@article{(Open Science Index):https://publications.waset.org/pdf/12040,
	  title     = {Three Dimensional MEMS Supercapacitor Fabricated by DRIE on Silicon Substrate},
	  author    = {Wei Sun and  Ruilin Zheng and  Xuyuan Chen},
	  country	= {},
	  institution	= {},
	  abstract     = {Micro power sources are required to be used in autonomous microelectromechanical system (MEMS). In this paper, 
we designed and fabricated a three dimensional (3D) MEMS supercapacitor, which is consisting of conformal silicon 
dioxide/titanium/polypyrrole (PPy) layers on silicon substrate. At first, ''through-structure'' was fabricated on the silicon substrate by high-aspect-ratio deep reactive ion etching (DRIE) method, which enlarges the available surface area significantly. Then the SiO2/Ti/PPy layers grew sequentially on the ³through-structure´. Finally, the supercapacitor was investigated by electrochemical methods.
},
	    journal   = {International Journal of Electrical and Computer Engineering},
	  volume    = {3},
	  number    = {10},
	  year      = {2009},
	  pages     = {1785 - 1788},
	  ee        = {https://publications.waset.org/pdf/12040},
	  url   	= {https://publications.waset.org/vol/34},
	  bibsource = {https://publications.waset.org/},
	  issn  	= {eISSN: 1307-6892},
	  publisher = {World Academy of Science, Engineering and Technology},
	  index 	= {Open Science Index 34, 2009},
	}