Ruthenium Based Nanoscale Contact Coatings for Magnetically Controlled MEMS Switches
Magnetically controlled microelectromechanical system (MCMEMS) switches is one of the directions in the field of micropower switching technology. MCMEMS switches are a promising alternative to Hall sensors and reed switches. The most important parameter for MCMEMS is the contact resistance, which should have a minimum value and is to be stable for the entire duration of service life. The value and stability of the contact resistance is mainly determined by the contact coating material. This paper presents the research results of a contact coating based on nanoscale ruthenium films obtained by electrolytic deposition. As a result of the performed investigations, the deposition modes of ruthenium films are chosen, the regularities of the contact resistance change depending on the number of contact switching, and the coating roughness are established. It is shown that changing the coating roughness makes it possible to minimize the contact resistance.
Digital Object Identifier (DOI): doi.org/10.5281/zenodo.2643518Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 436
 M. Vincent, L. Chiesi, J. C. Faurrier, A. Garnier, B . Grappe, C. Lapiere, C. Coutier, A. Samperio, S. Paineau, "Electrical contact reliability in magnetic MEMS switch", Proceedings of the 54th IEEE Holm Conf., Orlando, October 27-29, 2008, pp 145-150.
 C. Coutier, L. Chiesi, A. Garnier, J. C. Faurrier, C. Lapiere, M. Trouillon, B. Grappe, M. Vincent, A. Samperio, S. Borel, C. Dieppedale, E. Lorent, H. Sibuet, "A new magnetically actuated switch precise position detection", Proceedings of the 15th International Conf. Transducers 2009, Denver, June 21-25, pp. 861-864.
 S. Day, T. A Christenson, High Aspect Ratio Microfabricated Reed Switch Capable of Hot Switching. Holm Conference on Electrical Contacts (HOLM), 2013.
 S.M. Karabanov, R.M. Maizels, V.N. Shoffa. Magnetically operated switches (reed switches) and products on their basis, Dolgoprudniy, Publishing House "Intellect", 2011, 408 pages.
 Karabanov, A.S., Suvorov D.V., Grappe B., Coutier c., Sibuet H., Sazhin B.N., "Magnetically controlled MEMS switches with nanoscale contact coatings," 26th International Conference on Electrical Contacts (ICEC 2012), 2012) IET Conference Publications 2012 (605 CP) PP. 359-361. doi: 1049/cp.2012.0675.