Search results for: width depth ratio.

Authors: Chang-le Lu, Yong Chen

Abstract:

The shortest path question is in a graph theory model question, and it is applied in many fields. The most short-path question may divide into two kinds: Single sources most short-path, all apexes to most short-path. This article mainly introduces the problem of all apexes to most short-path, and gives a new parallel algorithm of all apexes to most short-path according to the Dijkstra algorithm. At last this paper realizes the parallel algorithms in the technology of C # multithreading.

Keywords: Dijkstra algorithm, parallel algorithms, multi-thread technology, most short-path, ratio.

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Authors: A. Chennaf, M. Yahia, W. Bouafia, S. Benbia, D. Khellaf

Abstract:

Our study was designed to highlight changes in  certain biochemical parameters (CH, TG, HDL, GOT, GPT, LDL and  CRP), obese women infertile fertile witnesses and research potential  pathophysiological link between obesity and infertility in this  population of women. This practical work was focused on a  population of 24 obese women infertile, compared to controls,  subjects without any pathology causing disruption of parameters to  be studied to determine the contribution of obesity in the etiology of  infertility. The assay results revealed a highly significant difference  between the two groups in serum CH, TG, HDL, TGO and TGP (P  <0.0001) and in the rate of LDL (p = 0.0017) and CRP (p = 0.02).  The present study indicates that obesity is associated with infertility,  but no direct pathophysiological link between obesity and infertility  has been determined. Further in-depth studies are needed to  determine the exact mechanism by which overweight leads to female  infertility.

 

Keywords: Obesity, fertility, infertility, biochemical, women.

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Authors: Hanna Ziętara

Abstract:

Gastronomy is one of the oldest forms of commercial activity. It is currently one of the most popular and still dynamically developing branches of business. Socio-economic changes, its widespread occurrence, new techniques or culinary styles affect the almost unlimited possibilities of its development. Importantly, regardless of the form of business adopted, foodservice is strongly related to logistics processes, and areas of foodservice that are closely linked to logistics are of strategic importance. Any inefficiency in logistics processes results in reduced chances for success and achieving competitive advantage by companies belonging to the catering industry. The aim of the paper is to identify the areas of logistic support, occurring in the catering business, and affecting the scope of the logistic processes implemented. The aim of the paper is implemented through a plural homogeneous approach, based on direct observation, text analysis of current documents, and in-depth free targeted interviews.

Keywords: Gastronomy, competitive advantage, logistics, logistics support.

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Authors: G. Çelik Gül, F. Kurtuluş

Abstract:

The first laboratory synthesis of hard materials such as diamond proceeded to attack of developing materials with high hardness to compete diamond. Boron rich solids are good candidates owing to their short interatomic bond lengths and strong covalent character. Boron containing hard material was synthesized by modifiedmicrowave method under nitrogen atmosphere by using a fuel (glycine or urea), amorphous boron and/or boric acid in appropriate molar ratio. Characterizations were done by x-ray diffraction (XRD), Fourier transform infrared (FTIR) spectroscopy, scanning electron microscopy/energy dispersive analyze (SEM/EDS), thermo gravimetric/differential thermal analysis (TG/DTA).

Keywords: Boron containing materials, hard materials, microwave synthesis, powder X-ray diffraction.

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Authors: Z. Fang, H.Y. Yu, W.J. Liu, N. Singh, G.Q. Lo

Abstract:

High performance Resistive Random Access Memory (RRAM) based on HfOx has been prepared and its temperature instability has been investigated in this work. With increasing temperature, it is found that: leakage current at high resistance state increases, which can be explained by the higher density of traps inside dielectrics (related to trap-assistant tunneling), leading to a smaller On/Off ratio; set and reset voltages decrease, which may be attributed to the higher oxygen ion mobility, in addition to the reduced potential barrier to create / recover oxygen ions (or oxygen vacancies); temperature impact on the RRAM retention degradation is more serious than electrical bias.

Keywords: RRAM, resistive switching, temperature instability.

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Authors: Hamed Vahdat Nejad, Hossein Deldari

Abstract:

Wavelet transforms are multiresolution decompositions that can be used to analyze signals and images. Image compression is one of major applications of wavelet transforms in image processing. It is considered as one of the most powerful methods that provides a high compression ratio. However, its implementation is very time-consuming. At the other hand, parallel computing technologies are an efficient method for image compression using wavelets. In this paper, we propose a parallel wavelet compression algorithm based on quadtrees. We implement the algorithm using MatlabMPI (a parallel, message passing version of Matlab), and compute its isoefficiency function, and show that it is scalable. Our experimental results confirm the efficiency of the algorithm also.

Keywords: Image compression, MPI, Parallel computing, Wavelets.

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Authors: T. Pavic Kramaric, M. Kitic

Abstract:

The purpose of this article is to analyze the market structure as well as the degree of concentration in insurance markets in new EU member states. The analysis was conducted using several most commonly used concentration indicators such as concentration ratio, Herfindahl-Hirschman index and entropy index. These indicators were calculated for the 2000-2010 period on the basis of total gross written premium as the most relevant indicator of market power in insurance markets. The results of the analysis showed that in all observed countries the level of concentration decreased, though with significantly different intensity. Yet, in some countries, the level of concentration remains very high.

Keywords: insurance market, concentration, new EU member states

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Authors: S.M.Hosseinalipour, H.Aghakhani

Abstract:

Considering the numerous applications of the study of the flow due to leakage in a buried pipe in unsaturated porous media, finding a proper model to explain the influence of the effective factors is of great importance.There are various important factors involved in this type of flow such as: pipe leakage size and location, burial depth, the degree of the saturation of the surrounding porous medium, characteristics of the porous medium, fluid type and pressure of the upstream.In this study, the flow through unsaturated porous media due to leakage of a buried pipe for up and down leakage location is studied experimentally and numerically and their results are compared. Study results show that Darcy equation together with BCM method (for calculating the relative permeability) have suitable ability for predicting the flow due to leakage of buried pipes in unsaturated porous media.

Keywords: Buried, Leaking pipe, Porous media, Unsaturated

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Authors: Soon Jai Yi, Sun-Hong Kim, Hang-Geun Jeong, Seong-Ik Cho

Abstract:

This paper presents a method of reducing the feedback delay time of DWA(Data Weighted Averaging) used in sigma-delta modulators. The delay time reduction results from the elimination of the latch at the quantizer output and also from the falling edge operation. The designed sigma-delta modulator improves the timing margin about 16%. The sub-circuits of sigma-delta modulator such as SC(Switched Capacitor) integrator, 9-level quantizer, comparator, and DWA are designed with the non-ideal characteristics taken into account. The sigma-delta modulator has a maximum SNR (Signal to Noise Ratio) of 84 dB or 13 bit resolution.

Keywords: Sigma-delta modulator, multibit, DWA

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Authors: Wan Norhayate Wan Daud, Fakhrul Anwar Zainol, Maslina Mansor

Abstract:

The study was conducted to produce case studies from the Malaysian public universities stands point East Coast of Malaysia. The aim of this study is to analyze the effects of knowledge management on human capital toward organizational innovation. The focus point of this study is on the management member in the faculties of these three Malaysian Public Universities in the East Coast state of Peninsular Malaysia. In this case, respondents who agreed to further participate in the research will be invited to a one-hour face-to-face semi-structured, in-depth interview. As a result, the sample size for this study was 3 deans of Faculty of Management. Lastly, this study tries to recommend the framework of organizational innovation in Malaysian Public Universities.

Keywords: Human Capital, Knowledge Management, Organizational Innovation, Public University.

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Authors: Muhammad Yasir Wadood, Fatemeh Babaeian

Abstract:

By developing ultra-wideband (UWB) systems, there is a high demand for UWB filters with low insertion loss, wide bandwidth, and having a planar structure which is compatible with other components of the UWB system. A microstrip interdigital filter is a great option for designing UWB filters. However, the presence of via holes in this structure creates difficulties in the fabrication procedure of the filter. Especially in the higher frequency band, any misalignment of the drilled via hole with the Microstrip stubs causes large errors in the measurement results compared to the desired results. Moreover, in this case (high-frequency designs), the line width of the stubs are very narrow, so highly precise small via holes are required to be implemented, which increases the cost of fabrication significantly. Also, in this case, there is a risk of having fabrication errors. To combat this issue, in this paper, a via-less UWB microstrip filter is proposed which is designed based on a modification of a conventional inter-digital bandpass filter. The novel approaches in this filter design are 1) replacement of each via hole with a quarter-wavelength open circuit stub to avoid the complexity of manufacturing, 2) using a bend structure to reduce the unwanted coupling effects and 3) minimising the size. Using the proposed structure, a UWB filter operating in the frequency band of 3.9-6.6 GHz (1-dB bandwidth) is designed and fabricated. The promising results of the simulation and measurement are presented in this paper. The selected substrate for these designs was Rogers RO4003 with a thickness of 20 mils. This is a common substrate in most of the industrial projects. The compact size of the proposed filter is highly beneficial for applications which require a very miniature size of hardware.

Keywords: Band-pass filters, inter-digital filter, microstrip, via-less.

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Authors: Porag Jyoti Ligira, Gargi Khanna

Abstract:

The paper presents a simulation study of the electrical characteristic of Bulk Planar Junctionless Transistor (BPJLT) using spacer. The BPJLT is a transistor without any PN junctions in the vertical direction. It is a gate controlled variable resistor. The characteristics of BPJLT are analyzed by varying the oxide material under the gate. It can be shown from the simulation that an ideal subthreshold slope of ~60 mV/decade can be achieved by using highk dielectric. The effects of variation of spacer length and material on the electrical characteristic of BPJLT are also investigated in the paper. The ION / IOFF ratio improvement is of the order of 107 and the OFF current reduction of 10-4 is obtained by using gate dielectric of HfO2 instead of SiO2.

Keywords: BPJLT, double gate, high-k, spacer.

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Authors: Hitham M. Tlilan

Abstract:

Using finite element method (FEM), the elastic new strain-concentration factor (SNCF) of cylindrical bars with circumferential flat-bottom groove is studied. This new SNCF has been defined under triaxial stress state. The employed specimens have constant groove depth with net section and gross diameters of 10.0 and 16.7 mm, respectively. The length of flatness ao has been varied form 0.0 ~12.5 mm to study the elastic SNCF of this type of geometrical irregularities. The results that the elastic new SNCF rapidly drops from its elastic value of the groove with ao = 0.0, i.e. circumferential U-notch, and reaches minimum value at ao = 2 mm. After that the elastic new SNCF becomes nearly constant with increasing flatness length (ao). The value of tensile load at yielding at the groove root increases with increasing ao. The current results show that severity of the notch decreases with increasing flatness length ao.

Keywords: Bar, groove, strain, tension

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Authors: N. Praveen Kumar, Abhijit Mitra, C. Ardil

Abstract:

Decision feedback equalizers are commonly employed to reduce the error caused by intersymbol interference. Here, an adaptive decision feedback equalizer is presented with a new adaptation algorithm. The algorithm follows a block-based approach of normalized least mean square (NLMS) algorithm with set-membership filtering and achieves a significantly less computational complexity over its conventional NLMS counterpart with set-membership filtering. It is shown in the results that the proposed algorithm yields similar type of bit error rate performance over a reasonable signal to noise ratio in comparison with the latter one.

Keywords: Decision feedback equalizer, Adaptive algorithm, Block based computation, Set membership filtering.

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Authors: A. G. Silva Sobrinho, G. M. Manzi, N. L. L. Lima, F. A. Almeida, V. Endo, N. M. B. L. Zeola

Abstract:

The purpose of this study was to evaluate the tissue composition and carcass muscularity of 32 legs of Ile de France lambs fed with diets containing sunflower seeds and vitamin E, with mean body weight of 15 kg, lodged in individual pens at 15 kg and slaughtered at 32 kg of body weight. The treatments influenced (P<0,05) leg weight, femur length and muscle:bone ratio, being the highest values (2,13 kg, 16,19 cm and 7,38, respectively) in lambs that received diet without sunflower seeds and vitamin E. The other variables were not affected (P>0,05) by the treatments. The interaction of the sunflower and vitamin E was positive for bone total weights and intermuscular fat.

Keywords: sheep, conformation, feedlot, nutrition, sugar-cane

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Authors: S. Kızıltas Demir, A. S. Kipcak, E. Moroydor Derun, N. Tugrul, S. Piskin

Abstract:

Flue gas desulfurization gypsum (FGD) is a waste material arouse from coal power plants. Hydroxyapatite (HAP) is a biomaterial with porous structure. In this study, FGD gypsum which retrieved from coal power plant in Turkey was characterized and HAP particles which can be used as an adsorbent in wastewater treatment application were synthesized from the FGD gypsum. The raw materials are characterized by using X Ray Diffraction (XRD) and Fourier transform infrared spectroscopy (FT-IR) techniques and produced HAP are characterized by using XRD. As a result, HAP particles were synthesized at the molar ratio of 5:10, 5:15, 5:20, 5:24, at room temperature, in alkaline medium (pH=11) and in 1 hour-reaction time. Among these conditions, 5:20 had the best result.

Keywords: FGD wastes, HAP, gypsum, wastewater.

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Authors: S.Aranganayagi, K.Thangavel

Abstract:

K-Modes is an extension of K-Means clustering algorithm, developed to cluster the categorical data, where the mean is replaced by the mode. The similarity measure proposed by Huang is the simple matching or mismatching measure. Weight of attribute values contribute much in clustering; thus in this paper we propose a new weighted dissimilarity measure for K-Modes, based on the ratio of frequency of attribute values in the cluster and in the data set. The new weighted measure is experimented with the data sets obtained from the UCI data repository. The results are compared with K-Modes and K-representative, which show that the new measure generates clusters with high purity.

Keywords: Clustering, categorical data, K-Modes, weighted dissimilarity measure

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Authors: S. R. Kumar, Shashikant Rajpal

Abstract:

A nanocrystalline thin film of ZnSe was successfully electrodeposited on copper substrate using a non-aqueous solution and subsequently annealed in air at 400°C. XRD analysis indicates the polycrystalline deposit of (111) plane in both the cases. The sharpness of the peak increases due to annealing of the film and average grain size increases to 20 nm to 27nm. SEM photograph indicate that grains are uniform and densely distributed over the surface. Annealing increases the average grain size by 20%. The EDS spectroscopy shows the ratio of Zn & Se is 1.1 in case of annealed film. AFM analysis indicates the average roughness of the film reduces from 181nm to 165nm due to annealing of the film. The bandgap also decreases from 2.71eV to 2.62eV.

Keywords: Electrodeposition, Non-aqueous medium, SEM, XRD.

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Authors: Siyathorn Khunon, Thanawit Buafai

Abstract:

This paper aims to investigate management of beach safety with a focus on tourist drownings in Samui. The data collected in this investigation will then lead to the proposal of a practical management model suitable for use in Samui. Qualitative research was conducted in the following manner: nine stakeholders from local government organizations and tourism businesses were interviewed in-depth. Additionally, a best practice case study from Phuket was applied to analyze beach safety. Twelve foreign tourists were also interviewed. Then, a focus group comprised of 32 people was used to determine practical solutions for enhancing tourists’ safety on the beach in Samui. A steering committee to coordinate between public and private organizations was proposed to manage and enhance tourists’ safety. A practical model is proposed to increase the safety level of tourists in Samui

Keywords: Beach safety, drowning, tourists, Samui.

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Authors: T. Khampan, N. Thavarungkul, J. Tiansuwan, S. Kamthai

Abstract:

This research aimed to modify pineapple leaf paper (PALP) for using as wet media in the evaporation cooling system by improving wet mechanical property (tensile strength) without compromising water absorption property. Polyamideamineepichorohydrin resin (PAE) and carboxymethylcellulose (CMC) were used to strengthen the paper, and the PAE and CMC ratio of 80:20 showed the optimum wet and dry tensile index values, which were higher than those of the commercial cooling pad (CCP). Compared with CCP, PALP itself and all the PAE/CMC modified PALP possessed better water absorption. The PAE/CMC modified PALP had potential to become a new type of wet media.

Keywords: wet strength, evaporative cooling, pineapple leaves, polyamideamine-epichorohydrin, carboxymethylcellulose.

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Authors: V. Ten

Abstract:

An approach of design of stable of control systems with ultimately wide ranges of uncertainly disturbed parameters is offered. The method relies on using of nonlinear structurally stable functions from catastrophe theory as controllers. Theoretical part presents an analysis of designed nonlinear second-order control systems. As more important the integrators in series, canonical controllable form and Jordan forms are considered. The analysis resumes that due to added controllers systems become stable and insensitive to any disturbance of parameters. Experimental part presents MATLAB simulation of design of control systems of epidemic spread, aircrafts angular motion and submarine depth. The results of simulation confirm the efficiency of offered method of design. KeywordsCatastrophes, robust control, simulation, uncertain parameters.

Keywords: Catastrophes, robust control, simulation, uncertain parameters.

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Authors: F. Niazkar, N. Arab-Moghaddam

Abstract:

In this research, effort was made to identify and evaluate barriers to the development of entrepreneurship among Iranian entrepreneur women who were graduated from universities. In this study, perspectives of thirty-seven available entrepreneur women were examined. In order to prepare questionnaires and receive knowledge about barriers among these women, seven cases of entrepreneur women took part in in-depth interviews. Then, to evaluate the importance of barriers, the researchers made a questionnaire with closed questions in which the barriers were classified into the following categories: personal-familial barriers; socio-cultural barriers; economic-financial-commercial barriers; and structural barriers. Entrepreneur women were requested to rate the importance of each item. The results indicated that there were different obstacles among entrepreneur women. The order of the important barriers was as fallow: economic-financial-commercial, structural, socio-cultural, and personal-familial.

Keywords: Barriers to Entrepreneurship, Entrepreneur Women

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Authors: L. Abukova, O. Abramova, A. Goreva, Y. Yakovlev

Abstract:

Important executive decisions on oil and gas production stimulation in Eastern Siberia have been recently taken. There are unique and large fields of oil, gas, and gas-condensate in Eastern Siberia. The Talakan, Koyumbinskoye, Yurubcheno-Tahomskoye, Kovykta, Chayadinskoye fields are supposed to be developed first. It will result in an abrupt increase in environmental load on the nature of Eastern Siberia. In Eastern Siberia, the introduction of ecological imperatives in hydrocarbon production is still realistic. Underground water movement is the one of the most important factors of the ecosystems condition management. Oil and gas production is associated with the forced displacement of huge water masses, mixing waters of different composition, and origin that determines the extent of anthropogenic impact on water drive systems and their protective reaction. An extensive hydrogeological system of the depression type is identified in the pre-salt deposits here. Pressure relieve here is steady up to the basement. The decrease of the hydrodynamic potential towards the basement with such a gradient resulted in reformation of the fields in process of historical (geological) development of the Nepsko-Botuobinskaya anteclise. The depression hydrodynamic systems are characterized by extremely high isolation and can only exist under such closed conditions. A steady nature of water movement due to a strictly negative gradient of reservoir pressure makes it quite possible to use environmentally-harmful liquid substances instead of water. Disposal of the most hazardous wastes is the most expedient in the deposits of the crystalline basement in certain structures distant from oil and gas fields. The time period for storage of environmentally-harmful liquid substances may be calculated by means of the geological time scales ensuring their complete prevention from releasing into environment or air even during strong earthquakes. Disposal of wastes of chemical and nuclear industries is a matter of special consideration. The existing methods of storage and disposal of wastes are very expensive. The methods applied at the moment for storage of nuclear wastes at the depth of several meters, even in the most durable containers, constitute a potential danger. The enormous size of the depression system of the Nepsko-Botuobinskaya anteclise makes it possible to easily identify such objects at the depth below 1500 m where nuclear wastes will be stored indefinitely without any environmental impact. Thus, the water drive system of the Nepsko-Botuobinskaya anteclise is the ideal object for large-volume injection of environmentally harmful liquid substances even if there are large oil and gas accumulations in the subsurface. Specific geological and hydrodynamic conditions of the system allow the production of hydrocarbons from the subsurface simultaneously with the disposal of industrial wastes of oil and gas, mining, chemical, and nuclear industries without any environmental impact.

Keywords: Eastern Siberia, formation pressure, underground water, waste burial.

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Authors: Raymond J. Jayabal, Chiew Tong Lau

Abstract:

Partitions can play a significant role in minimising cochannel interference of Wireless LANs by attenuating signals across room boundaries. This could pave the way towards higher density deployments in home and office environments through spatial channel reuse. Yet, due to protocol limitations, the latest incantation of IEEE 802.11 standard is still unable to take advantage of this fact: Despite having clearly adequate Signal to Interference Ratio (SIR) over co-channel neighbouring networks in other rooms, its goodput falls significantly lower than its maximum in the absence of cochannel interferers. In this paper, we describe how this situation can be remedied via modest modifications to the standard.

Keywords: IEEE 802.11 Wireless LAN, spatial channel re-use, physical layer capture.

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Authors: Y. Alqaheem, A. Alomair, F. Altarkait, F. Alswaileh, Nusrat Tanoli

Abstract:

Helium market is continuously growing due to its essential uses in the electronic and healthcare sectors. Currently, helium is produced by cryogenic distillation but the process is uneconomical especially for low production volumes. On the other hand, polymeric membranes can provide a cost-effective solution for helium purification due to their low operating energy. However, the preparation of membranes involves the use of very toxic solvents such as chloroform. In this work, polyetherimide membranes were prepared using a less toxic solvent, n-methylpyrrolidone with a polymer-to-solvent ratio of 27 wt%. The developed membrane showed a superior helium permeability of 15.9 Barrer that surpassed the permeability of membranes made by chloroform.

Keywords: Helium separation, polyetherimide, dense membrane, gas permeability, solvent.

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Authors: D. V. Sreekanth, M. Sreenivasa Rao

Abstract:

Abrasive jet machining is one of the promising non-traditional machining processes which uses mechanical energy (pressure and velocity) for machining various materials. The process parameters that influence the metal removal rate are kerfs, surface finish, depth of cut, air pressure, and distance between nozzle and work piece, nozzle diameter, abrasive type, abrasive shape, and mass flow rate of abrasive particles. The abrasive particles coming out with high pressure not only hits work surface but also passes through the nozzle resulting in erosion. This paper focuses mainly on the effect of different parameters on the erosion of nozzle in Abrasive jet machining. Three different types of nozzles made of sapphire, tungsten carbide, and high carbon high chromium steel (HCHCS) are used for machining glass and the erosion of these nozzles are calculated. The results are shown in tabular form and graphical representation.

Keywords: AJM, nozzle, sapphire, tungsten carbide, chrome steel.

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Authors: E. Arsuaga Uriarte, F. Díaz Martín

Abstract:

The SOM has several beneficial features which make it a useful method for data mining. One of the most important features is the ability to preserve the topology in the projection. There are several measures that can be used to quantify the goodness of the map in order to obtain the optimal projection, including the average quantization error and many topological errors. Many researches have studied how the topology preservation should be measured. One option consists of using the topographic error which considers the ratio of data vectors for which the first and second best BMUs are not adjacent. In this work we present a study of the behaviour of the topographic error in different kinds of maps. We have found that this error devaluates the rectangular maps and we have studied the reasons why this happens. Finally, we suggest a new topological error to improve the deficiency of the topographic error.

Keywords: Map lattice, Self-Organizing Map, topographic error, topology preservation.

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Authors: P Chockalingam, K Kok, R Vijayaram

Abstract:

This paper presents a comparative study on dry and wet grinding through experimental investigation in the grinding of CSM glass fibre reinforced polymer laminates using a pink aluminium oxide wheel. Different sets of experiments were performed to study the effects of the independent grinding parameters such as grinding wheel speed, feed and depth of cut on dependent performance criteria such as cutting forces and surface finish. Experimental conditions were laid out using design of experiment central composite design. An effective coolant was sought in this study to minimise cutting forces and surface roughness for GFRP laminates grinding. Test results showed that the use of coolants reduces surface roughness, although not necessarily the cutting forces. These research findings provide useful economic machining solution in terms of optimized grinding conditions for grinding CSM GFRP.

Keywords: Chopped Strand Mat GFRP laminates, Dry and Wet Grinding, Cutting Forces, Surface Finish.

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Authors: Hsin-Ping Huang, Shyankay Jou

Abstract:

Resistive switching of aluminum nitride (AlN_x) thin film was demonstrated in a TaN/AlN_x/TiN memory cell that was prepared by sputter deposition techniques. The memory cell showed bipolar switching of resistance between +3.5 V and –3.5 V. The resistance ratio of high resistance state (HRS) to low resistance state (HRS), R_HRS/R_LRS, was about 2 over 100 cycles of endurance test. Both the LRS and HRS of the memory cell exhibited ohmic conduction at low voltages and Poole-Frenkel emission at high voltages. The electrical conduction in the TaN/AlN_x/TiN memory cell was possibly attributed to the interactions between charges and defects in the AlN_x film.

Keywords: Aluminum nitride, nonvolatile memory, resistive switching, thin films.

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Authors: Wei Sun, Ruilin Zheng, Xuyuan Chen

Abstract:

Micro power sources are required to be used in autonomous microelectromechanical system (MEMS). In this paper,  we designed and fabricated a three dimensional (3D) MEMS supercapacitor, which is consisting of conformal silicon  dioxide/titanium/polypyrrole (PPy) layers on silicon substrate. At first, ''through-structure'' was fabricated on the silicon substrate by high-aspect-ratio deep reactive ion etching (DRIE) method, which enlarges the available surface area significantly. Then the SiO2/Ti/PPy layers grew sequentially on the ³through-structure´. Finally, the supercapacitor was investigated by electrochemical methods.

Keywords: MEMS, Supercapacitor, DRIE, 3D.

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