Search results for: voltage control

Authors: U. Amin, A. Talib, S. A. Qureshi, M. J. Hossain, G. Ahmad

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The choice evaluation between oil-immersed and dry-type transformers is often controlled by cost, location, and application. This paper compares the electrical performance of liquid- filled and dry-type transformers, which will assist the customer to choose the right and efficient ones for particular applications. An accurate assessment of the time-average flux density, electric field intensity and voltage distribution in an oil-insulated and a dry-type transformer have been computed and investigated. The detailed transformer modeling and analysis has been carried out to determine electrical parameter distributions. The models of oil-immersed and dry-type transformers are developed and solved by using the finite element method (FEM) to compare the electrical parameters. The effects of non-uniform and non-coherent voltage gradient, flux density and electric field distribution on the power losses and insulation properties of transformers are studied in detail. The results show that, for the same voltage and kilo-volt-ampere (kVA) rating, oil-immersed transformers have better insulation properties and less hysteresis losses than the dry-type.

Keywords: Finite element method, flux density, transformer, voltage gradient.

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Authors: K. Varesi

Abstract:

This paper proposes a Particle Swarm Optimization (PSO) based technique for the optimal allocation of Distributed Generation (DG) units in the power systems. In this paper our aim is to decide optimal number, type, size and location of DG units for voltage profile improvement and power loss reduction in distribution network. Two types of DGs are considered and the distribution load flow is used to calculate exact loss. Load flow algorithm is combined appropriately with PSO till access to acceptable results of this operation. The suggested method is programmed under MATLAB software. Test results indicate that PSO method can obtain better results than the simple heuristic search method on the 30-bus and 33- bus radial distribution systems. It can obtain maximum loss reduction for each of two types of optimally placed multi-DGs. Moreover, voltage profile improvement is achieved.

Keywords: Distributed Generation (DG), Optimal Allocation, Particle Swarm Optimization (PSO), Power Loss Minimization, Voltage Profile Improvement.

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Authors: A. A. Akande, B. P. Dhonge, B. W. Mwakikunga, A. G. J. Machatine

Abstract:

This article presents gate-voltage controlled humidity sensing performance of vanadium dioxide nanoparticles prepared from NH₄VO₃ precursor using microwave irradiation technique. The X-ray diffraction, transmission electron diffraction, and Raman analyses reveal the formation of VO₂ (B) with V₂O₅ and an amorphous phase. The BET surface area is found to be 67.67 m²/g. The humidity sensing measurements using the patented lateral-gate MOSFET configuration was carried out. The results show the optimum response at 5 V up to 8 V of gate voltages for 10 to 80% of relative humidity. The dose-response equation reveals the enhanced resilience of the gated VO₂ sensor which may saturate above 272% humidity. The response and recovery times are remarkably much faster (about 60 s) than in non-gated VO₂ sensors which normally show response and recovery times of the order of 5 minutes (300 s).

Keywords: VO2, VO2 (B), V2O5, MOSFET, gate voltage, humidity sensor.

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Authors: M. Sedighizadeh, A. Rezazadeh

Abstract:

Based on the component approach, three kinds of dynamic load models, including a single –motor model, a two-motor model and composite load model have been developed for the stability studies of Khuzestan power system. The study results are presented in this paper. Voltage instability is a dynamic phenomenon and therefore requires dynamic representation of the power system components. Industrial loads contain a large fraction of induction machines. Several models of different complexity are available for the description investigations. This study evaluates the dynamic performances of several dynamic load models in combination with the dynamics of a load changing transformer. Case study is steel industrial substation in Khuzestan power systems.

Keywords: Dynamic load, modeling, Voltage Stability.

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Authors: A. Denker, U. Akıncıoğlu

Abstract:

In this paper a neural adaptive control method has been developed and applied to robot control. Simulation results are presented to verify the effectiveness of the controller. These results show that the performance by using this controller is better than those which just use either direct inverse control or predictive control. In addition, they show that the resulting is a useful method which combines the advantages of both direct inverse control and predictive control.

Keywords: Neural networks, robotics, direct inverse control, predictive control.

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Authors: Suwimon Saneewong Na Ayuttaya

Abstract:

This paper presents a numerical investigation of electrically driven flow for enhancing convective heat transfer in a channel flow. This study focuses on the electrode arrangements, number of electrode and electrical voltage on Electrohydrodynamics (EHD) and effect of airflow driven on solid sample surface. The inlet airflow and inlet temperature are 0.35 m/s and 60 ^oC, respectively. High electrical voltage is tested in the range of 0-30 kV and number of electrode is tested in the range of 1-5. The numerical results show that electric field intensity is depended on electrical voltage and number of electrode. Increasing number of electrodes is increased shear flow, so swirling flow is increased. The swirling flows from aligned and staggered arrangements are affecting within the solid sample. When electrical voltage is increased, temperature distribution and convective heat transfer on the solid sample are significantly increased due to the electric force much stronger.

Keywords: Electrohydrodynamics, swirling flow, convective heat transfer, solid sample.

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Authors: R. Kamalakannan, N. Ravi Kumar

Abstract:

The global energy consumption is increasing persistently and need for distributed power generation through renewable energy is essential. To meet the power requirements for consumers without any voltage fluctuations and losses, modeling and design of multilevel inverter with Flexible AC Transmission System (FACTS) capability is presented. The presented inverter is provided with 13-level cascaded H-bridge topology of Insulated Gate Bipolar Transistor (IGBTs) connected along with inbuilt Distributed Static Synchronous Compensators (DSTATCOM). The DSTATCOM device provides control of power factor stability at local feeder lines and the inverter eliminates Total Harmonic Distortion (THD). The 13-level inverter utilizes 52 switches of each H-bridge is fed with single DC sources separately and the Pulse Width Modulation (PWM) technique is used for switching IGBTs. The control strategy implemented for inverter transmits active power to grid as well as it maintains power factor to be stable with achievement of steady state power transmission. Significant outcome of this project is improvement of output voltage quality with steady state power transmission with low THD. Simulation of inverter with DSTATCOM is performed using MATLAB/Simulink environment. The scaled prototype model of proposed inverter is built and its results were validated with simulated results.

Keywords: FACTS devices, distributed-Static synchronous compensators, DSTATCOM, total harmonics elimination, modular multilevel converter.

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Authors: Peng Lu, Branimir Radisavljevic, Martin Seeger, Daniel Over, Torsten Votteler, Bernardo Galletti

Abstract:

CO₂-based gas mixtures exhibit huge potential as the interruption medium for replacing SF₆ in high voltage switchgears. In this paper, the recovery characteristics of dielectric strength of CO₂-O₂ mixture in the post arc phase after the current zero are presented. As representative examples, the dielectric recovery curves under conditions of different gas filling pressures and short-circuit current amplitudes are presented. A series of dielectric recovery measurements suggests that the dielectric recovery rate is proportional to the mass flux of the blowing gas, and the dielectric strength recovers faster in the case of lower short circuit currents.

Keywords: CO2 mixture, high voltage circuit breakers, dielectric recovery rate, short-circuit current, mass flux.

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Authors: J. Chelladurai, G. Saravana Ilango, C. Nagamani, S. Senthil Kumar

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Pulse width modulation (PWM) techniques have been the subject of intensive research for different industrial and power sector applications. A large variety of methods, different in concept and performance, have been newly developed and described. This paper analyzes the comparative merits of Sinusoidal Pulse Width Modulation (SPWM) and Space Vector Pulse Width Modulation (SVPWM) techniques and the suitability of these techniques in a Shunt Active Filter (SAF). The objective is to select the scheme that offers effective utilization of DC bus voltage and also harmonic reduction at the input side. The effectiveness of the PWM techniques is tested in the SAF configuration with a non linear load. The performance of the SAF with the SPWM and (SVPWM) techniques are compared with respect to the THD in source current. The study reveals that in the context of closed loop SAF control with the SVPWM technique there is only a minor improvement in THD. The utilization of the DC bus with SVPWM is also not significant compared to that with SPWM because of the non sinusoidal modulating signal from the controller in SAF configuration.

Keywords: Voltage source inverter, Shunt active filter, SPWM, SVPWM, Matlab/SIMULINK.

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Authors: Shiang-Hwua Yu, Han-Sheng Tseng

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This paper presents a novel sinusoidal modulation scheme that features least correlated noise and high linearity. The modulation circuit, which is composed of a quantizer, a resonator, and a comparator, is capable of eliminating correlated modulation noise while doing modulation. The proposed modulation scheme combined with the linear quadratic optimal control is applied to a single-phase voltage source inverter and validated with the experiment results. The experiments show that the inverter supplies stable 60Hz 110V AC power with a total harmonic distortion of less than 1%, under the DC input variation from 190 V to 300 V and the output power variation from 0 to 600 W.

Keywords: Pulse width modulation, feedback dithering, linear quadratic control, inverter.

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Authors: N. Sumathi, R. Srinivasa Rao

Abstract:

This paper presents the experimental results of 11 kV and 33 kV silicon composite insulators under artificial salt and urea polluted conditions. The tests were carried out under different seasons like summer, winter, and monsoon. The artificial pollution is prepared by properly dissolving the salt and urea in the water. The prepared salt and urea pollutions are sprayed on the insulators and dried up for sufficiently large time. The process is continued until a uniform layer is formed on the surface of insulator. For each insulator rating, four samples were tested. The maximum leakage current and breakdown voltage were measured. From experimental data, performance of test specimen is evaluated by comparing breakdown voltage and leakage current during different seasons when exposed to salt and urea polluted conditions. From these results the performance of the insulators can be predicted when they are installed in industrial, agricultural, and coastal areas. The experimental tests were carried out in the High Voltage laboratory using two stage cascade transformer having the rating of 1000 kVA, 500 kV.

Keywords: Silicon composite insulators, Urea pollution, Leakage current, Breakdown voltage, salt pollution, artificial pollution.

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Authors: Elyse Sili, Jean Pascal Cambronne

Abstract:

In aircraft applications, according to the nature of electrical equipment its location may be in unpressurized area or very close to the engine; thus, the environmental conditions may change from atmospheric pressure to less than 100 mbar, and the temperature may be higher than the ambient one as in most real working conditions of electrical equipment. Then, the classical Paschen curve has to be replotted since these parameters may affect the discharge ignition voltage. In this paper, we firstly investigate the domain of validity of two corrective expressions on the Paschen-s law found in the literature, in case of changing the air environment and known as Peek and Dunbar corrections. Results show that these corrections are no longer valid for combined variation of temperature and pressure. After that, a new empirical expression for breakdown voltage is proposed and is validated in the case of combined variations of temperature and pressure.

Keywords: Gas breakdown, gas density, Paschen curve, temperature effects

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Authors: W. Chayinthu, K-N. Areerak, K-L. Areerak, A. Srikaew

Abstract:

This paper presents the optimal controller design of the generator control unit in the aircraft power system. The adaptive tabu search technique is applied to tune the controller parameters until the best terminal output voltage of generator is achieved. The output response from the system with the controllers designed by the proposed technique is compared with those from the conventional method. The transient simulations using the commercial software package show that the controllers designed from the adaptive tabu search algorithm can provide the better output performance compared with the result from the classical method. The proposed design technique is very flexible and useful for electrical aircraft engineers.

Keywords: Cascade PI controllers, DQ method, Adaptive tabusearch, Generator control unit, Aircraft power system, Modeling, Simulation, Artificial Intelligence.

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Authors: Priyanka Sen, Kaibalya Prasad Panda, Soumyakanta Samantaray, Sreyasee Rout, Bishnupriya Biswal

Abstract:

Deregulation in the power system industry and the invention of new technologies for producing electrical energy has led to innovations in power system planning. Distributed generation (DG) is one of the most attractive technologies that bring different kinds of advantages to a lot of entities, engaged in power systems. In this paper, a model for considering DGs in the power system planning problem is presented. Dynamic power system planning for reduction of maintenance and operational cost is presented in this paper. In addition to that, a modified particle swarm optimization (PSO) is used to find the optimal topology solution. Voltage Profile Improvement Index (VPII) and Line Loss Reduction Index (LLRI) are taken as benefit index of employing DG. The effectiveness of this method is demonstrated through examination of IEEE 30 bus test system.

Keywords: Distributed generation, line loss reduction index, particle swarm optimization, power system, voltage profile improvement index.

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Authors: Rohana Musa, Yuzman Yusoff, Chia Chieu Yin, Hanif Che Lah

Abstract:

This paper presents the design and characterization of a low power Complementary Metal Oxide Semiconductor (CMOS) process sensor. The design is targeted for implementation using Silterra’s 180 nm CMOS process technology. The proposed process sensor employs a voltage threshold (V_th) extractor architecture for detection of variations in the fabrication process. The process sensor generates output voltages in the range of 401 mV (fast-fast corner) to 443 mV (slow-slow corner) at nominal condition. The power dissipation for this process sensor is 6.3 µW with a supply voltage of 1.8V with a silicon area of 190 µm X 60 µm. The preliminary result of this process sensor that was fabricated indicates a close resemblance between test and simulated results.

Keywords: CMOS Process sensor, Process, Voltage and Temperature (PVT) sensor, threshold extractor circuit, Vth extractor circuit.

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Authors: Lei Yao, Jia Hao Cheong, Rui-Feng Xue, Minkyu Je

Abstract:

A closed-loop controlled wireless power transmission circuit block for implantable biomedical applications is described in this paper. The circuit consists of one front-end rectifier, power management sub-block including bandgap reference and low drop-out regulators (LDOs) as well as transmission power detection / feedback circuits. Simulation result shows that the front-end rectifier achieves 80% power efficiency with 750-mV single-end peak-to-peak input voltage and 1.28-V output voltage under load current of 4 mA. The power management block can supply 1.8mA average load current under 1V consuming only 12μW power, which is equivalent to 99.3% power efficiency. The wireless power transmission block described in this paper achieves a maximum power efficiency of 80%. The wireless power transmission circuit block is designed and implemented using UMC 65-nm CMOS/RF process. It occupies 1 mm × 1.2 mm silicon area.

Keywords: Implantable biomedical devices, wireless power transfer, LDO, rectifier, closed-loop power control

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Authors: Rizwan Ullah, Abdar Ali, Zahid Ullah

Abstract:

This paper illustrates the study of three isolated zero voltage switched (ZVS) PWM full bridge (FB) converters to charge the high voltage battery in the charger of electric vehicle (EV). EV battery chargers have several challenges such as high efficiency, high reliability, low cost, isolation, and high power density. The cost of magnetic and filter components in the battery charger is reduced when switching frequency is increased. The increase in the switching frequency increases switching losses. ZVS is used to reduce switching losses and to operate the converter in the battery charger at high frequency. The performance of each of the three converters is evaluated on the basis of ZVS range, dead times of the switches, conduction losses of switches, circulating current stress, circulating energy, duty cycle loss, and efficiency. The limitations and merits of each PWM FB converter are reviewed. The converter with broader ZVS range, high efficiency and low switch stresses is selected for battery charger applications in EV.

Keywords: Electric vehicle, PWM FB converter, zero voltage switching, circulating energy, duty cycle loss, battery charger.

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Authors: Ekow A. Kwofie, Emmanuel K. Anto, Godfred Mensah

Abstract:

In this paper, CYME Distribution software has been used to assess the impacts of solar Photovoltaic (PV) distributed generation (DG) plant on the Electricity Company of Ghana (ECG) 33 kV sub-transmission network at different PV penetration levels. As ECG begins to encourage DG PV interconnections within its network, there has been the need to assess the impacts on the sub-transmission losses and voltage contribution. In Tema, a city in Accra - Ghana, ECG has a 33 kV sub-transmission network made up of 20 No. 33 kV buses that was modeled. Three different locations were chosen: The source bus, a bus along the sub-transmission radial network and a bus at the tail end to determine the optimal location for DG PV interconnection. The optimal location was determined based on sub-transmission technical losses and voltage impact. PV capacities at different penetration levels were modeled at each location and simulations performed to determine the optimal PV penetration level. Interconnection at a bus along (or in the middle of) the sub-transmission network offered the highest benefits at an optimal PV penetration level of 80%. At that location, the maximum voltage improvement of 0.789% on the neighboring 33 kV buses and maximum loss reduction of 6.033% over the base case scenario were recorded. Hence, the optimal location for DG PV integration within the 33 kV sub-transmission utility network is at a bus along the sub-transmission radial network.

Keywords: Distributed generation photovoltaic, DG PV, optimal location, penetration level, sub-transmission network.

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Authors: Hanny H. Tumbelaka, Masafumi Miyatake

Abstract:

This paper proposes a three-phase four-wire currentcontrolled Voltage Source Inverter (CC-VSI) for both power quality improvement and PV energy extraction. For power quality improvement, the CC-VSI works as a grid current-controlling shunt active power filter to compensate for harmonic and reactive power of loads. Then, the PV array is coupled to the DC bus of the CC-VSI and supplies active power to the grid. The MPPT controller employs the particle swarm optimization technique. The output of the MPPT controller is a DC voltage that determines the DC-bus voltage according to PV maximum power. The PSO method is simple and effective especially for a partially shaded PV array. From computer simulation results, it proves that grid currents are sinusoidal and inphase with grid voltages, while the PV maximum active power is delivered to loads.

Keywords: Active Power Filter, MPPT, PV Energy Conversion.

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Authors: Asfar Ali Khan

Abstract:

Analytical expression for maximum power transfer through a transmission line limited by voltage stability has been formulated using exact representation of transmission line with ABCD parameters. The expression has been used for plotting PV curve at different power factors of a radial transmission line. Limiting values of reactive power have been obtained.

Keywords: Power Transfer, PV Curve, Voltage Stability.

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Authors: Chun-Yao Lee, Siang-Ren Wang

Abstract:

This paper aims to discuss the influence of resistance characteristic on the high conductive concrete considering the changes of voltage and environment. The high conductive concrete with appropriate proportion is produced to the press-electrode method. The curve of resistivity with the changes of voltage and environment is plotted and the changes of resistivity are explored.

Keywords: conductive concrete, resistivity.

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Authors: Dana M. Ragab, Jasim A Ghaeb

Abstract:

The Voltage Unbalance Factor (VUF) index is recommended to evaluate system performance under unbalanced operation. However, its calculation requires complex algebra which limits its use in the field. Furthermore, one system cycle is required at least to detect unbalance using the VUF. Ideally unbalance mitigation must be performed within 10 ms for 50 Hz systems. In this work, a linear relation for VUF evaluation in three-phase electrical power system using space vector (SV) is derived. It is proposed to determine the voltage unbalance quickly and accurately and to overcome the constraints associated with the traditional methods of VUF evaluation. Aqaba-Qatrana-South Amman (AQSA) power system is considered to study the system performance under unbalanced conditions. The results show that both the complexity of calculations and the time required to evaluate VUF are reduced significantly.

Keywords: Power quality, space vector, unbalance evaluation.

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Authors: Hai-Qing Xie, Yun Zeng, Yong-Hong Yan, Jian-Ping Zeng, Tai-Hong Wang

Abstract:

Photo-BJMOSFET (Bipolar Junction Metal-Oxide- Semiconductor Field Effect Transistor) fabricated on SOI film was proposed. ITO film is adopted in the device as gate electrode to reduce light absorption. Depletion region but not inversion region is formed in film by applying gate voltage (but low reverse voltage) to achieve high photo-to-dark-current ratio. Comparisons of photoelectriccharacteristics executed among VGK=0V, 0.3V, 0.6V, 0.9V and 1.0V (reverse voltage VAK is equal to 1.0V for total area of 10×10μm2). The results indicate that the greatest improvement in photo-to-dark-current ratio is achieved up to 2.38 at VGK=0.6V. In addition, photo-BJMOSFET is compatible with CMOS integration due to big input resistance

Keywords: Photo-BJMOSFET, Responsivity, Sensitivity, Spectral response.

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Authors: Kang Chia Yang, Hushairi HJ Zen, Nur Ikhmar@Najemeen Binti Ayob

Abstract:

Power quality is used to describe the degree of consistency of electrical energy expected from generation source to point of use. The term power quality refers to a wide variety of electromagnetic phenomena that characterize the voltage and current at a given time and at a given location on the power system. Power quality problems can be defined as problem that results in failure of customer equipments, which manifests itself as an economic burden to users, or produces negative impacts on the environment. Voltage stability, power factor, harmonics pollution, reactive power and load unbalance are some of the factors that affect the consistency or the quality level. This research proposal proposes to investigate and analyze the causes and effects of power quality to homes and industries in Sarawak. The increasing application of electronics equipment used in the industries and homes has caused a big impact on the power quality. Many electrical devices are now interconnected to the power network and it can be observed that if the power quality of the network is good, then any loads connected to it will run smoothly and efficiently. On the other hand, if the power quality of the network is bad, then loads connected to it will fail or may cause damage to the equipments and reduced its lifetime. The outcome of this research will enable better and novel solutions of poor power quality to small industries and reduce damage of electrical devices and products in the industries.

Keywords: Power quality, power network, voltage dip.

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Authors: O. S. Ebrahim, K. O. Shawky, M. A. Badr, P. K. Jain

Abstract:

This paper describes an efficient; low-cost; high-availability; induction motor (IM) drive system with intelligent supervisory control for water distribution networks including storage tank. To increase the operational efficiency and reduce cost, the IM drive system includes main pumping unit and an auxiliary voltage source inverter (VSI) fed unit. The main unit comprises smart star/delta starter, regenerative fluid clutch, switched VAR compensator, and hysteresis liquid-level controller. Three-state energy saving mode (ESM) is defined at no-load and a logic algorithm is developed for best energetic cost reduction. To reduce voltage sag, the supervisory controller operates the switched VAR compensator upon motor starting. To provide smart star/delta starter at low cost, a method based on current sensing is developed for interlocking, malfunction detection, and life–cycles counting and used to synthesize an improved fuzzy logic (FL) based availability assessment scheme. Furthermore, a recurrent neural network (RNN) full state estimator is proposed to provide sensor fault-tolerant algorithm for the feedback control. The auxiliary unit is working at low flow rates and improves the system efficiency and flexibility for distributed generation during islanding mode. Compared with doubly-fed IM, the proposed one ensures 30% working throughput under main motor/pump fault conditions, higher efficiency, and marginal cost difference. This is critically important in case of water networks. Theoretical analysis, computer simulations, cost study, as well as efficiency evaluation, using timely cascaded energy-conservative systems, are performed on IM experimental setup to demonstrate the validity and effectiveness of the proposed drive and control.

Keywords: Artificial Neural Network, ANN, Availability Assessment, Cloud Computing, Energy Saving, Induction Machine, IM, Supervisory Control, Fuzzy Logic, FL, Pumped Storage.

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Authors: Kejun Zhuang, Hailong Zhu

Abstract:

In this paper, stability and Hopf bifurcation analysis of a novel hyperchaotic system are investigated. Four feedback control strategies, the linear feedback control method, enhancing feedback control method, speed feedback control method and delayed feedback control method, are used to control the hyperchaotic attractor to unstable equilibrium. Moreover numerical simulations are given to verify the theoretical results.

Keywords: Feedback control, Hopf bifurcation, hyperchaotic system, stability.

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Authors: A. Izadbakhsh, M. M. Fateh

Abstract:

A model-free robust control (MFRC) approach is proposed for position control of robot manipulators in the state space. The control approach is verified analytically to be robust subject to uncertainties including external disturbances, unmodeled dynamics, and parametric uncertainties. There is a high flexibility to work on different systems including actuators by the use of the proposed control approach. The proposed control approach can guarantee the robustness of control system. A PUMA 560 robot driven by geared permanent magnet dc motors is simulated. The simulation results show a satisfactory performance for control system under technical specifications. KeywordsModel-free, robust control, position control, PUMA 560.

Keywords: Model-free, robust control, position control, PUMA 560.

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Authors: P.K. Sharma, B. Bhargava, S. Akashe

Abstract:

Power dissipation due to leakage current in the digital circuits is a biggest factor which is considered specially while designing nanoscale circuits. This paper is exploring the ideas of reducing leakage current in static CMOS circuits by stacking the transistors in increasing numbers. Clearly it means that the stacking of OFF transistors in large numbers result a significant reduction in power dissipation. Increase in source voltage of NMOS transistor minimizes the leakage current. Thus stacking technique makes circuit with minimum power dissipation losses due to leakage current. Also some of digital circuits such as full adder, D flip flop and 6T SRAM have been simulated in this paper, with the application of reduction technique on ‘cadence virtuoso tool’ using specter at 45nm technology with supply voltage 0.7V.

Keywords: Stack, 6T SRAM cell, low power, threshold voltage

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Authors: M. Lenzhofer, D. Holzmann, A. Tortschanoff

Abstract:

In this paper we present a new multichannel high voltage driver box to connect up to six MOEMS mirror devices to it that have resonant and also quasistatically driven actuating electrodes. It is possible to drive all resonant axes synchronously while the amplitude of them can individually be controlled by separate microcontrollers that also operate the quasistatic axes. Circuit simulations are compared with the measurements done on the real system and also show the robust driving performance of a MOEMS mirror.

Keywords: MOEMS, scanner mirror, electrostatic driver.

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Authors: W. J. Stępniowski, W. Florkiewicz, M. Norek, M. Michalska-Domańska, E. Kościuczyk, T. Czujko

Abstract:

In this paper, two options of anodic alumina barrier layer thinning have been demonstrated. The approaches varied with the duration of the voltage step. It was found that too long step of the barrier layer thinning process leads to chemical etching of the nanopores on their top. At the bottoms pores are not fully opened what is disadvantageous for further applications in nanofabrication. On the other hand, while the duration of the voltage step is controlled by the current density (value of the current density cannot exceed 75% of the value recorded during previous voltage step) the pores are fully opened. However, pores at the bottom obtained with this procedure have smaller diameter, nevertheless this procedure provides electric contact between the bare aluminum (substrate) and electrolyte, what is suitable for template assisted electrodeposition, one of the most cost-efficient synthesis method in nanotechnology.

Keywords: Anodic aluminum oxide, anodization, barrier layer thinning, nanopores.

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