%0 Journal Article %A Z. Fang and H.Y. Yu and W.J. Liu and N. Singh and G.Q. Lo %D 2010 %J International Journal of Electronics and Communication Engineering %B World Academy of Science, Engineering and Technology %I Open Science Index 48, 2010 %T Resistive RAM Based on Hfox and its Temperature Instability Study %U https://publications.waset.org/pdf/1308 %V 48 %X High performance Resistive Random Access Memory (RRAM) based on HfOx has been prepared and its temperature instability has been investigated in this work. With increasing temperature, it is found that: leakage current at high resistance state increases, which can be explained by the higher density of traps inside dielectrics (related to trap-assistant tunneling), leading to a smaller On/Off ratio; set and reset voltages decrease, which may be attributed to the higher oxygen ion mobility, in addition to the reduced potential barrier to create / recover oxygen ions (or oxygen vacancies); temperature impact on the RRAM retention degradation is more serious than electrical bias. %P 1836 - 1838