Nanoindentation of Thin Films Prepared by Physical Vapor Deposition
Commenced in January 2007
Frequency: Monthly
Edition: International
Paper Count: 32870
Nanoindentation of Thin Films Prepared by Physical Vapor Deposition

Authors: Dhiflaoui Hafedh, Khlifi Kaouthar, Ben Cheikh Larbi Ahmed


These Monolayer and multilayer coatings of CrN and AlCrN deposited on 100Cr6 (AISI 52100) substrate by PVD magnetron sputtering system. The microstructures of the coatings were characterized using atomic force microscopy (AFM). The AFM analysis revealed the presence of domes and craters that are uniformly distributed over all surfaces of the various layers. Nanoindentation measurement of CrN coating showed maximum hardness (H) and modulus (E) of 14 GPa and 190 GPa, respectively. The measured H and E values of AlCrN coatings were found to be 30 GPa and 382 GPa, respectively. The improved hardness in both the coatings was attributed mainly to a reduction in crystallite size and decrease in surface roughness. The incorporation of Al into the CrN coatings has improved both hardness and Young’s modulus.

Keywords: CrN/AlCrN, coatings, hardness, nano-indentation.

Digital Object Identifier (DOI):

Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 2194


[1] K. Holmberg, A. Matthews, “Tribology: Properties, mechanisms, techniques and applications in surface engineering,” in Coating tribology vol. 56, 2009.
[2] M. Van Stappen, K. M. Stales, M. Kerkhofs, C. Quaeyhaegens “State of the art for the industrial use of ceramic PVD coatings,” in Surf. Coat. Technol vol. 629, 2013, pp. 85-96.
[3] K. Khlifi, A. Ben Cheikh Larbi “Mechanical properties and adhesion of TiN monolayer and TiN/TiAlN nanolayer coatings,” in Journal of Adhesion Science and Technologyl, 1995, pp. 74-75.
[4] B. Navinsek, P. Panjan, I. Milosev “Industrial applications of CrN (PVD) coatings, deposited at high and low temperatures,” in Surf. Coat. Technol, 1997, pp 182.
[5] H. A. Jehn, “Multicomponent and multiphase hard coatings for tribological applications,” in Surf. Coat. Technol, 2000, pp 433-440.
[6] H. Hasegawa, T. Suzuki “Effects of second metal contents on microstructure method” Surf. Coat. Technol, 2004, pp 188-189.
[7] M. Kawate, A. K. Hashimoto, T. Suzuki “Oxidation resistance of CrAlN and TiAlN films,” in Surf. Coat. Technol, 2003, pp 163-167.
[8] A. C. Fischer-Cripps, “Critical review of analysis and interpretation of nanoindentation test,” in Surf. Coat. Technol, 2006, pp 4153.
[9] Lv F, Wen SP, Zong RL, Zeng F, Gao Y, Pan F. “Nanoindentation study of amorphous-Co79Zr13Nb8/Cr multilayers,” in Surf. Coat. Technol. 2008, 202, pp3239–3245.
[10] Harish C. Barshilia , N. Selvakumar, B. Deepthi, K.S. Rajam, “A comparative study of reactive direct current magnetron sputtered CrAlN and CrN coatings,” in Surface & Coatings Technology ., 2006, 201, pp2193–2201.