Studying the Dynamical Response of Nano-Microelectromechanical Devices for Nanomechanical Testing of Nanostructures
Authors: Mohammad Reza Zamani Kouhpanji
Characterizing the fatigue and fracture properties of nanostructures is one of the most challenging tasks in nanoscience and nanotechnology due to lack of a MEMS/NEMS device for generating uniform cyclic loadings at high frequencies. Here, the dynamic response of a recently proposed MEMS/NEMS device under different inputs signals is completely investigated. This MEMS/NEMS device is designed and modeled based on the electromagnetic force induced between paired parallel wires carrying electrical currents, known as Ampere’s Force Law (AFL). Since this MEMS/NEMS device only uses two paired wires for actuation part and sensing part, it represents highly sensitive and linear response for nanostructures with any stiffness and shapes (single or arrays of nanowires, nanotubes, nanosheets or nanowalls). In addition to studying the maximum gains at different resonance frequencies of the MEMS/NEMS device, its dynamical responses are investigated for different inputs and nanostructure properties to demonstrate the capability, usability, and reliability of the device for wide range of nanostructures. This MEMS/NEMS device can be readily integrated into SEM/TEM instruments to provide real time study of the fatigue and fracture properties of nanostructures as well as their softening or hardening behaviors, and initiation and/or propagation of nanocracks in them.
Digital Object Identifier (DOI): doi.org/10.5281/zenodo.1314465Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 549
 Mohammadi R, Shahrokhian S. In-situ fabrication of nanosheet arrays on copper foil as a new substrate for binder-free high-performance electrochemical supercapacitors. Journal of Electroanalytical Chemistry. 2017 Oct 1; 802:48-56.
 Ozel T, Zhang B, Gao R, Day RW, Lieber CM, Nocera DG. Electrochemical Deposition of Conformal and Functional Layers on High Aspect Ratio Silicon Micro/Nanowires. Nano Letters. 2017 Jun 16.
 Yan H, Hohman JN, Li FH, Jia C, Solis-Ibarra D, Wu B, Dahl JE, Carlson RM, Tkachenko BA, Fokin AA, Schreiner PR. Hybrid metal-organic chalcogenide nanowires with electrically conductive inorganic core through diamondoid-directed assembly. Nature materials. 2017 Mar 1; 16(3):349-55.
 Lupan O, Postica V, Wolff N, Polonskyi O, Duppel V, Kaidas V, Lazari E, Ababii N, Faupel F, Kienle L, Adelung R. Localized Synthesis of Iron Oxide Nanowires and Fabrication of High Performance Nanosensors Based on a Single Fe2O3 Nanowire. Small. 2017 Apr 1; 13(16).
 Han D, Jing X, Wang J, Ding Y, Cheng Z, Dang H, Xu P. Three-dimensional Co 3 O 4 [email protected] NiO Nanosheet Core-shell Construction Arrays as Electrodes for Low Charge Transfer Resistance. Electrochimica Acta. 2017 Jul 1; 241:220-8.
 Zhao Y, Chang C, Teng F, Zhao Y, Chen G, Shi R, Waterhouse GI, Huang W, Zhang T. Water Splitting: Defect‐Engineered Ultrathin δ‐MnO2 Nanosheet Arrays as Bifunctional Electrodes for Efficient Overall Water Splitting (Adv. Energy Mater. 18/2017). Advanced Energy Materials. 2017 Sep 1; 7(18).
 Zhou L, Shao M, Zhang C, Zhao J, He S, Rao D, Wei M, Evans DG, Duan X. Hierarchical CoNi‐Sulfide Nanosheet Arrays Derived from Layered Double Hydroxides toward Efficient Hydrazine Electrooxidation. Advanced Materials. 2017 Feb 1; 29(6).
 Zamani Kouhpanji, MR. Investigating the classical and non-classical mechanical properties of GaN nanowires. MS Thesis, University of New Mexico, 2017, http://digitalrepository.unm.edu/ece_etds/354.
 Zamani Kouhpanji MR, Jafaraghaei U. A semianalytical approach for determining the nonclassical mechanical properties of materials. arXiv preprint arXiv:1706.06559. 2017 Jun 20.
 Bao W, Su Z, Zheng C, Ning J, Xu S. Carrier localization effects in InGaN/GaN multiple-quantum-wells LED nanowires: luminescence quantum efficiency improvement and “negative” thermal activation energy. Scientific reports. 2016; 6.
 Farsad E, Abbasi SP, Goodarzi A, Zabihi MS. Experimental parametric investigation of temperature effects on 60W-QCW diode laser. World Acad. Sci. Eng. Technol. 2011 Nov 28; 59: 1190-6.
 Huang JY, Zheng H, Mao SX, Li Q, Wang GT. In situ nanomechanics of GaN nanowires. Nano letters. 2011 Mar 18; 11(4):1618-22.
 Hung SC, Su YK, Fang TH, Chang SJ, Ji LW. Buckling instabilities in GaN nanotubes under uniaxial compression. Nanotechnology. 2005 Aug 16; 16(10):2203.
 Brown JJ, Baca AI, Bertness KA, Dikin DA, Ruoff RS, Bright VM. Tensile measurement of single crystal gallium nitride nanowires on MEMS test stages. Sensors and Actuators A: Physical. 2011 Apr 30; 166(2):177-86.
 Dai S, Zhao J, He MR, Wang X, Wan J, Shan Z, Zhu J. Elastic properties of GaN nanowires: Revealing the influence of planar defects on Young’s modulus at nanoscale. Nano letters. 2014 Dec 4; 15(1):8-15.
 Nam CY, Jaroenapibal P, Tham D, Luzzi DE, Evoy S, Fischer JE. Diameter-dependent electromechanical properties of GaN nanowires. Nano letters. 2006 Feb 8; 6(2):153-8.
 Davydov VY, Averkiev NS, Goncharuk IN, Nelson DK, Nikitina IP, Polkovnikov AS, Smirnov AN, Jacobson MA, Semchinova OK. Raman and photoluminescence studies of biaxial strain in GaN epitaxial layers grown on 6H–SiC. Journal of applied physics. 1997 Nov 15; 82(10):5097-102.
 Moram MA, Barber ZH, Humphreys CJ. Accurate experimental determination of the Poisson’s ratio of GaN using high-resolution x-ray diffraction. Journal of applied physics. 2007 Jul 15; 102(2):023505.
 Kahn H, Ballarini R, Mullen RL, Heuer AH. Electrostatically actuated failure of microfabricated polysilicon fracture mechanics specimens. InProceedings of the royal society of london a: mathematical, physical and engineering sciences 1999 Oct 8 (Vol. 455, No. 1990, pp. 3807-3823). The Royal Society.
 Hosseinian E, Pierron ON. Quantitative in situ TEM tensile fatigue testing on nanocrystalline metallic ultrathin films. Nanoscale. 2013 Nov 22; 5(24):12532-41.
 M. R. Zamani Kouhpanji, “Paired-wire carrying current actuators and piezoelectric beam sensors for microelectromechanical systems,” Microsyst. Technol., p. MITE-D-17-00647, 2017.
 M. Reza and Z. Kouhpanji, “Designing and Analyzing Sensor and Actuator of a Nano / Micro-System for Fatigue and Fracture Characterization of Nanomaterials,” vol. 11, no. 10, pp. 1649–1657, 2017.
 Pisano AP, Cho YH. Mechanical design issues in laterally-driven microstructures. Sensors and Actuators A: Physical. 1990 Apr 1; 23(1-3):1060-4.
 Legtenberg R, Groeneveld AW, Elwenspoek M. Comb-drive actuators for large displacements. Journal of Micromechanics and microengineering. 1996 Sep; 6(3):320.
 Maloney JM, Schreiber DS, DeVoe DL. Large-force electrothermal linear micromotors. Journal of Micromechanics and Microengineering. 2003 Nov 17; 14(2):226.
 Zhu Y, Corigliano A, Espinosa HD. A thermal actuator for nanoscale in situ microscopy testing: design and characterization. Journal of micromechanics and microengineering. 2006 Jan 5; 16(2):242.
 Que L, Park JS, Gianchandani YB. Bent-beam electro-thermal actuators for high force applications. InMicro Electro Mechanical Systems, 1999. MEMS'99. Twelfth IEEE International Conference on 1999 Jan 21 (pp. 31-36). IEEE.
 Kahrobaiyan MH, Asghari M, Hoore M, Ahmadian MT. Nonlinear size-dependent forced vibrational behavior of microbeams based on a non-classical continuum theory. Journal of Vibration and Control. 2012 Apr; 18(5):696-711.
 Nayfeh AH, Mook DT. Nonlinear oscillations. John Wiley & Sons; 2008 Sep 26.
 Nayfeh MH, Brussel MK. Electricity and magnetism. Courier Dover Publications; 2015 Feb 9.
 Taylor FJ. State Variable Filter Models. Digital Filters: Principles and Applications with MATLAB.: 183-96.