Search results for: passive control system

Authors: Kamand Bagherian, Nariman Niknejad

Abstract:

A vibration isolation technology for precise position control of a rotary system powered by two permanent magnet DC (PMDC) motors is proposed, where this system is mounted on an oscillatory frame. To achieve vibration isolation for this system, active damping and disturbance rejection (ADDR) technology is presented which introduces a cooperation of a main and an auxiliary PMDC, controlled by discrete-time sliding mode control (DTSMC) based schemes. The controller of the main actuator tracks a desired position and the auxiliary actuator simultaneously isolates the induced vibration, as its controller follows a torque trend. To determine this torque trend, a combination of two algorithms is introduced by the ADDR technology. The first torque-trend producing algorithm rejects the disturbance by counteracting the perturbation, estimated using a model-based observer. The second torque trend applies active variable damping to minimize the oscillation of the output shaft. In this practice, the presented technology is implemented on a rotary system with a pendulum attached, mounted on a linear actuator simulating an oscillation-transmitting structure. In addition, the obtained results illustrate the functionality of the proposed technology.

Keywords: Vibration isolation, position control, discrete-time nonlinear controller, active damping, disturbance tracking algorithm, oscillation transmitting support, stability robustness.

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Authors: Y. J. Huang, T. C. Kuo, B. W. Hong, B. C. Wu

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This paper presents a robust proportionalderivative (PD) based cerebellar model articulation controller (CMAC) for vertical take-off and landing flight control systems. Successful on-line training and recalling process of CMAC accompanying the PD controller is developed. The advantage of the proposed method is mainly the robust tracking performance against aerodynamic parametric variation and external wind gust. The effectiveness of the proposed algorithm is validated through the application of a vertical takeoff and landing aircraft control system.

Keywords: vertical takeoff and landing, cerebellar modelarticulation controller, proportional-derivative control.

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Authors: M. Sedighizadeh, A. Rezazadeh

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In this paper a PID control strategy using neural network adaptive RASP1 wavelet for WECS-s control is proposed. It is based on single layer feedforward neural networks with hidden nodes of adaptive RASP1 wavelet functions controller and an infinite impulse response (IIR) recurrent structure. The IIR is combined by cascading to the network to provide double local structure resulting in improving speed of learning. This particular neuro PID controller assumes a certain model structure to approximately identify the system dynamics of the unknown plant (WECS-s) and generate the control signal. The results are applied to a typical turbine/generator pair, showing the feasibility of the proposed solution.

Keywords: Adaptive PID Control, RASP1 Wavelets, WindEnergy Conversion Systems.

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Authors: Koichi Yonemoto, Hiroshi Yamasaki, Masatomo Ichige, Yusuke Ura, Guna S. Gossamsetti, Takumi Ohki, Kento Shirakata, Ahsan R. Choudhuri, Shinji Ishimoto, Takashi Mugitani, Hiroya Asakawa, Hideaki Nanri

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This paper presents the strategic development plan of winged rockets WIRES (WInged REusable Sounding rocket) aiming at unmanned suborbital winged rocket for demonstrating future fully reusable space transportation technologies, such as aerodynamics, Navigation, Guidance and Control (NGC), composite structure, propulsion system, and cryogenic tanks etc., by universities in collaboration with government and industries, as well as the past and current flight test results.

Keywords: Autonomous guidance and control, reusable rocket, space transportation system, suborbital vehicle, winged rocket.

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Authors: M. H. Korayem, K. Khoshhal, H. Aliakbarpour

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In this paper, a vision based system has been used for controlling an industrial 3P Cartesian robot. The vision system will recognize the target and control the robot by obtaining images from environment and processing them. At the first stage, images from environment are changed to a grayscale mode then it can diverse and identify objects and noises by using a threshold objects which are stored in different frames and then the main object will be recognized. This will control the robot to achieve the target. A vision system can be an appropriate tool for measuring errors of a robot in a situation where the experimental test is conducted for a 3P robot. Finally, the international standard ANSI/RIA R15.05-2 is used for evaluating the path-related characteristics of the robot. To evaluate the performance of the proposed method experimental test is carried out.

Keywords: Robot, Vision, Experiment, Standard.

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Authors: Şaban Çetin, Özgür Demir

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In this study, Fuzzy PID Control scheme is designed for an active suspension system. The main goal of an active suspension system for using in a vehicle model is reducing body deflections and handling high comfort for a passenger car. The present system was modelled as a two-degree-of-freedom (2-DOF) nonlinear vehicle model.

Keywords: Active suspension system, Fuzzy PID controller, a nonlinear quarter car model.

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Authors: Murugan Marimuthu, Jeyabharath Rajaih

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This paper describes a simple way to control the speed of PMBLDC motor using Fuzzy logic control method. In the conventional PI controller the performance of the motor system is simulated and the speed is regulated by using PI controller. These methods used to improve the performance of PMSM drives, but in some cases at different operating conditions when the dynamics of the system also vary over time and it can change the reference speed, parameter variations and the load disturbance. The simulation is powered with the MATLAB program to get a reliable and flexible simulation. In order to highlight the effectiveness of the speed control method the FLC method is used. The proposed method targeted in achieving the improved dynamic performance and avoids the variations of the motor drive. This drive has high accuracy, robust operation from near zero to high speed. The effectiveness and flexibility of the individual techniques of the speed control method will be thoroughly discussed for merits and demerits and finally verified through simulation and experimental results for comparative analysis.

Keywords: Hall position sensors, permanent magnet brushless DC motor, PI controller, Fuzzy Controller.

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Authors: M.M. Namazi, S.M. Saghaiannejad, A. Rashidi

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In this paper by using the port-controlled Hamiltonian (PCH) systems theory, a full-order nonlinear controlled model is first developed. Then a nonlinear passivity-based robust adaptive control (PBRAC) of switched reluctance motor in the presence of external disturbances for the purpose of torque ripple reduction and characteristic improvement is presented. The proposed controller design is separated into the inner loop and the outer loop controller. In the inner loop, passivity-based control is employed by using energy shaping techniques to produce the proper switching function. The outer loop control is employed by robust adaptive controller to determine the appropriate Torque command. It can also overcome the inherent nonlinear characteristics of the system and make the whole system robust to uncertainties and bounded disturbances. A 4KW 8/6 SRM with experimental characteristics that takes magnetic saturation into account is modeled, simulation results show that the proposed scheme has good performance and practical application prospects.

Keywords: Switched Reluctance Motor, Port HamiltonianSystem, Passivity-Based Control, Torque Ripple Minimization

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Authors: Taweepol Suesut, Arjin Numsomran, Vittaya Tipsuwanporn

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This paper presents the communication network for machine vision system to implement to control systems and logistics applications in industrial environment. The real-time distributed over the network is very important for communication among vision node, image processing and control as well as the distributed I/O node. A robust implementation both with respect to camera packaging and data transmission has been accounted. This network consists of a gigabit Ethernet network and a switch with integrated fire-wall is used to distribute the data and provide connection to the imaging control station and IEC-61131 conform signal integration comprising the Modbus TCP protocol. The real-time and delay time properties each part on the network were considered and worked out in this paper.

Keywords: Distributed Real-Time Automation, Machine Visionand Ethernet.

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Authors: Lari Kela

Abstract:

An adaptive Helmholtz resonator was designed and adapted to hydraulics. The resonator was controlled by open- and closed-loop controls so that 20 dB attenuation of the peak-to-peak value of the pulsating pressure was maintained. The closed-loop control was noted to be better, albeit it was slower because of its low pressure and temperature variation, which caused variation in the effective bulk modulus of the hydraulic system. Low-pressure hydraulics contains air, which affects the stiffness of the hydraulics, and temperature variation changes the viscosity of the oil. Thus, an open-loop control loses its efficiency if a condition such as temperature or the amount of air changes after calibration. The instability of the low-pressure hydraulic system reduced the operational frequency range of the Helmholtz resonator when compared with the results of an analytical model. Different dampers for hydraulics are presented. Then analytical models of a hydraulic pipe and a hydraulic pipe with a Helmholtz resonator are presented. The analytical models are based on the wave equation of sound pressure. Finally, control methods and the results of experiments are presented.

Keywords: adaptive, damper, hydraulics, pressure, pulsating

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Authors: Mohamed Ouzzane, Mahmoud Bady

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Due to energy and environment context, research is looking for the use of clean and energy efficient system in cooling industry. In this regard, the ejector represents one of the promising solutions. The thermal ejector is a passive component used for thermal compression in refrigeration and cooling systems, usually activated by heat either waste or solar. The present study introduces a theoretical analysis of the cooling system which uses a gas ejector thermal compression. A theoretical model is developed and applied for the design and simulation of the ejector, as well as the whole cooling system. Besides the conservation equations of mass, energy and momentum, the gas dynamic equations, state equations, isentropic relations as well as some appropriate assumptions are applied to simulate the flow and mixing in the ejector. This model coupled with the equations of the other components (condenser, evaporator, pump, and generator) is used to analyze profiles of pressure and velocity (Mach number), as well as evaluation of the cycle cooling capacity. A FORTRAN program is developed to carry out the investigation. Properties of refrigerant R134a are calculated using real gas equations. Among many parameters, it is thought that the generator pressure is the cornerstone in the cycle, and hence considered as the key parameter in this investigation. Results show that the generator pressure has a great effect on the ejector and on the whole cooling system. At high generator pressures, strong shock waves inside the ejector are created, which lead to significant condenser pressure at the ejector exit. Additionally, at higher generator pressures, the designed system can deliver cooling capacity for high condensing pressure (hot season).

Keywords: Air cooling system, refrigeration, thermal ejector, thermal compression.

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Authors: Amil Daraz, Suheel Abdullah Malik, Tahir Saleem, Sajid Ali Bhati

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In this paper, Integral Proportional (I-P) controller is employed for superheated steam temperature control system. The Ziegler-Nichols (Z-N) method is used for the tuning of I-P controller. The performance analysis of Z-N based I-P controller is assessed on superheated steam system of 500-MW boiler. The comparison of transient response parameters such as rise time, settling time, and overshoot is made with Z-N based Proportional Integral (PI) controller. It is observed from the results that Z-N based I-P controller completely eliminates the overshoot in the output response.

Keywords: Superheated steam, process reaction curve, PI and I-P controller, Ziegler-Nichols tuning.

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Authors: Fereidoun Nowshiravan Rahatabad, Mohammad Ali Nekoui, Mohammad Reza Hashemi Golpaygani, AliFallah, Mehdi Kazemzadeh Narbat

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The people are differed by their capabilities, skills and mental agilities. The evolution of human from childhood when they are completely dependent up to adultness the time they gradually set the dependency free is too complicated, by considering they have all started from almost one point but some become cleverer and some less. The main control command of a cybernetic hand should be posted by remaining healthy organs of disabled Person. These commands can be from several channels, which their recording and detecting are different and need complicated study. In this research, we suppose that, this stage has been done or in the other words, the command has been already sent and detected. So the main goal is to control a long hand, upper elbow hand missing, by an interest angle define by disabled. It means that, the system input is the position desired by disables and the output is the elbow-joint angle variation. Therefore the goal is a suitable control design based on neural network theory in order to meet the given mapping.

Keywords: Control - system design, Upper limb prosthesis, neuralnetwork.

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Authors: Qiaozhen Song

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Based on the feature of model disturbances and uncertainty being compensated dynamically in auto – disturbances-rejection-controller (ADRC), a new method using ADRC is proposed for the decoupling control of dispenser longitudinal movement in big flight envelope. Developed from nonlinear model directly, ADRC is especially suitable for dynamic model that has big disturbances. Furthermore, without changing the structure and parameters of the controller in big flight envelope, this scheme can simplify the design of flight control system. The simulation results in big flight envelope show that the system achieves high dynamic performance, steady state performance and the controller has strong robustness.

Keywords: ADRC, ESO, nonlinear system

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Authors: Oliver Ohneiser, Francesca De Crescenzio, Gianluca Di Flumeri, Jan Kraemer, Bruno Berberian, Sara Bagassi, Nicolina Sciaraffa, Pietro Aricò, Gianluca Borghini, Fabio Babiloni

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An increasing degree of automation in air traffic will also change the role of the air traffic controller (ATCO). ATCOs will fulfill significantly more monitoring tasks compared to today. However, this rather passive role may lead to Out-Of-The-Loop (OOTL) effects comprising vigilance decrement and less situation awareness. The project MINIMA (Mitigating Negative Impacts of Monitoring high levels of Automation) has conceived a system to control and mitigate such OOTL phenomena. In order to demonstrate the MINIMA concept, an experimental simulation set-up has been designed. This set-up consists of two parts: 1) a Task Environment (TE) comprising a Terminal Maneuvering Area (TMA) simulator as well as 2) a Vigilance and Attention Controller (VAC) based on neurophysiological data recording such as electroencephalography (EEG) and eye-tracking devices. The current vigilance level and the attention focus of the controller are measured during the ATCO’s active work in front of the human machine interface (HMI). The derived vigilance level and attention trigger adaptive automation functionalities in the TE to avoid OOTL effects. This paper describes the full-scale experimental set-up and the component development work towards it. Hence, it encompasses a pre-test whose results influenced the development of the VAC as well as the functionalities of the final TE and the two VAC’s sub-components.

Keywords: Automation, human factors, air traffic controller, MINIMA, OOTL, Out-Of-The-Loop, EEG, electroencephalography, HMI, human machine interface.

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Authors: A. Hassoune, M. Khafallah, A. Mesbahi, T. Bouragba

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This work presents an improved strategy of control for charging a lithium-ion battery in an electric vehicle charging station using two charger topologies i.e. single ended primary inductor converter (SEPIC) and forward converter. In terms of rapidity and accuracy, the power system consists of a topology/control diagram that would overcome the performance constraints, for instance the power instability, the battery overloading and how the energy conversion blocks would react efficiently to any kind of perturbations. Simulation results show the effectiveness of the proposed topologies operated with a power management algorithm based on voltage/peak current mode controls. In order to provide credible findings, a low power prototype is developed to test the control strategy via experimental evaluations of the converter topology and its controls.

Keywords: Battery charger, forward converter, lithium-ion, management algorithm, SEPIC.

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Authors: H. Mahboubi, B. Moshiri, A. Khaki Seddigh

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Recently, a great amount of interest has been shown in the field of modeling and controlling hybrid systems. One of the efficient and common methods in this area utilizes the mixed logicaldynamical (MLD) systems in the modeling. In this method, the system constraints are transformed into mixed-integer inequalities by defining some logic statements. In this paper, a system containing three tanks is modeled as a nonlinear switched system by using the MLD framework. Comparing the model size of the three-tank system with that of a two-tank system, it is deduced that the number of binary variables, the size of the system and its complexity tremendously increases with the number of tanks, which makes the control of the system more difficult. Therefore, methods should be found which result in fewer mixed-integer inequalities.

Keywords: Hybrid systems, mixed-integer inequalities, mixed logical dynamical systems, multi-tank system.

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Authors: Abdolreza Roozbeh, Reza Sedaghati, Ali Asghar Baziar, Mohammad Reza Tabatabaei

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This paper presents dynamic models of distributed generators (DG) and investigates dynamic behavior of the DG units in the micro grid system. The DG units include photovoltaic and fuel cell sources. The voltage source inverter is adopted since the electronic interface which can be equipped with its controller to keep stability of the micro grid during small signal dynamics. This paper also introduces power management strategies and implements the DG load sharing concept to keep the micro grid operation in gridconnected and islanding modes of operation. The results demonstrate the operation and performance of the photovoltaic and fuel cell as distributed generators in a micro grid. The entire control system in the micro grid is developed by combining the benefits of the power control and the voltage control strategies. Simulation results are all reported, confirming the validity of the proposed control technique.

Keywords: Stability, Distributed Generation, Dynamic, Micro Grid.

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Authors: Banaja Mohanty, Prakash Kumar Hota

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This paper presents a differential evolution algorithm to design a robust PI and PID controllers for Load Frequency Control (LFC) of nonlinear interconnected power systems considering the boiler dynamics, Governor Dead Band (GDB), Generation Rate Constraint (GRC). Differential evolution algorithm is employed to search for the optimal controller parameters. The proposed method easily copes of with nonlinear constraints. Further the proposed controller is simple, effective and can ensure the desirable overall system performance. The superiority of the proposed approach has been shown by comparing the results with published fuzzy logic controller for the same power systems. The comparison is done using various performance measures like overshoot, settling time and standard error criteria of frequency and tie-line power deviation following a 1% step load perturbation in hydro area. It is noticed that, the dynamic performance of proposed controller is better than fuzzy logic controller. Furthermore, it is also seen that the proposed system is robust and is not affected by change in the system parameters.

Keywords: Automatic Generation control (AGC), Generation Rate Constraint (GRC), Governor Dead Band (GDB), Differential Evolution (DE)

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Authors: Cai Guoqiang, Jia Limin, Zhou Liming, Liang yu, Li xi

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This paper analysis the integrated use of safety monitoring with the domestic and international latest research on rail safety protection system, and focus on the implementation of an organic whole system, with the monitoring and early warning, risk assessment, predictive control and emergency rescue system. The system framework, contents and system structure of Security system is proposed completely. It-s pointed out that the Security system is a negative feedback system composed of by safety monitoring and warning system, risk assessment and emergency rescue system. Safety monitoring and warning system focus on the monitoring target monitoring, early warning, tracking, integration of decision-making, for objective and subjective risks factors. Risk assessment system analysis the occurrence of a major Security risk mechanism, determines the standard of the future short, medium and long term safety conditions, and give prop for development of safety indicators, accident analysis and safety standards. Emergency rescue system is with the goal of rapid and effective rescue work for accident, to minimize casualties and property losses.

Keywords: rail safety protection, monitoring and early warning, risk assessment, emergency rescue.

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Authors: Kittaya Somsai, Thanatchai Kulworawanichpong, Nitus Voraphonpiput

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This paper presents the DC voltage control design of D-STATCOM when the D-STATCOM is used for load voltage regulation. Although, the DC voltage can be controlled by active current of the D-STATCOM, reactive current still affects the DC voltage. To eliminate this effect, the control strategy with elimination effect of the reactive current is proposed and the results of the control with and without the elimination the effect of the reactive current are compared. For obtaining the proportional and integral gains of the PI controllers, the symmetrical optimum and genetic algorithms methods are applied. The stability margin of these methods are obtained and discussed in detail. In addition, the performance of the DC voltage control based on symmetrical optimum and genetic algorithms methods are compared. Effectiveness of the controllers designed was verified through computer simulation performed by using Power System Tool Block (PSB) in SIMULINK/MATLAB. The simulation results demonstrated that the DC voltage control proposed is effective in regulating DC voltage when the DSTATCOM is used for load voltage regulation.

Keywords: D-STATCOM, DC voltage control, Symmetrical optimum, Genetic algorithms

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Authors: Do-Woo Kim, Geon Woo Kim, Jun-Ho Lee, Jong-Wook Han

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The home in these days has not one computer connected to the Internet but rather a network of many devices within the home, and that network might be connected to the Internet. In such an environment, the potential for attacks is greatly increased. The general security technology can not apply because of the use of various wired and wireless network, middleware and protocol in digital home environment and a restricted system resource of home information appliances. To offer secure home services home network environments have need of access control for various home devices and information when users want to access. Therefore home network access control for user authorization is a very important issue. In this paper we propose access control model using RBAC in home network environments to provide home users with secure home services.

Keywords: Home network, access control, RBAC, security.

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Authors: Robert Gold

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Control flow graphs are a well-known representation of the sequential control flow structure of programs with a multitude of applications. Not only single functions but also sets of functions or complete programs can be modeled by control flow graphs. In this case the size of the graphs can grow considerably and thus makes it difficult for software engineers to analyze the control flow. Graph reductions are helpful in this situation. In this paper we define reductions to subsets of nodes. Since executions of programs are represented by paths through the control flow graphs, paths should be preserved. Furthermore, the composition of reductions makes a stepwise analysis approach possible.

Keywords: Control flow graph, graph reduction.

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Authors: Seema Chopra, R. Mitra, Vijay Kumar

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A neurofuzzy approach for a given set of input-output training data is proposed in two phases. Firstly, the data set is partitioned automatically into a set of clusters. Then a fuzzy if-then rule is extracted from each cluster to form a fuzzy rule base. Secondly, a fuzzy neural network is constructed accordingly and parameters are tuned to increase the precision of the fuzzy rule base. This network is able to learn and optimize the rule base of a Sugeno like Fuzzy inference system using Hybrid learning algorithm, which combines gradient descent, and least mean square algorithm. This proposed neurofuzzy system has the advantage of determining the number of rules automatically and also reduce the number of rules, decrease computational time, learns faster and consumes less memory. The authors also investigate that how neurofuzzy techniques can be applied in the area of control theory to design a fuzzy controller for linear and nonlinear dynamic systems modelling from a set of input/output data. The simulation analysis on a wide range of processes, to identify nonlinear components on-linely in a control system and a benchmark problem involving the prediction of a chaotic time series is carried out. Furthermore, the well-known examples of linear and nonlinear systems are also simulated under the Matlab/Simulink environment. The above combination is also illustrated in modeling the relationship between automobile trips and demographic factors.

Keywords: Fuzzy control, neuro-fuzzy techniques, fuzzy subtractive clustering, extraction of rules, and optimization of membership functions.

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Authors: Hyung-Nam Kim, Won-Yong Chae, Dong-Sul Shin, Ho-Sung Kim, Hee-Je Kim

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A wireless power transfer system can attribute to the fields in robot, aviation and space in which lightening the weight of device and improving the movement play an important role. A wireless power transfer system was investigated to overcome the inconvenience of using power cable. Especially a wireless power transfer technology is important element for mobile robots. We proposed the wireless power transfer system of the half-bridge resonant converter with the frequency tracking and optimized power transfer control unit. And the possibility of the application and development system was verified through the experiment with LED loads.

Keywords: Wireless Power Transmission (WPT), resonancefrequency, protection circuit. LED.

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Authors: Thair Sh. Mahmoud, Tang Sai Hong, Mohammed H. Marhaban

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In this paper, Neuro-Fuzzy based Fuzzy Subtractive Clustering Method (FSCM) and Self Tuning Fuzzy PD-like Controller (STFPDC) were used to solve non-linearity and trajectory problems of pitch AND yaw angles of Twin Rotor MIMO system (TRMS). The control objective is to make the beams of TRMS reach a desired position quickly and accurately. The proposed method could achieve control objectives with simpler controller. To simplify the complexity of STFPDC, ANFIS based FSCM was used to simplify the controller and improve the response. The proposed controllers could achieve satisfactory objectives under different input signals. Simulation results under MATLAB/Simulink® proved the improvement of response and superiority of simplified STFPDC on Fuzzy Logic Controller (FLC).

Keywords: Fuzzy Subtractive Clustering Method, Neuro Fuzzy, Self Tuning Fuzzy Controller, and Twin Rotor MIMO System.

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Authors: Bubaker M. F. Bushofa, Abdel Hafez A. Azab

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This article is based on the technique which is called Discrete Parameter Tracking (DPT). First introduced by A. A. Azab [8] which is applicable for less order reference model. The order of the reference model is (n-l) and n is the number of the adjustable parameters in the physical plant. The technique utilizes a modified gradient method [9] where the knowledge of the exact order of the nonadaptive system is not required, so, as to eliminate the identification problem. The applicability of the mentioned technique (DPT) was examined through the solution of several problems. This article introduces the solution of a third order system with three adjustable parameters, controlled according to second order reference model. The adjustable parameters have great initial error which represent condition. Computer simulations for the solution and analysis are provided to demonstrate the simplicity and feasibility of the technique.

Keywords: Adaptive Control System, Discrete Parameter Tracking, Discrete Time Model.

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Authors: Xiaoyan Dou, Yongkun Li

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In this paper, we consider a food-limited population model with delay and feedback control. By applying the comparison theorem of the differential equation and constructing a suitable Lyapunov functional, sufficient conditions which guarantee the permanence and existence of a unique globally attractive positive almost periodic solution of the system are obtained.

Keywords: Almost periodic solution, food-limited population, feedback control, permanence.

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Authors: J. Hodicky, P. Frantis

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Command and Control (C2) system and its interfacethe Common Operational Picture (COP) are main means that supports commander in its decision making process. COP contains information about friendly and enemy unit positions. The friendly position is gathered via tactical network. In the case of tactical network failure the information about units are not available. The tactical simulator can be used as a tool that is capable to predict movements of units in respect of terrain features. Article deals with an experiment that was based on Czech C2 system that is in the case of connectivity lost fed by VR Forces simulator. Article analyzes maximum time interval in which the position created by simulator is still usable and truthful for commander in real time.

Keywords: command and control system, movement prediction, simulation

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Authors: Luc Conti, Dimitry Dumont-Fillon, Harald van Lintel, Eric Chappel

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Flow control valves comprise a silicon flexible membrane that deflects against a substrate, usually made of glass, containing pillars, an outlet hole, and anti-stiction features. However, there is a strong interest in using silicon instead of glass as substrate material, as it would simplify the process flow by allowing the use of well controlled anisotropic etching. Moreover, specific devices demanding a bending of the substrate would also benefit from the inherent outstanding mechanical strength of monocrystalline silicon. Unfortunately, direct Si-Si bonding is not easily achieved with highly structured wafers since residual stress may prevent the good adhesion between wafers. Using a thermoplastic polymer, such as parylene, as intermediate layer is not well adapted to this design as the wafer-to-wafer alignment is critical. An alternative anodic bonding method using an intermediate borosilicate layer has been successfully tested. This layer has been deposited onto the silicon substrate. The bonding recipe has been adapted to account for the presence of the SOI buried oxide and intermediate glass layer in order not to exceed the breakdown voltage. Flow control valves dedicated to infusion of viscous fluids at very high pressure have been made and characterized. The results are compared to previous data obtained using the standard anodic bonding method.

Keywords: Anodic bonding, evaporated glass, microfluidic valve, drug delivery.

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