WASET
	@article{(Open Science Index):https://publications.waset.org/pdf/10001977,
	  title     = {Development of Piezoelectric Gas Micro Pumps with the PDMS Check Valve Design},
	  author    = {Chiang-Ho Cheng and  An-Shik Yang and  Hong-Yih Cheng and  Ming-Yu Lai},
	  country	= {},
	  institution	= {},
	  abstract     = {This paper presents the design and fabrication of a
novel piezoelectric actuator for a gas micro pump with check valve
having the advantages of miniature size, light weight and low power
consumption. The micro pump is designed to have eight major
components, namely a stainless steel upper cover layer, a piezoelectric
actuator, a stainless steel diaphragm, a PDMS chamber layer, two
stainless steel channel layers with two valve seats, a PDMS check
valve layer with two cantilever-type check valves and an acrylic
substrate. A prototype of the gas micro pump, with a size of 52 mm ×
50 mm × 5.0 mm, is fabricated by precise manufacturing. This device
is designed to pump gases with the capability of performing the
self-priming and bubble-tolerant work mode by maximizing the stroke
volume of the membrane as well as the compression ratio via
minimization of the dead volume of the micro pump chamber and
channel. By experiment apparatus setup, we can get the real-time
values of the flow rate of micro pump and the displacement of the
piezoelectric actuator, simultaneously. The gas micro pump obtained
higher output performance under the sinusoidal waveform of 250 Vpp.
The micro pump achieved the maximum pumping rates of 1185
ml/min and back pressure of 7.14 kPa at the corresponding frequency
of 120 and 50 Hz.},
	    journal   = {International Journal of Mechanical and Mechatronics Engineering},
	  volume    = {9},
	  number    = {7},
	  year      = {2015},
	  pages     = {1268 - 1273},
	  ee        = {https://publications.waset.org/pdf/10001977},
	  url   	= {https://publications.waset.org/vol/103},
	  bibsource = {https://publications.waset.org/},
	  issn  	= {eISSN: 1307-6892},
	  publisher = {World Academy of Science, Engineering and Technology},
	  index 	= {Open Science Index 103, 2015},
	}