Search results for: Hybrid PV/T system

Authors: Justin Leo Cheang Loong, Khazaimatol S Subari, Rosli Besar, Muhammad Kamil Abdullah

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In this paper, a novel method for a biometric system based on the ECG signal is proposed, using spectral coefficients computed through linear predictive coding (LPC). ECG biometric systems have traditionally incorporated characteristics of fiducial points of the ECG signal as the feature set. These systems have been shown to contain loopholes and thus a non-fiducial system allows for tighter security. In the proposed system, incorporating non-fiducial features from the LPC spectrum produced a segment and subject recognition rate of 99.52% and 100% respectively. The recognition rates outperformed the biometric system that is based on the wavelet packet decomposition (WPD) algorithm in terms of recognition rates and computation time. This allows for LPC to be used in a practical ECG biometric system that requires fast, stringent and accurate recognition.

Keywords: biometric, ecg, linear predictive coding, wavelet packet decomposition

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Authors: Breda M. Kiernan, Stephen Beirne, Cormac Fay, Dermot Diamond

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An autonomous environmental monitoring system (Smart Landfill) has been constructed for the quantitative measurement of the components of landfill gas found at borehole wells at the perimeter of landfill sites. The main components of landfill gas are the greenhouse gases, methane and carbon dioxide and have been monitored in the range 0-5 % volume. This monitoring system has not only been tested in the laboratory but has been deployed in multiple field trials and the data collected successfully compared with on-site monitors. This success shows the potential of this system for application in environments where reliable gas monitoring is crucial.

Keywords: Environmental monitoring, greenhouse gas, landfill gas, sensor deployment

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Authors: S. A. Gayvoronsky, T. A. Ezangina

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The robust control system objects with interval- undermined parameters is considers in this paper. Initial information about the system is its characteristic polynomial with interval coefficients. On the basis of coefficient estimations of quality indices and criterion of the maximum stability degree, the methods of synthesis of a robust regulator parametric is developed. The example of the robust stabilization system synthesis of the rope tension is given in this article.

Keywords: An interval polynomial, controller synthesis, analysis of quality factors, maximum degree of stability, robust degree of stability, robust oscillation, system accuracy.

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Authors: Bogdan Walek, Cyril Klimes

Abstract:

This paper focuses on testing database of existing information system. At the beginning we describe the basic problems of implemented databases, such as data redundancy, poor design of database logical structure or inappropriate data types in columns of database tables. These problems are often the result of incorrect understanding of the primary requirements for a database of an information system. Then we propose an algorithm to compare the conceptual model created from vague requirements for a database with a conceptual model reconstructed from implemented database. An algorithm also suggests steps leading to optimization of implemented database. The proposed algorithm is verified by an implemented prototype. The paper also describes a fuzzy system which works with the vague requirements for a database of an information system, procedure for creating conceptual from vague requirements and an algorithm for reconstructing a conceptual model from implemented database.

Keywords: testing, database, relational database, information system, conceptual model, fuzzy, uncertain information, database testing, reconstruction, requirements, optimization

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Authors: Simon L. Madsen, Mads Dyrmann, Morten S. Laursen, Rasmus N. Jørgensen

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Recent advances in the Unmanned Aerial System (UAS) safety and perception systems enable safe low altitude autonomous terrain following flights recently demonstrated by the consumer DJI Mavic PRO and Phamtom 4 Pro drones. This paper presents the first prototype system utilizing this functionality in form of semi-automated UAS based collection of crop/weed images where the embedded perception system ensures a significantly safer and faster gathering of weed images with sub-millimeter resolution. The system is to be used when the weeds are at cotyledon stage and prior to the harvest recognizing the grass weed species, which cannot be discriminated at the cotyledon stage.

Keywords: Weed mapping, integrated weed management, DJI SDK, automation, cotyledon plants.

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Authors: Jose D. Herrera, Mario A. Rios

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This paper deals with the coordinated tuning of the Power System Stabilizer (PSS) controller and Power Oscillation Damping (POD) Controller of Flexible AC Transmission System (FACTS) in a multi-machine power systems. The coordinated tuning is based on the critical eigenvalues of the power system and a model reduction technique where the Hankel Singular Value method is applied. Through the linearized system model and the parameter-constrained nonlinear optimization algorithm, it can compute the parameters of both controllers. Moreover, the parameters are optimized simultaneously obtaining the gains of both controllers. Then, the nonlinear simulation to observe the time response of the controller is performed.

Keywords: Balanced realization, controllability Grammian, electromechanical oscillations, FACTS, Hankel singular values, observability Grammian, POD, PSS.

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Authors: Ravichandra R., Srithar Rajoo, Tan Lit Wen

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In recent years Li-Ion batteries getting more attention among the Electrical Vehicles (EV) and Hybrid Electrical Vehicles (HEV) energy storage. Li-Ion has shown extended power density and light weight compared to other batteries readily available in the market. One of the major drawbacks in Li-Ion batteries is their sensitivity to the temperature. If the working temperature is beyond the limit, that could affect seriously on the durability and performance of Li-Ion battery. Thus Battery Thermal Management (BTM) is the most essential in adapting Li-Ion battery to the EVs and HEVs.

Keywords: Li-Ion battery, HEV/EV, battery thermal management, heat generation rate.

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Authors: Hazem J. Smadi

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FMEA has been used for several years and proved its efficiency for system’s risk analysis due to failures. Risk priority number found in FMEA is used to rank failure modes that may occur in a system. There are some guidelines in the literature to assign the values of FMEA components known as Severity, Occurrence and Detection. This paper propose a method to assign the value for occurrence in more realistic manner representing the state of the system under study rather than depending totally on the experience of the analyst. This method uses the hazard function of a system to determine the value of occurrence depending on the behavior of the hazard being constant, increasing or decreasing.

Keywords: FMEA, Hazard Function, Risk Priority Number.

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Authors: Kemal Comakli, Meryem Terhan

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In this study, the potential of heat recovery from waste flue gas was examined in 60 MW district heating system of a university, and fuel saving was aimed by using the recovered heat in the system as a source again. Various scenarios are intended to make use of waste heat. For this purpose, actual operation data of the system were taken. Besides, the heat recovery units that consist of heat exchangers such as flue gas condensers, economizers or air pre-heaters were designed theoretically for each scenario. Energy analysis of natural gas-fired boiler’s exhaust flue gas in the system, and economic analysis of heat recovery units to predict payback periods were done. According to calculation results, the waste heat loss ratio from boiler flue gas in the system was obtained as average 16%. Thanks to the heat recovery units, thermal efficiency of the system can be increased, and fuel saving can be provided. At the same time, a huge amount of green gas emission can be decreased by installing the heat recovery units.

Keywords: Heat recovery from flue gas, energy analysis of flue gas, economical analysis, payback period.

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Authors: Mamoun Sqali, Mohamed Wassim Trojet

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The requirements analysis, modeling, and simulation have consistently been one of the main challenges during the development of complex systems. The scenarios and the state machines are two successful models to describe the behavior of an interactive system. The scenarios represent examples of system execution in the form of sequences of messages exchanged between objects and are a partial view of the system. In contrast, state machines can represent the overall system behavior. The automation of processing scenarios in the state machines provide some answers to various problems such as system behavior validation and scenarios consistency checking. In this paper, we propose a method for translating scenarios in state machines represented by Discreet EVent Specification and procedure to detect implied scenarios. Each induced DEVS model represents the behavior of an object of the system. The global system behavior is described by coupling the atomic DEVS models and validated through simulation. We improve the validation process with integrating formal methods to eliminate logical inconsistencies in the global model. For that end, we use the Z notation.

Keywords: Scenarios, DEVS, synthesis, validation and verification, simulation, formal verification, z notation.

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Authors: Hritwik Ghosh, Irfan Sadiq Rahat, Sachi Nandan Mohanty, J. V. R. Ravindra, Abdus Sobur

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In the rapidly evolving landscape of medical diagnostics, the early detection and accurate classification of skin cancer remain paramount for effective treatment outcomes. This research delves into the transformative potential of artificial intelligence (AI), specifically deep learning (DL), as a tool for discerning and categorizing various skin conditions. Utilizing a diverse dataset of 3,000 images, representing nine distinct skin conditions, we confront the inherent challenge of class imbalance. This imbalance, where conditions like melanomas are over-represented, is addressed by incorporating class weights during the model training phase, ensuring an equitable representation of all conditions in the learning process. Our approach presents a hybrid model, amalgamating the strengths of two renowned convolutional neural networks (CNNs), VGG16 and ResNet50. These networks, pre-trained on the ImageNet dataset, are adept at extracting intricate features from images. By synergizing these models, our research aims to capture a holistic set of features, thereby bolstering classification performance. Preliminary findings underscore the hybrid model's superiority over individual models, showcasing its prowess in feature extraction and classification. Moreover, the research emphasizes the significance of rigorous data pre-processing, including image resizing, color normalization, and segmentation, in ensuring data quality and model reliability. In essence, this study illuminates the promising role of AI and DL in revolutionizing skin cancer diagnostics, offering insights into its potential applications in broader medical domains.

Keywords: Artificial intelligence, machine learning, deep learning, skin cancer, dermatology, convolutional neural networks, image classification, computer vision, healthcare technology, cancer detection, medical imaging.

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Authors: S. S. Mishra, D. K. Yadav

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This paper focuses on cost and profit analysis of single-server Markovian queuing system with two priority classes. In this paper, functions of total expected cost, revenue and profit of the system are constructed and subjected to optimization with respect to its service rates of lower and higher priority classes. A computing algorithm has been developed on the basis of fast converging numerical method to solve the system of non linear equations formed out of the mathematical analysis. A novel performance measure of cost and profit analysis in view of its economic interpretation for the system with priority classes is attempted to discuss in this paper. On the basis of computed tables observations are also drawn to enlighten the variational-effect of the model on the parameters involved therein.

Keywords: Cost and Profit, Computing, Expected Revenue, Priority classes

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Authors: Arunrungrusmi S, Chaokamnerd W , Tanitteerapan T , Mungkung N., Yuji T.

Abstract:

This research aimed to develop plasma system used in air conditioners. This developed plasma system could be installed in the air conditioners - all split type. The quality of air could be improved to be equal to present plasma system. Development processes were as follows: 1) to study the plasma system used in the air conditioners, 2) to design a plasma generator, 3) to develop the plasma generator, and 4) to test its performance in many types of the air conditioners. This plasma system was developed by AC high voltage – 14 kv with a frequency of 50 kHz. Carbon was a conductor to generate arc in air purifier system. The research was tested by installing the plasma generator in the air conditioners - wall type. Whereas, there were 3 types of installations: air flow out, air flow in, and room center. The result of the plasma generator installed in the air conditioners, split type, revealed that the air flow out installation provided the highest average of o-zone at 223 mg/h. This type of installation provided the highest efficiency of air quality improvement. Moreover, the air flow in installation and the room center installation provided the average of the o-zone at 163 mg/h and 64 mg/h, respectively.

Keywords: Air Conditioner, Plasma generator, High voltage, Optimization, Installation position.

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Authors: Yun Jong Choi, Nam Woong, PooGyeon Park

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Variable Structure Control (VSC) is one of the most useful tools handling the practical system with uncertainties and disturbances. Up to now, unfortunately, not enough studies on the input-saturated system with linear-growth-bound disturbances via VSC have been presented. Therefore, this paper proposes an asymp¬totic stability condition for the system via VSC. The designed VSC controller consists of two control parts. The linear control part plays a role in stabilizing the system, and simultaneously, the nonlinear control part in rejecting the linear-growth-bound disturbances perfectly. All conditions derived in this paper are expressed with Linear Matrices Inequalities (LMIs), which can be easily solved with an LMI toolbox in MATLAB.

Keywords: Input saturation, linear-growth bounded disturbances, linear matrix inequality (LMI), variable structure control

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Authors: Leila Maleki, Ezatollah Ahmadi

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Neuroplasticity or the flexibility of the neural system is the ability of the brain to adapt to the lack or deterioration of sense and the capability of the neural system to modify itself through changing shape and function. Not only have studies revealed that neuroplasticity does not end in childhood, but also they have proven that it continues till the end of life and is not limited to the neural system and covers the cognitive system as well. In the field of cognition, neuroplasticity is defined as the ability to change old thoughts according to new conditions and the individuals' differences in using various styles of cognitive regulation inducing several social, emotional and cognitive outcomes. This paper attempts to discuss and define major theories and principles of neuroplasticity and elaborate on nature or nurture.

Keywords: Neuroplasticity, Cognitive plasticity, Plasticity theories, Plasticity mechanisms.

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Authors: E.Talebi, F.Zahmatkesh

Abstract:

Buckling-Restrained Braced Frame system(BRBFs) are a new type of steel seismic-load-resisting system that has found use in several countries because of its efficiency and its promise of seismic performance far superior to that of conventional braced frames. The system is addressed in the 2005 edition of the AISC Seismic Provisions for Structural Steel Buildings, also a set of design provisions has been developed by NEHRP. This report illustrates the seismic design of buckling restrained braced frames and compares the result of design in the application of earthquake load for ordinary bracing systems and buckling restrained bracing systems to see the advantage and disadvantages of this new type of seismic resisting system in comparison with the old Ordinary Concentric Braced Frame systems (OCBFs); they are defined by the provisions governing their design.

Keywords: Buckling Restrained Braced Frame system (BRBFs), Ordinary Concentric Braced Frame systems (OCBFs).

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Authors: Jyong Lin, Shih-Chang Chen, Yu-Tsen Shih, Shi-Huang Chen

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This paper presents a remote on-line diagnostic system for vehicles via the use of On-Board Diagnostic (OBD), GPS, and 3G techniques. The main parts of the proposed system are on-board computer, vehicle monitor server, and vehicle status browser. First, the on-board computer can obtain the location of deriver and vehicle status from GPS receiver and OBD interface, respectively. Then on-board computer will connect with the vehicle monitor server through 3G network to transmit the real time vehicle system status. Finally, vehicle status browser could show the remote vehicle status including vehicle speed, engine rpm, battery voltage, engine coolant temperature, and diagnostic trouble codes. According to the experimental results, the proposed system can help fleet managers and car knockers to understand the remote vehicle status. Therefore this system can decrease the time of fleet management and vehicle repair due to the fleet managers and car knockers who find the diagnostic trouble messages in time.

Keywords: Diagnostic Trouble Code (DTC), Electronic Control Unit (ECU), Global Position System (GPS), On-Board Diagnostic (OBD).

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Authors: May Paing Paing Zaw, Su Myat Marlar Soe

Abstract:

Network Management Systems have played a great important role in information systems. Management is very important and essential in any fields. There are many managements such as configuration management, fault management, performance management, security management, accounting management and etc. Among them, configuration, fault and security management is more important than others. Because these are essential and useful in any fields. Configuration management is to monitor and maintain the whole system or LAN. Fault management is to detect and troubleshoot the system. Security management is to control the whole system. This paper intends to increase the network management functionalities including configuration management, fault management and security management. In configuration management system, this paper specially can support the USB ports and devices to detect and read devices configuration and solve to detect hardware port and software ports. In security management system, this paper can provide the security feature for the user account setting and user management and proxy server feature. And all of the history of the security such as user account and proxy server history are kept in the java standard serializable file. So the user can view the history of the security and proxy server anytime. If the user uses this system, the user can ping the clients from the network and the user can view the result of the message in fault management system. And this system also provides to check the network card and can show the NIC card setting. This system is used RMI (Remote Method Invocation) and JNI (Java Native Interface) technology. This paper is to implement the client/server network management system using Java 2 Standard Edition (J2SE). This system can provide more than 10 clients. And then this paper intends to show data or message structure of client/server and how to work using TCP/IP protocol.

Keywords: TCP/ IP based client server application

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Authors: H. Ahmad, S. Kermanshahani, A. Simonet, M. Simonet

Abstract:

The data exchanged on the Web are of different nature from those treated by the classical database management systems; these data are called semi-structured data since they do not have a regular and static structure like data found in a relational database; their schema is dynamic and may contain missing data or types. Therefore, the needs for developing further techniques and algorithms to exploit and integrate such data, and extract relevant information for the user have been raised. In this paper we present the system OSIX (Osiris based System for Integration of XML Sources). This system has a Data Warehouse model designed for the integration of semi-structured data and more precisely for the integration of XML documents. The architecture of OSIX relies on the Osiris system, a DL-based model designed for the representation and management of databases and knowledge bases. Osiris is a viewbased data model whose indexing system supports semantic query optimization. We show that the problem of query processing on a XML source is optimized by the indexing approach proposed by Osiris.

Keywords: Data integration, semi-structured data, views, XML.

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Authors: Toshihiko Sasama, Takao Kawamura, Kazunori Sugahara

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Using Internet communication, new home electronics have functions of monitoring and control from remote. However in many case these electronics work as standalone, and old electronics are not followed. Then, we developed the total remote system include not only new electronics but olds. This systems node is a adapter of electrical power plug that embed relay switch and some sensors, and these nodes communicate with each other. the system server was build on the Internet, and users access to this system from web browsers. To reduce the cost to set up of this system, communication between adapters are used ZigBee wireless network instead of wired LAN cable[3]. From measured RSSI(received signal strength indicator) information between each nodes, the system can estimate roughly adapters were mounted on which room, and where in the room. So also it reduces the cost of mapping nodes. Using this system, energy saving and house monitoring are expected.

Keywords: outlet, remote monitor, remote control, mobile ad hocnetwork, sensor network, zigbee.

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Authors: Abdul Ganiy A. S. Oladosu

Abstract:

The AL-MAJIRI school system is a variant of private Arabic and Islamic schools which cater for the religious and moral development of Muslims. In the past, the system produced clerics, scholars, judges, religious reformers, eminent teachers and great men who are worthy of emulation, particularly in northern Nigeria. Gradually, the system lost its glory but continued to discharge its educational responsibilities to a certain extent. This paper takes a look at the activities of the AL-MAJIRI schools. The introduction provides background information about Nigeria where the schools operate. This is followed by an overview of the Nigerian educational system, the nature and the features of the AL-MAJIRI school system, its weaknesses and the current challenges facing the schools. The paper concludes with emphasis on the urgent need for a comprehensive reform of the curriculum content of the schools. The step by step procedure required for the reform is discussed.

Keywords: AL-MAJIRI, Arabic and Islamic schools, Nigeria.

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Authors: L. C. Moreira, M. Kauffman

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This paper outlines the results of an experimental research on deploying an emerging augmented reality (AR) system for real-time task assistance (or work instructions) of highly customised and high-risk manual operations. The focus is on human operators’ training effectiveness and performance and the aim is to test if such technologies can support enhancing the knowledge retention levels and accuracy of task execution to improve health and safety (H&S). An AR enhanced assembly method is proposed and experimentally tested using a real industrial process as case study for electric vehicles’ (EV) battery module assembly. The experimental results revealed that the proposed method improved the training practices and performance through increases in the knowledge retention levels from 40% to 84%, and accuracy of task execution from 20% to 71%, when compared to the traditional paper-based method. The results of this research validate and demonstrate how emerging technologies are advancing the choice for manual, hybrid or fully automated processes by promoting the XR-assisted processes, and the connected worker (a vision for Industry 4 and 5.0), and supporting manufacturing become more resilient in times of constant market changes.

Keywords: Augmented reality, extended reality, connected worker, XR-assisted operator, manual assembly 4.0, industry 5.0, smart training, battery assembly.

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Authors: Arijit Roy, Sharmistha Roy, Dibyendu Chatterjee

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This article describes an interesting and inexpensive laboratory experiment for undergraduate students of electronics, geography and related disciplines. The objective of the proposed experiment is to improve the students’ exposure on the basic principles of instrumentation and to demonstrate an electronic measurement system. A simple electronic curvy length measurement system is presented here. Such a system can be used to measure curvy lengths e.g. length of a river, road or railway line etc. from topographical map. The proposed system is composed of simple functional blocks which are usually demonstrated in laboratory or in theory course of electronics at the undergraduate level. The experiment is assigned to a group of students and it is found that the experiment can fulfill its objectives with high degree of satisfaction.

Keywords: Curvy length measurement, Education, Electronics, Laboratory experiment, Topographical map.

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Authors: Shaiemaa, A. Momen, Dalia, A.M. Salem, Emad, M.S. Barakat, Mohamed, S. Salama

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The present study has been conducted to characterize the prophenoloxidase (PPO) system of the desert locust, Schistocerca gregaria following injection of Bacillus thuringiensis kurstaki (Bt). The bulk of PPO system was associated with haemocytes and a little amount was found in plasma. This system was activated by different activators such as laminarin, lipopolysaccharide (LPS) and trypsin suggesting that the stimulatory mechanism may involve an enzyme cascade of one or more associated molecules. These activators did not activate all the molecules of the cascade. Presence of phenoloxidase activity (PO) coincides with the appearance of protein band with molecular weight (MW) 70.154 KD (Kilo Dalton).

Keywords: Schistocerca gregaria, haemolymph, proteins, prophenoloxidase system, phenoloxidase

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Authors: Š. Čemerková, M. Wilczková

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The paper deals with the importance of information flow for providing of defined level of customer service in the firms. Setting of the criteria for the selection and implementation of logistics information system is a prerequisite for ensuring of the flow of information in firms. The decision on the selection and implementation of logistics information system is linked to the investment costs and operating costs, which are included in the total logistics costs. The article also deals with the conclusions of the research focused on the logistics information system selection in companies in the Czech Republic.

Keywords: Customer service, information system, logistics, research.

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Authors: Pavel Vazan, Pavol Tanuska, Michal Kebisek

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The paper gives the pilot results of the project that is oriented on the use of data mining techniques and knowledge discoveries from production systems through them. They have been used in the management of these systems. The simulation models of manufacturing systems have been developed to obtain the necessary data about production. The authors have developed the way of storing data obtained from the simulation models in the data warehouse. Data mining model has been created by using specific methods and selected techniques for defined problems of production system management. The new knowledge has been applied to production management system. Gained knowledge has been tested on simulation models of the production system. An important benefit of the project has been proposal of the new methodology. This methodology is focused on data mining from the databases that store operational data about the production process.

Keywords: data mining, data warehousing, management of production system, simulation

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Authors: Ajab Khan Kasi, Muhammad Waseem Ashraf, Jafar Khan Kasi, Shahzadi Tayyaba, NitinAfzulpurkar

Abstract:

This paper presents the development of low cost Nano membrane fabrication system. The system is specially designed for anodic aluminum oxide membrane. This system is capable to perform the processes such as anodization and electro-polishing. The designed machine was successfully tested for 'mild anodization' (MA) for 48 hours and 'hard anodization' (HA) for 3 hours at constant 0oC. The system is digitally controlled and guided for temperature maintenance during anodization and electro-polishing. The total cost of the developed machine is 20 times less than the multi-cooling systems available in the market which are generally used for this purpose.

Keywords: Anodic aluminum oxide, Nano-membrane, hardanodization, mild anodization, electro-polishing.

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Authors: C. W. Hsu, C. N. Liang, L. Y. Ke, F. Y. Huang

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Many accidents were happened because of fast driving, habitual working overtime or tired spirit. This paper presents a solution of remote warning for vehicles collision avoidance using vehicular communication. The development system integrates dedicated short range communication (DSRC) and global position system (GPS) with embedded system into a powerful remote warning system. To transmit the vehicular information and broadcast vehicle position; DSRC communication technology is adopt as the bridge. The proposed system is divided into two parts of the positioning andvehicular units in a vehicle. The positioning unit is used to provide the position and heading information from GPS module, and furthermore the vehicular unit is used to receive the break, throttle, and othersignals via controller area network (CAN) interface connected to each mechanism. The mobile hardware are built with an embedded system using X86 processor in Linux system. A vehicle is communicated with other vehicles via DSRC in non-addressed protocol with wireless access in vehicular environments (WAVE) short message protocol. From the position data and vehicular information, this paper provided a conflict detection algorithm to do time separation and remote warning with error bubble consideration. And the warning information is on-line displayed in the screen. This system is able to enhance driver assistance service and realize critical safety by using vehicular information from the neighbor vehicles.KeywordsDedicated short range communication, GPS, Control area network, Collision avoidance warning system.

Keywords: Dedicated short range communication, GPS, Control area network, Collision avoidance warning system.

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Authors: K.R. Aida–Zade, C. Ardil, A.M. Sharifova

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In this paper, the main principles of text-to-speech synthesis system are presented. Associated problems which arise when developing speech synthesis system are described. Used approaches and their application in the speech synthesis systems for Azerbaijani language are shown.

Keywords: synthesis of Azerbaijani language, morphemes, phonemes, sounds, sentence, speech synthesizer, intonation, accent, pronunciation.

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Authors: Alonggot Limcharoen Kaeochotchuangkul, Pathomporn Sawatchai

Abstract:

This research aims to design and build a wet etching system, which is suitable for anisotropic wet etching, in order to reduce etching time, to reduce hillocks on the etched surface (to reduce roughness), and to create a 45-degree wall angle (micro-mirror). This study would start by designing a wet etching system. There are four main components in this system: an ultrasonic cleaning, a condenser, a motor and a substrate holder. After that, an ultrasonic machine was modified by applying a condenser to maintain the consistency of the solution concentration during the etching process and installing a motor for improving the roughness. This effect on the etch rate and the roughness showed that the etch rate increased and the roughness was reduced.

Keywords: Anisotropic wet etching, wet etching system, Hillocks, ultrasonic cleaning.

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