Luc Conti and  Dimitry Dumont-Fillon and  Harald van Lintel and  Eric Chappel,  Silicon-To-Silicon Anodic Bonding via Intermediate Borosilicate Layer for Passive Flow Control Valves.   journal   = {International Journal of Mechanical and Mechatronics Engineering}, [online]. World Academy of Science, Engineering and Technology.
    May 2018, vol. 139(7). 701 - 704
    [viewed 24 April 2024]. Available from: https://publications.waset.org/pdf/10009124.