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Authors: C. Kumjeera, T. Unchim, B. Marungsri, A. Oonsivilai

Abstract:

The study of piezoelectric material in the past was in T-Domain form; however, no one has studied piezoelectric material in the S-Domain form. This paper will present the piezoelectric material in the transfer function or S-Domain model. S-Domain is a well known mathematical model, used for analyzing the stability of the material and determining the stability limits. By using S-Domain in testing stability of piezoelectric material, it will provide a new tool for the scientific world to study this material in various forms.

Keywords: Hard disk drive, failure analysis, tool, time

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Authors: V. Swarnalatha, A. V. Narasimha Rao, P. Pal

Abstract:

The present research reports the investigation of fast etching of silicon for the fabrication of microelectromechanical systems (MEMS) structures using silicon wet bulk micromachining. Low concentration tetramethyl-ammonium hydroxide (TMAH) and hydroxylamine (NH₂OH) are used as main etchant and additive, respectively. The concentration of NH₂OH is varied to optimize the composition to achieve best etching characteristics such as high etch rate, significantly high undercutting at convex corner for the fast release of the microstructures from the substrate, and improved etched surface morphology. These etching characteristics are studied on Si{100} and Si{110} wafers as they are most widely used in the fabrication of MEMS structures as wells diode, transistors and integrated circuits.

Keywords: KOH, MEMS, micromachining, silicon, TMAH, wet anisotropic etching.

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Authors: A. R. Nezamabadi, M. Karami Khorramabadi

Abstract:

This paper presents the elastic buckling of homogeneous beams with a pair of piezoelectric layers surface bonded on both sides of the beams. The displacement field of beam is assumed based on the Engesser-Timoshenko beam theory. Applying the Hamilton's principle, the equilibrium equation is established. The influences of applied voltage, dimensionless geometrical parameter and piezoelectric thickness on the critical buckling load of beam are presented. To investigate the accuracy of the present analysis, a compression study is carried out with a known data.

Keywords: Mechanical Buckling, Engesser-Timoshenko beam theory - Piezoelectric layer.

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Authors: H. M. Usman Sani, Shafaat A. Bazaz, Nisar Ahmed

Abstract:

In this paper, Fabless Prototyping Methodology is introduced for the design and analysis of MEMS devices. Conventionally Finite Element Analysis (FEA) is performed before system level simulation. In our proposed methodology, system level simulation is performed earlier than FEA as it is computationally less extensive and low cost. System level simulations are based on equivalent behavioral models of MEMS device. Electrostatic actuation based MEMS Microgripper is chosen as case study to implement this methodology. This paper addresses the behavioral model development and simulation of actuator part of an electrostatically actuated Microgripper. Simulation results show that the actuator part of Microgripper works efficiently for a voltage range of 0-45V with the corresponding jaw displacement of 0-4.5425μm. With some minor changes in design, this range can be enhanced to 15μm at 85V.

Keywords: MEMS Actuator, Behavioral Model, CoventorWare, Microgripper, SOIMUMPs, System Level Simulation

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Authors: Arian Bahrami, Mojtaba Tafaoli-Masoule, Mansour Nikkhah Bahrami

Abstract:

This paper demonstrates the potential of applying PD-like fuzzy logic controller for active vibration control of piezoelectric Stewart platforms. Through simulation, the control authority of the piezo stack actuators for effectively damping the Stewart platform vibration can be evaluated for further implementation of the system. Each leg of the piezoelectric Stewart platform consists of a linear piezo stack actuator, a collocated velocity sensor, a collocated displacement sensor and flexible tips for the connections with the two end plates. The piezoelectric stack is modeled as a bar element and the electro-mechanical coupling property is simulated using Matlab/Simulink software. Then, the open loop and closed loop dynamic responses are performed for the system to characterize the effect of the control on the vibration of the piezoelectric Stewart platform. A significant improvement in the damping of the structure can be observed by using the PD-like fuzzy controller.

Keywords: Active vibration control, Fuzzy controller, Piezoelectric stewart platform.

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Authors: Mohammad Reza Zamani Kouhpanji

Abstract:

Characterizing the fatigue and fracture properties of nanostructures is one of the most challenging tasks in nanoscience and nanotechnology due to lack of a MEMS/NEMS device for generating uniform cyclic loadings at high frequencies. Here, the dynamic response of a recently proposed MEMS/NEMS device under different inputs signals is completely investigated. This MEMS/NEMS device is designed and modeled based on the electromagnetic force induced between paired parallel wires carrying electrical currents, known as Ampere’s Force Law (AFL). Since this MEMS/NEMS device only uses two paired wires for actuation part and sensing part, it represents highly sensitive and linear response for nanostructures with any stiffness and shapes (single or arrays of nanowires, nanotubes, nanosheets or nanowalls). In addition to studying the maximum gains at different resonance frequencies of the MEMS/NEMS device, its dynamical responses are investigated for different inputs and nanostructure properties to demonstrate the capability, usability, and reliability of the device for wide range of nanostructures. This MEMS/NEMS device can be readily integrated into SEM/TEM instruments to provide real time study of the fatigue and fracture properties of nanostructures as well as their softening or hardening behaviors, and initiation and/or propagation of nanocracks in them.

Keywords: Ampere’s force law, dynamical response, fatigue and fracture characterization, paired wire actuators and sensors, MEMS/NEMS devices.

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Authors: A. R. Nezamabadi, M. Karami Khorramabadi

Abstract:

This paper studies dynamic stability of homogeneous beams with piezoelectric layers subjected to periodic axial compressive load that is simply supported at both ends lies on a continuous elastic foundation. The displacement field of beam is assumed based on Bernoulli-Euler beam theory. Applying the Hamilton's principle, the governing dynamic equation is established. The influences of applied voltage, foundation coefficient and piezoelectric thickness on the unstable regions are presented. To investigate the accuracy of the present analysis, a compression study is carried out with a known data.

Keywords: Dynamic stability, Homogeneous graded beam-Piezoelectric layer, Harmonic balance method.

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Authors: O. Miraliyari

Abstract:

This article attempts to analyze functionally graded beam thermal buckling along with piezoelectric layers applying based on the third order shearing deformation theory considering various boundary conditions. The beam properties are assumed to vary continuously from the lower surface to the upper surface of the beam. The equilibrium equations are derived using the total potential energy equations, Euler equations, piezoelectric material constitutive equations and third order shear deformation theory assumptions. In order to fulfill such an aim, at first functionally graded beam with piezoelectric layers applying the third order shearing deformation theory along with clamped -clamped boundary conditions are thoroughly analyzed, and then following making sure of the correctness of all the equations, the very same beam is analyzed with piezoelectric layers through simply-simply and simply-clamped boundary conditions. In this article buckling critical temperature for functionally graded beam is derived in two different ways, without piezoelectric layer and with piezoelectric layer and the results are compared together. Finally, all the conclusions obtained will be compared and contrasted with the same samples in the same and distinguished conditions through tables and charts. It would be noteworthy that in this article, the software MAPLE has been applied in order to do the numeral calculations.

Keywords: Thermal buckling, functionally graded beam, piezoelectric layer, various boundary conditions.

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Authors: José E. Q. Souza, Marcio Fontana, Antonio C. C. Lima

Abstract:

This paper presents analysis and characterization of a piezoelectric micro-generator for energy harvesting application. A low-cost experimental prototype was designed to operate as piezoelectric micro-generator in the laboratory. An input acceleration of 9.8m/s2 using a sine signal (peak-to-peak voltage: 1V, offset voltage: 0V) at frequencies ranging from 10Hz to 160Hz generated a maximum average power of 432.4μW (linear mass position = 25mm) and an average power of 543.3μW (angular mass position = 35°). These promising results show that the prototype can be considered for low consumption load application as an energy harvesting micro-generator.

Keywords: Piezoelectric, microgenerator, energy harvesting, cantilever beam.

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Authors: M. Karami Khorramabadi, A. R. Nezamabadi

Abstract:

Stability of functionally graded beams with piezoelectric layers subjected to axial compressive load that is simply supported at both ends is studied in this paper. The displacement field of beam is assumed based on first order shear deformation beam theory. Applying the Hamilton's principle, the governing equation is established. The influences of applied voltage, dimensionless geometrical parameter, functionally graded index and piezoelectric thickness on the critical buckling load of beam are presented. To investigate the accuracy of the present analysis, a compression study is carried out with a known data.

Keywords: Stability, Functionally graded beam, First order shear deformation theory, Piezoelectric layer.

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Authors: Bijay Kumar Sahoo, Ashok Kumar Srivastav

Abstract:

We have investigated the effect of piezoelectric (PZ) polarization property in binary as well as in ternary wurtzite nitrides. It is found that with the presence of PZ polarization property, the phonon group velocity is modified. The change in phonon group velocity due to PZ polarization effect directly depends on piezoelectric tensor value. Using different piezoelectric tensor values recommended by different workers in the literature, percent change in group velocities of phonons has been estimated. The Debye temperatures and frequencies of binary nitrides GaN, AlN and InN are also calculated using the modified group velocities. For ternary nitrides AlxGa(1-x)N, InxGa(1-x)N and InxAl(1-x)N, the phonon group velocities have been calculated as a functions of composition. A small positive bowing is observed in phonon group velocities of ternary alloys. Percent variations in phonon group velocities are also calculated for a straightforward comparison among ternary nitrides. The results are expected to show a change in phonon relaxation rates and thermal conductivity of III-nitrides when piezoelectric polarization property is taken into consideration.

Keywords: Wirtzite nitrides, piezoelectric polarization, Phonon group velocity, Debye frequency and Debye temperature.

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Authors: Chiang-Ho Cheng, Hong-Yih Cheng, An-Shik Yang, Tung-Hsun Hsu

Abstract:

This paper reports a novel actuating design that uses the shear deformation of a piezoelectric actuator to deflect a bulge-diaphragm for driving an array microdroplet ejector. In essence, we employed a circular-shaped actuator poled radial direction with remnant polarization normal to the actuating electric field for inducing the piezoelectric shear effect. The array microdroplet ejector consists of a shear type piezoelectric actuator, a vibration plate, two chamber plates, two channel plates and a nozzle plate. The vibration, chamber and nozzle plate components are fabricated using nickel electroforming technology, whereas the channel plate is fabricated by etching of stainless steel. The diaphragm displacement was measured by the laser two-dimensional scanning vibrometer. The ejected droplets of the microejector were also observed via an optic visualization system.

Keywords: Actuator, nozzle, microejector, piezoelectric.

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Authors: Chao Yi, Cunyue Lu, Lingwei Quan

Abstract:

Piezoelectric linear motors have the characteristics of great electromagnetic compatibility, high positioning accuracy, compact structure and no deceleration mechanism, which make it promising to applicate in micro-miniature precision drive systems. However, most piezoelectric motors are employed by flexible clamping, which has insufficient rigidity and is difficult to use in rapid positioning. Another problem is that this clamping method seriously affects the vibration efficiency of the vibrating unit. In order to solve these problems, this paper proposes a piezoelectric stack linear motor based on double-end rigid clamping. First, a piezoelectric linear motor with a length of only 35.5 mm is designed. This motor is mainly composed of a motor stator, a driving foot, a ceramic friction strip, a linear guide, a pre-tightening mechanism and a base. This structure is much simpler and smaller than most similar motors, and it is easy to assemble as well as to realize precise control. In addition, the properties of piezoelectric stack are reviewed and in order to obtain the elliptic motion trajectory of the driving head, a driving scheme of the longitudinal-shear composite stack is innovatively proposed. Finally, impedance analysis and speed performance testing were performed on the piezoelectric linear motor prototype. The motor can measure speed up to 25.5 mm/s under the excitation of signal voltage of 120 V and frequency of 390 Hz. The result shows that the proposed piezoelectric stacked linear motor obtains great performance. It can run smoothly in a large speed range, which is suitable for various precision control in medical images, aerospace, precision machinery and many other fields.

Keywords: Elliptical trajectory, linear motor, piezoelectric stack, rigid clamping.

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Authors: Mohammad Reza Zamani Kouhpanji

Abstract:

This paper presents a MEMS/NEMS device for fatigue and fracture characterization of nanomaterials. This device can apply static loads, cyclic loads, and their combinations in nanomechanical experiments. It is based on the electromagnetic force induced between paired parallel wires carrying electrical currents. Using this concept, the actuator and sensor parts of the device were designed and analyzed while considering the practical limitations. Since the PWCC device only uses two wires for actuation part and sensing part, its fabrication process is extremely easier than the available MEMS/NEMS devices. The total gain and phase shift of the MEMS/NEMS device were calculated and investigated. Furthermore, the maximum gain and sensitivity of the MEMS/NEMS device were studied to demonstrate the capability and usability of the device for wide range of nanomaterials samples. This device can be readily integrated into SEM/TEM instruments to provide real time study of the mechanical behaviors of nanomaterials as well as their fatigue and fracture properties, softening or hardening behaviors, and initiation and propagation of nanocracks.

Keywords: Sensors and actuators, MEMS/NEMS devices, fatigue and fracture nanomechanical testing device, static and cyclic nanomechanical testing device.

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Authors: Hui Liu, Haiyang Quan

Abstract:

This paper To get the angle value with a MEMS rate gyroscope in some specific field, the usual method is to make an integral operation to the rate output, which will lead the error cumulating effect. So the rate gyro is not suitable. MEMS rate integrating gyroscope (MRIG) will solve this problem. A DSP system has been developed to implement the control arithmetic. The system can measure the angle of rotation directly by the control loops that make the sensor work in whole-angle mode. Modeling the system with MATLAB, desirable results of angle outputs are got, which prove the feasibility of the control arithmetic.

Keywords: Rate gyroscope, Rate integrating gyroscope, Whole angle mode, MATLAB modeling, DSP control.

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Authors: J. H. Park, S. C. Jeong, J. H. Koo, H. Y. Jung, S. M. Lee

Abstract:

We propose an integral tracking control method for a piezoelectric actuator system. The proposed method achieves the output tracking without requiring any hysteresis observer or schemes to compensate the hysteresis effect. With the proposed control law, the system is converted into the standard singularly perturbed model. Using Tikhonov-s theorem, we guarantee that the tracking error can be reduced to arbitrarily small bound. A numerical example is given to illustrate the effectiveness of our proposed method.

Keywords: Piezoelectric actuator, tracking control, hysteresis effect.

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