Alonggot Limcharoen Kaeochotchuangkul and  Pathomporn Sawatchai,  A Design of Anisotropic Wet Etching System to Reduce Hillocks on Etched Surface of Silicon Substrate.   journal   = {International Journal of Industrial and Manufacturing Engineering}, [online]. World Academy of Science, Engineering and Technology.
    October 2019, vol. 155(11). 674 - 677
    [viewed 21 January 2021]. Available from: https://publications.waset.org/pdf/10010857.