Search results for: Thin Wafer

Authors: G. Zuppardi, F. Romano

Abstract:

Technology of thin film deposition is of interest in many engineering fields, from electronic manufacturing to corrosion protective coating. A typical deposition process, like that developed at the University of Eindhoven, considers the deposition of a thin, amorphous film of C:H or of Si:H on the substrate, using the Expanding Thermal arc Plasma technique. In this paper a computing procedure is proposed to simulate the flow field in a deposition chamber similar to that at the University of Eindhoven and a sensitivity analysis is carried out in terms of: precursor mass flow rate, electrical power, supplied to the torch and fluid-dynamic characteristics of the plasma jet, using different nozzles. To this purpose a deposition chamber similar in shape, dimensions and operating parameters to the above mentioned chamber is considered. Furthermore, a method is proposed for a very preliminary evaluation of the film thickness distribution on the substrate. The computing procedure relies on two codes working in tandem; the output from the first code is the input to the second one. The first code simulates the flow field in the torch, where Argon is ionized according to the Saha-s equation, and in the nozzle. The second code simulates the flow field in the chamber. Due to high rarefaction level, this is a (commercial) Direct Simulation Monte Carlo code. Gas is a mixture of 21 chemical species and 24 chemical reactions from Argon plasma and Acetylene are implemented in both codes. The effects of the above mentioned operating parameters are evaluated and discussed by 2-D maps and profiles of some important thermo-fluid-dynamic parameters, as per Mach number, velocity and temperature. Intensity, position and extension of the shock wave are evaluated and the influence of the above mentioned test conditions on the film thickness and uniformity of distribution are also evaluated.

Keywords: Deposition chamber, Direct Simulation Mote Carlo method (DSMC), Plasma chemistry, Rarefied gas dynamics.

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Authors: Karan Modi, Rajesh Kumar, Jyoti Katiyar, Shreya Thusoo

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This paper presents Finite Element Method (FEM) for analyzing the internal responses generated in thin rectangular plates with various edge conditions and rigidity conditions. Comparison has been made between the FEM (ANSYS software) results for displacement, stresses and moments generated with and without the consideration of hole in plate and different aspect ratios. In the end comparison for responses in plain and composite square plates has been studied.

Keywords: ANSYS, Finite Element Method, Plates, Static Analysis.

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Authors: Hesham Muhammad Ibrahim

Abstract:

This paper introduces and proves new concept of salt dissolving in water as very tiny solid sodium chloride particles of nanovolumes, from this point of view salt water can be desalinated by collision with special surface characterized by smoothness upon nano level, high rigidity, high hardness under appropriate conditions of water launching in the form of thin laminar flow under suitable speed and angle of incidence to get desalinated water.

Keywords: Desalination by collision, nano coating, water desalination, water repellent surface.

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Authors: Mutabar Shah, Muhammad Hassan Sayyad, Khasan S. Karimov

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Thin films of Nickel phthalocynine (NiPc) of different thicknesses (100, 150 and 200 nm) were deposited by thermal evaporator on glass substrates with preliminary deposited aluminum electrodes to form Al/NiPc/Al surface-type capacitive humidity sensors. The capacitance-humidity relationships of the sensors were investigated at humidity levels from 35 to 90% RH. It was observed that the capacitance value increases nonlinearly with increasing humidity level. All measurements were taken at room temperature.

Keywords: Capacitive sensor, Humidity, Nickel phthalocyanine, Organic semiconductor.

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Authors: Zong Chen, Li Zhang

Abstract:

Median filter is widely used to remove impulse noise without blurring sharp edges. However, when noise level increased, or with thin edges, median filter may work poorly. This paper proposes a new filter, which will detect edges along four possible directions, and then replace noise corrupted pixel with estimated noise-free edge median value. Simulations show that the proposed multi-stage directional median filter can provide excellent performance of suppressing impulse noise in all situations.

Keywords: Impulse noise, Median filter, Multi-stage, Edgepreserving

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Authors: Nao-Aki Noda, Yu Zhang, Ken-Tarou Takaishi, Hiroyuki Shibahara

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In this paper the strength of adhesive joint under tension and bending is discussed on the basis of intensity of singular stress by the application of FEM. A useful method is presented with focusing on the stress at the edge of interface between the adhesive and adherent obtained by FEM. After analyzing the adhesive joint strength with all material combinations, it is found that to improve the interface strength, thin adhesive layers are desirable because the intensity of singular stress decreases with decreasing the thickness.

Keywords: Adhesive, Adherent, Intensity of singular stress, Bonded strip

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Authors: Jaroslav Krutil, František Pochylý, Simona Fialová

Abstract:

The article presents two mathematical models of the interaction between a rotating shaft and an incompressible fluid. The mathematical model includes both the journal bearings and the axially traversed hydrodynamic sealing gaps of hydraulic machines. A method is shown for the identification of additional effects of the fluid acting on the rotor of the machine, both for a linear and a nonlinear model. The interaction is expressed by matrices of mass, stiffness and damping.

Keywords: CFD modeling, hydrodynamic gap, matrices of mass, stiffness and damping, nonlinear mathematical model.

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Authors: Syahril Ridzuan Ab Rahim, Ibrahim Ahmad, Mohd Azizi Chik, Ahmad Zafir Md. Rejab, and U. Hashim

Abstract:

This research presents the development of simulation modeling for WIP management in semiconductor fabrication. Manufacturing simulation modeling is needed for productivity optimization analysis due to the complex process flows involved more than 35 percent re-entrance processing steps more than 15 times at same equipment. Furthermore, semiconductor fabrication required to produce high product mixed with total processing steps varies from 300 to 800 steps and cycle time between 30 to 70 days. Besides the complexity, expansive wafer cost that potentially impact the company profits margin once miss due date is another motivation to explore options to experiment any analysis using simulation modeling. In this paper, the simulation model is developed using existing commercial software platform AutoSched AP, with customized integration with Manufacturing Execution Systems (MES) and Advanced Productivity Family (APF) for data collections used to configure the model parameters and data source. Model parameters such as processing steps cycle time, equipment performance, handling time, efficiency of operator are collected through this customization. Once the parameters are validated, few customizations are made to ensure the prior model is executed. The accuracy for the simulation model is validated with the actual output per day for all equipments. The comparison analysis from result of the simulation model compared to actual for achieved 95 percent accuracy for 30 days. This model later was used to perform various what if analysis to understand impacts on cycle time and overall output. By using this simulation model, complex manufacturing environment like semiconductor fabrication (fab) now have alternative source of validation for any new requirements impact analysis.

Keywords: Advanced Productivity Family (APF), Complementary Metal Oxide Semiconductor (CMOS), Manufacturing Execution Systems (MES), Work In Progress (WIP).

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Authors: Ruediger Schmidt, Thang Duy Vu

Abstract:

Two geometrically nonlinear plate theories, based either on first- or third-order transverse shear deformation theory are used for finite element modeling and simulation of the transient response of smart structures incorporating piezoelectric layers. In particular the time histories of nonlinear vibrations and sensor voltage output of a thin beam with a piezoelectric patch bonded to the surface due to an applied step force are studied.

Keywords: Nonlinear vibrations, piezoelectric patches, sensor voltage output, smart structures.

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Authors: Kedit J.

Abstract:

This paper is the tomographic images reconstruction simulation for defects detection in specimen. The specimen is the thin cylindrical steel contained with low density materials. The defects in material are simulated in three shapes.The specimen image function will be transformed to projection data. Radon transform and its inverse provide the mathematical for reconstructing tomographic images from projection data. The result of the simulation show that the reconstruction images is complete for defect detection.

Keywords: Tomography, Tomography Reconstruction, Radon Transform

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Authors: Dhiflaoui Hafedh, Khlifi Kaouthar, Ben Cheikh Larbi Ahmed

Abstract:

These Monolayer and multilayer coatings of CrN and AlCrN deposited on 100Cr6 (AISI 52100) substrate by PVD magnetron sputtering system. The microstructures of the coatings were characterized using atomic force microscopy (AFM). The AFM analysis revealed the presence of domes and craters that are uniformly distributed over all surfaces of the various layers. Nanoindentation measurement of CrN coating showed maximum hardness (H) and modulus (E) of 14 GPa and 190 GPa, respectively. The measured H and E values of AlCrN coatings were found to be 30 GPa and 382 GPa, respectively. The improved hardness in both the coatings was attributed mainly to a reduction in crystallite size and decrease in surface roughness. The incorporation of Al into the CrN coatings has improved both hardness and Young’s modulus.

Keywords: CrN/AlCrN, coatings, hardness, nano-indentation.

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Authors: Dmitry D. Zakharov

Abstract:

The theoretical prediction of the acoustical polarization effects in the heterogeneous composites, made of thick elastic solids with thin nematic films, is presented. The numericalanalytical solution to the problem of the different wave propagation exhibits some new physical effects in the low frequency domain: the appearance of the critical frequency and the existence of the narrow transition zone where the wave rapidly changes its speed. The associated wave attenuation is highly perturbed in this zone. We also show the possible appearance of the critical frequencies where the attenuation changes the sign. The numerical results of parametrical analysis are presented and discussed.

Keywords: Surface wave, guided wave, heterogeneous composite, nematic coating.

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Authors: V. K. Bheemineni, B. Käfer, H. Lammer, M. Kotnik, F. O. Riemelmoser

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This paper concerns about the experimental and numerical investigations of energy absorption and axial tearing behaviour of aluminium 6060 circular thin walled tubes under static axial compression. The tubes are received in T66 heat treatment condition with fixed outer diameter of 42mm, thickness of 1.5mm and length of 120mm. The primary variables are the conical die angles (15°, 20° and 25°). Numerical simulations are carried on ANSYS/LS-DYNA software tool, for investigating the effect of friction between the tube and the die.

Keywords: Angled die, ANSYS/LS-DYNA, Axial tearing, Energy absorption.

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Authors: E. F. Ochulor, S. O. Adeosun, S. A. Balogun

Abstract:

Effect of sprue/metal head height on mould filling, microstructure and mechanical properties of TWDI casting is studied. Results show that metal/sprue height of 50 mm is not sufficient to push the melt through the gating channel, but as it is increased from 100-350 mm, proper mould filling is achieved. However at higher heights between 200 mm and 350 mm, defects associated with incomplete solidification, carbide precipitation and turbulent flow are evident. This research shows that superior UTS, hardness, nodularity and nodule count are obtained at 100 mm sprue height.

Keywords: Melt pressure and velocity, nodularity, nodule count, sprue height.

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Authors: K. Kalaiselvan, A. Elango, N. M. Nagarajan, N. Mathiyazagan

Abstract:

Laser beam welding has wide acceptability due to least welding distortion, low labour costs and convenient operation. However, laser welding for dissimilar titanium and aluminium alloys is a new area which is having wider applications in aerospace, aircraft, automotive, electronics and other industries. The present study is concerned with welding parameters namely laser power, welding speed, focusing distance and type of shielding gas and thereby evaluate welding performance of titanium and aluminium alloy thin sheets. This paper reviews the basic concepts associated with different parameters of Ti/Al sheet joint using Laser beam welding.

Keywords: Laser Beam Welding (LBW), Dissimilar joining Titanium and Aluminum sheets.

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Authors: Danial Husseinzadeh

Abstract:

A new supported liquid membrane (SLM) system for the selective transport of VO2 + ions was prepared in this present work. The SLM was a thin porous polyvinylidene difluoride (PVDF) membrane soaked with Di-(2-ethylhexyl) phosphoric acid (D2EHPA) as mobile carrier in Xylene as organic solvent. D2EHPA acts as a highly selective carrier for the uphill transport of VO2 + ions through the SLM. The transport of VO2 + ions reached to 64%. In the presence of P2O7-2 ion as suitable masking agent in the feed solution, the interfering effects of other cations were eliminated.

Keywords: Facilitated ion transport, Membrane characteristics, Supported liquid membranes, Vanadium.

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Authors: V.Fathipour, M. A. Malakootian, S. Fathipour, M. Fathipour

Abstract:

In this paper we propose a novel RF LDMOS structure which employs a thin strained silicon layer at the top of the channel and the N-Drift region. The strain is induced by a relaxed Si0.8 Ge0.2 layer which is on top of a compositionally graded SiGe buffer. We explain the underlying physics of the device and compare the proposed device with a conventional LDMOS in terms of energy band diagram and carrier concentration. Numerical simulations of the proposed strained silicon laterally diffused MOS using a 2 dimensional device simulator indicate improvements in saturation and linear transconductance, current drivability, cut off frequency and on resistance. These improvements are however accompanied with a suppression in the break down voltage.

Keywords: High Frequency MOSFET, Design of RF LDMOS, Strained-Silicon, LDMOS.

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Authors: Seyed Ali Sedigh Zyabari, A. Zarifkar

Abstract:

Single photon detectors have been fabricated NbN nano wire. These detectors are fabricated from high quality, ultra high vacuum sputtered NbN thin films on a sapphire substrate. In this work a typical schematic of the nanowire Single Photon Detector structure and then driving and measurement electronic circuit are shown. The response of superconducting nanowire single photon detectors during a photo detection event, is modeled by a special electrical circuits (two circuit). Finally, current through the wire is calculated by solving equations of models.

Keywords: NbN, nanowire meander, superconducting single photon detector, kinetic inductance.

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Authors: Cathal Merz, Gareth O’Donnell

Abstract:

Coil reinforced thin-walled (CRTW) tubes are used in medicine to treat problems affecting blood vessels within the body through minimally invasive procedures. The CRTW tube considered in this research makes up part of such a device and is inserted into the patient via their femoral or brachial arteries and manually navigated to the site in need of treatment. This procedure replaces the requirement to perform open surgery but is limited by reduction of blood vessel lumen diameter and increase in tortuosity of blood vessels deep in the brain. In order to maximize the capability of these procedures, CRTW tube devices are being manufactured with decreasing wall thicknesses in order to deliver treatment deeper into the body and to allow passage of other devices through its inner diameter. This introduces significant stresses to the device materials which have resulted in an observed increase in the breaking of the proximal segment of the device into two separate pieces after it has failed by buckling. As there is currently no international standard for measuring the mechanical properties of these CRTW tube devices, it is difficult to accurately analyze this problem. The aim of the current work is to address this discrepancy in the biomedical device industry by developing a measurement system that can be used to quantify the effect of process and design changes on CRTW tube performance, aiding in the development of better performing, next generation devices. Using materials testing frames, micro-computed tomography (micro-CT) imaging, experiment planning, analysis of variance (ANOVA), T-tests and regression analysis, test methods have been developed for assessing the impact of process and design changes on the device. The major findings of this study have been an insight into the suitability of buckle and three-point bend tests for the measurement of the effect of varying processing factors on the device’s performance, and guidelines for interpreting the output data from the test methods. The findings of this study are of significant interest with respect to verifying and validating key process and design changes associated with the device structure and material condition. Test method integrity evaluation is explored throughout.

Keywords: Buckling, coil reinforced thin-walled tubes, fracture, test method.

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Authors: A. Jamekhorshid, S. M. Sadrameli

Abstract:

This paper presents the modeling results of an innovative system for the temperature control in the interior compartment of a stationary automobile facing the solar energy from the sun. A very thin layer of PCM inside a pouch placed in the ceiling of the car in which the heating energy is absorbed and release with melting and solidification of phase change materials. As a result the temperature of the car interior is maintained in the comfort condition. The amount of required PCM has been calculated to be about 755 g. The PCM-temperature controlling system is simple and has a potential to be implemented as a practical solution to prevent undesirable heating of the automobile-s cabin.

Keywords: Phase Change Material (PCM), automobile's cabin, temperature control

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Authors: Dil Nawaz Khan, M. H. Sayyad, Muhammad Yaseen, Munawar Ali Munawar, Mukhtar Ali

Abstract:

Effect of temperature and light was investigated on a thin film of organic semiconductor formyl-TIPPCu(II) deposited on a glass substrate with preliminary evaporated gold electrodes. The electrical capacitance and resistance of the fabricated device were evaluated under the effect of temperature and light. The relative capacitance of the fabricated sensor increased by 4.3 times by rising temperature from 27 to 1870C, while under illumination up to 25000 lx, the capacitance of the Au/formyl-TIPPCu(II)/Au photo capacitive sensor increased continuously by 13.2 times as compared to dark conditions.

Keywords: formyl-TIPPCu(II), Organic semiconductor, Photocapacitance, Polarizability.

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Authors: Jiang Fan

Abstract:

With growth of PV market in tropical region, it is necessary to investigate the performance of different types of PV technology under the tropical weather conditions. Singapore Polytechnic was funded by Economic Development Board (EDB) to set up a solar PV test-bed for the research on performance of different types of PV modules in the country. The PV test-bed installed the nine different types of PV systems that are integrated to power utility grid for monitoring and analyzing their operating performances. This paper presents the 12 months operational data of nine different PV systems and analyses on performances of installed PV systems using energy yield and performance ratio. The nine types of PV systems under test have shown their energy yields ranging from 2.67 to 3.36 kWh/kW_p and their performance ratios (PRs) ranging from 70% to 88%.

Keywords: Monocrystalline, Multicrystalline, Amorphous Silicon, Cadmium Telluride and thin film PV.

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Authors: M. Ertas, A. C. Onel, G. Ekinci, B. Toydemir, S. Durdu, M. Usta, L. Colakerol Arslan

Abstract:

To develop AZ91D magnesium alloys with improved properties, we have applied TiN and VN/TiN multilayer coatings using DC magnetron sputter technique. Coating structure, surface morphology, chemical bonding and corrosion resistance of coatings were analyzed by x-ray diffraction (XRD), scanning electron microscope (SEM), x-ray photoelectron spectroscopy (XPS), and tafel extrapolation method, respectively. XPS analysis reveal that VN overlayer reacts with oxygen at the VN/TiN interface and forms more stable TiN layer. Morphological investigations and the corrosion results show that VN/TiN multilayer thin film coatings are quite effective to optimize the corrosion resistance of Mg alloys.

Keywords: AZ91D Mg alloys, High corrosion resistance, Transition metal nitride coatings, Magnetron sputter.

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Authors: S.Asadi, H.Panahi

Abstract:

The Navier–Stokes equations for unsteady, incompressible, viscous fluids in the axisymmetric coordinate system are solved using a control volume method. The volume-of-fluid (VOF) technique is used to track the free-surface of the liquid. Model predictions are in good agreement with experimental measurements. It is found that the dynamic processes after impact are sensitive to the initial droplet velocity and the liquid pool depth. The time evolution of the crown height and diameter are obtained by numerical simulation. The critical We number for splashing (Wecr) is studied for Oh (Ohnesorge) numbers in the range of 0.01~0.1; the results compares well with those of the experiments.

Keywords: Droplet impingement, free surface flows, liquid crown, numerical simulation, thin liquid film.

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Authors: J. Kala, J. Melcher, M. Škaloud, Z. Kala

Abstract:

In the paper, the results of sensitivity analysis of the influence of initial imperfections on the web stress state of a thinwalled girder are presented. The results of the study corroborate a very good and effective agreement of experiments with theory. Most input random quantities were found experimentally. The change of sensitivity coefficients in dependence on working load value is analysed. The stress was analysed by means of a geometrically and materially non-linear solution by applying the program ANSYS. This research study offers important background for theoretical studies of stability problems, post-critical effects and limit states of thin-walled steel structures.

Keywords: Buckling, Fatigue, Imperfection, Steel, Sensitivity analysis.

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Authors: Zubair Ahmad, M. H. Sayyad, M. Yaseen, M. Ali

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In this work, an organic compound 5,10,15,20- Tetrakis(3,5-di-tertbutylphenyl)porphyrinatocopper(II) (TDTBPPCu) is studied as an active material for thin film electronic devices. To investigate the electrical properties of TDTBPPCu, junction of TDTBPPCu with heavily doped n-Si and Al is fabricated. TDTBPPCu film was sandwiched between Al and n-Si electrodes. Various electrical parameters of TDTBPPCu are determined. The current-voltage characteristics of the junction are nonlinear, asymmetric and show rectification behavior, which gives the clue of formation of depletion region. This behavior indicates the potential of TDTBPPCu for electronics applications. The current-voltage and capacitance-voltage techniques are used to find the different electronic parameters.

Keywords: P-type, organic semiconductor, Electricalcharacteristics

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Authors: Z. X. Chen, T. S. Phua, X. P. Wang, G. -Q. Lo, D. -L. Kwong

Abstract:

This paper presents device simulations on the vertical silicon nanowire tunneling FET (VSiNW TFET). Simulations show that a narrow nanowire and thin gate oxide is required for good performance, which is expected even for conventional MOSFETs. The gate length also needs to be more than the nanowire diameter to prevent short channel effects. An effect more unique to TFET is the need for abrupt source to channel junction, which is shown to improve the performance. The ambipolar effect suppression by reducing drain doping concentration is also explored and shown to have little or no effect on performance.

Keywords: Device simulation, MEDICI, tunneling FET (TFET), vertical silicon nanowire.

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Authors: Roscoe McLean, Jared Padayachee, Glen Bright

Abstract:

There is currently a gap in the technology covering the rapid establishment of control after a reconfiguration in a Reconfigurable Manufacturing System. This gap involves the detection of the factory floor state and the communication link between the factory floor and the high-level software. In this paper, a thin, hardware-supported Middleware Management System (MMS) is proposed and its design and implementation are discussed. The research found that a cost-effective localization technique can be combined with intelligent software to speed up the ramp-up of a reconfigured system. The MMS makes the process more intelligent, more efficient and less time-consuming, thus supporting the industrial implementation of the RMS paradigm.

Keywords: Intelligent systems, middleware, reconfigurable manufacturing.

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Authors: Young Wook Lee, Sun-Jae Kim, Soo-Yeon Lee, Moon-Kyu Song, Woo-Geun Lee Min-Koo Han

Abstract:

We have fabricated a-IGZO TFT and investigated the stability under positive DC and AC bias stress. The threshold voltage of a-IGZO TFT shifts positively under those biases, and that reduces on-current. For this reason, conventional shift-register circuit employing TFTs which stressed by positive bias will be unstable, may do not work properly. We have designed a new 6-transistor shift-register, which has less transistors than prior circuits. The TFTs of the proposed shift-register are not suffering from positive DC or AC stress, mainly kept unbiased. Despite the compact design, the stable output signal was verified through the SPICE simulation even under RC delay of clock signal.

Keywords: Indium Gallium Zinc Oxide (IGZO), Thin FilmTransistor (TFT), shift-register

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Authors: Seyed Abbas Tabatabaei

Abstract:

One of the important factors of cracks on the asphalt pavements is bitumen aging that associated with the loss of volatile components and oxidation of asphalt binder. This paper is about effect of Styrene-Butadiene-Styrene (SBS) polymer on asphalt aging In order to decrease asphalt aging effects. For this purpose samples of base bitumen and SBS modified bitumen aged according to the rolling thin film oven test (RTFOT) and pressure aging vessel (PAV), respectively. Properties of each sample were evaluated using Fourier Transform Infrared (FTIR) spectroscopy, n-heptane precipitation, viscosity test, softening point test and penetration test. FT-IR Analysis, showed lower oxidation of SBS modified bitumen than base bitumen, after aging.

Keywords: SBS, Asphalt aging, modified bitumen.

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