Search results for: Array sensors

Authors: Kasun Karunanayaka, Sanath Siriwardana, Chamari Edirisinghe, Ryohei Nakatsu, PonnampalamGopalakrishnakone

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In this paper, we are presenting a new type of pointing interface for computers which provides mouse functionalities with near surface haptic feedback. Further, it can be configured as a haptic display where users may feel the basic geometrical shapes in the GUI by moving the finger on top of the device surface. These functionalities are achieved by tracking three dimensional positions of the neodymium magnet using Hall Effect sensors grid and generating like polarity haptic feedback using an electromagnet array. This interface brings the haptic sensations to the 3D space where previously it is felt only on top of the buttons of the haptic mouse implementations.

Keywords: Pointing interface, near surface haptic feedback, tactile display, tangible user interface.

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Authors: Jayesh K., Ganesh T., Suganthi D., Mohan R., Rakesh C. J., Sarojkumar D. M., Jacob S. J.

Abstract:

Prior to the use of detectors, characteristics comparison study was performed and baseline established. In patient specific QA, the portal dosimetry mean values of area gamma, average gamma and maximum gamma were 1.02, 0.31 and 1.31 with standard deviation of 0.33, 0.03 and 0.14 for IMRT and the corresponding values were 1.58, 0.48 and 1.73 with standard deviation of 0.31, 0.06 and 0.66 for VMAT. With ImatriXX 2-D array system, on an average 99.35% of the pixels passed the criteria of 3%-3 mm gamma with standard deviation of 0.24 for dynamic IMRT. For VMAT, the average value was 98.16% with a standard deviation of 0.86. The results showed that both the systems can be used in patient specific QA measurements for IMRT and VMAT. The values obtained with the portal dosimetry system were found to be relatively more consistent compared to those obtained with ImatriXX 2-D array system.

Keywords: Gamma, IMRT, QA, TPS, VMAT.

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Authors: Tarek Mohammad

Abstract:

The amplitude response of infrared (IR) sensors depends on the reflectance properties of the target. Therefore, in order to use IR sensor for measuring distances accurately, prior knowledge of the surface must be known. This paper describes the Phong Illumination Model for determining the properties of a surface and subsequently calculating the distance to the surface. The angular position of the IR sensor is computed as normal to the surface for simplifying the calculation. Ultrasonic (US) sensor can provide the initial information on distance to obtain the parameters for this method. In addition, the experimental results obtained by using LabView are discussed. More care should be taken when placing the objects from the sensors during acquiring data since the small change in angle could show very different distance than the actual one. Since stereo camera vision systems do not perform well under some environmental conditions such as plain wall, glass surfaces, or poor lighting conditions, the IR and US sensors can be used additionally to improve the overall vision systems of mobile robots.

Keywords: Distance Measurement, Infrared sensor, Surface properties, Ultrasonic sensor.

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Authors: Panhathai Buasri

Abstract:

Hydrogen that used as fuel in fuel cell vehicles can be produced from renewable sources such as wind, solar, and hydro technologies. PV-electrolyzer is one of the promising methods to produce hydrogen with zero pollution emission. Hydrogen production from a PV-electrolyzer system depends on the efficiency of the electrolyzer and photovoltaic array, and sun irradiance at that site. In this study, the amount of hydrogen is obtained using mathematical equations for difference driving distance and sun peak hours. The results show that the minimum of 99 PV modules are used to generate 1.75 kgH2 per day for two vehicles.

Keywords: About four key words or phrases in alphabetical order, separated by commas.

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Authors: N. P. Waweru, D. B. O. Konditi, P. K. Langat

Abstract:

Direction of Arrival estimation refers to defining a mathematical function called a pseudospectrum that gives an indication of the angle a signal is impinging on the antenna array. This estimation is an efficient method of improving the quality of service in a communication system by focusing the reception and transmission only in the estimated direction thereby increasing fidelity with a provision to suppress interferers. This improvement is largely dependent on the performance of the algorithm employed in the estimation. Many DOA algorithms exists amongst which are MUSIC, Root-MUSIC and ESPRIT. In this paper, performance of these three algorithms is analyzed in terms of complexity, accuracy as assessed and characterized by the CRLB and memory requirements in various environments and array sizes. It is found that the three algorithms are high resolution and dependent on the operating environment and the array size. 

Keywords: Direction of Arrival, Autocorrelation matrix, Eigenvalue decomposition, MUSIC, ESPRIT, CRLB.

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Authors: Kariyappa B. S., Hariprasad S. A., R. Nagaraj

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In this paper, a new method of controlling position of AC Servomotor using Field Programmable Gate Array (FPGA). FPGA controller is used to generate direction and the number of pulses required to rotate for a given angle. Pulses are sent as a square wave, the number of pulses determines the angle of rotation and frequency of square wave determines the speed of rotation. The proposed control scheme has been realized using XILINX FPGA SPARTAN XC3S400 and tested using MUMA012PIS model Alternating Current (AC) servomotor. Experimental results show that the position of the AC Servo motor can be controlled effectively. KeywordsAlternating Current (AC), Field Programmable Gate Array (FPGA), Liquid Crystal Display (LCD).

Keywords: Alternating Current (AC), Field Programmable Gate Array (FPGA), Liquid Crystal Display (LCD).

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Authors: Martin Doran, Roy Sterritt, George Wilkie

Abstract:

NASA, ESA, and NSSC space agencies have plans to put planetary rovers on Mars in 2020. For these future planetary rovers to succeed, they will heavily depend on sensors to detect obstacles. This will also become of vital importance in the future, if rovers become less dependent on commands received from earth-based control and more dependent on self-configuration and self-decision making. These planetary rovers will face harsh environments and the possibility of hardware failure is high, as seen in missions from the past. In this paper, we focus on using Autonomic principles where self-healing, self-optimization, and self-adaption are explored using the MAPE-K model and expanding this model to encapsulate the attributes such as Awareness, Analysis, and Adjustment (AAA-3). In the experimentation, a Pioneer P3-DX research robot is used to simulate a planetary rover. The sonar sensors on the P3-DX robot are used to simulate the sensors on a planetary rover (even though in reality, sonar sensors cannot operate in a vacuum). Experiments using the P3-DX robot focus on how our software system can be adapted with the loss of sonar sensor functionality. The autonomic manager system is responsible for the decision making on how to make use of remaining ‘enabled’ sonars sensors to compensate for those sonar sensors that are ‘disabled’. The key to this research is that the robot can still detect objects even with reduced sonar sensor capability.

Keywords: Autonomic, self-adaption, self-healing, self-optimization.

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Authors: Hong-Wen Hsieh, Shun-Tung Yen

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We theoretically demonstrate modulation of light polarization by a crossed rectangular hole array with asymmetric arm lengths. There are two waveguide modes that can modulate the x- and y- polarized incident waves independently. A specific structure is proposed to convert a left-hand incident wave to a right-hand outgoing wave by transmission.

Keywords: Crossed rectangular hole array, extraordinary optical transmission, polarization modulation.

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Authors: Krzysztof Fujarewicz

Abstract:

This paper presents a predictive model of sensor readings for mobile robot. The model predicts sensor readings for given time horizon based on current sensor readings and velocities of wheels assumed for this horizon. Similar models for such anticipation have been proposed in the literature. The novelty of the model presented in the paper comes from the fact that its structure takes into account physical phenomena and is not just a black box, for example a neural network. From this point of view it may be regarded as a semi-phenomenological model. The model is developed for the Khepera robot, but after certain modifications, it may be applied for any robot with distance sensors such as infrared or ultrasonic sensors.

Keywords: Mobile robot, sensors, prediction, anticipation.

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Authors: S. Bouharati, I. Bouharati, C. Benzidane, F. Alleg, M. Belmahdi

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Sensors possess several properties of physical measures. Whether devices that convert a sensed signal into an electrical signal, chemical sensors and biosensors, thus all these sensors can be considered as an interface between the physical and electrical equipment. The problem is the analysis of the multitudes of saved settings as input variables. However, they do not all have the same level of influence on the outputs. In order to identify the most sensitive parameters, those that can guide users in gathering information on the ground and in the process of model calibration and sensitivity analysis for the effect of each change made. Mathematical models used for processing become very complex. In this paper a fuzzy rule-based system is proposed as a solution for this problem. The system collects the available signals information from sensors. Moreover, the system allows the study of the influence of the various factors that take part in the decision system. Since its inception fuzzy set theory has been regarded as a formalism suitable to deal with the imprecision intrinsic to many problems. At the same time, fuzzy sets allow to use symbolic models. In this study an example was applied for resolving variety of physiological parameters that define human health state. The application system was done for medical diagnosis help. The inputs are the signals expressed the cardiovascular system parameters, blood pressure, Respiratory system paramsystem was done, it will be able to predict the state of patient according any input values.

Keywords: Sensors, Sensivity, fuzzy logic, analysis, physiological parameters, medical diagnosis.

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Authors: S. Pradittara, M. Uthansakul, P. Uthansakul

Abstract:

A concept of switched beam antennas consisting of 2×2 rectangular array spaced by λ/4 accompanied with a null locating has been proposed in the previous work. In this letter, the performance evaluations of its prototype are presented. The benefits of using proposed system have been clearly measured in term of signal quality, throughput and delays. Also, the impact of position shift which mesh router is not located on the expected beam direction has also been investigated.

Keywords: Antenna array, Beamforming, Null steering, WMNs.

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Authors: Nurbanu Guzey, S. Jagannathan

Abstract:

Locating Radio Controlled (RC) devices using their unintended emissions has a great interest considering security concerns. Weak nature of these emissions requires near field localization approach since it is hard to detect these signals in far field region of array. Instead of only angle estimation, near field localization also requires range estimation of the source which makes this method more complicated than far field models. Challenges of locating such devices in a near field region and real time environment are analyzed in this paper. An ESPRIT like near field localization scheme is utilized for both angle and range estimation. 1-D search with symmetric subarrays is provided. Two 7 element uniform linear antenna arrays (ULA) are employed for locating RC source. Experiment results of location estimation for one unintended emitting walkie-talkie for different positions are given.

Keywords: Localization, angle of arrival (AoA), range estimation, array signal processing, ESPRIT, uniform linear array (ULA).

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Authors: Kenji Suyama, Masahiro Oshida, Noboru Owada

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In this paper, an estimation accuracy of multiple moving talker tracking using a microphone array is improved. The tracking can be achieved by the adaptive method in which two algorithms are integrated, namely, the PAST (Projection Approximation Subspace Tracking) algorithm and the IPLS (Interior Point Least Square) algorithm. When either talker begins to speak again after a silent period, an appropriate feasible region for an evaluation function of the IPLS algorithm might not be set. Then, the tracking fails due to the incorrect updating. Therefore, if an increment of the number of active talkers is detected, the feasible region must be reset. Then, a low cost realization is required for the high speed tracking and a high accuracy realization is desired for the precise tracking. In this paper, the directions roughly estimated using the delayed-sum-array method are used for the resetting. Several results of experiments performed in an actual room environment show the effectiveness of the proposed method.

Keywords: moving talkers tracking, microphone array, signal subspace

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Authors: Chiang-Ho Cheng, Hong-Yih Cheng, An-Shik Yang, Tung-Hsun Hsu

Abstract:

This paper reports a novel actuating design that uses the shear deformation of a piezoelectric actuator to deflect a bulge-diaphragm for driving an array microdroplet ejector. In essence, we employed a circular-shaped actuator poled radial direction with remnant polarization normal to the actuating electric field for inducing the piezoelectric shear effect. The array microdroplet ejector consists of a shear type piezoelectric actuator, a vibration plate, two chamber plates, two channel plates and a nozzle plate. The vibration, chamber and nozzle plate components are fabricated using nickel electroforming technology, whereas the channel plate is fabricated by etching of stainless steel. The diaphragm displacement was measured by the laser two-dimensional scanning vibrometer. The ejected droplets of the microejector were also observed via an optic visualization system.

Keywords: Actuator, nozzle, microejector, piezoelectric.

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Authors: Shun-Kai Yang, Kuo-Feng Ssu

Abstract:

Target tracking and localization are important applications in wireless sensor networks. In these applications, sensor nodes collectively monitor and track the movement of a target. They have limited energy supplied by batteries, so energy efficiency is essential for sensor networks. Most existing target tracking protocols need to wake up sensors periodically to perform tracking. Some unnecessary energy waste is thus introduced. In this paper, an energy efficient protocol for target localization is proposed. In order to preserve energy, the protocol fixes the number of sensors for target tracking, but it retains the quality of target localization in an acceptable level. By selecting a set of sensors for target localization, the other sensors can sleep rather than periodically wake up to track the target. Simulation results show that the proposed protocol saves a significant amount of energy and also prolongs the network lifetime.

Keywords: Coverage, energy efficiency, target localization, wireless sensor network.

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Authors: Kai-Chao Yang, Chun-Ming Huang, Chih-Chiao Yang, Chien-Ming Wu

Abstract:

Sensors have been used in various kinds of academic fields and applications. In this article, we propose the idea of modularized sensors that combine multiple sensor modules into a unique sensor. We divide a sensor into several units according to functionalities. Each unit has different sensor modules, which share the same type of connectors and can be serially and arbitrarily connected each other. A user can combine different sensor modules into a sensor platform according to requirements. Compared with current modularized sensors, the proposed sensor platform is highly flexible and reusable. We have implemented the prototype of the proposed sensor platform, and the experimental results show the proposed platform can work correctly.

Keywords: Sensor device, sensor fusion.

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Authors: Lei Qi, Rongxin Yan, Lichen Sun

Abstract:

With the increasing of human space activities, the number of space debris has increased dramatically, and the possibility that spacecrafts on orbit are impacted by space debris is growing. A method is of the vital significance to real-time detect and assess spacecraft damage, determine of gas leak accurately, guarantee the life safety of the astronaut effectively. In this paper, acoustic sensor array is used to detect the acoustic signal which emits from the damage of the spacecraft on orbit. Then, we apply the time difference of arrival and beam forming algorithm to locate the damage and leakage. Finally, the extent of the spacecraft damage is evaluated according to the nonlinear ultrasonic method. The result shows that this method can detect the debris impact and the structural damage, locate the damage position, and identify the damage degree effectively. This method can meet the needs of structural damage detection for the spacecraft in-orbit.

Keywords: Acoustic sensor array, spacecraft, damage assessment, leakage location.

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Authors: Meenakshi Bansal, Iqbal Singh, Parvinder S. Sandhu

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In over deployed sensor networks, one approach to Conserve energy is to keep only a small subset of sensors active at Any instant. For the coverage problems, the monitoring area in a set of points that require sensing, called demand points, and consider that the node coverage area is a circle of range R, where R is the sensing range, If the Distance between a demand point and a sensor node is less than R, the node is able to cover this point. We consider a wireless sensor network consisting of a set of sensors deployed randomly. A point in the monitored area is covered if it is within the sensing range of a sensor. In some applications, when the network is sufficiently dense, area coverage can be approximated by guaranteeing point coverage. In this case, all the points of wireless devices could be used to represent the whole area, and the working sensors are supposed to cover all the sensors. We also introduce Hybrid Algorithm and challenges related to coverage in sensor networks.

Keywords: Wireless sensor networks, network coverage, Energy conservation, Hybrid Algorithms.

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Authors: M. Abdullah-Al-Wadud

Abstract:

Sensor-based Activity Recognition systems usually accounts which sensors have been activated to perform an activity. The system then combines the conditional probabilities of those sensors to represent different activities and takes the decision based on that. However, the information about the sensors which are not activated may also be of great help in deciding which activity has been performed. This paper proposes an approach where the sensory data related to both usage and non-usage of objects are utilized to make the classification of activities. Experimental results also show the promising performance of the proposed method.

Keywords: Naïve Bayesian-based classification, Activity recognition, sensor data, object-usage model.

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Authors: Mbaitiga Zacharie

Abstract:

The objective of the presented work is to implement the Kalman Filter into an application that reduces the influence of the environmental changes over the robot expected to navigate over a terrain of varying friction properties. The Discrete Kalman Filter is used to estimate the robot position, project the estimated current state ahead at time through time update and adjust the projected estimated state by an actual measurement at that time via the measurement update using the data coming from the infrared sensors, ultrasonic sensors and the visual sensor respectively. The navigation test has been performed in a real world environment and has been found to be robust.

Keywords: Kalman filter, sensors fusion, robot navigation.

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Authors: D. Oshinubi, M. Rocznik, K. Dostert

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The need for micromechanical inertial sensors is increasing in future electronic stability control (ESC) and other positioning, navigation and guidance systems. Due to the rising density of sensors in automotive and consumer devices the goal is not only to get high performance, robustness and smaller package sizes, but also to optimize the energy management of the overall sensor system. This paper presents an evaluation concept for a surface micromachined yaw rate sensor. Within this evaluation concept an energy-efficient operation of the drive mode of the yaw rate sensor is enabled. The presented system concept can be realized within a power management subsystem.

Keywords: inertial sensors, micromachined gyros, gyro sensing concepts, power management, FPGA

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Authors: Ko-Shao Chen, Yun Tsao, Chia-Hsuan Tsen, Chien-Chung Chen, Shu-Chuan Liao

Abstract:

Electrospun microtube array membranes (MTAMs) made of PLLA (poly-L-lactic acid) have wide potential applications in tissue engineering. However, their surface hydrophobicity and poor biocompatability have limited their further usage. In this study, the surface of PLLA MTAMs were made hydrophilic by introducing extra functional groups, such as peroxide, via an acetic acid plasma (AAP). UV-graft polymerization of acrylic acid (G-AAc) was then used to produce carboxyl group on MTAMs surface, which bonded covalently with chitosan through EDC / NHS crosslinking agents. To evaluate the effects of the surface modification on PLLA MTAMs, water contact angle (WCA) measurement and cell compatibility tests were carried out. We found that AAP treated electrospun PLLA MTAMs grafted with AAc and, finally, with chitosan immobilized via crosslinking agent, exhibited improved hydrophilic and cell compatibility.

Keywords: Plasma, EDC/NHS, UV grafting, chitosan, microtube array membrane.

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Authors: Carlos Alberto Riveros, Edwin Fabián García, Javier Enrique Rivero

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The measured data obtained from sensors in continuous monitoring of civil structures are mainly used for modal identification and damage detection. Therefore, when modal identification analysis is carried out the quality in the identification of the modes will highly influence the damage detection results. It is also widely recognized that the usefulness of the measured data used for modal identification and damage detection is significantly influenced by the number and locations of sensors. The objective of this study is the numerical implementation of two widely known optimum sensor placement methods in beam-like structures.

Keywords: Optimum sensor placement, structural damage detection, modal identification, beam-like structures.

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Authors: Folorunso Olufemi Ayinde, Mohd Shahrizal Sunar, Sarudin Kari, Dzulkifli Mohamad

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In this paper we discuss the development of an Augmented Reality (AR) - based scientific visualization system prototype that supports identification, localisation, and 3D visualisation of oil leakages sensors datasets. Sensors generates significant amount of multivariate datasets during normal and leak situations. Therefore we have developed a data model to effectively manage such data and enhance the computational support needed for the effective data explorations. A challenge of this approach is to reduce the data inefficiency powered by the disparate, repeated, inconsistent and missing attributes of most available sensors datasets. To handle this challenge, this paper aim to develop an AR-based scientific visualization interface which automatically identifies, localise and visualizes all necessary data relevant to a particularly selected region of interest (ROI) along the virtual pipeline network. Necessary system architectural supports needed as well as the interface requirements for such visualizations are also discussed in this paper.

Keywords: Sensor Leakages Datasets, Augmented Reality, Sensor Data-Model, Scientific Visualization.

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Authors: Julio Manuel de Luis Ruiz, Javier Sedano Cibrián, Rubén Pérez Álvarez, Raúl Pereda García, Felipe Piña García

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Nowadays it is common to resort to aerial photography to carry out the prospection and/or exploration of archaeological sites. In recent years, Unmanned Aerial Vehicles (UAVs) have been applied as the vehicles that carry the sensor. This implies certain advantages, such as the possibility of including low-cost sensors, given that these vehicles can carry the sensor at relatively low altitudes. Due to this, low-cost dual sensors have recently begun to be used. This new equipment can collaborate with classic Digital Elevation Models (DEMs) in the exploration of archaeological sites, but this entails the need for a methodological setting to optimize the acquisition, processing and exploitation of the information provided by low-cost dual sensors. This research focuses on the design of an appropriate workflow to obtain 3D models with low-cost sensors carried on UAVs, both in the RGB and thermal domains. All the foregoing has been applied to the archaeological site of Juliobriga, located in Cantabria (Spain). To this end, a flight with this type of sensors has been planned, developed and analyzed. It has been applied to the archaeological site of Juliobriga (Cantabria, Spain). A strong dependence of the thermal sensor on the GSD, and the capability of this technique to interpret underground materials. This research allows to state that the thermal nature of the site does not provide main information about the site itself, but with combination with other types of information, such as the DEM, the typology of materials, etc., can produce very positive results with respect to the exploration and knowledge of the site. 

Keywords: process optimization, RGB models, thermal models, UAV, workflow

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Authors: Najiya Omar, Hamed Aly, Timothy Little

Abstract:

The optimal size of a photovoltaic (PV) array is considered a critical factor in designing an efficient PV system due to the dependence of the PV cell performance on temperature. A high temperature can lead to voltage losses of solar panels, whereas a low temperature can cause voltage overproduction. There are two possible scenarios of the inverter’s operation in which they are associated with the erroneous calculations of the number of PV panels: 1) If the number of the panels is scant and the temperature is high, the minimum voltage required to operate the inverter will not be reached. As a result, the inverter will shut down. 2) Comparably, if the number of panels is excessive and the temperature is low, the produced voltage will be more than the maximum limit of the inverter which can cause the inverter to get disconnected or even damaged. This article aims to assess theoretical and practical methodologies to calculate size and determine the topology of a PV array. The results are validated by applying an experimental evaluation for a 100 kW Grid-connected PV system for a location in Halifax, Nova Scotia and achieving a satisfactory system performance compared to the previous work done.

Keywords: Sizing PV panels, grid-connected PV, topology of PV array, theoretical and practical methodologies.

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Authors: Barış Can Yalçın

Abstract:

Motion sensors have been commonly used as a valuable component in mechatronic systems, however, many mechatronic designs and applications that need motion sensors cost enormous amount of money, especially high-tech systems. Design of a software for communication protocol between data acquisition card and motion sensor is another issue that has to be solved. This study presents how to design a low cost motion data acquisition setup consisting of MPU 6050 motion sensor (gyro and accelerometer in 3 axes) and Arduino Mega2560 microcontroller. Design parameters are calibration of the sensor, identification and communication between sensor and data acquisition card, interpretation of data collected by the sensor.

Keywords: Calibration of sensors, data acquisition.

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Authors: Ajay Kushwaha, Hemen Kalita, M. Aslam

Abstract:

Post growth annealing of solution grown ZnO nanowire array is performed under controlled oxygen ambience. The role of annealing over surface defects and their consequence on dark/photo-conductivity and photosensitivity of nanowire array is investigated. Surface defect properties are explored using various measurement tools such as contact angle, photoluminescence, Raman spectroscopy and XPS measurements. The contact angle of the NW films reduces due to oxygen annealing and nanowire film surface changes from hydrophobic (96°) to hydrophilic (16°). Raman and XPS spectroscopy reveal that oxygen annealing improves the crystal quality of the nanowire films. The defect band emission intensity (relative to band edge emission, ID/IUV) reduces from 1.3 to 0.2 after annealing at 600 °C at 10 SCCM flow of oxygen. An order enhancement in dark conductivity is observed in O2 annealed samples, while photoconductivity is found to be slightly reduced due to lower concentration of surface related oxygen defects.

Keywords: Zinc Oxide, Surface defects, Photoluminescence, Photoconductivity, Photosensor and Nanowire thin film.

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Authors: Mukul Bandodkar, Virat Chourasia

Abstract:

Visually impaired people find it extremely difficult to acquire basic and vital information necessary for their living. Therefore, they are at a very high risk of being socially excluded as a result of poor access to information. In recent years, several attempts have been made in improving the communication methods for visually impaired people which involve tactile sensation such as finger Braille, manual alphabets and the print on palm method and several other electronic devices. But, there are some problems which arise in such methods such as lack of privacy and lack of compatibility to computer environment. This paper describes a low cost Braille hand glove for blind people using slot sensors and vibration motors with the help of which they can read and write emails, text messages and read e-books. This glove allows the person to type characters based on different Braille combination using six slot sensors. The vibration in six different positions of the glove which matches to the Braille code allows them to read characters.

Keywords: Braille, Braille Hand-Glove, Slot sensors, Vibration motors.

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Authors: Andrew Randles, Ilker Ocak, Cheam Daw Don, Navab Singh, Alex Gu

Abstract:

Nine Degrees of Freedom (9 DOF) systems are already in development in many areas. In this paper, an integrated pressure sensor is proposed that will make use of an already existing monolithic 9 DOF inertial MEMS platform. Capacitive pressure sensors can suffer from limited sensitivity for a given size of membrane. This novel pressure sensor design increases the sensitivity by over 5 times compared to a traditional array of square diaphragms while still fitting within a 2 mm x 2 mm chip and maintaining a fixed static capacitance. The improved design uses one large diaphragm supported by pillars with fixed electrodes placed above the areas of maximum deflection. The design optimization increases the sensitivity from 0.22 fF/kPa to 1.16 fF/kPa. Temperature sensitivity was also examined through simulation.

Keywords: Capacitive pressure sensor, 9 DOF, 10 DOF, sensor, capacitive, inertial measurement unit, IMU, inertial navigation system, INS.

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