Commenced in January 2007
Paper Count: 30077
Response Surface Methodology for Optimum Hardness of TiN on Steel Substrate
Abstract:Hard coatings are widely used in cutting and forming tool industries. Titanium Nitride (TiN) possesses good hardness, strength, and corrosion resistance. The coating properties are influenced by many process parameters. The coatings were deposited on steel substrate by changing the process parameters such as substrate temperature, nitrogen flow rate and target power in a D.C planer magnetron sputtering. The structure of coatings were analysed using XRD. The hardness of coatings was found using Micro hardness tester. From the experimental data, a regression model was developed and the optimum response was determined using Response Surface Methodology (RSM).
Digital Object Identifier (DOI): doi.org/10.5281/zenodo.1110676Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 1213
 T. An, M. Wen, L.L. Wang, C.Q. Hu, H.W. Tian and W.T. Zheng, “Structures, mechanical properties and thermal stability of TiN/SiN x multilayer coatings deposited by magnetron sputtering” Journal of alloys and compounds, Vol. 486, pp 515-520, 2009.
 A. Wisby, P.J Gregson and M. Tuke, “Application of PVD TiN coating to Co-Cr-Mo based surgical implants,” Biomaterials,, Vol.8, pp 477- 480, 1987B.
 Y. Mitamuo, T. Mikami and T. Yuton, “Development of fine ceramic heart valve for use as a cardiac prosthesis,” Transactions of American society. Artif Intern Organs, Vol.32, pp 444-448, 1986.
 O. Knotek, F. Loffler and K. Weitkamp, “Physical vapour deposition coatings for dental prostheses,” Surface and Coatings Technology, Vol.54/55, pp 536-540, 1992.
 T. Cselle and A. Barimani, “Today's applications and future developments of coatings for drills and rotating cutting tools” Surface and Coatings Technology, Vol.76/77, pp 712-718, 1995.
 J. Vettor, “Vacuum arc coatings for tools: potential and application” Surface and Coatings Technology, Vol.76/77, pp 719-724, 1995.
 T. Suni, D. Sigurd, K.T. Hu and M.A Nicolet, “Thermal Oxidation of Reactively Sputtered Titanium Nitride and Hafnium Nitride Films” Journal of Electrochemical society’, Vol.130, pp1210-1214, 1983.
 D. Maheo and J. M. Poitevin, “Structure of TiN films deposited on heated and negatively biased silicon substrates” Thin Solid Films, Vol.215 No.1, pp 8-13, 1992.
 Guenther Hrkoltz and Hans Eligehausen, “Technological Advances in Physical Vapor Depostion,”IEE Transctions on Components, hybrids and manufacturing technology, vol.chmt-6 No2, 1983.
 W. D. Sproul, P. J. Rudnik, M. E. Graham, “The effect of N2 partial pressure, deposition rate and substrate bias potential on the hardness and texture of reactively sputtered TiN coatings” Surface and Coatings Technology, Vol.39-40,Part-I, December 1989, Pages 355–363pp.
 Chi-Tung Huang and Jenq-Gong Duh, “Depostion of (Ti, AlN) films on A2 steel by reactive r.f magnetron sputtering,” Surface and Coatings Technology, Vol.71/95, pp 259- 266
 Nadia Saoula, Karim Hendai and Rafika Kesri, “Influence of Nitrogen Content on the Structural and Mechanical Properties of TiN Thin Films,” J. Plasma Fusion Res. SERIES, Vol. 8 (2009).
 Raymond. H Myers, D.C. Montgomery, “Response surface Methodology,” Third ed., John Wiley & Sons.