Search results for: plasma parameters.

Authors: Basudev Ghosh, Sailendranath Paul, Sreyasi Banerjee

Abstract:

Using quantum hydrodynamical (QHD) model the linear dispersion relation for the electron plasma waves propagating in a cylindrical waveguide filled with a dense plasma containing streaming electron, hole and stationary charged dust particles has been derived. It is shown that the effect of finite boundary and stream velocity of electrons and holes make some of the possible modes of propagation linearly unstable. The growth rate of this instability is shown to depend significantly on different plasma parameters.

Keywords: Electron Plasma wave, Quantum plasma, Quantum Hydrodynamical model.

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Authors: A. N. Dagang, E. I. Ismail, Z. Zakaria

Abstract:

This paper presents the analysis on the performance of monopole antenna with fluorescent tubes. In this research, the simulation and experimental approach is conducted. The fluorescent tube with different length and size is designed using Computer Simulation Technology (CST) software and the characteristics of antenna parameter are simulated throughout the software. CST was used to simulate antenna parameters such as return loss, resonant frequency, gain and directivity. Vector Network Analyzer (VNA) was used to measure the return loss of plasma antenna in order to validate the simulation results. In the simulation and experiment, the supply frequency is set starting from 1 GHz to 10 GHz. The results show that the return loss of plasma antenna changes when size of fluorescent tubes is varied, correspond to the different plasma properties. It shows that different values of plasma properties such as plasma frequency and collision frequency gives difference result of return loss, gain and directivity. For the gain, the values range from 2.14 dB to 2.36 dB. The return loss of plasma antenna offers higher value range from -22.187 dB to -32.903 dB. The higher the values of plasma frequency and collision frequency, the higher return loss can be obtained. The values obtained are comparative to the conventional type of metal antenna.

Keywords: Plasma antenna, fluorescent tube, computer simulation technology, plasma parameters.

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Authors: M.I.S. Ismail, Z. Taha

Abstract:

In this paper, the experimental design of using the Taguchi method is employed to optimize the processing parameters in the plasma arc surface hardening process. The processing parameters evaluated are arc current, scanning velocity and carbon content of steel. In addition, other significant effects such as the relation between processing parameters are also investigated. An orthogonal array, signal-to-noise (S/N) ratio and analysis of variance (ANOVA) are employed to investigate the effects of these processing parameters. Through this study, not only the hardened depth increased and surface roughness improved, but also the parameters that significantly affect the hardening performance are identified. Experimental results are provided to verify the effectiveness of this approach.

Keywords: Plasma arc, hardened depth, surface roughness, Taguchi method, optimization.

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Authors: T. Zlámal, J. Petrů, M. Pagáč, P. Krajkovič

Abstract:

For the required function of components with the thermal spray coating, it is necessary to perform additional machining of the coated surface. The paper deals with assessing the surface integrity of Metco 2042, a plasma sprayed coating, after its machining. The selected plasma sprayed coating serves as an abradable sealing coating in a jet engine. Therefore, the spray and its surface must meet high quality and functional requirements. Plasma sprayed coatings are characterized by lamellar structure, which requires a special approach to their machining. Therefore, the experimental part involves the set-up of special cutting tools and cutting parameters under which the applied coating was machined. For the assessment of suitably set machining parameters, selected parameters of surface integrity were measured and evaluated during the experiment. To determine the size of surface irregularities and the effect of the selected machining technology on the sprayed coating surface, the surface roughness parameters Ra and Rz were measured. Furthermore, the measurement of sprayed coating surface hardness by the HR 15 Y method before and after machining process was used to determine the surface strengthening. The changes of strengthening were detected after the machining. The impact of chosen cutting parameters on the surface roughness after the machining was not proven.

Keywords: Machining, plasma sprayed coating, surface integrity, strengthening.

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Authors: Tian Kai, Yang Sheng-sheng, Li De-tian, Miao Yu-jun, Xue Yu-xiong Wang Yi, Yan Ze-dong, Ma Ya-li, ZHuang Jian-hong

Abstract:

The charge-exchange xenon (CEX) ion generated by ion thruster can backflow to the surface of spacecraft and threaten to the safety of spacecraft operation. In order to evaluate the effects of the induced plasma environment in backflow regions on the spacecraft, we designed a spherical single Langmuir probe of 5.8cm in diameter for measuring low-density plasma parameters in backflow region of ion thruster. In practice, the tests are performed in a two-dimensional array (40cm×60cm) composed of 20 sites. The experiment results illustrate that the electron temperature ranges from 3.71eV to 3.96eV, with the mean value of 3.82eV and the standard deviation of 0.064eV. The electron density ranges from 8.30×1012/m3 to 1.66×1013/m3, with the mean value of 1.30×1013/m3 and the standard deviation of 2.15×1012/m3. All data is analyzed according to the “ideal" plasma conditions of Maxwellian distributions.

Keywords: Langmuir Probe, Plasma parameters, Ion thruster, Backflow region.

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Authors: Sahil Sharma, Mukesh Gupta, Raj Kumar, N. S Bindra

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This paper presents an experimental investigation on the optimization and the effect of the cutting parameters on Material Removal Rate (MRR) in Plasma Arc Cutting (PAC) of EN-45A Material using Taguchi L ₁₆ orthogonal array method. Four process variables viz. cutting speed, current, stand-off-distance and plasma gas pressure have been considered for this experimental work. Analysis of variance (ANOVA) has been performed to get the percentage contribution of each process parameter for the response variable i.e. MRR. Based on ANOVA, it has been observed that the cutting speed, current and the plasma gas pressure are the major influencing factors that affect the response variable. Confirmation test based on optimal setting shows the better agreement with the predicted values.

Keywords: Analysis of variance, Material removal rate, plasma arc cutting, Taguchi method.

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Authors: Swarniv Chandra, Basudev Ghosh

Abstract:

Using the quantum hydrodynamic (QHD) model for quantum plasma at finite temperature the modulational instability of electron plasma waves is investigated by deriving a nonlinear Schrodinger equation. It was found that the electron degeneracy parameter significantly affects the linear and nonlinear properties of electron plasma waves in quantum plasma.

Keywords: Amplitude Modulation, Electron Plasma Waves, Finite Temperature Model, Modulational Instability, Quantum Plasma.

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Authors: Basudev Ghosh, Sreyasi Banerjee

Abstract:

Using pseudo potential method arbitrary amplitude ion-acoustic solitary waves have been theoretically studied in a collisionless plasma consisting of warm drifting positive ions, Boltzmann positrons and nonthermal electrons. Ion-acoustic solitary wave solutions have been obtained and the dependence of the solitary wave profile on different plasma parameters has been studied numerically. Lower and higher order compressive and rarefactive solitary waves are observed in presence of positrons, nonthermal electrons, ion drift velocity and finite ion temperature. Inclusion of higher order nonlinearity is shown to have significant correction to the solitary wave profile for the same values of plasma parameters.

Keywords: Ion-acoustic waves, Nonthermal electrons, Sagdeev potential, Solitary waves.

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Authors: Swarniv Chandra, Basudev Ghosh

Abstract:

Nonlinear solitary structures of electron plasma waves have been investigated by using nonlinear quantum fluid equations for electrons with an arbitrary temperature. It is shown that the electron degeneracy parameter has significant effects on the linear and nonlinear properties of electron plasma waves. Depending on its value both compressive and rarefactive solitons can be excited in the model plasma under consideration.

Keywords: Electron Plasma Waves, Finite Temperature Model, Modulational Instability, Quantum Plasma, Solitary structure

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Authors: A. Tamošiūnas, P. Valatkevičius, V. Grigaitiene, V. Valinčius

Abstract:

The atmospheric pressure plasma torch with a direct current arc discharge stabilized by water vapor vortex was experimentally investigated. Overheated up to 450K water vapor was used as plasma forming gas. Plasma torch design is one of the most important factors leading to a stable operation of the device. The electrical and thermal characteristics of the plasma torch were determined during the experimental investigations. The design and the basic characteristics of the water vapor plasma torch are presented in the paper. Plasma torches with the electric arc stabilized by water vapor vortex provide special performance characteristics in some plasma processing applications such as thermal plasma neutralization and destruction of organic wastes enabling to extract high caloric value synthesis gas as by-product of the process. Syngas could be used as a surrogate fuel partly replacing the dependence on the fossil fuels or used as a feedstock for hydrogen, methanol production.

Keywords: Arc discharge, atmospheric pressure thermal plasma, plasma torch, water vapor.

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Authors: M. Khoshtinat, N. A. S. Amin, I. Noshadi

Abstract:

Direct conversion of methane to methanol by partial oxidation in a thermal reactor has a poor yield of about 2% which is less than the expected economical yield of about 10%. Conventional thermal catalytic reactors have been proposed to be superseded by plasma reactors as a promising approach, due to strength of the electrical energy which can break C-H bonds of methane. Among the plasma techniques, non-thermal dielectric barrier discharge (DBD) plasma chemical process is one of the most future promising technologies in synthesizing methanol. The purpose of this paper is presenting a brief review of CH4 oxidation with O2 in DBD plasma reactors based on the recent investigations. For this reason, the effect of various parameters of reactor configuration, feed ratio, applied voltage, residence time (gas flow rate), type of applied catalyst, pressure and reactor wall temperature on methane conversion and methanol selectivity are discussed.

Keywords: Dielectric barrier discharge, methane, methanol, partial oxidation, Plasma.

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Authors: Afshin Moradi, Mohammad Hosain Teimourpour

Abstract:

We derive simple sets of equations to describe the microwave response of a thin film of magnetized hydrogen plasma in the presence of carbon nanotubes, which were grown by ironcatalyzed high-pressure disproportionation (HiPco). By considering the interference effects due to multiple reflections between thin plasma film interfaces, we present the effects of the continuously changing external magnetic field and plasma parameters on the reflected power, absorbed power, and transmitted power in the system. The simulation results show that the interference effects play an important role in the reflectance, transmittance and absorptance of microwave radiation at the magnetized plasma slab. As a consequence, the interference effects lead to a sinusoidal variation of the reflected intensity and can greatly reduce the amount of reflection power, but the absorption power increases.

Keywords:

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Authors: Ma Ya-li, Tang Fu-jun, Xue Yu-xiong, Chen Yi-feng, Gao Xin, Wang Yi, Tian Kai, Yan Ze-dong

Abstract:

Plasma plume will be produced and arrive at spacecraft when the electric thruster operates on orbit. It-s important to characterize the thruster plasma parameters because the plume has significant effects or hazards on spacecraft sub-systems and parts. Through the ground test data of the desired parameters, the major characteristics of the thruster plume will be achieved. Also it is very important for optimizing design of Ion thruster. Retarding Potential Analyzer (RPA) is an effective instrument for plasma ion energy per unit charge distribution measurement. Special RPA should be designed according to certain plume plasma parameters range and feature. In this paper, major principles usable for good RPA design are discussed carefully. Conform to these principles, a four-grid planar electrostatic energy analyzer RPA was designed to avoid false data, and details were discussed including construction, materials, aperture diameter and so on. At the same time, it was designed more suitable for credible and long-duration measurements in the laboratory. In the end, RPA measurement results in the laboratory were given and discussed.

Keywords: Thruster plume ion energy distributions, retarding potential analyzer, ground test.

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Authors: Magda Bădescu, Daniela Jitaru, C.Grigoraş, L.Bădescu, I. Topala, Manuela Ciocoiu

Abstract:

The purpose of our study was to compare spontaneous re-epithelisation characteristics versus assisted re-epithelisation. In order to assess re-epithelisation of the injured skin, we have imagined and designed a burn wound model on Wistar rat skin. Our aim was to create standardised, easy reproducible and quantifiable skin lesions involving entire epidermis and superficial dermis. We then have applied the above mentioned therapeutic strategies to compare regeneration of epidermis and dermis, local and systemic parameter changes in different conditions. We have enhanced the reepithelisation process under a moist atmosphere of a polyurethane wound dress modified with helium non-thermal plasma, and with the aid of direct cold-plasma treatment respectively. We have followed systemic parameters change: hematologic and biochemical parameters, and local features: oxidative stress markers and histology of skin in the above mentioned conditions. Re-epithelisation is just a part of the skin regeneration process, which recruits cellular components, with the aid of epidermal and dermal interaction via signal molecules.

Keywords: Plasma medicine, re-epithelisation and tissue regeneration

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Authors: Mohamed Fawzi Mahboub, Mourad Djebli

Abstract:

The expansion mechanism of a partially ionized plasma produced by laser interaction with solid target (copper) is studied. For this purpose we use a hydrodynamical model which includes a source term combined with Saha's equation. The obtained self-similar solution in the limit of quasi-neutrality shows that the expansion, at the earlier stage, is driven by the combination of thermal pressure and electrostatic potential. They are of the same magnitude. The initial ionized fraction and the temperature are the leading parameters of the expanding profiles,

Keywords: expansion, quasi-neutral, laser-ablated plasma, self- similar.

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Authors: B. Ghosh, H. Sahoo, K. K. Mondal

Abstract:

Propagation of arbitrary amplitude nonlinear Alfven waves has been investigated in low but finite β electron-positron-ion plasma including full ion dynamics. Using Sagdeev pseudopotential method an energy integral equation has been derived. The Sagdeev potential has been calculated for different plasma parameters and it has been shown that inclusion of ion parallel motion along the magnetic field changes the nature of slow shear Alfven wave solitons from dip type to hump type. The effects of positron concentration, plasma-β and obliqueness of the wave propagation on the solitary wave structure have also been examined.

Keywords: Alfven waves, Sagdeev potential, Solitary waves.

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Authors: I. Kulyk, M. Stefan

Abstract:

Atmospheric plasma is emerging as a promising technology for many industrial sectors, because of its ecological and economic advantages respect to the traditional production processes. For textile industry, atmospheric plasma is becoming a valid alternative to the conventional wet processes, but the plasma machines realized so far do not allow the treatment of fibrous mechanically weak material. Novel atmospheric plasma machine for industrial applications, developed by VenetoNanotech SCpA in collaboration with Italian producer of corona equipment ME.RO SpA is presented. The main feature of this pre-industrial scale machine is the possibility of the inline plasma treatment of delicate fibrous substrates such as fibre sleeves, for example wool tops, cotton fibres, polymeric tows, mineral fibers and so on, avoiding burnings and disruption of the faint materials.

Keywords: Atmospheric plasma, industrial machine, fibrous materials.

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Authors: Arunrungrusmi S, Chaokamnerd W , Tanitteerapan T , Mungkung N., Yuji T.

Abstract:

This research aimed to develop plasma system used in air conditioners. This developed plasma system could be installed in the air conditioners - all split type. The quality of air could be improved to be equal to present plasma system. Development processes were as follows: 1) to study the plasma system used in the air conditioners, 2) to design a plasma generator, 3) to develop the plasma generator, and 4) to test its performance in many types of the air conditioners. This plasma system was developed by AC high voltage – 14 kv with a frequency of 50 kHz. Carbon was a conductor to generate arc in air purifier system. The research was tested by installing the plasma generator in the air conditioners - wall type. Whereas, there were 3 types of installations: air flow out, air flow in, and room center. The result of the plasma generator installed in the air conditioners, split type, revealed that the air flow out installation provided the highest average of o-zone at 223 mg/h. This type of installation provided the highest efficiency of air quality improvement. Moreover, the air flow in installation and the room center installation provided the average of the o-zone at 163 mg/h and 64 mg/h, respectively.

Keywords: Air Conditioner, Plasma generator, High voltage, Optimization, Installation position.

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Authors: Emil G. Ioanid, Viorica Frunză, Dorina Rusu, Ana Maria Vlad, Catalin Tanase, Simona Dunca

Abstract:

The application of cold Radio-Frequency (RF) plasma in the conservation of cultural heritage became important in the last decades due to the positive results obtained in decontamination treatments. This paper presents an equipment especially designed for cold RF plasma application on paper documents, developed within a research project. The equipment consists in two modules: the first one is designed for decontamination and cleaning treatments of any type of paper supports, while the second one can be used for coating friable papers with adequate polymers, for protection purposes. All these operations are carried out in cold radio-frequency plasma, working in gaseous nitrogen, at low pressure. In order to optimize the equipment parameters ancient paper samples infested with microorganisms have been treated in nitrogen plasma and the decontamination effects, as well as changes in surface properties (color, pH) were assessed. The microbiological analysis revealed complete decontamination at 6 minutes treatment duration; only minor modifications of the surface pH were found and the colorimetric analysis showed a slight yellowing of the support.

Keywords: Cultural heritage, nitrogen plasma, paper support.

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Authors: C. W. Kan, H. F. Cheung, Y. S. Lee

Abstract:

This study examines the results of colour fading of cotton fabric by plasma-induced ozone treatment, with an aim to provide learning materials for fashion designers when designing colour fading effects in fashion products. Cotton knitted fabrics were dyed with red reactive dye with a colour depth of 1.5% and were subjected to ozone generated by a commercially available plasma machine for colour fading. The plasma-induced ozone treatment was conducted with different parameters: (i) air concentration = 10%, 30%, 50% and 70%; (ii) water content in fabric = 35% and 45%, and (iii) treatment time = 10 minutes, 20 minutes and 30 minutes. Finally, the colour properties of the plasma–induced ozone treated fabric were measured by spectrophotometer under illuminant D₆₅ to obtain the CIE L*, CIE a* and CIE b* values.

Keywords: Learning materials, colour fading, colour properties, fashion products.

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Authors: Lloyd G. Allred

Abstract:

The distribution of velocities of particles in plasma is a well understood discipline of plasma physics. Boltzmann’s law and the Maxwell-Boltzmann distribution describe the distribution of velocity of a particle in plasma as a function of mass and temperature. Particles with the same mass tend to have the same velocity. By expressing the same law in terms of energy alone, the author obtains a distribution independent of mass. In summary, for particles in plasma, the energies tend to equalize, independent of the masses of the individual particles. For high-energy plasma, the original law predicts velocities greater than the speed of light. If one uses Einstein’s formula for energy (E=mc²), then a relativistic correction is not required.

Keywords: Cosmology, EMP, Euclidean, plasma physics, relativity.

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Authors: Babajide O. Ogungbesan, Rajneesh Kumar, Mohamed Sassi

Abstract:

Hydrogen sulfide (H2S) is a very toxic gas that is produced in very large quantities in the oil and gas industry. It cannot be flared to the atmosphere and Claus process based gas plants are used to recover the sulfur and convert the hydrogen to water. In this paper, we present optical characterization of an atmospheric pressure microwave plasma torch for H2S dissociation into hydrogen and sulfur. The torch is operated at 2.45 GHz with power up to 2 kW. Three different gases can simultaneously be injected in the plasma torch. Visual imaging and optical emission spectroscopy are used to characterize the plasma for varying gas flow rates and microwave power. The plasma length, emission spectra and temperature are presented. The obtained experimental results validate our earlier published simulation results of plasma torch.

Keywords: Atmospheric pressure microwave plasma, gas dissociation, optical emission spectroscopy.

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Authors: Thanat Rungsirathana, Vorathit Rungsetthaphat, Shogo Azuma, Nobuhiro Harada

Abstract:

This paper presents a 2-D hydrodynamic model of the ablated plasma when irradiating a 50 μm Al solid target with a single pulsed ion beam. The Lagrange method is used to solve the moving fluid for the ablated plasma production and formation mechanism. In the calculations, a 10-ns-single-pulsed of ion beam with a total energy density of 120 J/cm2, is used. The results show that the ablated plasma was formed after 2 ns of ion beam irradiation and it started to expand right after 4-6 ns. In addition, the 2-D model give a better understanding of pulsed ion beam-solid target ablated plasma production and expansion process clearer.

Keywords: Ablated plasma, pulse ion beam, thin foil solid target, two-dimensional model

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Authors: R. Bhuvenesh, M.H. Norizaman, M.S. Abdul Manan

Abstract:

Industrial surveys shows that manufacturing companies define the qualities of thermal removing process based on the dimension and physical appearance of the cutting material surface. Therefore, the roughness of the surface area of the material cut by the plasma arc cutting process and the rate of the removed material by the manual plasma arc cutting machine was importantly considered. Plasma arc cutter Selco Genesis 90 was used to cut Standard AISI 1017 Steel of 200 mm x100 mm x 6 mm manually based on the selected parameters setting. The material removal rate (MRR) was measured by determining the weight of the specimens before and after the cutting process. The surface roughness (SR) analysis was conducted using Mitutoyo CS-3100 to determine the average roughness value (Ra). Taguchi method was utilized to achieve optimum condition for both outputs studied. The microstructure analysis in the region of the cutting surface is performed using SEM. The results reveal that the SR values are inversely proportional to the MRR values. The quality of the surface roughness depends on the dross peak that occurred after the cutting process.

Keywords: Material removal rate, plasma arc cutting, surface roughness, Taguchi method

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Authors: Mashayekh Amir Shahriar, Akhlaghi Morteza, Rajaee Hajar, Khani Mohammad Reza, Shokri Babak

Abstract:

A new and novel approach in medicine is the use of cold plasma for various applications such as sterilization blood coagulation and cancer cell treatment. In this paper a pin-to-hole plasma jet suitable for biological applications is investigated and characterized and the possibility and feasibility of cancer cell treatment is evaluated. The characterization includes power consumption via Lissajous method, thermal behavior of plasma using Infra-red camera as a novel method, Optical Emission Spectroscopy (OES) to determine the species that are generated. Treatment of leukemia cancer cells is also implemented and MTT assay is used to evaluate viability.

Keywords: Atmospheric Pressure Plasma Jet (APPJ), Plasma Medicine, Cancer cell treatment, leukemia.

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Authors: Djemai Bara, Mohamed Faouzi Mahboub, Djamila Bennaceur-Doumaz

Abstract:

In this work, the role of the preformed plasma created on the front face of a target, irradiated by a high intensity short pulse laser, in the framework of ion acceleration process, modeled by Target Normal Sheath Acceleration (TNSA) mechanism, is studied. This plasma is composed of cold ions governed by fluid equations and non-thermal & trapped with densities represented by a "Cairns-Gurevich" equation. The self-similar solution of the equations shows that electronic trapping and the presence of non-thermal electrons in the pre-plasma are both responsible in ion acceleration as long as the proportion of energetic electrons is not too high. In the case where the majority of electrons are energetic, the electrons are accelerated directly by the ponderomotive force of the laser without the intermediate of an accelerating plasma wave.

Keywords: Cairns-Gurevich Equation, ion acceleration, plasma expansion, pre-plasma.

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Authors: Swarniv Chandra, Parthasona Maji, Basudev Ghosh

Abstract:

The nonlinear self-interaction of an electrostatic surface wave on a semibounded quantum plasma with relativistic degeneracy is investigated by using quantum hydrodynamic (QHD) model and the Poisson’s equation with appropriate boundary conditions. It is shown that a part of the second harmonic generated through self-interaction does not have a true surface wave character but propagates obliquely away from the plasma-vacuum interface into the bulk of plasma.

Keywords: Harmonic Generation, Quantum Plasma, Quantum Hydrodynamic Model, Relativistic Degeneracy, Surface waves.

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Authors: Abdel Majid Kassir, Joël Sonnard, Ludovic Roulin, Martine Baudin, Gilles Courret, Wolfram Manuel Brück

Abstract:

Motivated by the current COVID-19 pandemic and the need to find alternative methods to contain and battle it, the purpose of this innovative project is to conceive a disinfection module equipped with a cold atmospheric plasma source. Such a plasma source was developed for a potential integration into pulsed air hand dryers. This type of plasma is known for its ability to generate reactive oxygen and nitrogen species that initiate bio-molecular reactions involved in bacterial and viral deactivation mechanisms. This study shows how additive manufacturing helped accelerate the prototyping of a nozzle allowing the preservation of the plasma flow from circulation cells and external interferences in the discharge’s surrounding.

Keywords: Cold atmospheric plasma, hand disinfection, hand sanitization, bacterial and viral deactivation, plasma chemistry.

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Authors: A. Greco, N. Mammone, F.C. Morabito, M.Versaci

Abstract:

This paper is mainly concerned with the application of a novel technique of data interpretation to the characterization and classification of measurements of plasma columns in Tokamak reactors for nuclear fusion applications. The proposed method exploits several concepts derived from soft computing theory. In particular, Artifical Neural Networks have been exploited to classify magnetic variables useful to determine shape and position of the plasma with a reduced computational complexity. The proposed technique is used to analyze simulated databases of plasma equilibria based on ITER geometry configuration. As well as demonstrating the successful recovery of scalar equilibrium parameters, we show that the technique can yield practical advantages compares with earlier methods.

Keywords: Tokamak, sensors, artificial neural network.

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Authors: G. Zuppardi, F. Romano

Abstract:

Technology of thin film deposition is of interest in many engineering fields, from electronic manufacturing to corrosion protective coating. A typical deposition process, like that developed at the University of Eindhoven, considers the deposition of a thin, amorphous film of C:H or of Si:H on the substrate, using the Expanding Thermal arc Plasma technique. In this paper a computing procedure is proposed to simulate the flow field in a deposition chamber similar to that at the University of Eindhoven and a sensitivity analysis is carried out in terms of: precursor mass flow rate, electrical power, supplied to the torch and fluid-dynamic characteristics of the plasma jet, using different nozzles. To this purpose a deposition chamber similar in shape, dimensions and operating parameters to the above mentioned chamber is considered. Furthermore, a method is proposed for a very preliminary evaluation of the film thickness distribution on the substrate. The computing procedure relies on two codes working in tandem; the output from the first code is the input to the second one. The first code simulates the flow field in the torch, where Argon is ionized according to the Saha-s equation, and in the nozzle. The second code simulates the flow field in the chamber. Due to high rarefaction level, this is a (commercial) Direct Simulation Monte Carlo code. Gas is a mixture of 21 chemical species and 24 chemical reactions from Argon plasma and Acetylene are implemented in both codes. The effects of the above mentioned operating parameters are evaluated and discussed by 2-D maps and profiles of some important thermo-fluid-dynamic parameters, as per Mach number, velocity and temperature. Intensity, position and extension of the shock wave are evaluated and the influence of the above mentioned test conditions on the film thickness and uniformity of distribution are also evaluated.

Keywords: Deposition chamber, Direct Simulation Mote Carlo method (DSMC), Plasma chemistry, Rarefied gas dynamics.

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