Search results for: MEMS Actuator

Authors: H. M. Usman Sani, Shafaat A. Bazaz, Nisar Ahmed

Abstract:

In this paper, Fabless Prototyping Methodology is introduced for the design and analysis of MEMS devices. Conventionally Finite Element Analysis (FEA) is performed before system level simulation. In our proposed methodology, system level simulation is performed earlier than FEA as it is computationally less extensive and low cost. System level simulations are based on equivalent behavioral models of MEMS device. Electrostatic actuation based MEMS Microgripper is chosen as case study to implement this methodology. This paper addresses the behavioral model development and simulation of actuator part of an electrostatically actuated Microgripper. Simulation results show that the actuator part of Microgripper works efficiently for a voltage range of 0-45V with the corresponding jaw displacement of 0-4.5425μm. With some minor changes in design, this range can be enhanced to 15μm at 85V.

Keywords: MEMS Actuator, Behavioral Model, CoventorWare, Microgripper, SOIMUMPs, System Level Simulation

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Authors: Mohammad Reza Zamani Kouhpanji

Abstract:

This paper presents a MEMS/NEMS device for fatigue and fracture characterization of nanomaterials. This device can apply static loads, cyclic loads, and their combinations in nanomechanical experiments. It is based on the electromagnetic force induced between paired parallel wires carrying electrical currents. Using this concept, the actuator and sensor parts of the device were designed and analyzed while considering the practical limitations. Since the PWCC device only uses two wires for actuation part and sensing part, its fabrication process is extremely easier than the available MEMS/NEMS devices. The total gain and phase shift of the MEMS/NEMS device were calculated and investigated. Furthermore, the maximum gain and sensitivity of the MEMS/NEMS device were studied to demonstrate the capability and usability of the device for wide range of nanomaterials samples. This device can be readily integrated into SEM/TEM instruments to provide real time study of the mechanical behaviors of nanomaterials as well as their fatigue and fracture properties, softening or hardening behaviors, and initiation and propagation of nanocracks.

Keywords: Sensors and actuators, MEMS/NEMS devices, fatigue and fracture nanomechanical testing device, static and cyclic nanomechanical testing device.

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Authors: Sallem F., Dahhou B., Kamoun A.

Abstract:

In this work, the main problem considered is the  detection and the isolation of the actuator fault. A new formulation of  the linear system is generated to obtain the conditions of the actuator  fault diagnosis. The proposed method is based on the representation  of the actuator as a subsystem connected with the process system in  cascade manner. The designed formulation is generated to obtain the  conditions of the actuator fault detection and isolation. Detectability  conditions are expressed in terms of the invertibility notions. An  example and a comparative analysis with the classic formulation  illustrate the performances of such approach for simple actuator fault  diagnosis by using the linear model of nuclear reactor.

 

Keywords: Actuator fault, Fault detection, left invertibility, nuclear reactor, observability, parameter intervals, system inversion.

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Authors: Sergey M. Karabanov, Dmitry V. Suvorov, Dmitry Yu. Tarabrin

Abstract:

The operating principle of magnetically controlled microelectromechanical system (MEMS) switches is based on controlling the beam movement under the influence of a magnetic field. Currently, there is a MEMS switch design with a flexible ferromagnetic electrode in the form of a fixed-terminal beam, with an electrode fastened on a straight or cranked anchor. The basic performance characteristics of magnetically controlled MEMS switches (service life, sensitivity, contact resistance, fast response) are largely determined by the flexible electrode design. To ensure the stable and controlled motion of the flexible electrode, it is necessary to provide the optimal design of a flexible electrode.

Keywords: MEMS switch, magnetic sensitivity, magnetic concentrator.

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Authors: Samee Ahmad, Adnan Masood, Umar S. Khan

Abstract:

A 2-Degrees of freedom powered prosthetic wrist actuator has been proposed that can provide the Abduction/Adduction & Flexion/Extension movements of the human wrist. The basic structure of the actuator is a Ball and Socket joint and the force is transmitted from the DC geared servo motors to the joint through the Bowden cables. The proposed design is capable of providing the required DOF in both axes i.e. 85° & 90° in flexion extension axis. The size and weight of the actuator lies within the ranges of an average human being-s wrist.

Keywords: Actuator, Ball & Socket, Bowden Cable, Prosthetic, Wrist

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Authors: M. Mohebbi, K. Shakeri

Abstract:

Since the actuator capacity is limited, in the real application of active control systems under sever earthquakes it is conceivable that the actuators saturate, hence the actuator saturation should be considered as a constraint in design of optimal controllers. In this paper optimal design of active controllers for nonlinear structures by considering actuator saturation, has been studied. The proposed method for designing optimal controllers is based on defining an optimization problem which the objective has been to minimize the maximum displacement of structure when a limited capacity for actuator has been used. To this end a single degree of freedom (SDF) structure with a bilinear hysteretic behavior has been simulated under a white noise ground acceleration of different amplitudes. Active tendon control mechanism, comprised of prestressed tendons and an actuator, and extended nonlinear Newmark method based instantaneous optimal control algorithm have been used. To achieve the best results, the weights corresponding to displacement, velocity, acceleration and control force in the performance index have been optimized by the Distributed Genetic Algorithm (DGA). Results show the effectiveness of the proposed method in considering actuator saturation. Also based on the numerical simulations it can be concluded that the actuator capacity and the average value of required control force are two important factors in designing nonlinear controllers which consider the actuator saturation.

Keywords: Active control, Actuator Saturation, Distributedgeneticalgorithms, Nonlinear.

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Authors: J. H. Kim, J. H. Kwon, J. S. Park, K. J. Lim

Abstract:

This paper has been investigated a technique that predicts the performance of a bar-type unimorph piezoelectric vibration actuator depending on the frequency. This paper has been proposed an equivalent circuit that can be easily analyzed for the bar-type unimorph piezoelectric vibration actuator. In the dynamic analysis, rigidity and resonance frequency, which are important mechanical elements, were derived using the basic beam theory. In the equivalent circuit analysis, the displacement and bandwidth of the piezoelectric vibration actuator depending on the frequency were predicted. Also, for the reliability of the derived equations, the predicted performance depending on the shape change was compared with the result of a finite element analysis program.

Keywords: Actuator, performance, piezoelectric, unimorph.Actuator, performance, piezoelectric, unimorph.

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Authors: Nurul Amziah Md Yunus, Izhal Abdul Halin, Nasri Sulaiman, Noor Faezah Ismail, Ong Kai Sheng

Abstract:

The MEMS pressure sensor has been introduced and presented in this paper. The types of pressure sensor and its theory of operation are also included. The latest MEMS technology, the fabrication processes of pressure sensor are explored and discussed. Besides, various device applications of pressure sensor such as tire pressure-monitoring system, diesel particulate filter and others are explained. Due to further miniaturization of the device nowadays, the pressure sensor with nanotechnology (NEMS) is also reviewed. The NEMS pressure sensor is expected to have better performance as well as lower in its cost. It has gained an excellent popularity in many applications.

Keywords: Pressure sensor, diaphragm, MEMS, automotive application, biomedical application, NEMS.

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Authors: Aziz Sezgin, Yuksel Hacioglu, Nurkan Yagiz

Abstract:

Sliding mode controller for a vehicle active suspension system is designed in this study. The widely used quarter car model is preferred and it is aimed to improve the ride comfort of the passengers. The effect of the actuator time delay, which may arise due to the information processing, sensors or actuator dynamics, is also taken into account during the design of the controller. A sliding mode controller was designed that has taken into account the actuator time delay by using Smith predictor. The successful performance of the designed controller is confirmed via numerical results.

Keywords: Sliding mode control, active suspension system, actuator time delay.

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Authors: A. M. Wahab, E. Rustighi

Abstract:

Elastomeric dielectric material has recently become a new alternative for actuator technology. The characteristics of dielectric elastomers placed between two electrodes to withstand large strain when electrodes are charged has attracted the attention of many researcher to study this material for actuator technology. Thus, in the past few years Danfoss Ventures A/S has established their own dielectric electro-active polymer (DEAP), which was called PolyPower. The main objective of this work was to investigate the dynamic characteristics for vibration control of a PolyPower actuator folded in ‘pull’ configuration. A range of experiments was carried out on the folded actuator including passive (without electrical load) and active (with electrical load) testing. For both categories static and dynamic testing have been done to determine the behavior of folded DEAP actuator. Voltage-Strain experiments show that the DEAP folded actuator is a non-linear system. It is also shown that the voltage supplied has no effect on the natural frequency. Finally, varying AC voltage with different amplitude and frequency shows the parameters that influence the performance of DEAP folded actuator. As a result, the actuator performance dominated by the frequency dependence of the elastic response and was less influenced by dielectric properties.

Keywords: Dielectric Electro-active Polymer, Pull Actuator, Static, Dynamic, Electromechanical.

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Authors: Mogeeb A. Ahmed, Mona F. Taher, Sayed M. Metwalli

Abstract:

Shape memory alloy (SMA) actuators have found a wide range of applications due to their unique properties such as high force, small size, lightweight and silent operation. This paper presents the development of compact (SMA) actuator and cooling system in one unit. This actuator is developed for multi-fingered hand. It consists of nickel-titanium (Nitinol) SMA wires in compact forming. The new arrangement insulates SMA wires from the human body by housing it in a heat sink and uses a thermoelectric device for rejecting heat to improve the actuator performance. The study uses optimization methods for selecting the SMA wires geometrical parameters and the material of a heat sink. The experimental work implements the actuator prototype and measures its response.

Keywords: Optimization, Prosthetic hand, Shape memory alloy, Thermoelectric device, Actuator system

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Authors: Wei Sun, Ruilin Zheng, Xuyuan Chen

Abstract:

Micro power sources are required to be used in autonomous microelectromechanical system (MEMS). In this paper,  we designed and fabricated a three dimensional (3D) MEMS supercapacitor, which is consisting of conformal silicon  dioxide/titanium/polypyrrole (PPy) layers on silicon substrate. At first, ''through-structure'' was fabricated on the silicon substrate by high-aspect-ratio deep reactive ion etching (DRIE) method, which enlarges the available surface area significantly. Then the SiO2/Ti/PPy layers grew sequentially on the ³through-structure´. Finally, the supercapacitor was investigated by electrochemical methods.

Keywords: MEMS, Supercapacitor, DRIE, 3D.

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Authors: Suhas K, Sripadaraja K

Abstract:

This paper details few mechanical modeling and design issues of RF MEMS switches. We concentrate on an electrostatically actuated broad side series switch; surface micromachined with a crab leg membrane. The same results are extended to any complex structure. With available experimental data and fabrication results, we present the variation in dynamic performance and compliance of the switch with reference to few design issues, which we find are critical in deciding the dynamic behavior of the switch, without compromise on the RF characteristics. The optimization of pull in voltage, transient time and resonant frequency with regard to these critical design parameters are also presented.

Keywords: Microelectromechanical Systems (MEMS), RadioFrequency MEMS, Modeling, Actuators

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Authors: Markus Reichhartinger, Martin Horn

Abstract:

In this paper, the position control of an electronic throttle actuator is outlined. The dynamic behavior of the actuator is described with the help of an uncertain plant model. This motivates the controller design based on the ideas of higher-order slidingmodes. As a consequence anti-chattering techniques can be omitted. It is shown that the same concept is applicable to estimate unmeasureable signals. The control law and the observer are implemented on an electronic control unit. Results achieved by numerical simulations and real world experiments are presented and discussed.

Keywords: higher order sliding-mode, throttle actuator, electromechanicalsystem, robust and nonlinear control.

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Authors: V. Swarnalatha, A. V. Narasimha Rao, P. Pal

Abstract:

The present research reports the investigation of fast etching of silicon for the fabrication of microelectromechanical systems (MEMS) structures using silicon wet bulk micromachining. Low concentration tetramethyl-ammonium hydroxide (TMAH) and hydroxylamine (NH₂OH) are used as main etchant and additive, respectively. The concentration of NH₂OH is varied to optimize the composition to achieve best etching characteristics such as high etch rate, significantly high undercutting at convex corner for the fast release of the microstructures from the substrate, and improved etched surface morphology. These etching characteristics are studied on Si{100} and Si{110} wafers as they are most widely used in the fabrication of MEMS structures as wells diode, transistors and integrated circuits.

Keywords: KOH, MEMS, micromachining, silicon, TMAH, wet anisotropic etching.

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Authors: Mohammad Reza Zamani Kouhpanji

Abstract:

Characterizing the fatigue and fracture properties of nanostructures is one of the most challenging tasks in nanoscience and nanotechnology due to lack of a MEMS/NEMS device for generating uniform cyclic loadings at high frequencies. Here, the dynamic response of a recently proposed MEMS/NEMS device under different inputs signals is completely investigated. This MEMS/NEMS device is designed and modeled based on the electromagnetic force induced between paired parallel wires carrying electrical currents, known as Ampere’s Force Law (AFL). Since this MEMS/NEMS device only uses two paired wires for actuation part and sensing part, it represents highly sensitive and linear response for nanostructures with any stiffness and shapes (single or arrays of nanowires, nanotubes, nanosheets or nanowalls). In addition to studying the maximum gains at different resonance frequencies of the MEMS/NEMS device, its dynamical responses are investigated for different inputs and nanostructure properties to demonstrate the capability, usability, and reliability of the device for wide range of nanostructures. This MEMS/NEMS device can be readily integrated into SEM/TEM instruments to provide real time study of the fatigue and fracture properties of nanostructures as well as their softening or hardening behaviors, and initiation and/or propagation of nanocracks in them.

Keywords: Ampere’s force law, dynamical response, fatigue and fracture characterization, paired wire actuators and sensors, MEMS/NEMS devices.

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Authors: M. Mohebbi, K. Shakeri

Abstract:

In the real application of active control systems to mitigate the response of structures subjected to sever external excitations such as earthquake and wind induced vibrations, since the capacity of actuators is limited then the actuators saturate. Hence, in designing controllers for linear and nonlinear structures under sever earthquakes, the actuator saturation should be considered as a constraint. In this paper optimal design of active controllers for nonlinear structures by considering the actuator saturation has been studied. To this end a method has been proposed based on defining an optimization problem which considers the minimizing of the maximum displacement of the structure as objective when a limited capacity for actuator has been used as a constraint in optimization problem. To evaluate the effectiveness of the proposed method, a single degree of freedom (SDF) structure with a bilinear hysteretic behavior has been simulated under a white noise ground acceleration of different amplitudes. Active tendon control mechanism, comprised of pre-stressed tendons and an actuator, and extended nonlinear Newmark method based instantaneous optimal control algorithm have been used as active control mechanism and algorithm. To enhance the efficiency of the controllers, the weights corresponding to displacement, velocity, acceleration and control force in the performance index have been found by using the Distributed Genetic Algorithm (DGA). According to the results it has been concluded that the proposed method has been effective in considering the actuator saturation in designing optimal controllers for nonlinear frames. Also it has been shown that the actuator capacity and the average value of required control force are two important factors in designing nonlinear controllers for considering the actuator saturation.

Keywords: Active control, Actuator Saturation, Nonlinear, Optimization.

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Authors: Chiang-Ho Cheng, Hong-Yih Cheng, An-Shik Yang, Tung-Hsun Hsu

Abstract:

This paper reports a novel actuating design that uses the shear deformation of a piezoelectric actuator to deflect a bulge-diaphragm for driving an array microdroplet ejector. In essence, we employed a circular-shaped actuator poled radial direction with remnant polarization normal to the actuating electric field for inducing the piezoelectric shear effect. The array microdroplet ejector consists of a shear type piezoelectric actuator, a vibration plate, two chamber plates, two channel plates and a nozzle plate. The vibration, chamber and nozzle plate components are fabricated using nickel electroforming technology, whereas the channel plate is fabricated by etching of stainless steel. The diaphragm displacement was measured by the laser two-dimensional scanning vibrometer. The ejected droplets of the microejector were also observed via an optic visualization system.

Keywords: Actuator, nozzle, microejector, piezoelectric.

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Authors: Jun-ya Nagase, Toshiyuki Satoh, Norihiko Saga, Koichi Suzumori

Abstract:

In recent years, Japanese society has been aging, engendering a labor shortage of young workers. Robots are therefore expected to perform tasks such as rehabilitation, nursing elderly people, and day-to-day work support for elderly people. The pneumatic balloon actuator is a rubber artificial muscle developed for use in a robot hand in such environments. This actuator has a long stroke and a high power-to-weight ratio compared with the present pneumatic artificial muscle. Moreover, the dynamic characteristics of this actuator resemble those of human muscle. This study evaluated characteristics of force control of balloon actuator using a predictive functional control (PFC) system with disturbance observer. The predictive functional control is a model-based predictive control (MPC) scheme that predicts the future outputs of the actual plants over the prediction horizon and computes the control effort over the control horizon at every sampling instance. For this study, a 1-link finger system using a pneumatic balloon actuator is developed. Then experiments of PFC control with disturbance observer are performed. These experiments demonstrate the feasibility of its control of a pneumatic balloon actuator for a robot hand.

Keywords: Disturbance observer, Pneumatic balloon, Predictive functional control, Rubber artificial muscle.

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Authors: H. Yazdani, K. Ghorbanian

Abstract:

This paper deals with modeling and simulation of the plasma actuator with OpenFOAM. Plasma actuator is one of the newest devices in flow control techniques which can delay separation by inducing external momentum to the boundary layer of the flow. The effects of the plasma actuators on the external flow are incorporated into Navier-Stokes computations as a body force vector which is obtained as a product of the net charge density and the electric field. In order to compute this body force vector, the model solves two equations: One for the electric field due to the applied AC voltage at the electrodes and the other for the charge density representing the ionized air. The simulation result is compared to the experimental and typical values which confirms the validity of the modeling.

Keywords: Active flow control, flow field, OpenFOAM, plasma actuator.

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Authors: Tawiwat V., Phermsak S., Noppasit C.

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This paper deals with under actuator dynamic systems such as spring-mass-damper system when the number of control variable is less than the number of state variable. In order to apply optimal control, the controllability must be checked. There are many objective functions to be selected as the goal of the optimal control such as minimum energy, maximum energy and minimum jerk. As the objective function is the first priority, if one like to have the second goal to be applied; however, it could not fit in the objective function format and also avoiding the vector cost for the objective, this paper will illustrate the problem of under actuator dynamic systems with the easiest to deal with comparing between minimum energy and minimum jerk.

Keywords: Under actuator, Dynamic optimal control, Minimumjerk, Minimum energy.

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Authors: Irfan Hussain, Adnan Masood, Javaid Iqbal, Umar S. Khan

Abstract:

Above Elbow Prosthesis is one of the most commonly amputated or missing limbs. The research is done for modelling techniques of upper limb prosthesis and design of high torque, light weight and compact in size elbow actuator. The purposed actuator consists of a DC motor, planetary gear set and a harmonic drive. The calculations show that the actuator is good enough to be used in real life powered prosthetic upper limb or rehabilitation exoskeleton.

Keywords: Above Elbow prosthesis, Harmonic drive, Planetarygear set, Sagittal Plane

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Authors: Hassen M. Ouakad

Abstract:

In this paper, the influence of van der Waals, as well as electrostatic forces on the structural behavior of MEMS and NEMS actuators, has been investigated using of a Euler-Bernoulli beam continuous model. In the proposed nonlinear model, the electrostatic fringing-fields and the mid-plane stretching (geometric nonlinearity) effects have been considered. The nonlinear integro-differential equation governing the static structural behavior of the actuator has been derived. An original Galerkin-based reduced-order model has been developed to avoid problems arising from the nonlinearities in the differential equation. The obtained reduced-order model equations have been solved numerically using the Newton-Raphson method. The basic design parameters such as the pull-in parameters (voltage and deflection at pull-in), as well as the detachment length due to the van der Waals force of some investigated micro- and nano-actuators have been calculated. The obtained numerical results have been compared with some other existing methods (finite-elements method and finite-difference method) and the comparison showed good agreement among all assumed numerical techniques.

Keywords: MEMS, NEMS, fringing-fields, mid-plane stretching, Galerkin method.

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Authors: J. H. Park, S. C. Jeong, J. H. Koo, H. Y. Jung, S. M. Lee

Abstract:

We propose an integral tracking control method for a piezoelectric actuator system. The proposed method achieves the output tracking without requiring any hysteresis observer or schemes to compensate the hysteresis effect. With the proposed control law, the system is converted into the standard singularly perturbed model. Using Tikhonov-s theorem, we guarantee that the tracking error can be reduced to arbitrarily small bound. A numerical example is given to illustrate the effectiveness of our proposed method.

Keywords: Piezoelectric actuator, tracking control, hysteresis effect.

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Authors: Hui Liu, Haiyang Quan

Abstract:

This paper To get the angle value with a MEMS rate gyroscope in some specific field, the usual method is to make an integral operation to the rate output, which will lead the error cumulating effect. So the rate gyro is not suitable. MEMS rate integrating gyroscope (MRIG) will solve this problem. A DSP system has been developed to implement the control arithmetic. The system can measure the angle of rotation directly by the control loops that make the sensor work in whole-angle mode. Modeling the system with MATLAB, desirable results of angle outputs are got, which prove the feasibility of the control arithmetic.

Keywords: Rate gyroscope, Rate integrating gyroscope, Whole angle mode, MATLAB modeling, DSP control.

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Authors: Yung-Tien Liu, Chun-Chao Wang

Abstract:

This paper presents the control performance of a high-precision positioning device using the hybrid actuator composed of a piezoelectric (PZT) actuator and a voice-coil motor (VCM). The combined piezo-VCM actuator features two main characteristics: a large operation range due to long stroke of the VCM, and high precision and heavy load positioning ability due to PZT impact force. A one-degree-of-freedom (DOF) experimental setup was configured to examine the fundamental characteristics, and the control performance was effectively demonstrated by using a switching controller. In rough positioning state, an integral variable structure controller (IVSC) was used for the VCM to conduct long range of operation; in precision positioning state, an impact force controller (IFC) for the PZT actuator coupled with presliding states of the sliding table was used to obtain high-precision position control and achieve both forward and backward actuations. The experimental results showed that the sliding table having a mass of 881g and with a preload of 10 N was successfully positioned within the positioning accuracy of 10 nm in both forward and backward position controls.

Keywords: Integral variable structure controller (IVSC), impact force, precision positioning, presliding, PZT actuator, voice-coil motor (VCM).

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Authors: S. Sonkham, U. Pinsopon, W. Chatlatanagulchai

Abstract:

This paper presents a method of sliding mode control (SMC) designing and developing for the servo system in a dual-stage actuator (DSA) hard disk drive. Mathematical modeling of hard disk drive actuators is obtained, extracted from measuring frequency response of the voice-coil motor (VCM) and PZT micro-actuator separately. Matlab software tools are used for mathematical model estimation and also for controller design and simulation. A model-reference approach for tracking requirement is selected as a proposed technique. The simulation results show that performance of a model-reference SMC controller design in DSA servo control can be satisfied in the tracking error, as well as keeping the positioning of the head within the boundary of +/-5% of track width under the presence of internal and external disturbance. The overall results of model-reference SMC design in DSA are met per requirement specifications and significant reduction in %off track is found when compared to the single-state actuator (SSA).

Keywords: Hard Disk Drive, Dual-Stage Actuator, Track Following, HDD Servo Control, Sliding Mode Control, Model-Reference, Tracking Control.

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Authors: Muhammad Farid Shaari, Zahurin Samad

Abstract:

This paper presents the design, development and characterization of contractile water jet thruster (CWJT) for mini underwater robot. Instead of electric motor, this CWJT utilizes the Ionic Polymer Metal Composite (IPMC) as the actuator to generate the water jet. The main focus of this paper is to analyze the conceptual design of the proposed CWJT which would determine the thrust force value, jet flow behavior and actuator’s stress. Those thrust force and jet flow studies were carried out using Matlab/Simscape simulation software. The actuator stress had been analyzed using COSMOS simulation software. The results showed that there was no significant change for jet velocity at variable cross sectional nozzle area. However, a significant change was detected for jet velocity at different nozzle cross sectional area ratio which was up to 37%. The generated thrust force has proportional relation to the nozzle cross sectional area.

Keywords: Contractile water jet thruster, IPMC actuator, Thrust force.

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Authors: B. G. Sheeparamatti, J. S. Kadadevarmath

Abstract:

Microcantilevers are the basic MEMS devices, which can be used as sensors, actuators and electronics can be easily built into them. The detection principle of microcantilever sensors is based on the measurement of change in cantilever deflection or change in its resonance frequency. The objective of this work is to explore the analogies between mechanical and electrical equivalent of microcantilever beams. Normally scientists and engineers working in MEMS use expensive software like CoventorWare, IntelliSuite, ANSYS/Multiphysics etc. This paper indicates the need of developing electrical equivalent of the MEMS structure and with that, one can have a better insight on important parameters, and their interrelation of the MEMS structure. In this work, considering the mechanical model of microcantilever, equivalent electrical circuit is drawn and using force-voltage analogy, it is analyzed with circuit simulation software. By doing so, one can gain access to powerful set of intellectual tools that have been developed for understanding electrical circuits Later the analysis is performed using ANSYS/Multiphysics - software based on finite element method (FEM). It is observed that both mechanical and electrical domain results for a rectangular microcantlevers are in agreement with each other.

Keywords: Electrical equivalent circuit analogy, FEM analysis, micro cantilevers, micro sensors.

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Authors: YoHan Choi, HeeSuk Seo, SeungHwan Ju, SungHyu Han

Abstract:

As currently various portable devices were launched, smart business conducted using them became common. Since smart business can use company-internal resources in an exlternal remote place, user authentication that can identify authentic users is an important factor. Commonly used user authentication is a method of using user ID and Password. In the user authentication using ID and Password, the user should see and enter authentication information him or her. In this user authentication system depending on the user’s vision, there is the threat of password leaks through snooping in the process which the user enters his or her authentication information. This study designed and produced a user authentication module using an actuator to respond to the snooping threat.

Keywords: Actuator, User Authentication, Security Evaluation.

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