%0 Journal Article
	%A Mutabar Shah and  Muhammad Hassan Sayyad and  Khasan S. Karimov
	%D 2008
	%J International Journal of Aerospace and Mechanical Engineering
	%B World Academy of Science, Engineering and Technology
	%I Open Science Index 19, 2008
	%T Fabrication and Study of Nickel Phthalocyanine based Surface Type Capacitive Sensors
	%U https://publications.waset.org/pdf/899
	%V 19
	%X Thin films of Nickel phthalocynine (NiPc) of different
thicknesses (100, 150 and 200 nm) were deposited by thermal
evaporator on glass substrates with preliminary deposited aluminum
electrodes to form Al/NiPc/Al surface-type capacitive humidity
sensors. The capacitance-humidity relationships of the sensors were
investigated at humidity levels from 35 to 90% RH. It was observed
that the capacitance value increases nonlinearly with increasing
humidity level. All measurements were taken at room temperature.
	%P 113 - 115