Search results for: Capacitance to Voltage converter Circuit

Authors: D. Krishnaveni, M. Geetha Priya

Abstract:

Applications of reversible logic gates in the design of complex integrated circuits provide power optimization.  This technique finds a great use in low power CMOS design, optical computing, quantum computing and nanotechnology. This paper proposes a reversible signed division circuit that can divide an n-bit signed dividend with an n-bit signed divisor using non-restoration division logic. The proposed design adequately addresses the ‘delay’ there by improving the efficiency of the circuit. An attempt is made to design a reversible signed division circuit. This paper provides a threshold to build more complex arithmetic systems using reversible logic, thus increasing the performance of computing systems.

Keywords: Low power CMOS, quantum computing, reversible logic gates, shift register, signed division.

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Authors: S. Chahba, R. Sehab, A. Akrad, C. Morel

Abstract:

Nowadays, the electric machines used in urban electric vehicles are, in most cases, three-phase electric machines with or without a magnet in the rotor. Permanent Magnet Synchronous Machine (PMSM) and Induction Machine (IM) are the main components of drive trains of electric and hybrid vehicles. These machines have very good performance in healthy operation mode, but they are not redundant to ensure safety in faulty operation mode. Faced with the continued growth in the demand for electric vehicles in the automotive market, improving the reliability of electric vehicles is necessary over the lifecycle of the electric vehicle. Multiphase electric machines respond well to this constraint because, on the one hand, they have better robustness in the event of a breakdown (opening of a phase, opening of an arm of the power stage, intern-turn short circuit) and, on the other hand, better power density. In this work, a diagnosis approach using a neural network for an open circuit fault or more of a five-phase induction machine is developed. Validation on the simulator of the vehicle drivetrain, at reduced power, is carried out, creating one and more open circuit stator phases showing the efficiency and the reliability of the new approach to detect and to locate on-line one or more open phases of a five-induction machine.

Keywords: Electric vehicle drivetrain, multiphase drives, induction machine, control, open circuit fault diagnosis, artificial neural network.

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Authors: Jiří Primas, Michal Malík, Darina Jašíková, Václav Kopecký

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When a high DC voltage is applied to a capacitor with strongly asymmetrical electrodes, it generates a mechanical force that affects the whole capacitor. This is caused by the motion of ions generated around the smaller of the two electrodes and their subsequent interaction with the surrounding medium. If one of the electrodes is heated, it changes the conditions around the capacitor and influences the process of ionisation, thus changing the value of the generated force. This paper describes these changes and gives reasons behind them. Further the experimental results are given as proof of the ionic mechanism of the phenomenon.

Keywords: Capacitor with asymmetrical electrodes, Generated force, Heated electrode, High voltage.

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Authors: Yaw-Juen Wang, Po-Chun Hsu

Abstract:

This paper presents an equivalent circuit model based on piecewise linear parallel branches (PLPB) to study solar cell modules which are partially shaded. The PLPB model can easily be used in circuit simulation software such as the ElectroMagnetic Transients Program (EMTP). This PLPB model allows the user to simulate several different configurations of solar cells, the influence of partial shadowing on a single or multiple cells, the influence of the number of solar cells protected by a bypass diode and the effect of the cell connection configuration on partial shadowing.

Keywords: Cell Connection Configurations, EMTP, Equivalent Circuit, Partial Shading, Photovoltaic Module

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Authors: S. Abouda, F. Nollet, A. Chaari, N. Essounbouli, Y. Koubaa

Abstract:

In this paper we propose the study of a centrifugal pump control system driven by a three-phase induction motor, which is supplied by a PhotoVoltaic PV generator. The system includes solar panel, a DC / DC converter equipped with its MPPT control, a voltage inverter to three-phase Pulse Width Modulation - PWM and a centrifugal pump driven by a three phase induction motor. In order to control the flow of the centrifugal pump, a Direct Torque Control - DTC of the induction machine is used. To illustrate the performances of the control, simulation results are carried out using Matlab/Simulink.

Keywords: Photovoltaic generators, Maximum power point tracking (MPPT), DC/DC converters, Induction motor, Direct torque control (DTC).

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Authors: J. H. Kim, J. H. Kwon, J. S. Park, K. J. Lim

Abstract:

This paper has been investigated a technique that predicts the performance of a bar-type unimorph piezoelectric vibration actuator depending on the frequency. This paper has been proposed an equivalent circuit that can be easily analyzed for the bar-type unimorph piezoelectric vibration actuator. In the dynamic analysis, rigidity and resonance frequency, which are important mechanical elements, were derived using the basic beam theory. In the equivalent circuit analysis, the displacement and bandwidth of the piezoelectric vibration actuator depending on the frequency were predicted. Also, for the reliability of the derived equations, the predicted performance depending on the shape change was compared with the result of a finite element analysis program.

Keywords: Actuator, performance, piezoelectric, unimorph.Actuator, performance, piezoelectric, unimorph.

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Authors: Z. Ezzouine, A. Nakheli

Abstract:

This paper presents a high position electromagnetic sensor system (HPESS) that is applicable for moving object detection. The authors have developed a high-performance position sensor prototype dedicated to students’ laboratory. The challenge was to obtain a highly accurate and real-time sensor that is able to calculate position, length or displacement. An electromagnetic solution based on a two coil induction principal was adopted. The HPESS converts mechanical motion to electric energy with direct contact. The output signal can then be fed to an electronic circuit. The voltage output change from the sensor is captured by data acquisition system using LabVIEW software. The displacement of the moving object is determined. The measured data are transmitted to a PC in real-time via a DAQ (NI USB -6281). This paper also describes the data acquisition analysis and the conditioning card developed specially for sensor signal monitoring. The data is then recorded and viewed using a user interface written using National Instrument LabVIEW software. On-line displays of time and voltage of the sensor signal provide a user-friendly data acquisition interface. The sensor provides an uncomplicated, accurate, reliable, inexpensive transducer for highly sophisticated control systems.

Keywords: Electromagnetic sensor, data acquisition, accurately, position measurement.

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Authors: Jason Chien-Hsun Tseng, Nguyen Dong-Thai Dao, Chong-Ching Chang

Abstract:

A novel PDE solver using the multidimensional wave digital filtering (MDWDF) technique to achieve the solution of a 2D seismic wave system is presented. In essence, the continuous physical system served by a linear Kirchhoff circuit is transformed to an equivalent discrete dynamic system implemented by a MD wave digital filtering (MDWDF) circuit. This amounts to numerically approximating the differential equations used to describe elements of a MD passive electronic circuit by a grid-based difference equations implemented by the so-called state quantities within the passive MDWDF circuit. So the digital model can track the wave field on a dense 3D grid of points. Details about how to transform the continuous system into a desired discrete passive system are addressed. In addition, initial and boundary conditions are properly embedded into the MDWDF circuit in terms of state quantities. Graphic results have clearly demonstrated some physical effects of seismic wave (P-wave and S–wave) propagation including radiation, reflection, and refraction from and across the hard boundaries. Comparison between the MDWDF technique and the finite difference time domain (FDTD) approach is also made in terms of the computational efficiency.

Keywords: Seismic Wave Propagation, Multi-dimension WaveDigital Filters, Partial Differential Equations.

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Authors: Ivan Yatchev, Ewen Ritchie

Abstract:

Comparison of two approaches for the simulation of the dynamic behaviour of a permanent magnet linear actuator is presented. These are full coupled model, where the electromagnetic field, electric circuit and mechanical motion problems are solved simultaneously, and decoupled model, where first a set of static magnetic filed analysis is carried out and then the electric circuit and mechanical motion equations are solved employing bi-cubic spline approximations of the field analysis results. The results show that the proposed decoupled model is of satisfactory accuracy and gives more flexibility when the actuator response is required to be estimated for different external conditions, e.g. external circuit parameters or mechanical loads.

Keywords: Coupled problems, dynamic models, finite elementanalysis, linear actuators, permanent magnets.

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Authors: Hassam Ahmed, Yuanzhi Liu, Yassine Selami, Wei Tao, Hui Zhao

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The purpose of this research is to develop a real time axial force measurement system for a smart bearing through the use of strain-gauges, whereby the data acquisition is performed by an Arduino microcontroller due to its easy manipulation and low-cost. The measured signal is acquired and then discretized using a Wheatstone Bridge and an Analog-Digital Converter (ADC) respectively. For bearing monitoring, a real time monitoring system based on Internet of things (IoT) and Bluetooth were developed. Experimental tests were performed on a bearing within a force range up to 600 kN. The experimental results show that there is a proportional linear relationship between the applied force and the output voltage, and the error R squared is within 0.9878 based on the regression analysis.

Keywords: Bearing, force measurement, IoT, strain gauge.

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Authors: P. Jelodarian , E. Farshidi

Abstract:

In this paper, a new approach for design of a fully differential second order current mode continuous-time sigma-delta modulator is presented. For circuit implementation, square root domain (SRD) translinear loop based on floating-gate MOS transistors that operate in saturation region is employed. The modulator features, low supply voltage, low power consumption (8mW) and high dynamic range (55dB). Simulation results confirm that this design is suitable for data converters.

Keywords: Sigma-delta, current-mode, translinear loop, geometric mean, squarer/divider.

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Authors: Dana M. Ragab, Jasim A. Ghaeb

Abstract:

The three-phase power system suffers from different challenging problems, e.g. voltage unbalance conditions at the load side. The voltage unbalance usually degrades the power quality of the electric power system. Several techniques can be considered for load balancing including load reconfiguration, static synchronous compensator and static reactive power compensator. In this work an efficient neural network is designed to control the unbalanced condition in the Aqaba-Qatrana-South Amman (AQSA) electric power system. It is designed for highly enhanced response time of the reactive compensator for voltage balancing. The neural network is developed to determine the appropriate set of firing angles required for the thyristor-controlled reactor to balance the three load voltages accurately and quickly. The parameters of AQSA power system are considered in the laboratory model, and several test cases have been conducted to test and validate the proposed technique capabilities. The results have shown a high performance of the proposed Neural Network Control (NNC) technique for correcting the voltage unbalance conditions at three-phase load based on accuracy and response time.

Keywords: Three-phase power system, reactive power control, voltage unbalance factor, neural network, power quality.

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Authors: Marios N. Moschakis

Abstract:

This paper deals with the assessment of faulted area around an industrial customer connected to a particular electric grid that will cause a certain sag magnitude on this customer. The faulted (critical or exposed) area’s length is calculated by adding all line lengths in the neighborhood of the critical node (customer). The applied method is the so-called Method of Critical Distances. By using advanced short-circuit analysis, the Critical Area can be accurately calculated for radial and meshed power networks due to all symmetrical and asymmetrical faults. For the demonstration of the effectiveness of the proposed methodology, a study case is used.

Keywords: Critical area, fault-induced voltage sags, industrial customers, power quality.

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Authors: A. Morsli, A.Tlemçani, N. Ould Cherchali, M. S. Boucherit

Abstract:

This article presents two methods for the compensation of harmonics generated by a nonlinear load. The first is the classic method P-Q. The second is the controller by modern method of artificial intelligence specifically fuzzy logic. Both methods are applied to a shunt Active Power Filter (sAPF) based on a three-phase voltage converter at five levels NPC topology. In calculating the harmonic currents of reference, we use the algorithm P-Q and pulse generation, we use the intersective PWM. For flexibility and dynamics, we use fuzzy logic. The results give us clear that the rate of Harmonic Distortion issued by fuzzy logic is better than P-Q.

Keywords: Fuzzy logic controller, P-Q method, Pulse Width Modulation (PWM), shunt Active Power Filter (sAPF), Total Harmonic Distortion (THD).

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Authors: Yuzman Yusoff, Siti Noor Harun, Noor Shelida Sallehand Tan Kong Yew

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This paper presents the design and characterization of analog readout interface circuits for ion sensitive field effect transistor (ISFET) and ion selective electrode (ISE) based sensor. These interface circuits are implemented using MIMOS’s 0.35um CMOS technology and experimentally characterized under 24-leads QFN package. The characterization evaluates the circuit’s functionality, output sensitivity and output linearity. Commercial sensors for both ISFET and ISE are employed together with glass reference electrode during testing. The test result shows that the designed interface circuits manage to readout signals produced by both sensors with measured sensitivity of ISFET and ISE sensor are 54mV/pH and 62mV/decade, respectively. The characterized output linearity for both circuits achieves above 0.999 rsquare. The readout also has demonstrated reliable operation by passing all qualifications in reliability test plan.

Keywords: Readout interface circuit (ROIC), analog interface circuit, ion sensitive field effect transistor (ISFET), ion selective electrode (ISE), and ion sensor electronics.

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Authors: Yuzman Yusoff, Siti Noor Harun, Noor Shelida Sallehand, Tan Kong Yew

Abstract:

This paper presents the design and characterization of analog readout interface circuits for ion sensitive field effect transistor (ISFET) and ion selective electrode (ISE) based sensor. These interface circuits are implemented using MIMOS’s 0.35um CMOS technology and experimentally characterized under 24-leads QFN package. The characterization evaluates the circuit’s functionality, output sensitivity and output linearity. Commercial sensors for both ISFET and ISE are employed together with glass reference electrode during testing. The test result shows that the designed interface circuits manage to readout signals produced by both sensors with measured sensitivity of ISFET and ISE sensor are 54mV/pH and 62mV/decade, respectively. The characterized output linearity for both circuits achieves above 0.999 Rsquare. The readout also has demonstrated reliable operation by passing all qualifications in reliability test plan.

Keywords: Readout interface circuit (ROIC), analog interface circuit, ion sensitive field effect transistor (ISFET), ion selective electrode (ISE), ion sensor electronics.

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Authors: M. Ghareh, L. Sepahi

Abstract:

Temperature rise in a transformer depends on variety of parameters such as ambient temperature, output current and type of the core. Considering these parameters, temperature rise estimation is still complicated procedure. In this paper, we present a new model based on simple electrical equivalent circuit. This method avoids the complication associated to accurate estimation and is in very good agreement with practice.

Keywords: Thermal modeling, temperature rise, equivalent thermal circuit.

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Authors: Jun Wang, Tingcun Wei

Abstract:

The digital pulse width modulator (DPWM) is the crucial building block for digitally-controlled DC-DC switching converter, which converts the digital duty ratio signal into its analog counterpart to control the power MOSFET transistors on or off. With the increase of switching frequency of digitally-controlled DC-DC converter, the DPWM with higher time resolution is required. In this paper, a 15-bits DPWM with three-level hybrid structure is presented; the first level is composed of a7-bits counter and a comparator, the second one is a 5-bits delay line, and the third one is a 3-bits digital dither. The presented DPWM is designed and implemented using the PLL megafunction of FPGA (Field Programmable Gate Arrays), and the required frequency of clock signal is 128 times of switching frequency. The simulation results show that, for the switching frequency of 2 MHz, a DPWM which has the time resolution of 15 ps is achieved using a maximum clock frequency of 256MHz. The designed DPWM in this paper is especially useful for high-frequency digitally-controlled DC-DC switching converters.

Keywords: DPWM, PLL megafunction, FPGA, time resolution, digitally-controlled DC-DC switching converter.

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Authors: Saih Mohamed, Rouijaa Hicham, Ghammaz Abdelilah

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This paper presents circuit models to analyze the conducted susceptibility of multiconductor shielded cables in frequency domains using Branin’s method, which is referred to as the method of characteristics. These models, which can be used directly in the time and frequency domains, take into account the presence of both the transfer impedance and admittance. The conducted susceptibility is studied by using an injection current on the cable shield as the source. Two examples are studied; a coaxial shielded cable and shielded cables with two parallel wires (i.e., twinax cables). This shield has an asymmetry (one slot on the side). Results obtained by these models are in good agreement with those obtained by other methods.

Keywords: Circuit models, multiconductor shielded cables, Branin’s method, coaxial shielded cable, twinax cables.

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Authors: Justinian Anatory, Nelson Theethayi, M. M. Kissaka, N. H. Mvungi

Abstract:

Power line channel is proposed as an alternative for broadband data transmission especially in developing countries like Tanzania [1]. However the channel is affected by stochastic attenuation and deep notches which can lead to the limitation of channel capacity and achievable data rate. Various studies have characterized the channel without giving exactly the maximum performance and limitation in data transfer rate may be this is due to complexity of channel modeling being used. In this paper the channel performance of medium voltage, low voltage and indoor power line channel is presented. In the investigations orthogonal frequency division multiplexing (OFDM) with phase shift keying (PSK) as carrier modulation schemes is considered, for indoor, medium and low voltage channels with typical ten branches and also Golay coding is applied for medium voltage channel. From channels, frequency response deep notches are observed in various frequencies which can lead to reduce the achievable data rate. However, is observed that data rate up to 240Mbps is realized for a signal to noise ratio of about 50dB for indoor and low voltage channels, however for medium voltage a typical link with ten branches is affected by strong multipath and coding is required for feasible broadband data transfer.

Keywords: Powerline Communications, branched network, channel model, modulation, channel performance, OFDM.

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Authors: Yogesh Pahariya, Rakesh Saxena, Biswaroop Sarkar

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The selection of control strategy depends on the converters of the drive including power, speed, performance and the possible system costs. A number of attempts were therefore made in recent times to develop novel power electronic converter structures for SRM drives, based on the utilization. Many of the converters with variable speed drives have no input power factor correction circuits. This results in harmonic pollution of the utility supply, which should be avoided. The effect of power factor variation in terms of harmonic content is also analyzed in this study. The proposed topologies were simulated using MATLAB / Simulink software package and the results are obtained.

Keywords: Harmonic Pollution, Power Electronic Converter, Power Quality, Simulation.

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Authors: L. Parisi, D. Hamili, N. Azlan

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The aim of this study was to design and simulate a particular type of Asynchronous State Machine (ASM), namely a ‘traffic light controller’ (TLC), operated at a frequency of 0.5 Hz. The design task involved two main stages: firstly, designing a 4-bit binary counter using J-K flip flops as the timing signal and, subsequently, attaining the digital logic by deploying ASM design process. The TLC was designed such that it showed a sequence of three different colours, i.e. red, yellow and green, corresponding to set thresholds by deploying the least number of AND, OR and NOT gates possible. The software Multisim was deployed to design such circuit and simulate it for circuit troubleshooting in order for it to display the output sequence of the three different colours on the traffic light in the correct order. A clock signal, an asynchronous 4- bit binary counter that was designed through the use of J-K flip flops along with an ASM were used to complete this sequence, which was programmed to be repeated indefinitely. Eventually, the circuit was debugged and optimized, thus displaying the correct waveforms of the three outputs through the logic analyser. However, hazards occurred when the frequency was increased to 10 MHz. This was attributed to delays in the feedback being too high.

Keywords: Asynchronous State Machine, Traffic Light Controller, Circuit Design, Digital Electronics.

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Authors: Ingy N. Bkrey, Ahmed A. Moniem

Abstract:

We succeeded to produce a high performance and flexible graphene/Manganese dioxide (G/MnO₂) electrode coated on flexible polyethylene terephthalate (PET) substrate. The graphene film is initially synthesized by drop-casting the graphene oxide (GO) solution on the PET substrate, followed by simultaneous reduction and patterning of the dried film using carbon dioxide (CO₂) laser beam with power of 1.8 W. Potentiostatic Anodic Deposition method was used to deposit thin film of MnO₂ with different loading mass 10 – 50 and 100 μg.cm^-2 on the pre-prepared graphene film. The electrodes were fully characterized in terms of structure, morphology, and electrochemical performance. A maximum specific capacitance of 973 F.g^-1 was attributed when depositing 50μg.cm^-2 MnO₂ on the laser reduced graphene oxide rGO (or G/50MnO₂) and over 92% of its initial capacitance was retained after 1000 cycles. The good electrochemical performance and long-term cycling stability make our proposed approach a promising candidate in the supercapacitor applications.

Keywords: Electrode Deposition, Flexible, Graphene oxide, Graphene, High Power CO2 Laser, MnO2.

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Authors: B. M. Manjunatha, D. V. Ashok Kumar, M. Vijay Kumar

Abstract:

This paper proposes five level diode clamped Z source Inverter. The existing PWM techniques used for ZSI are restricted for two level. The two level Z Source Inverter have high harmonic distortions which effects the performance of the grid connected PV system. To improve the performance of the system the number of voltage levels in the output waveform need to be increased. This paper presents comparative analysis of a five level diode clamped Z source Inverter with different carrier based Modified Pulse Width Modulation techniques. The parameters considered for comparison are output voltage, voltage gain, voltage stress across switch and total harmonic distortion when powered by same DC supply. Analytical results are verified using MATLAB.

Keywords: Diode Clamped, Pulse Width Modulation, total harmonic distortion, Z Source Inverter.

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Authors: Shiv Shankar Mishra, S. Wairya, R. K. Nagaria, S. Tiwari

Abstract:

New methodologies for XOR-XNOR circuits are proposed to improve the speed and power as these circuits are basic building blocks of many arithmetic circuits. This paper evaluates and compares the performance of various XOR-XNOR circuits. The performance of the XOR-XNOR circuits based on TSMC 0.18μm process models at all range of the supply voltage starting from 0.6V to 3.3V is evaluated by the comparison of the simulation results obtained from HSPICE. Simulation results reveal that the proposed circuit exhibit lower PDP and EDP, more power efficient and faster when compared with best available XOR-XNOR circuits in the literature.

Keywords: Exclusive-OR (XOR), Exclusive-NOR (XNOR), High speed, Low power, Arithmetic Circuits.

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Authors: Irtaza M. Syed, Kaamran Raahemifar

Abstract:

In this paper, we present a comparative assessment of Space Vector Pulse Width Modulation (SVPWM) and Model Predictive Control (MPC) for two-level three phase (2L-3P) Voltage Source Inverter (VSI). VSI with associated system is subjected to both control techniques and the results are compared. Matlab/Simulink was used to model, simulate and validate the control schemes. Findings of this study show that MPC is superior to SVPWM in terms of total harmonic distortion (THD) and implementation.

Keywords: Model Predictive Control, Space Vector Pulse Width Modulation, Voltage Source Inverter.

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Authors: P. Vaculík, P. Kaňovský

Abstract:

The following article presents Technology Centre of Ostrava (TCO) in the Czech Republic describing the structure and main research areas realized by the project ENET - Energy Units for Utilization of non Traditional Energy Sources. More details are presented from the research program dealing with transformation, accumulation and distribution of electric energy. Technology Centre has its own energy mix consisting of alternative sources of fuel sources that use of process gases from the storage part and also the energy from distribution network. The article will be focus on the properties and application possibilities SiC semiconductor devices for power semiconductor converter for photovoltaic systems.

Keywords: SiC, Si, Technology Centre of Ostrava, Photovoltaic Systems, DC/DC Converter, Simulation.

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Authors: N. Mungkung, S. Wongcharoen., Tanes Tanitteerapan, C. Saejao, D. Arunyasot

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The condition of lightning surge causes the traveling waves and the temporary increase in voltage in the transmission line system. Lightning is the most harmful for destroying the transmission line and setting devices so it is necessary to study and analyze the temporary increase in voltage for designing and setting the surge arrester. This analysis describes the figure of the lightning wave in transmission line with 115 kV voltage level in Thailand by using ATP/EMTP program to create the model of the transmission line and lightning surge. Because of the limit of this program, it must be calculated for the geometry of the transmission line and surge parameter and calculation in the manual book for the closest value of the parameter. On the other hand, for the effects on surge protector when the lightning comes, the surge arrester model must be right and standardized as metropolitan electrical authority's standard. The candidate compared the real information to the result from calculation, also. The results of the analysis show that the temporary increase in voltage value will be rise to 326.59 kV at the line which is done by lightning when the surge arrester is not set in the system. On the other hand, the temporary increase in voltage value will be 182.83 kV at the line which is done by lightning when the surge arrester is set in the system and the period of the traveling wave is reduced, also. The distance for setting the surge arrester must be as near to the transformer as possible. Moreover, it is necessary to know the right distance for setting the surge arrester and the size of the surge arrester for preventing the temporary increase in voltage, effectively.

Keywords: Lightning surge, surge arrester, electrical power system, ATP/EMTP program.

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Authors: Omid Borazjani, Mahmoud Roosta, Khodakhast Isapour, Ali Reza Rajabi

Abstract:

This paper presents an application of Artificial Neural Network (ANN) algorithm for improving power system voltage stability. The training data is obtained by solving several normal and abnormal conditions using the Linear Programming technique. The selected objective function gives minimum deviation of the reactive power control variables, which leads to the maximization of minimum Eigen value of load flow Jacobian. The considered reactive power control variables are switchable VAR compensators, OLTC transformers and excitation of generators. The method has been implemented on a modified IEEE 30-bus test system. The results obtain from the test clearly show that the trained neural network is capable of improving the voltage stability in power system with a high level of precision and speed.

Keywords: Artificial Neural Network (ANN), Load Flow, Voltage Stability, Power Systems.

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Authors: X. L. Zhou, S. Tunmee, I. Toda, K. Komatsu, S. Ohshio, H. Saitoh

Abstract:

Hydrogenated amorphous carbon (a-C:H) films have been synthesized by a radio frequency plasma enhanced chemical vapor deposition (rf-PECVD) technique with different bias voltage from 0.0 to -0.5 kV. The Raman spectra displayed the polymer-like hydrogenated amorphous carbon (PLCH) film with 0.0 to -0.1 and a-C:H films with -0.2 to -0.5 kV of bias voltages. The surface chemical information of all films were studied by X-ray photoelectron spectroscopy (XPS) technique, presented to C-C (sp2 and sp3) and C-O bonds, and relative carbon (C) and oxygen (O) atomics contents. The O contamination had affected on structure and optical properties. The true density of PLCH and a-C:H films were characterized by X-ray refractivity (XRR) method, showed the result as in the range of 1.16-1.73 g/cm3 that depending on an increasing of bias voltage. The hardness was proportional to the true density of films. In addition, the optical properties i.e. refractive index (n) and extinction coefficient (k) of these films were determined by a spectroscopic ellipsometry (SE) method that give formation to in 1.62-2.10 (n) and 0.04-0.15 (k) respectively. These results indicated that the optical properties confirmed the Raman results as presenting the structure changed with applied bias voltage increased.

Keywords: Negative bias voltage, a-C:H film, Oxygen contamination, Optical properties.

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