Search results for: Micro grid

Authors: K. Horáková, K. Fraňa, V. Honzejk

Abstract:

This part of study deals with description of unsteady isothermal melt flow in the container with cuboid shape. This melt flow is driven by rotating magnetic field. Input data (instantaneous velocities, grid coordinates and Lorentz forces) were obtained from in-house CFD code (called NS-FEM3D) which uses DDES method of computing. Description of the flow was performed by contours of Lorentz forces and caused velocity field. Taylor magnetic numbers of the flow were used 1.10^6, 5.10^6 and 1.10^7, flow was in 3D turbulent flow regime.

Keywords: In-house computing code, Lorentz forces, magnetohydrodynamics, rotating magnetic field.

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Authors: Ondřej Bayer

Abstract:

The paper evaluates the ongoing reform of VAT in the Czech Republic in terms of impacts on individual households. The main objective is to analyse the impact of given changes on individual households. The adopted method is based on the data related to household consumption by individual household quintiles; obtained data are subjected to micro-simulation examining. Results are discussed in terms of vertical tax justice. Results of the analysis reveal that VAT behaves regressively and a sole consolidation of rates at a higher level only increases the regression of this tax in the Czech Republic.

Keywords: Consolidation of rates, household quintiles, tax impact, VAT.

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Authors: Wardah, T., Kamil, A.A., Sahol Hamid, A.B., Maisarah, W.W.I

Abstract:

Quantitative precipitation forecast (QPF) from atmospheric model as input to hydrological model in an integrated hydro-meteorological flood forecasting system has been operational in many countries worldwide. High-resolution numerical weather prediction (NWP) models with grid cell sizes between 2 and 14 km have great potential in contributing towards reasonably accurate QPF. In this study the potential of two NWP models to forecast precipitation for a flood-prone area in a tropical region is examined. The precipitation forecasts produced from the Fifth Generation Penn State/NCAR Mesoscale (MM5) and Weather Research and Forecasting (WRF) models are statistically verified with the observed rain in Kelantan River Basin, Malaysia. The statistical verification indicates that the models have performed quite satisfactorily for low and moderate rainfall but not very satisfactory for heavy rainfall.

Keywords: MM5, Numerical weather prediction (NWP), quantitative precipitation forecast (QPF), WRF

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Authors: Michal Spilacek, Marian Brazdil, Otakar Stelcl, Jiri Pospisil

Abstract:

This paper shows an experimental testing of a small unit for combustion of solid fuels, such as charcoal and wood logs, that can provide electricity. One of the concepts is that the unit does not require qualified personnel for its operation. The unit itself is composed of two main parts. The design requires a heat producing stove and electricity producing thermoelectric generator. After the construction the unit was tested and the results show that the emission release is within the legislative requirements for emission production and environmental protection. That qualifies such unit for indoor application.

Keywords: Micro-cogeneration, thermoelectric generator, biomass combustion, wood stove.

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Authors: Jamal Amani Rad, Kourosh Parand

Abstract:

In this paper, we have applied the homotopy perturbation method (HPM) for obtaining the analytical solution of unsteady flow of gas through a porous medium and we have also compared the findings of this research with some other analytical results. Results showed a very good agreement between results of HPM and the numerical solutions of the problem rather than other analytical solutions which have previously been applied. The results of homotopy perturbation method are of high accuracy and the method is very effective and succinct.

Keywords: Unsteady gas equation, Homotopy perturbation method(HPM), Porous medium, Nonlinear ODE

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Authors: F. Rezaie Moghaddam, J. Amani, T. Rezaie Moghaddam

Abstract:

Many computational techniques were applied to solution of heat conduction problem. Those techniques were the finite difference (FD), finite element (FE) and recently meshless methods. FE is commonly used in solution of equation of heat conduction problem based on the summation of stiffness matrix of elements and the solution of the final system of equations. Because of summation process of finite element, convergence rate was decreased. Hence in the present paper Cellular Automata (CA) approach is presented for the solution of heat conduction problem. Each cell considered as a fixed point in a regular grid lead to the solution of a system of equations is substituted by discrete systems of equations with small dimensions. Results show that CA can be used for solution of heat conduction problem.

Keywords: Heat conduction, Cellular automata, convergencerate, discrete system.

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Authors: L. Lancaster, M. H. Lung, D. Sujan

Abstract:

The application of agro-industrial waste in Aluminum Metal Matrix Composites has been getting more attention as they can reinforce particles in metal matrix which enhance the strength properties of the composites. In addition, by applying these agroindustrial wastes in useful way not only save the manufacturing cost of products but also reduce the pollutions on environment. This paper represents a literature review on a range of industrial wastes and their utilization in metal matrix composites. The paper describes the synthesis methods of agro-industrial waste filled metal matrix composite materials and their mechanical, wear, corrosion, and physical properties. It also highlights the current application and future potential of agro-industrial waste reinforced composites in aerospace, automotive and other construction industries.

Keywords: Bond layer, Interfacial shear stress, Bi-layered assembly, Thermal mismatch, Flip Chip Ball Grid Array.

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Authors: A. M. Sagir

Abstract:

In this paper, linear multistep technique using power series as the basis function is used to develop the block methods which are suitable for generating direct solution of the special second order ordinary differential equations with associated initial or boundary conditions. The continuous hybrid formulations enable us to differentiate and evaluate at some grids and off – grid points to obtain two different four discrete schemes, each of order (5,5,5,5)T, which were used in block form for parallel or sequential solutions of the problems. The computational burden and computer time wastage involved in the usual reduction of second order problem into system of first order equations are avoided by this approach. Furthermore, a stability analysis and efficiency of the block methods are tested on linear and non-linear ordinary differential equations and the results obtained compared favorably with the exact solution.

Keywords: Block Method, Hybrid, Linear Multistep Method, Self – starting, Special Second Order.

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Authors: Byung-Soo Shin, Nam-Seok Kim, Sang-Kyu Lee, O-Hyun Keum

Abstract:

This analysis investigates the distortion of flow measurement and the increase of cavitation along orifice flowmeter. The analysis using the numerical method (CFD) validated the distortion of flow measurement through the inlet velocity profile considering the convergence and grid dependency. Realizable k-e model was selected and y+ was about 50 in this numerical analysis. This analysis also estimated the vulnerability of cavitation effect due to inlet velocity profile. The investigation concludes that inclined inlet velocity profile could vary the pressure which was measured at pressure tab near pipe wall and it led to distort the pressure values ranged from -3.8% to 5.3% near the orifice plate and to make the increase of cavitation. The investigation recommends that the fully developed inlet velocity flow is beneficial to accurate flow measurement in orifice flowmeter.

Keywords: Orifice, k-e model, CFD

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Authors: Marque Adrien, Delahaye Daniel, Marechal Pierre, Berry Isabelle

Abstract:

Wind direction and uncertainty are crucial in aircraft or unmanned aerial vehicle trajectories. By computing wind covariance matrices on each spatial grid point, these spatial grids can be defined as images with symmetric positive definite matrix elements. A data pre-processing step, a specific convolution, a specific max-pooling, and specific flatten layers are implemented to process such images. Then, the neural network is applied to spatial grids, whose elements are wind covariance matrices, to solve classification problems related to the feasibility of unmanned aerial vehicles based on wind direction and wind uncertainty.

Keywords: Wind direction, uncertainty level, Unmanned Aerial Vehicle, convolution neural network, SPD matrices.

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Authors: Labar Hocine, Rekik Badri, Bounaya Kamel, Kelaiaia Mounia Samira

Abstract:

Diagnostic goal of transformers in service is to detect the winding or the core in fault. Transformers are valuable equipment which makes a major contribution to the supply security of a power system. Consequently, it is of great importance to minimize the frequency and duration of unwanted outages of power transformers. So, Frequency Response Analysis (FRA) is found to be a useful tool for reliable detection of incipient mechanical fault in a transformer, by finding winding or core defects. The authors propose as first part of this article, the coupled circuits method, because, it gives most possible exhaustive modelling of transformers. And as second part of this work, the application of FRA in low frequency in order to improve and simplify the response reading. This study can be useful as a base data for the other transformers of the same categories intended for distribution grid.

Keywords: Diagnostic, Coupled Circuit Method, FRA, Transformer Faults

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Authors: Irtaza M. Syed, Kaamran Raahemifar

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This paper presents a model predictive control (MPC) of a utility interactive (UI) single phase inverter (SPI) for a photovoltaic (PV) system at residential/distribution level. The proposed model uses single-phase phase locked loop (PLL) to synchronize SPI with the grid and performs MPC control in a dq reference frame. SPI model consists of boost converter (BC), maximum power point tracking (MPPT) control, and a full bridge (FB) voltage source inverter (VSI). No PI regulators to tune and carrier and modulating waves are required to produce switching sequence. Instead, the operational model of VSI is used to synthesize sinusoidal current and track the reference. Model is validated using a three kW PV system at the input of UI-SPI in Matlab/Simulink. Implementation and results demonstrate simplicity and accuracy, as well as reliability of the model.

Keywords: Matlab/Simulink, Model Predictive Control, Phase Locked Loop, Single Phase Inverter, Voltage Source Inverter.

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Authors: R. Joseph Raviselvan, K. Ramanathan, P. Perumal, M. R. Thansekhar

Abstract:

Hard coatings are widely used in cutting and forming tool industries. Titanium Nitride (TiN) possesses good hardness, strength, and corrosion resistance. The coating properties are influenced by many process parameters. The coatings were deposited on steel substrate by changing the process parameters such as substrate temperature, nitrogen flow rate and target power in a D.C planer magnetron sputtering. The structure of coatings were analysed using XRD. The hardness of coatings was found using Micro hardness tester. From the experimental data, a regression model was developed and the optimum response was determined using Response Surface Methodology (RSM).

Keywords: Hardness, RSM, sputtering, TiN XRD.

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Authors: Lana Dalawr Jalal

Abstract:

This paper addresses the problem of offline path planning for Unmanned Aerial Vehicles (UAVs) in complex threedimensional environment with obstacles, which is modelled by 3D Cartesian grid system. Path planning for UAVs require the computational intelligence methods to move aerial vehicles along the flight path effectively to target while avoiding obstacles. In this paper Modified Particle Swarm Optimization (MPSO) algorithm is applied to generate the optimal collision free 3D flight path for UAV. The simulations results clearly demonstrate effectiveness of the proposed algorithm in guiding UAV to the final destination by providing optimal feasible path quickly and effectively.

Keywords: Obstacle Avoidance, Particle Swarm Optimization, Three-Dimensional Path Planning Unmanned Aerial Vehicles.

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Authors: Ziyad Aljarboua

Abstract:

In this paper, we present a technical and an economic assessment of several sources of renewable energy in Saudi Arabia; mainly solar, wind, hydro and biomass. We analyze the environmental and climatic conditions in relation to these sources and give an overview of some of the existing clean energy technologies. Using standardized cost and efficiency data, we carry out a cost benefit analysis to understand the economic factors influencing the sustainability of energy production from renewable sources in light of the energy cost and demand in the Saudi market. Finally, we take a look at the Saudi petroleum industry and the existing sources of conventional energy and assess the potential of building a successful market for renewable energy under the constraints imposed by the flow of subsidized cheap oil. We show that while some renewable energy resources are well suited for distributed or grid connected generation in the kingdom, their viability is greatly undercut by the well developed and well capitalized oil industry.

Keywords: Energy strategy, energy policy, renewable energy, Saudi Arabia, oil.

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Authors: I. Ioannou, I. M. Gitman

Abstract:

This study focused on the contribution of micro-mechanical parameters on the macro-mechanical response of short fiber composites, namely polypropylene matrix reinforced by glass fibers. In the framework of this paper, an attention has been given to the glass fibers length, as micromechanical parameter influences the overall macroscopic material’s behavior. Three dimensional numerical models were developed and analyzed through the concept of a Representative Volume Element (RVE). Results of the RVE-based approach were compared with analytical Halpin-Tsai’s model.

Keywords: Effective properties, representative volume element, short fiber reinforced composites.

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Authors: Badr M. Alshammari, Mohamed A. El-Kady

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The paper presents new results of a recent industry supported research and development study in which an efficient framework for evaluating practical and meaningful power system reliability and quality indices was applied. The system-wide integrated performance indices are capable of addressing and revealing areas of deficiencies and bottlenecks as well as redundancies in the composite generation-transmission-demand structure of large-scale power grids. The technique utilizes a linear programming formulation, which simulates practical operating actions and offers a general and comprehensive framework to assess the harmony and compatibility of generation, transmission and demand in a power system. Practical applications to a reduced system model as well as a portion of the Saudi power grid are also presented in the paper for demonstration purposes.

Keywords: Power systems, Linear programming, Quality assessment, Reliability.

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Authors: Sharan Badiger, Prema T. Akkasaligar, Patil LS, Manish Patel, Biradar MS

Abstract:

Human immunodeficiency virus infection and acquired immunodeficiency syndrome is a global pandemic with cases reporting from virtually every country and continues to be a common infection in developing country like India. Microalbuminuria is a manifestation of human immunodeficiency virus associated nephropathy. Therefore, microalbuminuria may be an early marker of human immunodeficiency virus associated nephropathy, and screening for its presence may be beneficial. A strikingly high prevalence of microalbuminuria among human immunodeficiency virus infected patients has been described in various studies. Risk factors for clinically significant proteinuria include African - American race, higher human immunodeficiency virus ribonucleic acid level and lower CD4 lymphocyte count. The cardiovascular risk factors of increased systolic blood pressure and increase fasting blood sugar level are strongly associated with microalbuminuria in human immunodeficiency virus patient. These results suggest that microalbuminuria may be a sign of current endothelial dysfunction and micro-vascular disease and there is substantial risk of future cardiovascular disease events. Positive contributing factors include early kidney disease such as human immunodeficiency virus associated nephropathy, a marker of end organ damage related to co morbidities of diabetes or hypertension, or more diffuse endothelial cells dysfunction. Nevertheless after adjustment for non human immunodeficiency virus factors, human immunodeficiency virus itself is a major risk factor. The presence of human immunodeficiency virus infection is independent risk to develop microalbuminuria in human immunodeficiency virus patient. Cardiovascular risk factors appeared to be stronger predictors of microalbuminuria than markers of human immunodeficiency virus severity person with human immunodeficiency virus infection and microalbuminuria therefore appear to potentially bear the burden of two separate damage related to known vascular end organ damage related to know vascular risk factors, and human immunodeficiency virus specific processes such as the direct viral infection of kidney cells.The higher prevalence of microalbuminuria among the human immunodeficiency virus infected could be harbinger of future increased risks of both kidney and cardiovascular disease. Further study defining the prognostic significance of microalbuminuria among human immunodeficiency virus infected persons will be essential. Microalbuminuria seems to be a predictor of cardiovascular disease in diabetic and non diabetic subjects, hence it can also be used for early detection of micro vascular disease in human immunodeficiency virus positive patients, thus can help to diagnose the disease at the earliest.

Keywords: Acquired immunodeficiency syndrome, Human immunodeficiency virus, Microalbuminuria.

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Authors: Qing Fang, Lianxi Jia, Junfeng Song, Chao Li, Xianshu Luo, Mingbin Yu, Guoqiang Lo

Abstract:

In this paper, we demonstrated a 1 × 4 silicon photonic cascaded arrayed waveguide grating, which is fabricated on a SOI wafer with a 220 nm top Si layer and a 2µm buried oxide layer. The measured on-chip transmission loss of this cascaded arrayed waveguide grating is ~ 5.6 dB, including the fiber-to-waveguide coupling loss. The adjacent crosstalk is 33.2 dB. Compared to the normal single silicon photonic arrayed waveguide grating with a crosstalk of ~ 12.5 dB, the crosstalk of this device has been dramatically increased.

Keywords: Silicon photonic, arrayed waveguide grating, high-crosstalk, cascaded structure.

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Authors: Vijay Kumar Kukreja, Ravneet Kaur

Abstract:

In this paper, one dimensional advection diffusion model is analyzed using finite difference method based on Crank-Nicolson scheme. A practical problem of filter cake washing of chemical engineering is analyzed. The model is converted into dimensionless form. For the grid Ω × ω = [0, 1] × [0, T], the Crank-Nicolson spatial derivative scheme is used in space domain and forward difference scheme is used in time domain. The scheme is found to be unconditionally convergent, stable, first order accurate in time and second order accurate in space domain. For a test problem, numerical results are compared with the analytical ones for different values of parameter.

Keywords: Consistency, Crank-Nicolson scheme, Gerschgorin circle, Lax-Richtmyer theorem, Peclet number, stability.

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Authors: H. Sediki, Dj. Ould Abdeslam, T. Otmane-cherif, A. Bechouche, K. Mesbah

Abstract:

This paper explores steady-state characteristics of grid-connected doubly fed induction motor (DFIM) in case of unity power factor operation. Based on the synchronized mathematical model, analytic determination of the control laws is presented and illustrated by various figures to understand the effect of the applied rotor voltage on the speed and the active power. On other hand, unlike previous works where the stator resistance was neglected, in this work, stator resistance is included such that the equations can be applied to small wind turbine generators which are becoming more popular. Finally the work is crowned by integration of the studied induction generator in a wind system where an open loop control is proposed confers a remarkable simplicity of implementation compared to the known methods.

Keywords: DFIM, equivalent circuit, induction machine, steady state

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Authors: A. Abbou, H. Mahmoudi, M. Akherraz

Abstract:

In contrast to conventional generators, self-excited induction generators are found to be most suitable machines for wind energy conversion in remote and windy areas due to many advantages over grid connected machines. This papers presents a Self-Excited Induction Generator (SEIG) driven by wind turbine and supplying an induction motor which is coupled to a centrifugal pump. A method to describe the steady state performance based on nodal analysis is presented. Therefore the advanced knowledge of the minimum excitation capacitor value is required. The effects of variation of excitation capacitance on system and rotor speed under different loading conditions have been analyzed and considered to optimize induction motor pump performances.

Keywords: SEIG, Induction Motor, Centrifugal Pump, capacitance requirements, wind rotor speed.

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Authors: A. A. James, A. O. Adesanya, M. R. Odekunle, D. G. Yakubu

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This paper examines the development of one step, five hybrid point method for the solution of first order initial value problems. We adopted the method of collocation and interpolation of power series approximate solution to generate a continuous linear multistep method. The continuous linear multistep method was evaluated at selected grid points to give the discrete linear multistep method. The method was implemented using a constant order predictor of order seven over an overlapping interval. The basic properties of the derived corrector was investigated and found to be zero stable, consistent and convergent. The region of absolute stability was also investigated. The method was tested on some numerical experiments and found to compete favorably with the existing methods.

Keywords: Interpolation, Approximate Solution, Collocation, Differential system, Half step, Converges, Block method, Efficiency.

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Authors: Ding Guo-hao, Li Hua, Wang Wen-long

Abstract:

A parallel computational fluid dynamics code has been developed for the study of aerodynamic heating problem in hypersonic flows. The code employs the 3D Navier-Stokes equations as the basic governing equations to simulate the laminar hypersonic flow. The cell centered finite volume method based on structured grid is applied for spatial discretization. The AUSMPW+ scheme is used for the inviscid fluxes, and the MUSCL approach is used for higher order spatial accuracy. The implicit LU-SGS scheme is applied for time integration to accelerate the convergence of computations in steady flows. A parallel programming method based on MPI is employed to shorten the computing time. The validity of the code is demonstrated by comparing the numerical calculation result with the experimental data of a hypersonic flow field around a blunt body.

Keywords: Aerodynamic Heating, AUSMPW+, MPI, ParallelComputation

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Authors: Nam-Seok Kim, Sang-Kyu Lee, Byung-Soo Shin, O-Hyun Keum

Abstract:

The present paper represents a methodology for investigating flow characteristics near orifice plate by using a commercial computational fluid dynamics code. The flow characteristics near orifice plate which is located in the auxiliary feedwater system were modeled via three different levels of grid and four different types of Reynolds Averaged Navier-Stokes (RANS) equations with proper near-wall treatment. The results from CFD code were compared with experimental data in terms of differential pressure through the orifice plate. In this preliminary study, the Realizable k-ε and the Reynolds stress models with enhanced wall treatment were suitable to analyze flow characteristics near orifice plate, and the results had a good agreement with experimental data.

Keywords: Auxiliary Feedwater, Computational Fluid Dynamics, Orifice, Nuclear Power Plant

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Authors: Sreeyuth Lal, Yohei Sato, Bojan Niceno

Abstract:

With the long-term objective of Critical Heat Flux (CHF) prediction, a Direct Numerical Simulation (DNS) framework for simulation of subcooled and saturated nucleate pool boiling is developed. One case of saturated, and three cases of subcooled boiling at different subcooling levels are simulated. Grid refinement study is also reported. Both boiling and condensation phenomena can be computed simultaneously in the proposed numerical framework. Computed bubble detachment diameters of the saturated nucleate pool boiling cases agree well with the experiment. The flow structures around the growing bubble are presented and the accompanying physics is described. The relation between heat flux evolution from the heated wall and the bubble growth is studied, along with investigations of temperature distribution and flow field evolutions.

Keywords: CFD, interface tracking method, phase change model, subcooled nucleate pool boiling.

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Authors: F. Yilmaz, Y. Saylan, A. Derazshamshir, S. Atay, A. Denizli

Abstract:

A quartz crystal microbalance (QCM) nanosensor was developed to detect lysozyme enzyme by functionalizing its gold surface with the attachment of poly(methacroyl-L-phenylalanine) (PMAPA) nanoparticles. PMAPA was chosen as a hydrophobic matrix. The hydrophobic nanoparticles were synthesized by micro-emulsion polymerization method. Hydrophobic QCM nanosensor was tested for real time detection of lysozyme enzyme from aqueous solution. The kinetic and affinity studies were determined by using lysozyme solutions with different concentrations. The responses related with mass (Δm) and frequency (Δf) shifts were used to evaluate adsorption properties. 

 

Keywords: HIC, lysozyme, nanosensor, QCM.

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Authors: Cathal Merz, Gareth O’Donnell

Abstract:

Coil reinforced thin-walled (CRTW) tubes are used in medicine to treat problems affecting blood vessels within the body through minimally invasive procedures. The CRTW tube considered in this research makes up part of such a device and is inserted into the patient via their femoral or brachial arteries and manually navigated to the site in need of treatment. This procedure replaces the requirement to perform open surgery but is limited by reduction of blood vessel lumen diameter and increase in tortuosity of blood vessels deep in the brain. In order to maximize the capability of these procedures, CRTW tube devices are being manufactured with decreasing wall thicknesses in order to deliver treatment deeper into the body and to allow passage of other devices through its inner diameter. This introduces significant stresses to the device materials which have resulted in an observed increase in the breaking of the proximal segment of the device into two separate pieces after it has failed by buckling. As there is currently no international standard for measuring the mechanical properties of these CRTW tube devices, it is difficult to accurately analyze this problem. The aim of the current work is to address this discrepancy in the biomedical device industry by developing a measurement system that can be used to quantify the effect of process and design changes on CRTW tube performance, aiding in the development of better performing, next generation devices. Using materials testing frames, micro-computed tomography (micro-CT) imaging, experiment planning, analysis of variance (ANOVA), T-tests and regression analysis, test methods have been developed for assessing the impact of process and design changes on the device. The major findings of this study have been an insight into the suitability of buckle and three-point bend tests for the measurement of the effect of varying processing factors on the device’s performance, and guidelines for interpreting the output data from the test methods. The findings of this study are of significant interest with respect to verifying and validating key process and design changes associated with the device structure and material condition. Test method integrity evaluation is explored throughout.

Keywords: Buckling, coil reinforced thin-walled tubes, fracture, test method.

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Authors: Mahdi Zolfaghari, Seyed Hossein Hosseinian, Hossein Askarian Abyaneh, Mehrdad Abedi

Abstract:

This paper presents a virtual active power filter (VAPF) using vehicle to grid (V2G) technology to maintain power quality requirements. The optimal discrete operation of the power converter of electric vehicle (EV) is based on recognizing desired switching states using the model predictive control (MPC) algorithm. A fast dynamic response, lower total harmonic distortion (THD) and good reference tracking performance are realized through the presented control strategy. The simulation results using MATLAB/Simulink validate the effectiveness of the scheme in improving power quality as well as good dynamic response in power transferring capability.

Keywords: Virtual active power filter, V2G technology, model predictive control, electric vehicle, power quality.

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Authors: Wei Sun, Ruilin Zheng, Xuyuan Chen

Abstract:

Micro power sources are required to be used in autonomous microelectromechanical system (MEMS). In this paper,  we designed and fabricated a three dimensional (3D) MEMS supercapacitor, which is consisting of conformal silicon  dioxide/titanium/polypyrrole (PPy) layers on silicon substrate. At first, ''through-structure'' was fabricated on the silicon substrate by high-aspect-ratio deep reactive ion etching (DRIE) method, which enlarges the available surface area significantly. Then the SiO2/Ti/PPy layers grew sequentially on the ³through-structure´. Finally, the supercapacitor was investigated by electrochemical methods.

Keywords: MEMS, Supercapacitor, DRIE, 3D.

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