Search results for: Semi cylindrical Capacitive Sensor
Commenced in January 2007
Frequency: Monthly
Edition: International
Paper Count: 1573

Search results for: Semi cylindrical Capacitive Sensor

1573 A Semi-Cylindrical Capacitive Sensor Used for Soil Moisture Measurement

Authors: Subir Das, Tuhin Subhra Sarkar, Badal Chakraborty

Abstract:

Differing from the structure of traditional parallel plate capacitive sensor a semi cylindrical capacitive sensor has been introduced in this present work to measure the soil moisture conveniently. Here, the numerical analysis method to evaluate the capacitance from the semi-cylindrical capacitive sensor is analyzed and discussed. The changes of capacitance with the variation of soil moisture obtained linear in the nano farad range (nF) and which converted into voltage variation by using proper signal conditioning circuit. Experimental results depict the satisfactory performance of the sensor for measurement of soil moisture in the range of 0 to 70%. We investigated the linearity of 4% of FSO and sensitivity of 70 mV/unit percentage changes in soil moisture level (DB).

Keywords: Semi cylindrical Capacitive Sensor, Capacitance to Voltage converter Circuit, Soil Moisture.

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1572 Capacitive ECG Measurement by Conductive Fabric Tape

Authors: Yue-Der Lin, Ya-Hsueh Chien, Yen-Ting Lin, Shih-Fan Wang, Cheng-Lun Tsai, Ching-Che Tsai

Abstract:

Capacitive electrocardiogram (ECG) measurement is an attractive approach for long-term health monitoring. However, there is little literature available on its implementation, especially for multichannel system in standard ECG leads. This paper begins from the design criteria for capacitive ECG measurement and presents a multichannel limb-lead capacitive ECG system with conductive fabric tapes pasted on a double layer PCB as the capacitive sensors. The proposed prototype system incorporates a capacitive driven-body (CDB) circuit to reduce the common-mode power-line interference (PLI). The presented prototype system has been verified to be stable by theoretic analysis and practical long-term experiments. The signal quality is competitive to that acquired by commercial ECG machines. The feasible size and distance of capacitive sensor have also been evaluated by a series of tests. From the test results, it is suggested to be greater than 60 cm2 in sensor size and be smaller than 1.5 mm in distance for capacitive ECG measurement.

Keywords: capacitive driven-body (CDB) circuit, capacitive electrocardiogram (ECG) measurement, capacitive sensor, conductive fabric tape, power-line interference (PLI).

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1571 A Capacitive Sensor Interface Circuit Based on Phase Differential Method

Authors: H. A. Majid, N. Razali, M. S. Sulaiman, A. K. A'ain

Abstract:

A new interface circuit for capacitive sensor is presented. This paper presents the design and simulation of soil moisture capacitive sensor interface circuit based on phase differential technique. The circuit has been designed and fabricated using MIMOS- 0.35"m CMOS technology. Simulation and test results show linear characteristic from 36 – 52 degree phase difference, representing 0 – 100% in soil moisture level. Test result shows the circuit has sensitivity of 0.79mV/0.10 phase difference, translating into resolution of 10% soil moisture level.

Keywords: Capacitive sensor, interface, phase differential.

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1570 The Design, Development, and Optimization of a Capacitive Pressure Sensor Utilizing an Existing 9 DOF Platform

Authors: Andrew Randles, Ilker Ocak, Cheam Daw Don, Navab Singh, Alex Gu

Abstract:

Nine Degrees of Freedom (9 DOF) systems are already in development in many areas. In this paper, an integrated pressure sensor is proposed that will make use of an already existing monolithic 9 DOF inertial MEMS platform. Capacitive pressure sensors can suffer from limited sensitivity for a given size of membrane. This novel pressure sensor design increases the sensitivity by over 5 times compared to a traditional array of square diaphragms while still fitting within a 2 mm x 2 mm chip and maintaining a fixed static capacitance. The improved design uses one large diaphragm supported by pillars with fixed electrodes placed above the areas of maximum deflection. The design optimization increases the sensitivity from 0.22 fF/kPa to 1.16 fF/kPa. Temperature sensitivity was also examined through simulation.

Keywords: Capacitive pressure sensor, 9 DOF, 10 DOF, sensor, capacitive, inertial measurement unit, IMU, inertial navigation system, INS.

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1569 Resonant-Based Capacitive Pressure Sensor Read-Out Oscillating at 1.67 GHz in 0.18

Authors: Yong Wang, Wang Ling Goh, Jung Hyup Lee, Kevin T. C. Chai, Minkyu Je

Abstract:

This paper presents a resonant-based read-out circuit for capacitive pressure sensors. The proposed read-out circuit consists of an LC oscillator and a counter. The circuit detects the capacitance changes of a capacitive pressure sensor by means of frequency shifts from its nominal operation frequency. The proposed circuit is designed in 0.18m CMOS with an estimated power consumption of 43.1mW. Simulation results show that the circuit has a capacitive resolution of 8.06kHz/fF, which enables it for high resolution pressure detection.

Keywords: Capacitance-to-frequency converter, Capacitive pressure sensor, Digital counter, LC oscillator.

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1568 Design of SiC Capacitive Pressure Sensor with LC-Based Oscillator Readout Circuit

Authors: Azza M. Anis, M. M. Abutaleb, Hani F. Ragai, M. I. Eladawy

Abstract:

This paper presents the characterization and design of a capacitive pressure sensor with LC-based 0.35 µm CMOS readout circuit. SPICE is employed to evaluate the characteristics of the readout circuit and COMSOL multiphysics structural analysis is used to simulate the behavior of the pressure sensor. The readout circuit converts the capacitance variation of the pressure sensor into the frequency output. Simulation results show that the proposed pressure sensor has output frequency from 2.50 to 2.28 GHz in a pressure range from 0.1 to 2 MPa almost linearly. The sensitivity of the frequency shift with respect to the applied pressure load is 0.11 GHz/MPa.

Keywords: CMOS LC-based oscillator, micro pressure sensor, silicon carbide

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1567 Fabrication and Study of Nickel Phthalocyanine based Surface Type Capacitive Sensors

Authors: Mutabar Shah, Muhammad Hassan Sayyad, Khasan S. Karimov

Abstract:

Thin films of Nickel phthalocynine (NiPc) of different thicknesses (100, 150 and 200 nm) were deposited by thermal evaporator on glass substrates with preliminary deposited aluminum electrodes to form Al/NiPc/Al surface-type capacitive humidity sensors. The capacitance-humidity relationships of the sensors were investigated at humidity levels from 35 to 90% RH. It was observed that the capacitance value increases nonlinearly with increasing humidity level. All measurements were taken at room temperature.

Keywords: Capacitive sensor, Humidity, Nickel phthalocyanine, Organic semiconductor.

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1566 Accuracy of Displacement Estimation and Selection of Capacitors for a Four Degrees of Freedom Capacitive Force Sensor

Authors: Chisato Murakami, Makoto Takahashi

Abstract:

Force sensor has been used as requisite for knowing information on the amount and the directions of forces on the skin surface. We have developed a four-degrees-of-freedom capacitive force sensor (approximately 20×20×5 mm3) that has a flexible structure and sixteen parallel plate capacitors. An iterative algorithm was developed for estimating four displacements from the sixteen capacitances using fourth-order polynomial approximation of characteristics between capacitance and displacement. The estimation results from measured capacitances had large error caused by deterioration of the characteristics. In this study, effective capacitors had major information were selected on the basis of the capacitance change range and the characteristic shape. Maximum errors in calibration and non-calibration points were 25%and 6.8%.However the maximum error was larger than desired value, the smallness of averaged value indicated the occurrence of a few large error points. On the other hand, error in non-calibration point was within desired value.

 

Keywords: Force sensors, capacitive sensors, estimation, iterative algorithms.

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1565 Drafting the Design and Development of Micro- Controller Based Portable Soil Moisture Sensor for Advancement in Agro Engineering

Authors: Guneet Mander, Gurinder Pal Singh

Abstract:

Moisture is an important consideration in many aspects ranging from irrigation, soil chemistry, golf course, corrosion and erosion, road conditions, weather predictions, livestock feed moisture levels, water seepage etc. Vegetation and crops always depend more on the moisture available at the root level than on precipitation occurrence. In this paper, design of an instrument is discussed which tells about the variation in the moisture contents of soil. This is done by measuring the amount of water content in soil by finding the variation in capacitance of soil with the help of a capacitive sensor. The greatest advantage of soil moisture sensor is reduced water consumption. The sensor is also be used to set lower and upper threshold to maintain optimum soil moisture saturation and minimize water wilting, contributes to deeper plant root growth ,reduced soil run off /leaching and less favorable condition for insects and fungal diseases. Capacitance method is preferred because, it provides absolute amount of water content and also measures water content at any depth.

Keywords: Capacitive Sensors, aluminum, Water, Irrigation.

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1564 Numerical Investigation of the Effect of Flow and Heat Transfer of a Semi-Cylindrical Obstacle Located in a Channel

Authors: Omer F. Can, Nevin Celik

Abstract:

In this study, a semi-cylinder obstacle placed in a channel is handled to determine the effect of flow and heat transfer around the obstacle. Both faces of the semi-cylinder are used in the numerical analysis. First, the front face of the semi-cylinder is stated perpendicular to flow, than the rear face is placed. The study is carried out numerically, by using commercial software ANSYS 11.0. The well-known κ-ε model is applied as the turbulence model. Reynolds number is in the range of 104 to 105 and air is assumed as the flowing fluid. The results showed that, heat transfer increased approximately 15 % in the front faze case, while it enhanced up to 28 % in the rear face case.

Keywords: External flow, semi-cylinder obstacle, heat transfer, friction.

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1563 A Wireless Sensor Network Protocol for a Car Parking Space Monitoring System

Authors: Jung-Ho Moon, Myung-Gon Yoon, Tae Kwon Ha

Abstract:

This paper presents a wireless sensor network protocol for a car parking monitoring system. A wireless sensor network for the purpose is composed of multiple sensor nodes, a sink node, a gateway, and a server. Each of the sensor nodes is equipped with a 3-axis AMR sensor and deployed in the center of a parking space. The sensor node reads its sensor values periodically and transmits the data to the sink node if the current and immediate past sensor values show a difference exceeding a threshold value. The operations of the sink and sensor nodes are described in detail along with flow diagrams. The protocol allows a low-duty cycle operation of the sensor nodes and a flexible adjustment of the threshold value used by the sensor nodes.

Keywords: Car parking monitoring, sensor node, wireless sensor network, network protocol.

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1562 Highly Flexible Modularized Sensor Platform

Authors: Kai-Chao Yang, Chun-Ming Huang, Chih-Chiao Yang, Chien-Ming Wu

Abstract:

Sensors have been used in various kinds of academic fields and applications. In this article, we propose the idea of modularized sensors that combine multiple sensor modules into a unique sensor. We divide a sensor into several units according to functionalities. Each unit has different sensor modules, which share the same type of connectors and can be serially and arbitrarily connected each other. A user can combine different sensor modules into a sensor platform according to requirements. Compared with current modularized sensors, the proposed sensor platform is highly flexible and reusable. We have implemented the prototype of the proposed sensor platform, and the experimental results show the proposed platform can work correctly.

Keywords: Sensor device, sensor fusion.

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1561 Predictive Model of Sensor Readings for a Mobile Robot

Authors: Krzysztof Fujarewicz

Abstract:

This paper presents a predictive model of sensor readings for mobile robot. The model predicts sensor readings for given time horizon based on current sensor readings and velocities of wheels assumed for this horizon. Similar models for such anticipation have been proposed in the literature. The novelty of the model presented in the paper comes from the fact that its structure takes into account physical phenomena and is not just a black box, for example a neural network. From this point of view it may be regarded as a semi-phenomenological model. The model is developed for the Khepera robot, but after certain modifications, it may be applied for any robot with distance sensors such as infrared or ultrasonic sensors.

Keywords: Mobile robot, sensors, prediction, anticipation.

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1560 A Micro-Watt Second Order Filter for a Chopper Stabilized MEMS Pressure Sensor Interface

Authors: Arup K. George, Wai Pan Chan, Zhi Hui Kong, Minkyu Je

Abstract:

This paper describes a low-power second-order filter for a continuous-time chopper stabilized capacitive sensor interface, integrated with a fully differential post-CMOS surface-micromachined MEMS pressure sensor. The circuit uses a single-ended folded-cascode operational amplifier and two GM-C filters connected in cascade. The circuit is realized in a 0.18 μm CMOS process and offers differential to single-ended conversion. The novelty of the scheme is the cascade of two GM-C filters to achieve a second-order filter while minimizing power dissipation. The simulated filter cutoff frequency is 1.14 kHz at common-mode voltage 1.65 V, operating from a 3.3 V supply while dissipating 172μW of power. The filter achieves an operating range of 1V for an output load of 1MOhm and 10pF.

Keywords: Chopper Stabilization, MEMS, Pressure Sensors, Low Pass Filter

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1559 Application of Formyl-TIPPCu (II) for Temperature and Light Sensing

Authors: Dil Nawaz Khan, M. H. Sayyad, Muhammad Yaseen, Munawar Ali Munawar, Mukhtar Ali

Abstract:

Effect of temperature and light was investigated on a thin film of organic semiconductor formyl-TIPPCu(II) deposited on a glass substrate with preliminary evaporated gold electrodes. The electrical capacitance and resistance of the fabricated device were evaluated under the effect of temperature and light. The relative capacitance of the fabricated sensor increased by 4.3 times by rising temperature from 27 to 1870C, while under illumination up to 25000 lx, the capacitance of the Au/formyl-TIPPCu(II)/Au photo capacitive sensor increased continuously by 13.2 times as compared to dark conditions.

Keywords: formyl-TIPPCu(II), Organic semiconductor, Photocapacitance, Polarizability.

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1558 An 8-Bit, 100-MSPS Fully Dynamic SAR ADC for Ultra-High Speed Image Sensor

Authors: F. Rarbi, D. Dzahini, W. Uhring

Abstract:

In this paper, a dynamic and power efficient 8-bit and 100-MSPS Successive Approximation Register (SAR) Analog-to-Digital Converter (ADC) is presented. The circuit uses a non-differential capacitive Digital-to-Analog (DAC) architecture segmented by 2. The prototype is produced in a commercial 65-nm 1P7M CMOS technology with 1.2-V supply voltage. The size of the core ADC is 208.6 x 103.6 µm2. The post-layout noise simulation results feature a SNR of 46.9 dB at Nyquist frequency, which means an effective number of bit (ENOB) of 7.5-b. The total power consumption of this SAR ADC is only 1.55 mW at 100-MSPS. It achieves then a figure of merit of 85.6 fJ/step.

Keywords: CMOS analog to digital converter, dynamic comparator, image sensor application, successive approximation register.

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1557 Automatic Generation Control of an Interconnected Power System with Capacitive Energy Storage

Authors: Rajesh Joseph Abraham, D. Das, Amit Patra

Abstract:

This paper is concerned with the application of small rating Capacitive Energy Storage units for the improvement of Automatic Generation Control of a multiunit multiarea power system. Generation Rate Constraints are also considered in the investigations. Integral Squared Error technique is used to obtain the optimal integral gain settings by minimizing a quadratic performance index. Simulation studies reveal that with CES units, the deviations in area frequencies and inter-area tie-power are considerably improved in terms of peak deviations and settling time as compared to that obtained without CES units.

Keywords: Automatic Generation Control, Capacitive EnergyStorage, Integral Squared Error.

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1556 Data-driven ASIC for Multichannel Sensors

Authors: Eduard Atkin, Alexander Klyuev, Vitaly Shumikhin

Abstract:

An approach and its implementation in 0.18 m CMOS process of the multichannel ASIC for capacitive (up to 30 pF) sensors are described in the paper. The main design aim was to study an analog data-driven architecture. The design was done for an analog derandomizing function of the 128 to 16 structure. That means that the ASIC structure should provide a parallel front-end readout of 128 input analog sensor signals and after the corresponding fast commutation with appropriate arbitration logic their processing by means of 16 output chains, including analog-to-digital conversion. The principal feature of the ASIC is a low power consumption within 2 mW/channel (including a 9-bit 20Ms/s ADC) at a maximum average channel hit rate not less than 150 kHz.

Keywords: Data-driven architecture, derandomizer, multichannel sensor readout

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1555 A Car Parking Monitoring System Using Wireless Sensor Networks

Authors: Jung-Ho Moon, Tae Kwon Ha

Abstract:

This paper presents a car parking monitoring system using wireless sensor networks. Multiple sensor nodes and a sink node, a gateway, and a server constitute a wireless network for monitoring a parking lot. Each of the sensor nodes is equipped with a 3-axis AMR sensor and deployed in the center of a parking space. Each sensor node reads its sensor values periodically and transmits the data to the sink node if the current and immediate past sensor values show a difference exceeding a threshold value. The sensor nodes and sink node use the 448 MHz band for wireless communication. Since RF transmission only occurs when sensor values show abrupt changes, the number of RF transmission operations is reduced and battery power can be conserved. The data from the sensor nodes reach the server via the sink node and gateway. The server determines which parking spaces are taken by cars based upon the received sensor data and reference values. The reference values are average sensor values measured by each sensor node when the corresponding parking spot is not occupied by a vehicle. Because the decision making is done by the server, the computational burden of the sensor node is relieved, which helps reduce the duty cycle of the sensor node.

Keywords: Car parking monitoring, magnetometer, sensor node, wireless sensor network.

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1554 Pull-In Instability Determination of Microcapacitive Sensor for Measuring Special Range of Pressure

Authors: Yashar Haghighatfar, Shahrzad Mirhosseini

Abstract:

Pull-in instability is a nonlinear and crucial effect that is important for the design of microelectromechanical system devices. In this paper, the appropriate electrostatic voltage range is determined by measuring fluid flow pressure via micro pressure sensor based microbeam. The microbeam deflection contains two parts, the static and perturbation deflection of static. The second order equation regarding the equivalent stiffness, mass and damping matrices based on Galerkin method is introduced to predict pull-in instability due to the external voltage. Also the reduced order method is used for solving the second order nonlinear equation of motion. Furthermore, in the present study, the micro capacitive pressure sensor is designed for measuring special fluid flow pressure range. The results show that the measurable pressure range can be optimized, regarding damping field and external voltage.

Keywords: MEMS, pull-in instability, electrostatically actuated microbeam, reduced order method.

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1553 A Trust Model using Fuzzy Logic in Wireless Sensor Network

Authors: Tae Kyung Kim, Hee Suk Seo

Abstract:

Adapting various sensor devices to communicate within sensor networks empowers us by providing range of possibilities. The sensors in sensor networks need to know their measurable belief of trust for efficient and safe communication. In this paper, we suggested a trust model using fuzzy logic in sensor network. Trust is an aggregation of consensus given a set of past interaction among sensors. We applied our suggested model to sensor networks in order to show how trust mechanisms are involved in communicating algorithm to choose the proper path from source to destination.

Keywords: Fuzzy, Sensor Networks, Trust.

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1552 Fabrication of Cylindrical Silicon Nanowire-Embedded Field Effect Transistor Using Al2O3 Transfer Layer

Authors: Sang Hoon Lee, Tae Il Lee, Su Jeong Lee, Jae Min Myoung

Abstract:

In order to manufacture short gap single Si nanowire (NW) field effect transistor (FET) by imprinting and transferring method, we introduce the method using Al2O3 sacrificial layer. The diameters of cylindrical Si NW addressed between Au electrodes by dielectrophoretic (DEP) alignment method are controlled to 106, 128, and 148 nm. After imprinting and transfer process, cylindrical Si NW is embedded in PVP adhesive and dielectric layer. By curing transferred cylindrical Si NW and Au electrodes on PVP-coated p++ Si substrate with 200nm-thick SiO2, 3μm gap Si NW FET fabrication was completed. As the diameter of embedded Si NW increases, the mobility of FET increases from 80.51 to 121.24 cm2/V·s and the threshold voltage moves from –7.17 to –2.44 V because the ratio of surface to volume gets reduced.

Keywords: Al2O3 Sacrificial transfer layer, cylindrical silicon nanowires, Dielectrophorestic alignment, Field effect transistor.

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1551 Volume Fraction Law for Stainless Steel on Inner Surface and Nickel on Outer Surface For FGM Cylindrical Shell

Authors: M.Hosseinjani Zamenjani, A.R.Tahmasebi Birgani, M.R.Isvandzibaei

Abstract:

Vibration of thin cylindrical shells made of a functionally gradient material composed of stainless steel and nickel is presented. The effects of the FGM configuration are studied by studying the frequencies of FG cylindrical shells. In this case FG cylindrical shell has Nickel on its outer surface and stainless steel on its inner surface. The study is carried out based on third order shear deformation shell theory. The objective is to study the natural frequencies, the influence of constituent volume fractions and the effects of configurations of the constituent materials on the frequencies. The properties are graded in the thickness direction according to the volume fraction power-law distribution. Results are presented on the frequency characteristics, the influence of the constituent various volume fractions on the frequencies.

Keywords: Nickel, Stainless Steel, Cylindrical shell.

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1550 A Nobel Approach for Campus Monitoring

Authors: Rashmi Priyadarshini, S. R. N. Reddy, R. M. Mehra

Abstract:

This paper presents one of the best applications of wireless sensor network for campus Monitoring. With the help of PIR sensor, temperature sensor and humidity sensor, effective utilization of energy resources has been implemented in one of rooms of Sharda University, Greater Noida, India. The RISC microcontroller is used here for analysis of output of sensors and providing proper control using ZigBee protocol. This wireless sensor module presents a tremendous power saving method for any campus

Keywords: PIC microcontroller, wireless sensor network, ZigBee.

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1549 Nickel on Inner Surface and Stainless Steel on Outer Surface for Functionally Graded Cylindrical Shell

Authors: A.R.Tahmasebi Birgani, M.Hosseinjani Zamenjani, M.R.Isvandzibaei

Abstract:

Study is on the vibration of thin cylindrical shells made of a functionally gradient material (FGM) composed of stainless steel and nickel is presented. The effects of the FGM configuration are studied by studying the frequencies of FG cylindrical shells. In this case FG cylindrical shell has Nickel on its inner surface and stainless steel on its outer surface. The study is carried out based on third order shear deformation shell theory. The objective is to study the natural frequencies, the influence of constituent volume fractions and the effects of configurations of the constituent materials on the frequencies. The properties are graded in the thickness direction according to the volume fraction power-law distribution. Results are presented on the frequency characteristics, the influence of the constituent various volume fractions on the frequencies.

Keywords: Nickel, Stainless Steel, Cylindrical shell.

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1548 Vibration of Functionally Graded Cylindrical Shells under Effects Clamped-Clamped Boundary Conditions

Authors: M.R.Alinaghizadehand, M.R.Isvandzibaei

Abstract:

Study of the vibration cylindrical shells made of a functionally gradient material (FGM) composed of stainless steel and nickel is important. Material properties are graded in the thickness direction of the shell according to volume fraction power law distribution. The objective is to study the natural frequencies, the influence of constituent volume fractions and the effects of boundary conditions on the natural frequencies of the FG cylindrical shell. The study is carried out using third order shear deformation shell theory. The governing equations of motion of FG cylindrical shells are derived based on shear deformation theory. Results are presented on the frequency characteristics, influence of constituent volume fractions and the effects of clampedclamped boundary conditions.

Keywords: Vibration, FGM, Cylindrical shell, Hamilton's principle.

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1547 Wireless Communicated Smart Wind Sensor

Authors: Zdenek Bohuslavek

Abstract:

Development of microprocessor controlled sensor for measurement of wind speed and direction is the aim of this study. Electrical circuits and software were developed to the existing electromechanical part of the sensor TM-W2 becoming the properties of so-called smart sensor. The measured data about wind speed (sensitivity 0.01 m/s) and direction (0-360° by step 10°) are transmitted as 16-bit information. The connection between sensor and control unit is realized by radio communication (FM 433 MHz). Transition range is 220 m if used Quad type antenna. This concept provides substitution of actual cable systems by wireless ones.

Keywords: smart wind sensor, anemometer, wind speed, wireless communication

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1546 Vibration of Functionally Graded Cylindrical Shells under Free-Free Boundary Conditions

Authors: A.R.Tahmasebi Birgani, M.Hosseinjani Zamenjani, M.R.Isvandzibaei

Abstract:

In the present work, study of the vibration of thin cylindrical shells made of a functionally gradient material (FGM) composed of stainless steel and nickel is presented. Material properties are graded in the thickness direction of the shell according to volume fraction power law distribution. The objective is to study the natural frequencies, the influence of constituent volume fractions and the effects of boundary conditions on the natural frequencies of the FG cylindrical shell. The study is carried out using third order shear deformation shell theory. The governing equations of motion of FG cylindrical shells are derived based on shear deformation theory. Results are presented on the frequency characteristics, influence of constituent volume fractions and the effects of free-free boundary conditions.

Keywords: Vibration, FGM, Cylindrical shell.

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1545 Plasma Density Distribution in Asymmetric Geometry Capacitive Coupled Plasma Discharge System

Authors: Yinchang Du, Yangfang Li

Abstract:

In this work, we used the single Langmuir probe to measure the plasma density distribution in an geometrically asymmetric capacitive coupled plasma discharge system. Because of the frame structure of powered electrode, the plasma density was not homogeneous in the discharge volume. It was higher under the frame, but lower in the centre. Finite element simulation results showed a good agreement with the experiment results. To increase the electron density in the central volume and improve the homogeneity of the plasma, we added an auxiliary electrode, powered by DC voltage, in the simulation geometry. The simulation results showed that the auxiliary electrode could alter the potential distribution and improve the density homogeneity effectively.

Keywords: Capacitive coupled discharge, asymmetric discharge, homogeneous plasma.

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1544 Valuation on MEMS Pressure Sensors and Device Applications

Authors: Nurul Amziah Md Yunus, Izhal Abdul Halin, Nasri Sulaiman, Noor Faezah Ismail, Ong Kai Sheng

Abstract:

The MEMS pressure sensor has been introduced and presented in this paper. The types of pressure sensor and its theory of operation are also included. The latest MEMS technology, the fabrication processes of pressure sensor are explored and discussed. Besides, various device applications of pressure sensor such as tire pressure-monitoring system, diesel particulate filter and others are explained. Due to further miniaturization of the device nowadays, the pressure sensor with nanotechnology (NEMS) is also reviewed. The NEMS pressure sensor is expected to have better performance as well as lower in its cost. It has gained an excellent popularity in many applications.

Keywords: Pressure sensor, diaphragm, MEMS, automotive application, biomedical application, NEMS.

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