Alonggot Limcharoen Kaeochotchuangkul and Pathomporn Sawatchai, A Design of Anisotropic Wet Etching System to Reduce Hillocks on Etched Surface of Silicon Substrate. journal = {International Journal of Industrial and Manufacturing Engineering}, [online]. World Academy of Science, Engineering and Technology. October 2019, vol. 155(11). 674 - 677 [viewed 21 January 2021]. Available from: https://publications.waset.org/pdf/10010857.