Search results for: porous Ni electrodes.

Authors: Jobby K. Chacko, Deepu Oommen, Kevin K. Mathew, Noble Sunny, N. Babu

Abstract:

A new cost effective, eye controlled method was introduced to guide and control a wheel chair for disable people, based on Electrooculography (EOG). The guidance and control is effected by eye ball movements within the socket. The system consists of a standard electric wheelchair with an on-board microcontroller system attached. EOG is a new technology to sense the eye signals for eye movements and these signals are captured using electrodes, signal processed such as amplification, noise filtering, and then given to microcontroller which drives the motors attached with wheel chair for propulsion. This technique could be very useful in applications such as mobility for handicapped and paralyzed persons.

Keywords: Electrooculography, Microcontroller, Signal processing, Wheelchair.

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Authors: M. Sasajima, M. Watanabe, T. Yamaguchi Y. Kurosawa, Y. Koike

Abstract:

In very narrow pathways, the speed of sound propagation and the phase of sound waves change due to the air viscosity. We have developed a new finite element method (FEM) that includes the effects of air viscosity for modeling a narrow sound pathway. This method is developed as an extension of the existing FEM for porous sound-absorbing materials. The numerical calculation results for several three-dimensional slit models using the proposed FEM are validated against existing calculation methods.

Keywords: Simulation, FEM, air viscosity, slit.

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Authors: Dil Nawaz Khan, M. H. Sayyad, Muhammad Yaseen, Munawar Ali Munawar, Mukhtar Ali

Abstract:

Effect of temperature and light was investigated on a thin film of organic semiconductor formyl-TIPPCu(II) deposited on a glass substrate with preliminary evaporated gold electrodes. The electrical capacitance and resistance of the fabricated device were evaluated under the effect of temperature and light. The relative capacitance of the fabricated sensor increased by 4.3 times by rising temperature from 27 to 1870C, while under illumination up to 25000 lx, the capacitance of the Au/formyl-TIPPCu(II)/Au photo capacitive sensor increased continuously by 13.2 times as compared to dark conditions.

Keywords: formyl-TIPPCu(II), Organic semiconductor, Photocapacitance, Polarizability.

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Authors: Zubair Ahmad, M. H. Sayyad, M. Yaseen, M. Ali

Abstract:

In this work, an organic compound 5,10,15,20- Tetrakis(3,5-di-tertbutylphenyl)porphyrinatocopper(II) (TDTBPPCu) is studied as an active material for thin film electronic devices. To investigate the electrical properties of TDTBPPCu, junction of TDTBPPCu with heavily doped n-Si and Al is fabricated. TDTBPPCu film was sandwiched between Al and n-Si electrodes. Various electrical parameters of TDTBPPCu are determined. The current-voltage characteristics of the junction are nonlinear, asymmetric and show rectification behavior, which gives the clue of formation of depletion region. This behavior indicates the potential of TDTBPPCu for electronics applications. The current-voltage and capacitance-voltage techniques are used to find the different electronic parameters.

Keywords: P-type, organic semiconductor, Electricalcharacteristics

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Authors: Imen Mejri, Ahmed Mahmoudi, Mohamed A. Abbassi, Ahmed Omri

Abstract:

The radiation effect within the solid anode, electrolyte, and cathode SOFC layers problem has been investigated in this paper. Energy equation is solved by the Lattice Boltzmann method (LBM). The Rosseland method is used to model the radiative transfer in the electrodes. The Schuster-Schwarzschild method is used to model the radiative transfer in the electrolyte. Without radiative effect, the found results are in good agreement with those published. The obtained results show that the radiative effect can be neglected.

Keywords: SOFC, lattice Boltzmann method, conduction, radiation.

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Authors: Tze Sian Pui, Tushar Bansal, Patthara Kongsuphol, Sunil K. Arya

Abstract:

We present a label-free biosensor based on electrochemical impedance spectroscopy for the detection of proinflammatory cytokine Tumor Necrosis Factor (TNF-α). Secretion of TNF-α has been correlated to the onset of various diseases including rheumatoid arthritis, Crohn-s disease etc. Gold electrodes were patterned on a silicon substrate and self assembled monolayer of dithiobis-succinimidyl propionate was used to develop the biosensor which achieved a detection limit of ~57fM. A linear relationship was also observed between increasing TNF-α concentrations and chargetransfer resistance within a dynamic range of 1pg/ml – 1ng/ml.

Keywords: Tumor necrosis factor, electrochemical impedance spectroscopy, label free, self assembled monolayer

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Authors: Zhazgul Kelgenbaeva, Emil Omurzak, Saadat Sulaimankulova, Tsutomu Mashimo

Abstract:

Spherical shaped magnetite (Fe3O4) and Au@Fe3O4 nanoparticles were successfully synthesized from Fe electrodes immersed in water with CTAB surfactant and HAuCl4 solution using simple method-pulsed plasma in liquid, without the use of dopants or special conditions for stabilization. Vibrating sample magnetometer indicated ferromagnetic behavior of particles at room temperature with coercivity and saturation magnetization of (Hc=105 Oe, Ms=6.83 emu/g) for Fe3O4 and (Hc=175, Ms=3.56emu/g) for Au@Fe3O4 nanoparticles. Structure and morphology of nanoparticles were characterized by X-ray Diffraction analysis and HR-TEM measurements. The cytotoxicity of nanoparticles was indicated using a XTT assay to be very low (cell viability: 98-89% with Fe3O4 and 99-91% for Au@Fe3O4 NPs).

Keywords: Magnetite, Gold coated magnetite, Nanoparticles, Pulsed Plasma in Liquid, Cytotoxicity.

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Authors: Gela Gelashvili, David Gelenidze, Sulkhan Nanobashvili, Irakli Nanobashvili, George Tavkhelidze, Tsiuri Sitchinava

Abstract:

Development of new highly efficient plasma arc combustion system of pulverized coal is presented. As it is well-known, coal is one of the main energy carriers by means of which electric and heat energy is produced in thermal power stations. The quality of the extracted coal decreases very rapidly. Therefore, the difficulties associated with its firing and complete combustion arise and thermo-chemical preparation of pulverized coal becomes necessary. Usually, other organic fuels (mazut-fuel oil or natural gas) are added to low-quality coal for this purpose. The fraction of additional organic fuels varies within 35-40% range. This decreases dramatically the economic efficiency of such systems. At the same time, emission of noxious substances in the environment increases. Because of all these, intense development of plasma combustion systems of pulverized coal takes place in whole world. These systems are equipped with Non-Transferred Plasma Arc Torches. They allow practically complete combustion of pulverized coal (without organic additives) in boilers, increase of energetic and financial efficiency. At the same time, emission of noxious substances in the environment decreases dramatically. But, the non-transferred plasma torches have numerous drawbacks, e.g. complicated construction, low service life (especially in the case of high power), instability of plasma arc and most important – up to 30% of energy loss due to anode cooling. Due to these reasons, intense development of new plasma technologies that are free from these shortcomings takes place. In our proposed system, pulverized coal-air mixture passes through plasma arc area that burns between to carbon electrodes directly in pulverized coal muffler burner. Consumption of the carbon electrodes is low and does not need a cooling system, but the main advantage of this method is that radiation of plasma arc directly impacts on coal-air mixture that accelerates the process of thermo-chemical preparation of coal to burn. To ensure the stability of the plasma arc in such difficult conditions, we have developed a power source that provides fixed current during fluctuations in the arc resistance automatically compensated by the voltage change as well as regulation of plasma arc length over a wide range. Our combustion system where plasma arc acts directly on pulverized coal-air mixture is simple. This should allow a significant improvement of pulverized coal combustion (especially low-quality coal) and its economic efficiency. Preliminary experiments demonstrated the successful functioning of the system.

Keywords: Coal combustion, plasma arc, plasma torches, pulverized coal.

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Authors: Sh. Sohrabnezhad, A. Jafarzadeh

Abstract:

In this paper, MCM-41 mesoporous material nanofibers were synthesized by an electrospinning technique. The nanofibers were characterized by scanning electron microscopy (SEM), transmission electron microscopy (TEM), x-ray diffraction (XRD), and nitrogen adsorption–desorption measurement. Tetraethyl orthosilicate (TEOS) and polyvinyl alcohol (PVA) were used as a silica source and fiber forming source, respectively. TEM and SEM images showed synthesis of MCM-41 nanofibers with a diameter of 200 nm. The pore diameter and surface area of calcined MCM-41 nanofibers was 2.2 nm and 970 m²/g, respectively. The morphology of the MCM-41 nanofibers depended on spinning voltages.

Keywords: Electrospinning, electron microscopy, fiber technology, porous materials, X-ray techniques.

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Authors: Asghar Shirazpour, Seyed Moein Rassoulinejad Mousavi, Hamid Reza Seyf

Abstract:

In this paper an analytical solution is presented for fully developed flow in a parallel plates channel under the action of Lorentz force, by use of Homotopy Perturbation Method (HPM). The analytical results are compared with exact solution and an excellent agreement has been observed between them for both Couette and Poiseuille flows. Moreover, the effects of key parameters have been studied on the dimensionless velocity profile.

Keywords: Lorentz Force, Porous Media, Homotopy Perturbation method

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Authors: Ahmad Kayvani Fard, Yehia Manawi

Abstract:

Qatar’s primary source of fresh water is through seawater desalination. Amongst the major processes that are commercially available on the market, the most common large scale techniques are Multi-Stage Flash distillation (MSF), Multi Effect distillation (MED), and Reverse Osmosis (RO). Although commonly used, these three processes are highly expensive down to high energy input requirements and high operating costs allied with maintenance and stress induced on the systems in harsh alkaline media. Beside that cost, environmental footprint of these desalination techniques are significant; from damaging marine eco-system, to huge land use, to discharge of tons of GHG and huge carbon footprint. Other less energy consuming techniques based on membrane separation are being sought to reduce both the carbon footprint and operating costs is membrane distillation (MD). Emerged in 1960s, MD is an alternative technology for water desalination attracting more attention since 1980s. MD process involves the evaporation of a hot feed, typically below boiling point of brine at standard conditions, by creating a water vapor pressure difference across the porous, hydrophobic membrane. Main advantages of MD compared to other commercially available technologies (MSF and MED) and specially RO are reduction of membrane and module stress due to absence of trans-membrane pressure, less impact of contaminant fouling on distillate due to transfer of only water vapor, utilization of low grade or waste heat from oil and gas industries to heat up the feed up to required temperature difference across the membrane, superior water quality, and relatively lower capital and operating cost. To achieve the objective of this study, state of the art flat-sheet cross-flow DCMD bench scale unit was designed, commissioned, and tested. The objective of this study is to analyze the characteristics and morphology of the membrane suitable for DCMD through SEM imaging and contact angle measurement and to study the water quality of distillate produced by DCMD bench scale unit. Comparison with available literature data is undertaken where appropriate and laboratory data is used to compare a DCMD distillate quality with that of other desalination techniques and standards. Membrane SEM analysis showed that the PTFE membrane used for the study has contact angle of 127º with highly porous surface supported with less porous and bigger pore size PP membrane. Study on the effect of feed solution (salinity) and temperature on water quality of distillate produced from ICP and IC analysis showed that with any salinity and different feed temperature (up to 70ºC) the electric conductivity of distillate is less than 5 μS/cm with 99.99% salt rejection and proved to be feasible and effective process capable of consistently producing high quality distillate from very high feed salinity solution (i.e. 100000 mg/L TDS) even with substantial quality difference compared to other desalination methods such as RO and MSF.

Keywords: Membrane Distillation, Waste Heat, Seawater Desalination, Membrane, Freshwater, Direct Contact Membrane Distillation

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Authors: Myoung Ro Kim, Gilwon Yoon

Abstract:

A game using electro-oculography (EOG) as control signal was introduced in this study. Various EOG signals are generated by eye movements. Even though EOG is a quite complex type of signal, distinct and separable EOG signals could be classified from horizontal and vertical, left and right eye movements. Proper signal processing was incorporated since EOG signal has very small amplitude in the order of micro volts and contains noises influenced by external conditions. Locations of the electrodes were set to be above and below as well as left and right positions of the eyes. Four control signals of up, down, left and right were generated. A microcontroller processed signals in order to simulate a DDR game. A LCD display showed arrows falling down with four different head directions. This game may be used as eye exercise for visual concentration and acuity. Our proposed EOG control signal can be utilized in many other applications of human machine interfaces such as wheelchair, computer keyboard and home automation.

Keywords: DDR game, EOG, eye movement.

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Authors: Alireza Behvandi, Somayeh Tourani

Abstract:

High pressure adsorption of carbon dioxide on zeolite 13X was investigated in the pressure range (0 to 4) Mpa and temperatures 298, 308 and 323K. The data fitting is accomplished with the Toth, UNILAN, Dubinin-Astakhov and virial adsorption models which are generally used for micro porous adsorbents such as zeolites. Comparison with experimental data from the literature indicated that the virial model would best determine results. These results may be partly attributed to the flexibility of the virial model which can accommodate as many constants as the data warrants.

Keywords: adsorption models, zeolite, carbon dioxide

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Authors: Shaharin A. Sulaiman, Mizuan Minhat

Abstract:

This paper presents development of an ignition system using spark electrodes for application in a research explosion vessel. A single spark is aimed to be discharged with quantifiable ignition energy. The spark electrode system would enable study of flame propagation, ignitability of fuel-air mixtures and other fundamental characteristics of flames. The principle of the capacitive spark circuit of ASTM is studied to charge an appropriate capacitance connected across the spark gap through a large resistor by a high voltage from the source of power supply until the initiation of spark. Different spark energies could be obtained mainly by varying the value of the capacitance and the supply current. The spark sizes produced are found to be affected by the spark gap, electrode size, input voltage and capacitance value.

Keywords: Ignition, Spark Electrode, Flame

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Authors: C. Phalakornkule, S. Polgumhang, W. Tongdaung

Abstract:

This study presents an investigation of electrochemical variables and an application of the optimal parameters in operating a continuous upflow electrocoagulation reactor in removing dye. Direct red 23, which is azo-based, was used as a representative of direct dyes. First, a batch mode was employed to optimize the design parameters: electrode type, electrode distance, current density and electrocoagulation time. The optimal parameters were found to be iron anode, distance between electrodes of 8 mm and current density of 30 A·m-2 with contact time of 5 min. The performance of the continuous upflow reactor with these parameters was satisfactory, with >95% color removal and energy consumption in the order of 0.6-0.7 kWh·m-3.

Keywords: Decolorization, Direct Dye, Electrocoagulation, Textile Wastewater, Upflow Reactor.

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Authors: Nirmala P. Ratchagar, S. Senthamilselvi

Abstract:

The heat and mass transfer characteristics of contaminants in groundwater subjected to a biodegradation reaction is analyzed by taking into account the thermal diffusion (Soret) effects. This phenomenon is modulated mathematically by a system of partial differential equations which govern the motion of fluid (groundwater) and solid (contaminants) particles. The numerical results are presented graphically for different values of the parameters entering into the problem on the velocity profiles of fluid, contaminants, temperature and concentration profile.

Keywords: Heat and mass transfer, Soret number, porous media.

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Authors: Carlos L. Antunes, Tony R. Almeida, Nélia Raposeiro, Belarmino Gonçalves, Paulo Almeida, André Antunes

Abstract:

In the last two decades radiofrequency ablation (RFA) has been considered a promising medical procedure for the treatment of primary and secondary malignancies. However, the needle-based electrodes so far developed for this kind of treatment are not suitable for the thermal ablation of tumors located in hollow organs like esophagus, colon or bile duct. In this work a tubular electrode solution is presented. Numerical and experimental analyses were performed to characterize the volume of the lesion induced. Results show that this kind of electrode is a feasible solution and numerical simulation might provide a tool for planning RFA procedure with some accuracy.

Keywords: 3D modeling, cancer, medical therapy, radiofrequency ablation.

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Authors: Bogdan Il. Bogdanov, Dimitar R.Rusev, Yancho H. Hristov, Irena G. Markovska, Dimitar P.Georgiev

Abstract:

New design of a grid for preparation of high density granules with enhanced mechanical strength by granulation of dispersed materials is suggested. A method for hydrodynamic dimensioning of the grid depending on granulation conditions, hydrodynamic regime of the operation, dispersity and physicochemical characteristics of the materials to be granulated was suggested. The aim of the grid design is to solve the problems arising by the granulation of disperse materials.

Keywords: fluidized bed reactor, granulation, porous silicatematerials.

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Authors: M. Sasajima, T. Yamaguchi, M. Watanabe, Y. Koike

Abstract:

This paper discusses the propagation of sound waves in air, specifically in narrow rectangular pathways of an occluded-ear simulator for acoustic measurements. In narrow pathways, both the speed of sound and the phase of the sound waves are affected by the damping of the air viscosity. Herein, we propose a new finite-element method (FEM) that considers the effects of the air viscosity. The method was developed as an extension of existing FEMs for porous, sound-absorbing materials. The results of a numerical calculation for a three-dimensional ear-simulator model using the proposed FEM were validated by comparing with theoretical lumped-parameter modeling analysis and standard values.

Keywords: Ear simulator, FEM, simulation, viscosity.

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Authors: H. Yazdani, K. Ghorbanian

Abstract:

This paper deals with modeling and simulation of the plasma actuator with OpenFOAM. Plasma actuator is one of the newest devices in flow control techniques which can delay separation by inducing external momentum to the boundary layer of the flow. The effects of the plasma actuators on the external flow are incorporated into Navier-Stokes computations as a body force vector which is obtained as a product of the net charge density and the electric field. In order to compute this body force vector, the model solves two equations: One for the electric field due to the applied AC voltage at the electrodes and the other for the charge density representing the ionized air. The simulation result is compared to the experimental and typical values which confirms the validity of the modeling.

Keywords: Active flow control, flow field, OpenFOAM, plasma actuator.

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Authors: Ramon Sancibrian, Carlos Redondo-Figuero, Maria C. Gutierrez-Diez, Esther G. Sarabia, Maria A. Benito-Gonzalez, Jose C. Manuel-Palazuelos

Abstract:

In this paper, the design and evaluation of a handle for laparoscopic surgery is presented. The design of the handle is based on ergonomic principles and tries to avoid awkward postures for surgeons. The handle combines the so-called power-grip and accurate-grip in order to provide strength and accuracy in the performance of surgery. The handle is tested using both objective and subjective approaches. The objective approach uses motion capture techniques to obtain the angles of forearm, arm, wrist and hand. The muscular effort is obtained with electromyography electrodes. On the other hand, a subjective survey has been carried out using questionnaires. Results confirm that the handle is preferred by the majority of the surgeons.

Keywords: Laparoscopic Surgery, Ergonomics, Mechanical Design, Biomechanics.

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Authors: Promise Sethembiso Ngema, Freeman Ntuli, Mohamed Belaid

Abstract:

The main objective of this study was to remove and recover Ni, Cu and Fe from a mixed metal system using sodium hypophosphite as a reducing agent and nickel powder as seeding material. The metal systems studied consisted of Ni-Cu, Ni-Fe and Ni-Cu-Fe solutions. A 5 L batch reactor was used to conduct experiments where 100 mg/l of each respective metal was used. It was found that the metals were reduced to their elemental form with removal efficiencies of over 80%. The removal efficiency decreased in the order Fe>Ni>Cu. The metal powder obtained contained between 97-99% Ni and was almost spherical and porous. Size enlargement by aggregation was the dominant particulate process.

Keywords: crystallization, electroless plating, heavy metal removal, wastewater treatment

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Authors: K.-J. You, H.J. Lee, Y. Lang, C. Im, C.S. Koh, H.-C. Shin

Abstract:

This paper presents a novel method for inferring the odor based on neural activities observed from rats- main olfactory bulbs. Multi-channel extra-cellular single unit recordings were done by micro-wire electrodes (tungsten, 50μm, 32 channels) implanted in the mitral/tufted cell layers of the main olfactory bulb of anesthetized rats to obtain neural responses to various odors. Neural response as a key feature was measured by substraction of neural firing rate before stimulus from after. For odor inference, we have developed a decoding method based on the maximum likelihood (ML) estimation. The results have shown that the average decoding accuracy is about 100.0%, 96.0%, 84.0%, and 100.0% with four rats, respectively. This work has profound implications for a novel brain-machine interface system for odor inference.

Keywords: biomedical signal processing, neural engineering, olfactory, neural decoding, BMI

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Authors: Kannanut Chamsri

Abstract:

Darcy’s Law is a well-known constitutive equation describing the flow of a fluid through a porous medium. The equation shows a relationship between the superficial or Darcy velocity and the pressure gradient which was first experimentally observed by Henry Darcy in 1855-1856. In this study, we apply homogenization method to Stokes equation in order to derive Darcy’s Law. The process of deriving the equation is complicated, especially in multidimensional domain. Thus, for the sake of simplicity, we use the indicial notation as well as the homogenization. This combination provides a smooth, simple and easy technique to derive Darcy’s Law.

Keywords: Darcy’s Law, Homogenization method, Indicial notation

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Authors: Zhypargul Abdullaeva, Emil Omurzak, Tsutomu Mashimo

Abstract:

Copper sulfide nanoparticles (CuS) were successfully synthesized by the pulsed plasma in liquid method, using two copper rod electrodes submerged in molten sulfur. Low electrical energy and no high temperature were applied for synthesis. Obtained CuS nanoparticles were then analyzed by means of X-ray diffraction, Low and High Resolution Transmission Electron Microscopy, Electron Diffraction, X-ray Photoelectron, Raman Spectroscopies and Field Emission Scanning Electron Microscopy. XRD analysis revealed peaks for CuS with hexagonal phase composition. TEM and HRTEM studies showed that sizes of CuS nanoparticles ranged between 10-60 nm, with the average size of about 20 nm. Copper sulfide nanoparticles have short nanorod-like structure. Raman spectroscopy found peak for CuS at 474.2cm-1of Raman region.

Keywords: Copper sulfide, Nanoparticles, Pulsed plasma, Synthesis.

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Authors: Onder Yakut, Serdar Solak, Emine Dogru Bolat

Abstract:

Measuring the Electrocardiogram (ECG) signal is an essential process for the diagnosis of the heart diseases. The ECG signal has the information of the degree of how much the heart performs its functions. In medical diagnosis and treatment systems, Decision Support Systems processing the ECG signal are being developed for the use of clinicians while medical examination. In this study, a modular wireless ECG (WECG) measuring and recording system using a single board computer and e-Health sensor platform is developed. In this designed modular system, after the ECG signal is taken from the body surface by the electrodes first, it is filtered and converted to digital form. Then, it is recorded to the health database using Wi-Fi communication technology. The real time access of the ECG data is provided through the internet utilizing the developed web interface.

Keywords: ECG, e-health sensor shield, raspberry Pi, wifi technology.

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Authors: Humanyun Zahir, Irtsam Ghazi

Abstract:

This paper outlines the basic installation and operation of magnetic inductive flow velocity sensors on large underground cooling water pipelines. Research on the effects of cathodic protection as well as into other factors that might influence the overall performance of the meter is presented in this paper. The experiments were carried out on an immersion type magnetic meter specially used for flow measurement of cooling water pipeline. An attempt has been made in this paper to outline guidelines that can ensure accurate measurement related to immersion type magnetic meters on underground pipelines.

Keywords: Magnetic Induction, Flow meter, Faradays law, Immersion, Cathodic protection, Anode, Cathode. Flange, Grounding, Plant information management system, Electrodes.

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Authors: A. Naga Rajesh, S. Chandralingam, T. Anjaneyulu, K. Satyanarayana

Abstract:

Assistive robotics are playing a vital role in advancing the quality of life for disable people. There exist wide range of systems that can control and guide autonomous mobile robots. The objective of the control system is to guide an autonomous mobile robot using the movement of eyes by means of EOG signal. The EOG signal is acquired using Ag/AgCl electrodes and this signal is processed by a microcontroller unit to calculate the eye gaze direction. Then according to the guidance control strategy, the control commands of the wheelchair are sent. The classification of different eye movements allows us to generate simple code for controlling the wheelchair. This work was aimed towards developing a usable and low-cost assistive robotic wheel chair system for disabled people. To live more independent life, the system can be used by the handicapped people especially those with only eye-motor coordination.

Keywords: Electrooculography, Microcontroller, Motors, Wheelchair.

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Authors: Danial Husseinzadeh

Abstract:

A new supported liquid membrane (SLM) system for the selective transport of VO2 + ions was prepared in this present work. The SLM was a thin porous polyvinylidene difluoride (PVDF) membrane soaked with Di-(2-ethylhexyl) phosphoric acid (D2EHPA) as mobile carrier in Xylene as organic solvent. D2EHPA acts as a highly selective carrier for the uphill transport of VO2 + ions through the SLM. The transport of VO2 + ions reached to 64%. In the presence of P2O7-2 ion as suitable masking agent in the feed solution, the interfering effects of other cations were eliminated.

Keywords: Facilitated ion transport, Membrane characteristics, Supported liquid membranes, Vanadium.

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Authors: Andrew Randles, Ilker Ocak, Cheam Daw Don, Navab Singh, Alex Gu

Abstract:

Nine Degrees of Freedom (9 DOF) systems are already in development in many areas. In this paper, an integrated pressure sensor is proposed that will make use of an already existing monolithic 9 DOF inertial MEMS platform. Capacitive pressure sensors can suffer from limited sensitivity for a given size of membrane. This novel pressure sensor design increases the sensitivity by over 5 times compared to a traditional array of square diaphragms while still fitting within a 2 mm x 2 mm chip and maintaining a fixed static capacitance. The improved design uses one large diaphragm supported by pillars with fixed electrodes placed above the areas of maximum deflection. The design optimization increases the sensitivity from 0.22 fF/kPa to 1.16 fF/kPa. Temperature sensitivity was also examined through simulation.

Keywords: Capacitive pressure sensor, 9 DOF, 10 DOF, sensor, capacitive, inertial measurement unit, IMU, inertial navigation system, INS.

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