Alonggot Limcharoen Kaeochotchuangkul and Pathomporn Sawatchai, A Design of Anisotropic Wet Etching System to Reduce Hillocks on Etched Surface of Silicon Substrate. journal = {International Journal of Industrial and Manufacturing Engineering}, [online]. World Academy of Science, Engineering and Technology. October 2019, vol. 155(11). 695 - 698 [viewed 20 September 2024]. Available from: https://publications.waset.org/pdf/10010857.