Yinchang Du and Yangfang Li, Plasma Density Distribution in Asymmetric Geometry Capacitive Coupled Plasma Discharge System. journal = {International Journal of Physical and Mathematical Sciences}, [online]. World Academy of Science, Engineering and Technology. November 2012, vol. 71(11). 1534 - 1537 [viewed 28 March 2024]. Available from: https://publications.waset.org/pdf/5878.