Search results for: Access timing error
Commenced in January 2007
Frequency: Monthly
Edition: International
Paper Count: 2160

Search results for: Access timing error

2130 Study of the Effect of Project Management on Manufacturing and Production Projects

Authors: S.B. Ahmadi, Z. Moradpour, Gh. Liaghat

Abstract:

In this article the accumulated results out of the effects and length of the manufacture and production projects in the university and research standard have been settled with the usefulness definition of the process of project management for the accessibility to the proportional pattern in the “time and action" stages. Studies show that many problems confronted by the researchers in these projects are connected to the non-profiting of: 1) autonomous timing for gathering the educational theme, 2) autonomous timing for planning and pattern, presenting before the construction, and 3) autonomous timing for manufacture and sample presentation from the output. The result of this study indicates the division of every manufacture and production projects into three smaller autonomous projects from its kind, budget and autonomous expenditure, shape and order of the stages for the management of these kinds of projects. In this case study real result are compared with theoretical results.

Keywords: Project management, Manufacturing, production.

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2129 Decoder Design for a New Single Error Correcting/Double Error Detecting Code

Authors: M. T. Anwar, P. K. Lala, P. Thenappan

Abstract:

This paper presents the decoder design for the single error correcting and double error detecting code proposed by the authors in an earlier paper. The speed of error detection and correction of a code is largely dependent upon the associated encoder and decoder circuits. The complexity and the speed of such circuits are determined by the number of 1?s in the parity check matrix (PCM). The number of 1?s in the parity check matrix for the code proposed by the authors are fewer than in any currently known single error correcting/double error detecting code. This results in simplified encoding and decoding circuitry for error detection and correction.

Keywords: Decoder, Hsiao code, Parity Check Matrix, Syndrome Pattern.

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2128 Calibration of the Radical Installation Limit Error of the Accelerometer in the Gravity Gradient Instrument

Authors: Danni Cong, Meiping Wu, Xiaofeng He, Junxiang Lian, Juliang Cao, Shaokuncai, Hao Qin

Abstract:

Gravity gradient instrument (GGI) is the core of the gravity gradiometer, so the structural error of the sensor has a great impact on the measurement results. In order not to affect the aimed measurement accuracy, limit error is required in the installation of the accelerometer. In this paper, based on the established measuring principle model, the radial installation limit error is calibrated, which is taken as an example to provide a method to calculate the other limit error of the installation under the premise of ensuring the accuracy of the measurement result. This method provides the idea for deriving the limit error of the geometry structure of the sensor, laying the foundation for the mechanical precision design and physical design.

Keywords: Gravity gradient sensor, radial installation limit error, accelerometer, uniaxial rotational modulation.

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2127 Analysis of Bit Error Rate Improvement in MFSK Communication Link

Authors: O. P. Sharma, V. Janyani, S. Sancheti

Abstract:

Data rate, tolerable bit error rate or frame error rate and range & coverage are the key performance requirement of a communication link. In this paper performance of MFSK link is analyzed in terms of bit error rate, number of errors and total number of data processed. In the communication link model proposed, which is implemented using MATLAB block set, an improvement in BER is observed. Different parameters which effects and enables to keep BER low in M-ary communication system are also identified.

Keywords: Additive White Gaussian Noise (AWGN), Bit Error Rate (BER), Frequency Shift Keying (FSK), Orthogonal Signaling.

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2126 High Capacity Reversible Watermarking through Interpolated Error Shifting

Authors: Hae-Yeoun Lee

Abstract:

Reversible watermarking that not only protects the copyright but also preserve the original quality of the digital content have been intensively studied. In particular, the demand for reversible watermarking has increased. In this paper, we propose a reversible watermarking scheme based on interpolation-error shifting and error pre-compensation. The intensity of a pixel is interpolated from the intensities of neighboring pixels, and the difference histogram between the interpolated and the original intensities is obtained and modified to embed the watermark message. By restoring the difference histogram, the embedded watermark is extracted and the original image is recovered by compensating for the interpolation error. The overflow and underflow are prevented by error pre-compensation. To show the performance of the method, the proposed algorithm is compared with other methods using various test images.

Keywords: Reversible watermarking, High capacity, High quality, Interpolated error shifting, Error pre-compensation.

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2125 Reducing Power in Error Correcting Code using Genetic Algorithm

Authors: Heesung Lee, Joonkyung Sung, Euntai Kim

Abstract:

This paper proposes a method which reduces power consumption in single-error correcting, double error-detecting checker circuits that perform memory error correction code. Power is minimized with little or no impact on area and delay, using the degrees of freedom in selecting the parity check matrix of the error correcting codes. The genetic algorithm is employed to solve the non linear power optimization problem. The method is applied to two commonly used SEC-DED codes: standard Hamming and odd column weight Hsiao codes. Experiments were performed to show the performance of the proposed method.

Keywords: Error correcting codes, genetic algorithm, non-linearpower optimization, Hamming code, Hsiao code.

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2124 Unequal Error Protection for Region of Interest with Embedded Zerotree Wavelet

Authors: T. Hirner, J. Polec

Abstract:

This paper describes a new method of unequal error protection (UEP) for region of interest (ROI) with embedded zerotree wavelet algorithm (EZW). ROI technique is important in applications with different parts of importance. In ROI coding, a chosen ROI is encoded with higher quality than the background (BG). Unequal error protection of image is provided by different coding techniques. In our proposed method, image is divided into two parts (ROI, BG) that consist of more important bytes (MIB) and less important bytes (LIB). The experimental results verify effectiveness of the design. The results of our method demonstrate the comparison of the unequal error protection (UEP) of image transmission with defined ROI and the equal error protection (EEP) over multiple noisy channels.

Keywords: embedded zerotree wavelet (EZW), equal error protection (EEP), region of interest (ROI), RS code, unequal error protection (UEP)

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2123 Calibration of Time-Skew Error in a M-Channel Time-Interleaved Analog-to-Digital Converter

Authors: Yu-Sheng Lee, Qi An

Abstract:

Offset mismatch, gain mismatch, and time-skew error between time-interleaved channels limit the performance of time-interleaved analog-to-digital converters (TIADC). This paper focused on the time-skew error. A new technique for calibrating time-skew error in M-channels TIADC is described, and simulation results are also presented.

Keywords: Calibration, time-skew error, time-interleavedanalog-to-digital converters.

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2122 Concurrency in Web Access Patterns Mining

Authors: Jing Lu, Malcolm Keech, Weiru Chen

Abstract:

Web usage mining is an interesting application of data mining which provides insight into customer behaviour on the Internet. An important technique to discover user access and navigation trails is based on sequential patterns mining. One of the key challenges for web access patterns mining is tackling the problem of mining richly structured patterns. This paper proposes a novel model called Web Access Patterns Graph (WAP-Graph) to represent all of the access patterns from web mining graphically. WAP-Graph also motivates the search for new structural relation patterns, i.e. Concurrent Access Patterns (CAP), to identify and predict more complex web page requests. Corresponding CAP mining and modelling methods are proposed and shown to be effective in the search for and representation of concurrency between access patterns on the web. From experiments conducted on large-scale synthetic sequence data as well as real web access data, it is demonstrated that CAP mining provides a powerful method for structural knowledge discovery, which can be visualised through the CAP-Graph model.

Keywords: concurrent access patterns (CAP), CAP mining and modelling, CAP-Graph, web access patterns (WAP), WAP-Graph, Web usage mining.

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2121 Packing and Covering Radii of Linear Error-Block Codes

Authors: Rabiˆı DARITI, El Mamoun SOUIDI

Abstract:

Linear error-block codes are a natural generalization of linear error correcting codes. The purpose of this paper is to generalize some results on the packing and the covering radii to the error-block case. We study their properties when a code undergoes some specific modifications and combinations with another code. We give a few bounds on the packing and the covering radii of these codes.

Keywords: Linear error-block codes, π-distance, Correction capacity, Packing radius, Covering radius.

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2120 Grating Scale Thermal Expansion Error Compensation for Large Machine Tools Based on Multiple Temperature Detection

Authors: Wenlong Feng, Zhenchun Du, Jianguo Yang

Abstract:

To decrease the grating scale thermal expansion error, a novel method which based on multiple temperature detection is proposed. Several temperature sensors are installed on the grating scale and the temperatures of these sensors are recorded. The temperatures of every point on the grating scale are calculated by interpolating between adjacent sensors. According to the thermal expansion principle, the grating scale thermal expansion error model can be established by doing the integral for the variations of position and temperature. A novel compensation method is proposed in this paper. By applying the established error model, the grating scale thermal expansion error is decreased by 90% compared with no compensation. The residual positioning error of the grating scale is less than 15μm/10m and the accuracy of the machine tool is significant improved.

Keywords: Thermal expansion error of grating scale, error compensation, machine tools, integral method.

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2119 A New Quadrature Rule Derived from Spline Interpolation with Error Analysis

Authors: Hadi Taghvafard

Abstract:

We present a new quadrature rule based on the spline interpolation along with the error analysis. Moreover, some error estimates for the reminder when the integrand is either a Lipschitzian function, a function of bounded variation or a function whose derivative belongs to Lp are given. We also give some examples to show that, practically, the spline rule is better than the trapezoidal rule.

Keywords: Quadrature, Spline interpolation, Trapezoidal rule, Numericalintegration, Error analysis.

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2118 Error Estimates for Calculated Glomerular Filtration Rates

Authors: Simon Brown

Abstract:

Glomerular filtration rate (GFR) is a measure of kidney function. It is usually estimated from serum concentrations of cystatin C or creatinine although there has been considerable debate in the literature about (i) the best equation to use and (ii) the variability in the correlation between the concentrations of creatinine and cystatin C. The equations for GFR can be written in a general form and from these I calculate the error of the GFR estimates associated with analyte measurement error. These show that the error of the GFR estimates is such that it is not possible to distinguish between the equations over much of the concentration range of either analyte. The general forms of the equations are also used to derive an expression for the concentration of cystatin C as a function of the concentration of creatinine. This equation shows that these analyte concentrations are not linearly related. Clinical reports of cystatin C and creatinine concentration are consistent with the expression derived.

Keywords: creatinine, cystatin C, error analysis, glomerularfiltration rate, measurement error.

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2117 Error Correction Method for 2D Ultra-Wideband Indoor Wireless Positioning System Using Logarithmic Error Model

Authors: Phornpat Chewasoonthorn, Surat Kwanmuang

Abstract:

Indoor positioning technologies have been evolved rapidly. They augment the Global Positioning System (GPS) which requires line-of-sight to the sky to track the location of people or objects. In this study, we developed an error correction method for an indoor real-time location system (RTLS) based on an ultra-wideband (UWB) sensor from Decawave. Multiple stationary nodes (anchor) were installed throughout the workspace. The distance between stationary and moving nodes (tag) can be measured using a two-way-ranging (TWR) scheme. The result has shown that the uncorrected ranging error from the sensor system can be as large as 1 m. To reduce ranging error and thus increase positioning accuracy, we present an online correction algorithm using the Kalman filter. The results from experiments have shown that the system can reduce ranging error down to 5 cm.

Keywords: Indoor positioning, ultra-wideband, error correction, Kalman filter.

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2116 Straightness Error Compensation Servo-system for Single-axis Linear Motor Stage

Authors: M. S. Kang, D. H. Kim, J. S. Yoon, B. S. Park, J. K. Lee

Abstract:

Since straightness error of linear motor stage is hardly dependent upon machining accuracy and assembling accuracy, there is limit on maximum realizable accuracy. To cope with this limitation, this paper proposed a servo system to compensate straightness error of a linear motor stage. The servo system is mounted on the slider of the linear motor stage and moves in the direction of the straightness error so as to compensate the error. From position dependency and repeatability of the straightness error of the slider, a feedforward compensation control is applied to the platform servo control. In the consideration of required fine positioning accuracy, a platform driven by an electro-magnetic actuator is suggested and a sliding mode control was applied. The effectiveness of the sliding mode control was verified along with some experimental results.

Keywords: Linear Motor Stage, Straightness Error, Friction, Sliding Mode Control.

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2115 A Survey of Access Control Schemes in Wireless Sensor Networks

Authors: Youssou Faye, Ibrahima Niang, Thomas Noel

Abstract:

Access control is a critical security service in Wire- less Sensor Networks (WSNs). To prevent malicious nodes from joining the sensor network, access control is required. On one hand, WSN must be able to authorize and grant users the right to access to the network. On the other hand, WSN must organize data collected by sensors in such a way that an unauthorized entity (the adversary) cannot make arbitrary queries. This restricts the network access only to eligible users and sensor nodes, while queries from outsiders will not be answered or forwarded by nodes. In this paper we presentee different access control schemes so as to ?nd out their objectives, provision, communication complexity, limits, etc. Using the node density parameter, we also provide a comparison of these proposed access control algorithms based on the network topology which can be flat or hierarchical.

Keywords: Access Control, Authentication, Key Management, Wireless Sensor Networks.

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2114 Effective Security Method for Wireless LAN using Life-Cycle of Wireless Access Point

Authors: Soon-Tai Park, Haeryong Park, Myoung-sun Noh, Yoo-Jae Won

Abstract:

There are many expand of Wi-Fi zones provided mobile careers and usage of wireless access point at home as increase of usage of wireless internet caused by the use of smart phone. This paper shows wireless local area network status, security threats of WLAN and functionality of major wireless access point in Korea. We propose security countermeasures concerned with life cycle of access point from manufacturing to installation, using and finally disposal. There needed to releasing with configured secure at access point. Because, it is most cost effective resolution than stage of installation or other life cycle of access point.

Keywords: Wireless LAN Security, Wi-Fi Security, Wireless Access Point, Product Life-Cycle

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2113 Competitiveness and Pricing Policy Assessment for Resilience Surface Access System at Airports

Authors: Dimitrios J. Dimitriou

Abstract:

Considering a worldwide tendency, air transports are growing very fast and many changes have taken place in planning, management and decision making process. Given the complexity of airport operation, the best use of existing capacity is the key driver of efficiency and productivity. This paper deals with the evaluation framework for the ground access at airports, by using a set of mode choice indicators providing key messages towards airport’s ground access performance. The application presents results for a sample of 12 European airports, illustrating recommendations to define policy and improve service for the air transport access chain.

Keywords: Air transport chain, airport ground access, airport access performance, airport policy.

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2112 A Purpose Based Usage Access Control Model

Authors: Lili Sun, Hua Wang

Abstract:

As privacy becomes a major concern for consumers and enterprises, many research have been focused on the privacy protecting technology in recent years. In this paper, we present a comprehensive approach for usage access control based on the notion purpose. In our model, purpose information associated with a given data element specifies the intended use of the subjects and objects in the usage access control model. A key feature of our model is that it allows when an access is required, the access purpose is checked against the intended purposes for the data item. We propose an approach to represent purpose information to support access control based on purpose information. Our proposed solution relies on usage access control (UAC) models as well as the components which based on the notions of the purpose information used in subjects and objects. Finally, comparisons with related works are analyzed.

Keywords: Purpose, privacy, access control, authorization

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2111 An Investigation on Efficient Spreading Codes for Transmitter Based Techniques to Mitigate MAI and ISI in TDD/CDMA Downlink

Authors: Abhijit Mitra, C. Ardil

Abstract:

We investigate efficient spreading codes for transmitter based techniques of code division multiple access (CDMA) systems. The channel is considered to be known at the transmitter which is usual in a time division duplex (TDD) system where the channel is assumed to be the same on uplink and downlink. For such a TDD/CDMA system, both bitwise and blockwise multiuser transmission schemes are taken up where complexity is transferred to the transmitter side so that the receiver has minimum complexity. Different spreading codes are considered at the transmitter to spread the signal efficiently over the entire spectrum. The bit error rate (BER) curves portray the efficiency of the codes in presence of multiple access interference (MAI) as well as inter symbol interference (ISI).

Keywords: Code division multiple access, time division duplex, transmitter technique, precoding, pre-rake, rake, spreading code.

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2110 Design and Performance Analysis of One Dimensional Zero Cross-Correlation Coding Technique for a Fixed Wavelength Hopping SAC-OCDMA

Authors: Satyasen Panda, Urmila Bhanja

Abstract:

This paper presents a SAC-OCDMA code with zero cross correlation property to minimize the Multiple Access Interface (MAI) as New Zero Cross Correlation code (NZCC), which is found to be more scalable compared to the other existing SAC-OCDMA codes. This NZCC code is constructed using address segment and data segment. In this work, the proposed NZCC code is implemented in an optical system using the Opti-System software for the spectral amplitude coded optical code-division multiple-access (SAC-OCDMA) scheme. The main contribution of the proposed NZCC code is the zero cross correlation, which reduces both the MAI and PIIN noises. The proposed NZCC code reveals properties of minimum cross-correlation, flexibility in selecting the code parameters and supports a large number of users, combined with high data rate and longer fiber length. Simulation results reveal that the optical code division multiple access system based on the proposed NZCC code accommodates maximum number of simultaneous users with higher data rate transmission, lower Bit Error Rates (BER) and longer travelling distance without any signal quality degradation, as compared to the former existing SAC-OCDMA codes.

Keywords: Cross Correlation, Optical Code Division Multiple Access, Spectral Amplitude Coding Optical Code Division Multiple Access, Multiple Access Interference, Phase Induced Intensity Noise, New Zero Cross Correlation code.

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2109 A Design of Fractional-Order PI Controller with Error Compensation

Authors: Mazidah Tajjudin, Norhashim Mohd Arshad, Ramli Adnan

Abstract:

Fractional-order controller was proven to perform better than the integer-order controller. However, the absence of a pole at origin produced marginal error in fractional-order control system. This study demonstrated the enhancement of the fractionalorder PI over the integer-order PI in a steam temperature control. The fractional-order controller was cascaded with an error compensator comprised of a very small zero and a pole at origin to produce a zero steady-state error for the closed-loop system. Some modification on the error compensator was suggested for different order fractional integrator that can improve the overall phase margin.

Keywords: Fractional-order PI, Ziegler-Nichols tuning, Oustaloup's Recursive Approximation, steam temperature control.

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2108 Operational risks Classification for Information Systems with Service-Oriented Architecture (Including Loss Calculation Example)

Authors: Irina Pyrlina

Abstract:

This article presents the results of a study conducted to identify operational risks for information systems (IS) with service-oriented architecture (SOA). Analysis of current approaches to risk and system error classifications revealed that the system error classes were never used for SOA risk estimation. Additionally system error classes are not normallyexperimentally supported with realenterprise error data. Through the study several categories of various existing error classifications systems are applied and three new error categories with sub-categories are identified. As a part of operational risks a new error classification scheme is proposed for SOA applications. It is based on errors of real information systems which are service providers for application with service-oriented architecture. The proposed classification approach has been used to classify SOA system errors for two different enterprises (oil and gas industry, metal and mining industry). In addition we have conducted a research to identify possible losses from operational risks.

Keywords: Enterprise architecture, Error classification, Oil&Gas and Metal&Mining industries, Operational risks, Serviceoriented architecture

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2107 Design and Performance Improvement of Three-Dimensional Optical Code Division Multiple Access Networks with NAND Detection Technique

Authors: Satyasen Panda, Urmila Bhanja

Abstract:

In this paper, we have presented and analyzed three-dimensional (3-D) matrices of wavelength/time/space code for optical code division multiple access (OCDMA) networks with NAND subtraction detection technique. The 3-D codes are constructed by integrating a two-dimensional modified quadratic congruence (MQC) code with one-dimensional modified prime (MP) code. The respective encoders and decoders were designed using fiber Bragg gratings and optical delay lines to minimize the bit error rate (BER). The performance analysis of the 3D-OCDMA system is based on measurement of signal to noise ratio (SNR), BER and eye diagram for a different number of simultaneous users. Also, in the analysis, various types of noises and multiple access interference (MAI) effects were considered. The results obtained with NAND detection technique were compared with those obtained with OR and AND subtraction techniques. The comparison results proved that the NAND detection technique with 3-D MQC\MP code can accommodate more number of simultaneous users for longer distances of fiber with minimum BER as compared to OR and AND subtraction techniques. The received optical power is also measured at various levels of BER to analyze the effect of attenuation.

Keywords: Cross correlation, three-dimensional optical code division multiple access, spectral amplitude coding optical code division multiple access, multiple access interference, phase induced intensity noise, three-dimensional modified quadratic congruence/modified prime code.

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2106 Implementation of Channel Estimation and Timing Synchronization Algorithms for MIMO-OFDM System Using NI USRP 2920

Authors: Ali Beydoun, Hamzé H. Alaeddine

Abstract:

MIMO-OFDM communication system presents a key solution for the next generation of mobile communication due to its high spectral efficiency, high data rate and robustness against multi-path fading channels. However, MIMO-OFDM system requires a perfect knowledge of the channel state information and a good synchronization between the transmitter and the receiver to achieve the expected performances. Recently, we have proposed two algorithms for channel estimation and timing synchronization with good performances and very low implementation complexity compared to those proposed in the literature. In order to validate and evaluate the efficiency of these algorithms in real environments, this paper presents in detail the implementation of 2 × 2 MIMO-OFDM system based on LabVIEW and USRP 2920. Implementation results show a good agreement with the simulation results under different configuration parameters.

Keywords: MIMO-OFDM system, timing synchronization, channel estimation, STBC, USRP 2920.

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2105 Performance Comparison of Real Time EDAC Systems for Applications On-Board Small Satellites

Authors: Y. Bentoutou

Abstract:

On-board Error Detection and Correction (EDAC) devices aim to secure data transmitted between the central processing unit (CPU) of a satellite onboard computer and its local memory. This paper presents a comparison of the performance of four low complexity EDAC techniques for application in Random Access Memories (RAMs) on-board small satellites. The performance of a newly proposed EDAC architecture is measured and compared with three different EDAC strategies, using the same FPGA technology. A statistical analysis of single-event upset (SEU) and multiple-bit upset (MBU) activity in commercial memories onboard Alsat-1 is given for a period of 8 years

Keywords: Error Detection and Correction; On-board computer; small satellite missions

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2104 Monitoring and Fault-Recovery Capacity with Waveguide Grating-based Optical Switch over WDM/OCDMA-PON

Authors: Yao-Tang Chang, Chuen-Ching Wang, Shu-Han Hu

Abstract:

In order to implement flexibility as well as survivable capacities over passive optical network (PON), a new automatic random fault-recovery mechanism with array-waveguide-grating based (AWG-based) optical switch (OSW) is presented. Firstly, wavelength-division-multiplexing and optical code-division multiple-access (WDM/OCDMA) scheme are configured to meet the various geographical locations requirement between optical network unit (ONU) and optical line terminal (OLT). The AWG-base optical switch is designed and viewed as central star-mesh topology to prohibit/decrease the duplicated redundant elements such as fiber and transceiver as well. Hence, by simple monitoring and routing switch algorithm, random fault-recovery capacity is achieved over bi-directional (up/downstream) WDM/OCDMA scheme. When error of distribution fiber (DF) takes place or bit-error-rate (BER) is higher than 10-9 requirement, the primary/slave AWG-based OSW are adjusted and controlled dynamically to restore the affected ONU groups via the other working DFs immediately.

Keywords: Random fault recovery mechanism, Array-waveguide-grating based optical switch (AWG- based OSW), wavelength-division-multiplexing and optical code-divisionmultiple-access (WDM/ OCDMA)

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2103 ICF Neutron Detection Techniques Based on Doped ZnO Crystal

Authors: L. Chen, X. P. Ouyang, Z. B. Zhang, J. F. Zhang, J. L. Liu

Abstract:

Ultrafast doped zinc oxide crystal promised us a good opportunity to build new instruments for ICF fusion neutron measurement. Two pulsed neutron detectors based on ZnO crystal wafer have been conceptually designed, the superfast ZnO timing detector and the scintillation recoil proton neutron detection system. The structure of these detectors was presented, and some characters were studied as well. The new detectors could be much faster than existing systems, and would be more competent for ICF neutron diagnostics.

Keywords: ICF fusion neutron detection, proton recoil telescope, superfast timing, ZnO crystal

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2102 WDM and OCDMA Systems under MAI Effects: A Comparison Analysis

Authors: Hilal A. Fadhil, Thanaa Hussein Abd, Hamza M. R. Al-Khafaji, S. A. Aljunid

Abstract:

This paper presents a comparison between Spectrum- Sliced Wavelength Division Multiplexing (SS-WDM) and Spectrum Amplitude Coding Optical Code Division Multiple Access (SAC Optical CDMA) systems for different light sources. The performance of the system is shown in the simulated results of the bit error rate (BER) and the eye diagram of both systems. The comparison results indicate that the Multiple Access Interference (MAI) effects have a significant impact on SS-WDM over SAC Optical CDMA systems. Finally, in terms of spectral efficiency at constant BER of 10-12, SSWDM offers higher spectral efficiency than optical CDMA since no bandwidth expansion in needed.

Keywords: WDM, OCDMA, BER, RD code

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2101 The Analysis of Radial/Axial Error Motion on a Precision Rotation Stage

Authors: Jinho Kim, Dongik Shin, Deokwon Yun, Changsoo Han

Abstract:

Rotating stages in semiconductor, display industry and many other fields require challenging accuracy to perform their functions properly. Especially, Axis of rotation error on rotary system is significant; such as the spindle error motion of the aligner, wire bonder and inspector machine which result in the poor state of manufactured goods. To evaluate and improve the performance of such precision rotary stage, unessential movements on the other 5 degrees of freedom of the rotary stage must be measured and analyzed. In this paper, we have measured the three translations and two tilt motions of a rotating stage with high precision capacitive sensors. To obtain the radial error motion from T.I.R (Total Indicated Reading) of radial direction, we have used Donaldson's reversal technique. And the axial components of the spindle tilt error motion can be obtained accurately from the axial direction outputs of sensors by Estler face motion reversal technique. Further more we have defined and measured the sensitivity of positioning error to the five error motions.

Keywords: Donaldson's reversal methods, Estler face motionreversal method, Error motion, sensitivity, T.I.R (Total IndicatedReading).

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