Search results for: MEMS Actuator

Authors: M. Honarpardaz, Z. Zhang, J. Derkx, A. Trangärd, J. Larsson

Abstract:

Pilot stages are one of the most common positioners and regulators in industry. In this paper, we present two novel concepts for pilot stages with low power consumption to regulate a pneumatic device. Pilot 1, first concept, is designed based on a conventional frame core electro-magnetic actuator and a leaf spring to control the air flow and pilot 2 has an axisymmetric actuator and spring made of non-oriented electrical steel. Concepts are simulated in a system modeling tool to study their dynamic behavior. Both concepts are prototyped and tested. Experimental results are comprehensively analyzed and compared. The most promising concept that consumes less than 8 mW is highlighted and presented.

Keywords: Electro-magnetic actuator, multidisciplinary system, low power consumption, pilot stage.

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Authors: Mutuku Muvengei, John Kihiu

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In this paper, a bond graph dynamic model for a valvecontrolled hydraulic cylinder has been developed. A simplified bond graph model of the inter-actuator interactions in a multi-cylinder hydraulic system has also been presented. The overall bond graph model of a valve-controlled hydraulic cylinder was developed by combining the bond graph sub-models of the pump, spool valve and the actuator using junction structures. Causality was then assigned in order to obtain a computational model which could be simulated. The causal bond graph model of the hydraulic cylinder was verified by comparing the open loop state responses to those of an ODE model which had been developed in literature based on the same assumptions. The results were found to correlate very well both in the shape of the curves, magnitude and the response times, thus indicating that the developed model represents the hydraulic dynamics of a valve-controlled cylinder. A simplified model for interactuator interaction was presented by connecting an effort source with constant pump pressure to the zero-junction from which the cylinders in a multi-cylinder system are supplied with a constant pressure from the pump. On simulating the state responses of the developed model under different situations of cylinder operations, indicated that such a simple model can be used to predict the inter-actuator interactions.

Keywords: Bond graphs, Inter-actuator interactions, Valvecontrolledhydraulic cylinder.

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Authors: Ishtiaq A. Chaudhry, Zia R. Tahir

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Experimental investigation has been carried out towards understanding the complex fluid dynamics involved in the interaction of vortical structures with zero pressure gradient boundary layer. A laminar boundary layer is produced on the flat plate placed in the water flume and the synthetic jet actuator is deployed on top of the plate at a definite distance from the leading edge. The synthetic jet actuator has been designed in such a way that the to and fro motion of the diaphragm is maneuvered at will by varying the operating parameters to produce the typical streamwise vortical structures namely hairpin and tilted vortices. PIV measurements are made on the streamwise plane normal to the plate to evaluate their interaction with the near wall fluid.

Keywords: Boundary layer, synthetic jet actuator, flow separation control, vortical structures.

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Authors: Basharat Ali Haider, Naveed Durrani, Nadeem Aizud, Salimuddin Zahir

Abstract:

The aerodynamic stall control of a baseline 13-percent thick NASA GA(W)-2 airfoil using a synthetic jet actuator (SJA) is presented in this paper. Unsteady Reynolds-averaged Navier-Stokes equations are solved on a hybrid grid using a commercial software to simulate the effects of a synthetic jet actuator located at 13% of the chord from the leading edge at a Reynolds number Re = 2.1x106 and incidence angles from 16 to 22 degrees. The experimental data for the pressure distribution at Re = 3x106 and aerodynamic coefficients at Re = 2.1x106 (angle of attack varied from -16 to 22 degrees) without SJA is compared with the computational fluid dynamic (CFD) simulation as a baseline validation. A good agreement of the CFD simulations is obtained for aerodynamic coefficients and pressure distribution. A working SJA has been integrated with the baseline airfoil and initial focus is on the aerodynamic stall control at angles of attack from 16 to 22 degrees. The results show a noticeable improvement in the aerodynamic performance with increase in lift and decrease in drag at these post stall regimes.

Keywords: Active flow control, Aerodynamic stall, Airfoilperformance, Synthetic jet actuator.

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Authors: Arup K. George, Wai Pan Chan, Zhi Hui Kong, Minkyu Je

Abstract:

This paper describes a low-power second-order filter for a continuous-time chopper stabilized capacitive sensor interface, integrated with a fully differential post-CMOS surface-micromachined MEMS pressure sensor. The circuit uses a single-ended folded-cascode operational amplifier and two GM-C filters connected in cascade. The circuit is realized in a 0.18 μm CMOS process and offers differential to single-ended conversion. The novelty of the scheme is the cascade of two GM-C filters to achieve a second-order filter while minimizing power dissipation. The simulated filter cutoff frequency is 1.14 kHz at common-mode voltage 1.65 V, operating from a 3.3 V supply while dissipating 172μW of power. The filter achieves an operating range of 1V for an output load of 1MOhm and 10pF.

Keywords: Chopper Stabilization, MEMS, Pressure Sensors, Low Pass Filter

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Authors: Hiroyuki Nishida, Taku Nonomura, Takashi Abe

Abstract:

Wall-surface jet induced by the dielectric barrier discharge (DBD) has been proposed as an actuator for active flow control in aerodynamic applications. Discharge plasma evolution of the DBD plasma actuator was simulated based on a simple fluid model, in which the electron, one type of positive ion and negative ion were taken into account. Two-dimensional simulation was conducted, and the results are in agreement with the insights obtained from experimental studies. The simulation results indicate that the discharge mode changes depending on applied voltage slope; when the applied voltage is positive-going with high applied voltage slope, the corona-type discharge mode turns into the streamer-type discharge mode and the threshold voltage slope is around 300 kV/ms in this simulation. The characteristics of the electrohydrodynamic (EHD) force, which is the source of the wall-surface jet, also change depending on the discharge mode; the tentative peak value of the EHD force during the positive-going voltage phase is saturated by the periodical formation of the streamer-type discharge.

Keywords: Dielectric barrier discharge, Plasma actuator, Fluid simulation.

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Authors: Norbert Burger, Thorsten Staake

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What influences microsystems (MEMS) and nanosystems (NEMS) innovation teams apart from technology complexity? Based on in-depth interviews with innovators, this research explores the key influences on innovation teams in the early phases of MEMS/NEMS. Projects are rare and may last from 5 to 10 years or more from idea to concept. As fundamental technology development in MEMS/NEMS is highly complex and interdisciplinary by involving expertise from different basic and engineering disciplines, R&D is rather a 'testing of ideas' with many uncertainties than a clearly structured process. The purpose of this study is to explore the innovation teams- environment and give specific insights for future management practices. The findings are grouped into three major areas: people, know-how and experience, and market. The results highlight the importance and differences of innovation teams- composition, transdisciplinary knowledge, project evaluation and management compared to the counterparts from new product development teams.

Keywords: Innovation teams, early phases, Microsystems, Nanosystems, technology developments.

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Authors: Dawei Cai

Abstract:

This paper describes a design of earphone style wearable device that may provide an automatic guidance service for visitors. With both position information and orientation information obtained from NFC and terrestrial magnetism sensor, a high level automatic guide service may be realized. To realize the service, a algorithm for position detection using the packet from NFC tags, and developed an algorithm to calculate the device orientation based on the data from acceleration and terrestrial magnetism sensors called as MEMS. If visitors want to know some explanation about an exhibit in front of him, what he has to do is only move to the object and stands for a moment. The identification program will automatically recognize the status based on the information from NFC and MEMS, and start playing explanation content about the exhibit. This service should be useful for improving the understanding of the exhibition items and bring more satisfactory visiting experience without less burden.

Keywords: Wearable device, MEMS sensor, NFC, ubiquitous computing, guide system.

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Authors: Ivan Yatchev, Ewen Ritchie

Abstract:

Comparison of two approaches for the simulation of the dynamic behaviour of a permanent magnet linear actuator is presented. These are full coupled model, where the electromagnetic field, electric circuit and mechanical motion problems are solved simultaneously, and decoupled model, where first a set of static magnetic filed analysis is carried out and then the electric circuit and mechanical motion equations are solved employing bi-cubic spline approximations of the field analysis results. The results show that the proposed decoupled model is of satisfactory accuracy and gives more flexibility when the actuator response is required to be estimated for different external conditions, e.g. external circuit parameters or mechanical loads.

Keywords: Coupled problems, dynamic models, finite elementanalysis, linear actuators, permanent magnets.

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Authors: Dawei Cai

Abstract:

In this paper, we present an autonomous guidance service by combinating the position information from NFC and the orientation information from 6 a 6 axis acceleration and terrestrial magnetism sensor. We developed an algorithm to calculate the device orientation  based on the data from acceleration and terrestrial magnetism sensor.With this function, a autonomous guidance service can be provided, according the visitors's position and orientation. This service may be convient for old people or disables or children.

Keywords: NFC, Ubiquitous Computing, Guide Sysem, MEMS.

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Authors: Sh. Foroughi, V. Karamzadeh, M. Packirisamy

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This paper presents design and analysis of an electrothermally symmetrical actuated microgripper applicable for performing micro assembly or biological cell manipulation. Integration of micro-optics with microdevice leads to achieve extremely precise control over the operation of the device. Geometry, material, actuation, control, accuracy in measurement and temperature distribution are important factors which have to be taken into account for designing the efficient microgripper device. In this work, analyses of four different geometries are performed by means of COMSOL Multiphysics 5.2 with implementing Finite Element Methods. Then, temperature distribution along the fingertip, displacement of gripper site as well as optical efficiency vs. displacement and electrical potential are illustrated. Results show in addition to the industrial application of this device, the usage of that as a cell manipulator is possible.

Keywords: Electro thermal actuator, MEMS, Microgripper, MOEMS.

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Authors: M. Derayatifar, M. Packirisamy, R.B. Bhat

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Role of piezoelectric energy harvesters has gained interest in supplying power for micro devices such as health monitoring sensors. In this study, in order to enhance the piezoelectric energy harvesting in capturing energy from broader range of excitation and to improve the mechanical and electrical responses, bimorph piezoelectric energy harvester beam with magnetic mass attached at the end is presented. In view of overcoming the brittleness of piezo-ceramics, functionally graded piezoelectric layers comprising of both piezo-ceramic and piezo-polymer is employed. The nonlinear equations of motions are derived using energy method and then solved analytically using perturbation scheme. The frequency responses of the forced vibration case are obtained for the near resonance case. The nonlinear dynamic responses of the MEMS scaled functionally graded piezoelectric energy harvester in this paper may be utilized in different design scenarios to increase the efficiency of the harvester.

Keywords: Energy harvesting, functionally graded piezoelectric material, magnetic force, MEMS piezoelectric, perturbation method.

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Authors: Dong Sang Yoo

Abstract:

The problem of finding control laws for underactuated systems has attracted growing attention since these systems are characterized by the fact that they have fewer actuators than the degrees of freedom to be controlled. The acrobot, which is a planar two-link robotic arm in the vertical plane with an actuator at the elbow but no actuator at the shoulder, is a representative in underactuated systems. In this paper, the dynamic model of the acrobot is implemented using Mathworks’ Simscape. And the sliding mode control is constructed using MATLAB and Simulink.

Keywords: Acrobot, MATLAB and Simulink, sliding mode control, underactuated systems.

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Authors: Sun-Ki Hong, Yong-Ho Cho, Ki-Seok Kim, Tae-Sam Kang

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Piezoelectric actuator is treated as RC load when it is modeled electrically. For some piezoelectric actuator applications, arbitrary voltage is required to actuate. Especially for unidirectional arbitrary voltage driving like as sine wave, some special inverter with circuit that can charge and discharge the capacitive energy can be used. In this case, the difference between power supply level and the object voltage level for RC load is varied. Because the control gain is constant, the controlled output is not uniform according to the voltage difference. In this paper, for charge and discharge circuit for unidirectional arbitrary voltage driving for piezoelectric actuator, the controller gain is controlled according to the voltage difference. With the proposed simple idea, the load voltage can have controlled smoothly although the voltage difference is varied. The appropriateness is proved from the simulation of the proposed circuit.

Keywords: Analog voltage inverter, Capacitive load, Gain control, DC-DC converter, Piezoelectric, Voltage waveform.

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Authors: Chien-Chun Kung, Feng-Lung Chiang, Kuei-Yi Chen, Hsien-Wen Wei, Ming-Yi Huang, Cai-Ming Huang, Sheng-Kai Wang

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The aim of this paper is to present a new three-dimensional proportional-pursuit coupled (PP) guidance law to track highly maneuverable aircraft. Utilizing a 3-D polar coordinate frame, the PP guidance law is formed by collecting proportional navigation guidance in Z-R plane and pursuit guidance in X-Y plane. Feedback linearization control method to solve the guidance accelerations is used to implement PP guidance. In order to compensate the actuator time delay, the time delay compensated version of PP guidance law (CPP) was derived and proved the effectiveness of modifying the problem of high acceleration in the final phase of pursuit guidance and improving the weak robustness of proportional navigation. The simulation results for intercepting Max G turn situation show that the proposed proportional-pursuit coupled guidance law guidance law with actuator delay compensation (CPP) possesses satisfactory robustness and performance.

Keywords: Feedback linearization control, time delay, guidance law, robustness, proportional navigation guidance, pursuit guidance.

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Authors: Rajib Ul Alam Uzzal, Ion Stiharu, Waiz Ahmed

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This paper presents the modeling of a MEMS based accelerometer in order to detect the presence of a wheel flat in the railway vehicle. A haversine wheel flat is assigned to one wheel of a 5 DOF pitch plane vehicle model, which is coupled to a 3 layer track model. Based on the simulated acceleration response obtained from the vehicle-track model, an accelerometer is designed that meets all the requirements to detect the presence of a wheel flat. The proposed accelerometer can survive in a dynamic shocking environment with acceleration up to ±150g. The parameters of the accelerometer are calculated in order to achieve the required specifications using lumped element approximation and the results are used for initial design layout. A finite element analysis code (COMSOL) is used to perform simulations of the accelerometer under various operating conditions and to determine the optimum configuration. The simulated results are found within about 2% of the calculated values, which indicates the validity of lumped element approach. The stability of the accelerometer is also determined in the desired range of operation including the condition under shock.

Keywords: MEMS accelerometer, Pitch plane vehicle, wheel flat.

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Authors: Kyung-Jung Lee, Young-Hun Ki, Hyun-Sik Ahn

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In this paper, we propose a hardware and software design method for automotive Electronic Control Units (ECU) considering the functional safety. The proposed ECU is considered for the application to Electro-Mechanical Actuator systems and the validity of the design method is shown by the application to the Electro-Mechanical Brake (EMB) control system which is used as a brake actuator in Brake-By-Wire (BBW) systems. The importance of a functional safety-based design approach to EMB ECU design has been emphasized because of its safety-critical functions, which are executed with the aid of many electric actuators, sensors, and application software. Based on hazard analysis and risk assessment according to ISO26262, the EMB system should be ASIL-D-compliant, the highest ASIL level. To this end, an external signature watchdog and an Infineon 32-bit microcontroller TriCore are used to reduce risks considering common-cause hardware failure. Moreover, a software design method is introduced for implementing functional safety-oriented monitoring functions based on an asymmetric dual core architecture considering redundancy and diversity. The validity of the proposed ECU design approach is verified by using the EMB Hardware-In-the-Loop (HILS) system, which consists of the EMB assembly, actuator ECU, a host PC, and a few debugging devices. Furthermore, it is shown that the existing sensor fault tolerant control system can be used more effectively for mitigating the effects of hardware and software faults by applying the proposed ECU design method.

Keywords: BBW (Brake-By-wire), EMB (Electro-Mechanical Brake), Functional Safety, ISO26262.

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Authors: Chiang-Ho Cheng, An-Shik Yang, Hong-Yih Cheng

Abstract:

This paper applies the MEMS technology to design and fabricate a micro-bubble generator by a piezoelectric actuator. Coupled with a nickel nozzle plate, an annular piezoelectric ceramic was utilized as the primary structure of the generator. In operations, the piezoelectric element deforms transversely under an electric field applied across the thickness of the generator. The surface of the nozzle plate can expand or contract because of the induction of radial strain, resulting in the whole structure to bend, and successively transport oxygen micro-bubbles into the blood flow for enhancing the oxygen content in blood. In the tests, a high magnification microscope and a high speed CCD camera were employed to photograph the time evolution of meniscus shape of gaseous bubbles dispensed from the micro-bubble generator for flow visualization. This investigation thus explored the bubble formation process including the influences of inlet gas pressure along with driving voltage and resonance frequency on the formed bubble extent.

Keywords: Micro-bubble, nozzle, oxygenator, piezoelectric.

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Authors: Tawiwat V., Tosapolporn P., Kedit J.

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This research proposes the state of art on how to control or find the trajectory paths of the RRP robot when the prismatic joint is malfunction. According to this situation, the minimum energy of the dynamic optimization is applied. The RRP robot or similar systems have been used in many areas such as fire fighter truck, laboratory equipment and military truck for example a rocket launcher. In order to keep on task that assigned, the trajectory paths must be computed. Here, the open loop control is applied and the result of an example show the reasonable solution which can be applied to the controllable system.

Keywords: RRP robot, Optimal Control, Minimum Energy and Under Actuator.

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Authors: Consalva J. Msigwa, Beda J. Kundy, Bakari M. M. Mwinyiwiwa

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In this paper the reference current for Voltage Source Converter (VSC) of the Shunt Active Power Filter (SAPF) is generated using Synchronous Reference Frame method, incorporating the PI controller with anti-windup scheme. The proposed method improves the harmonic filtering by compensating the winding up phenomenon caused by the integral term of the PI controller. Using Reference Frame Transformation, the current is transformed from om a - b - c stationery frame to rotating 0 - d - q frame. Using the PI controller, the current in the 0 - d - q frame is controlled to get the desired reference signal. A controller with integral action combined with an actuator that becomes saturated can give some undesirable effects. If the control error is so large that the integrator saturates the actuator, the feedback path becomes ineffective because the actuator will remain saturated even if the process output changes. The integrator being an unstable system may then integrate to a very large value, the phenomenon known as integrator windup. Implementing the integrator anti-windup circuit turns off the integrator action when the actuator saturates, hence improving the performance of the SAPF and dynamically compensating harmonics in the power network. In this paper the system performance is examined with Shunt Active Power Filter simulation model.

Keywords: Phase Locked Loop (PLL), Voltage SourceConverter (VSC), Shunt Active Power Filter (SAPF), PI, Pulse WidthModulation (PWM).

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Authors: Ali Fellah Jahromi, Wen Fang Xie, Rama B. Bhat

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A semi-active control strategy for suspension systems of passenger cars is presented employing Magnetorheological (MR) dampers. The vehicle is modeled with seven DOFs including the, roll pitch and bounce of car body, and the vertical motion of the four tires. In order to design an optimal controller based on the actuator constraints, a Linear-Quadratic Regulator (LQR) is designed. The design procedure of the LQR consists of selecting two weighting matrices to minimize the energy of the control system. This paper presents a hybrid optimization procedure which is a combination of gradient-based and evolutionary algorithms to choose the weighting matrices with regards to the actuator constraint. The optimization algorithm is defined based on maximum comfort and actuator constraints. It is noted that utilizing the present control algorithm may significantly reduce the vibration response of the passenger car, thus, providing a comfortable ride.

Keywords: Full car model, Linear Quadratic Regulator, Sequential Quadratic Programming, Genetic Algorithm

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Authors: Saman M. Siddiqui, Fang Jiancheng

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Micro electromechanical sensors (MEMS) play a vital role along with global positioning devices in navigation of autonomous vehicles .These sensors are low cost ,easily available but depict colored noises and unpredictable discontinuities .Conventional filters like Kalman filters and Sigma point filters are not able to cope with nonwhite noises. This research has utilized H∞ filter in nonlinear frame work both with Kalman filter and Unscented filter for navigation and self alignment of an airborne vehicle. The system is simulated for colored noises and discontinuities and results are compared with not robust nonlinear filters. The results are found 40%-70% more robust against colored noises and discontinuities.

Keywords: filtering, integrated navigation, MEMS, nonlinearfiltering, self alignment

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Authors: Saman M. Siddiqui, Fang Jiancheng

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Robust nonlinear integrated navigation of GPS and low cost MEMS is a hot topic of research these days. A robust filter is required to cope up with the problem of unpredictable discontinuities and colored noises associated with low cost sensors. H∞ filter is previously used in Extended Kalman filter and Unscented Kalman filter frame. Unscented Kalman filter has a problem of Cholesky matrix factorization at each step which is a very unstable operation. To avoid this problem in this research H∞ filter is designed in Square root Unscented filter framework and found 50% more robust towards increased level of colored noises.

Keywords: H∞ filter, MEMS, GPS, Nonlinear system, robust system, Square root unscented filter.

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Authors: B. G. Sheeparamatti, Prashant Hanasi, Vanita Abbigeri

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The objective of this work is to carryout critical comparison of different actuation mechanisms like electrostatic, thermal, piezoelectric, and magnetic with reference to a micro cantilever. The relevant parameters like force generated, displacement are compared in actuation methods. With these results, helps in choosing the best actuation method for a particular application. In this study, Comsol/Multiphysics software is used. Modeling and simulation is done by considering the micro cantilever of same dimensions as an actuator using all the above mentioned actuation techniques. In addition to their small size, micro actuators consume very little power and are capable of accurate results. In this work, a comparison of actuation mechanisms is done to decide the efficient system in micro domain.

Keywords: Actuation techniques, microswitch, micro actuator, microsystems.

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Authors: Ilya Popov, Steven Hulshoff

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A numerical investigation of the effects of nanosecond barrier discharge on the stability of a two-dimensional free shear layer is performed. The computations are carried out using a compressible Navier-Stokes algorithm coupled with a thermodynamic model of the discharge. The results show that significant increases in the shear layer-s momentum thickness and Reynolds stresses occur due to actuation. Dependence on both frequency and amplitude of actuation are considered, and a comparison is made of the computed growth rates with those predicted by linear stability theory. Amplitude and frequency ranges for the efficient promotion of shear-layer instabilities are identified.

Keywords: NS-DBD, plasma, actuator, flow control, instability, shear layer

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Authors: Dongsu Wu, Hongbin Gu, Peng Li

Abstract:

A novel adaptive fuzzy trajectory tracking algorithm of Stewart platform based motion platform is proposed to compensate path deviation and degradation of controller-s performance due to actuator torque limit. The algorithm can be divided into two parts: the real-time trajectory shaping part and the joint space adaptive fuzzy controller part. For a reference trajectory in task space whenever any of the actuators is saturated, the desired acceleration of the reference trajectory is modified on-line by using dynamic model of motion platform. Meanwhile an additional action with respect to the difference between the nominal and modified trajectories is utilized in the non-saturated region of actuators to reduce the path error. Using modified trajectory as input, the joint space controller incorporates compute torque controller, leg velocity observer and fuzzy disturbance observer with saturation compensation. It can ensure stability and tracking performance of controller in present of external disturbance and position only measurement. Simulation results verify the effectiveness of proposed control scheme.

Keywords: Actuator saturation, adaptive fuzzy control, Stewartplatform, trajectory shaping, flight simulator

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Authors: Chiang-Ho Cheng, An-Shik Yang, Hong-Yih Cheng, Ming-Yu Lai

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This paper presents the design and fabrication of a novel piezoelectric actuator for a gas micro pump with check valve having the advantages of miniature size, light weight and low power consumption. The micro pump is designed to have eight major components, namely a stainless steel upper cover layer, a piezoelectric actuator, a stainless steel diaphragm, a PDMS chamber layer, two stainless steel channel layers with two valve seats, a PDMS check valve layer with two cantilever-type check valves and an acrylic substrate. A prototype of the gas micro pump, with a size of 52 mm × 50 mm × 5.0 mm, is fabricated by precise manufacturing. This device is designed to pump gases with the capability of performing the self-priming and bubble-tolerant work mode by maximizing the stroke volume of the membrane as well as the compression ratio via minimization of the dead volume of the micro pump chamber and channel. By experiment apparatus setup, we can get the real-time values of the flow rate of micro pump and the displacement of the piezoelectric actuator, simultaneously. The gas micro pump obtained higher output performance under the sinusoidal waveform of 250 Vpp. The micro pump achieved the maximum pumping rates of 1185 ml/min and back pressure of 7.14 kPa at the corresponding frequency of 120 and 50 Hz.

Keywords: PDMS, Check valve, Micro pump, Piezoelectric.

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Authors: R. Resmi, M. R. Baiju

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The thermal damping of a dynamic vibrating micromirror is an important factor affecting the design of MEMS based actuator systems. In the development process of new micromirror systems, assessing the extent of energy loss due to thermal damping accurately and predicting the performance of the system is very essential. In this paper, the depth of the thermal penetration layer at different eigenfrequencies and the temperature variation distributions surrounding a vibrating micromirror is analyzed. The thermal penetration depth corresponds to the thermal boundary layer in which energy is lost which is a measure of the thermal damping is found out. The energy is mainly dissipated in the thermal boundary layer and thickness of the layer is an important parameter. The detailed thermoacoustics is used to model the air domain surrounding the micromirror. The thickness of the boundary layer, temperature variations and thermal power dissipation are analyzed for a Si based torsional mode micromirror. It is found that thermal penetration depth decreases with eigenfrequency and hence operating the micromirror at higher frequencies is essential for reducing thermal damping. The temperature variations and thermal power dissipations at different eigenfrequencies are also analyzed. Both frequency-response and eigenfrequency analyses are done using COMSOL Multiphysics software.

Keywords: Eigen frequency analysis, micromirrors, thermal damping, thermoacoustic interactions.

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Authors: Sergey M. Karabanov, Dmitry V. Suvorov

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Magnetically controlled microelectromechanical system (MCMEMS) switches is one of the directions in the field of micropower switching technology. MCMEMS switches are a promising alternative to Hall sensors and reed switches. The most important parameter for MCMEMS is the contact resistance, which should have a minimum value and is to be stable for the entire duration of service life. The value and stability of the contact resistance is mainly determined by the contact coating material. This paper presents the research results of a contact coating based on nanoscale ruthenium films obtained by electrolytic deposition. As a result of the performed investigations, the deposition modes of ruthenium films are chosen, the regularities of the contact resistance change depending on the number of contact switching, and the coating roughness are established. It is shown that changing the coating roughness makes it possible to minimize the contact resistance.

Keywords: Contact resistance, electrode coating, electrolythic deposition, magnetically controlled MEMS.

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Authors: Othman Maklouf, Abdurazag Ghila, Ahmed Abdulla, Ameer Yousef

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Land vehicle navigation system technology is a subject of great interest today. Global Positioning System (GPS) is a common choice for positioning in such systems. However, GPS alone is incapable of providing continuous and reliable positioning, because of its inherent dependency on external electromagnetic signals. Inertial Navigation is the implementation of inertial sensors to determine the position and orientation of a vehicle. As such, inertial navigation has unbounded error growth since the error accumulates at each step. Thus in order to contain these errors some form of external aiding is required. The availability of low cost Micro-Electro-Mechanical-System (MEMS) inertial sensors is now making it feasible to develop Inertial Navigation System (INS) using an inertial measurement unit (IMU), in conjunction with GPS to fulfill the demands of such systems. Typically IMU’s are very expensive systems; however this INS will use “low cost” components. Unfortunately with low cost also comes low performance and is the main reason for the inclusion of GPS and Kalman filtering into the system. The aim of this paper is to develop a GPS/MEMS INS integrated system, which is able to provide a navigation solution with accuracy levels appropriate for land vehicle navigation. The primary piece of equipment used was a MEMS-based Crista IMU (from Cloud Cap Technology Inc.) and a Garmin GPS 18 PC (which is both a receiver and antenna). The integration of GPS with INS can be implemented using a Kalman filter in loosely coupled mode. In this integration mode the INS error states, together with any navigation state (position, velocity, and attitude) and other unknown parameters of interest, are estimated using GPS measurements. All important equations regarding navigation are presented along with discussion.

Keywords: GPS, IMU, Kalman Filter.

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