Commenced in January 2007
Frequency: Monthly
Edition: International
Paper Count: 30253
Energy-Efficient Sensing Concept for a Micromachined Yaw Rate Sensor

Authors: D. Oshinubi, M. Rocznik, K. Dostert

Abstract:

The need for micromechanical inertial sensors is increasing in future electronic stability control (ESC) and other positioning, navigation and guidance systems. Due to the rising density of sensors in automotive and consumer devices the goal is not only to get high performance, robustness and smaller package sizes, but also to optimize the energy management of the overall sensor system. This paper presents an evaluation concept for a surface micromachined yaw rate sensor. Within this evaluation concept an energy-efficient operation of the drive mode of the yaw rate sensor is enabled. The presented system concept can be realized within a power management subsystem.

Keywords: Power management, FPGA, inertial sensors, micromachined gyros, gyro sensing concepts

Digital Object Identifier (DOI): doi.org/10.5281/zenodo.1061930

Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 1172

References:


[1] A. Lawrence, Modern Inertial Technology, Navigation Guidance and Control, Springer-Verlag New York, 2002
[2] W.M. Macek and D.T.M. Davis, Rotation rate sensing with traveling wave ring lasers, Appl. Phys. Lett. 2, Springer-Verlag New York, 1. Feb. 1963, pp67-68
[3] J. Bernstein, et al., A micromachined comb-drive tuning fork gyroscope, IEEE Micro Electro Mechanical Systems, IEEE Catalog No. 93CH3265- 6, Feb. 1993, pp143-148
[4] M. Palaniapan, R.T. Howe, J. Yasaitis, Integrated surface-micromachined z-axis frame microgyroscope, Electron Devices Meeting, 2002. IEDM -02. Digest. International, Dec. 2002, pp203-206
[5] K. Funk, H. Emmerich, A. Schilp, M. Offenberg, R. Neul, F. L¨armer, A surface micromachined silicon gyroscope using a thick polysilicon layer., Proc., Twelfth IEEE Int. Conf. on Micro Electro Mechanical Systems (MEMS -99), Jan. 17-21, Orlando, Fla., pp57-60
[6] R. Neul, U. G'omez, K. Kehr, W. Bauer, J. Classen, C. D¨oring, E. Esch, S. G¨otz, J. Hauer, B. Kuhlmann, C. Lang, M. Veith and R. Willig, Micromachined Gyros for automotive applications, Sensors 2005 IEEE, Oct. 2005, pp527-530
[7] R. E. Best, Theorie und Anwendung des Phase-locked Loops, 5rd ed. AT-Verlag Aarau, 1992
[8] U. Kiencke and H. J¨ackel, Signale und Systeme, 2rd ed. Oldenburg Verlag M¨unchen, Sep.2002