Design and Fabrication of an Array Microejector Driven by a Shear-Mode Piezoelectric Actuator

Authors: Chiang-Ho Cheng, Hong-Yih Cheng, An-Shik Yang, Tung-Hsun Hsu

Abstract:

This paper reports a novel actuating design that uses the shear deformation of a piezoelectric actuator to deflect a bulge-diaphragm for driving an array microdroplet ejector. In essence, we employed a circular-shaped actuator poled radial direction with remnant polarization normal to the actuating electric field for inducing the piezoelectric shear effect. The array microdroplet ejector consists of a shear type piezoelectric actuator, a vibration plate, two chamber plates, two channel plates and a nozzle plate. The vibration, chamber and nozzle plate components are fabricated using nickel electroforming technology, whereas the channel plate is fabricated by etching of stainless steel. The diaphragm displacement was measured by the laser two-dimensional scanning vibrometer. The ejected droplets of the microejector were also observed via an optic visualization system.

Keywords: Actuator, nozzle, microejector, piezoelectric.

Digital Object Identifier (DOI): doi.org/10.5281/zenodo.1106725

References:

[1] Y. Fuda, T. Yoshida, Piezoelectric torsional actuator, Ferroelectrics 160 (1994) 323–330.
[2] J. Satonobu, N. Torii, K. Nakamura, S. Ueha, Construction of megatorque hybrid transducer type ultrasonic motor, Jpn. J. Appl. Phys. 35 (1996) 5038–5041.
[3] E.L. Kyser, S.B. Sears, Method and apparatus for recording with writing fluids and drop projection means therefore, US Patent 3,946,398 (1976).
[4] T. Kitahara, Ink-jet head with multi-layer piezoelectric actuator, in: Proceedings of the IS&T’s 11th International Congress on Adv. in Non-Impact Printing Technologies, Hilton Head, SC, USA, October 29–November 3, 1995, pp. 346–349.
[5] S.I. Zoltan, Pulse droplet ejection system, US Patent 3,683,212 (1974).
[6] A.J. Michaelis, A.D. Paton, S. Temple, W.S. Bartky, Droplet deposition apparatus, US Patent 4,887,100 (1989).
[7] K.H. Fischbeck, P.A. Hoisington, Shear mode transducer for ink jet systems, US Patent 4,825,227 (1989).
[8] J. Brunahl, A.M. Grishin, Piezoelectric shear mode drop-on-demand inkjet actuator, Sens. Actuators A 101 (2002) 371–382.
[9] http://www.dimatix.com/technology/spectra-piezoelectric.asp.
[10] D.A. Berlincourt, C. Fall, F.T. Brunarski, Polarization of titanate ceramics, US Patent 2,928,163 (1960).
[11] J.A. Sugden, Ferroelectric ceramic materials, US Patent 3,068,177 (1962).
[12] M. Sayer, B. Judd, K.E. Assal, E. Prassad, Poling of piezoelectric, J. Can. Ceram. Soc. 50 (1981) 23–28.
[13] P. Bryant, Optimization of poling conditions for piezoelectric ceramics, Mater. Sci. Forum 34 (1988) 285–289.
[14] H.T. Chung, H.G. Kim, Characteristics of domain in tetragonal phase PZT ceramics, Ferroelectrics 76 (1987) 327–333.