Search results for: elements of composition
Commenced in January 2007
Frequency: Monthly
Edition: International
Paper Count: 1740

Search results for: elements of composition

1200 Experimental Determination of the Critical Locus of the Acetone + Chloroform Binary System

Authors: Niramol Juntarachat, Romain Privat, Jean-Noël Jaubert

Abstract:

In this paper, vapour-liquid critical locus for the binary system acetone + chloroform was determined experimentally over the whole range of composition. The critical property measurements were carried out using a dynamic-synthetic apparatus, employed in the dynamic mode. The critical points are visually determined by observing the critical opalescence and the simultaneous disappearance and reappearance of the meniscus in the middle of a high-pressure view cell which withstands operations up to 673K and 20MPa. The experimental critical points measured in this work were compared to those available in literature.

Keywords: Experimental measurement, critical point, critical locus, negative azeotrope.

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1199 Investigation of Gas Phase Composition During Carbon Nanotube Production

Authors: S. Yaglikci, B. Salgara, F. Soysal, B. Cicek

Abstract:

Chemical vapor deposition method was used to produce carbon nanotubes on an iron based catalyst from acetylene. Gas-phase samples collected from the different positions of the tubular reactor were analyzed by GC/MS. A variety of species ranging from hydrogen to naphthalene were observed and changes in their concentrations were plotted against the reactor position. Briefly benzene, toluene, styrene, indene and naphthalene were the main higher molecular weight species and vinylacetylene and diacetylene were the important intermediates. Nanotube characterization was performed by scanning electron microscopy and transmission electron microscopy.

Keywords: Carbon nanotubes, chemical vapor deposition, GC/MS, species profile

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1198 Importance of Macromineral Ratios and Products in Association with Vitamin D in Pediatric Obesity Including Metabolic Syndrome

Authors: Mustafa M. Donma, Orkide Donma

Abstract:

Metabolisms of macrominerals, those of calcium, phosphorus and magnesium, are closely associated with the metabolism of vitamin D. Particularly magnesium, the second most abundant intracellular cation, is related to biochemical and metabolic processes in the body, such as those of carbohydrates, proteins and lipids. The status of each mineral was investigated in obesity to some extent. Their products and ratios may possibly give much more detailed information about the matter. The aim of this study is to investigate possible relations between each macromineral and some obesity-related parameters. This study was performed on 235 children, whose ages were between 06-18 years. Aside from anthropometric measurements, hematological analyses were performed. TANITA body composition monitor using bioelectrical impedance analysis technology was used to establish some obesity-related parameters including basal metabolic rate (BMR), total fat, mineral and muscle masses. World Health Organization body mass index (BMI) percentiles for age and sex were used to constitute the groups. The values above 99th percentile were defined as morbid obesity. Those between 95th and 99th percentiles were included into the obese group. The overweight group comprised of children whose percentiles were between 95 and 85. Children between the 85th and 15th percentiles were defined as normal. Metabolic syndrome (MetS) components (waist circumference, fasting blood glucose, triacylglycerol, high density lipoprotein cholesterol, systolic pressure, diastolic pressure) were determined. High performance liquid chromatography was used to determine Vitamin D status by measuring 25-hydroxy cholecalciferol (25-hydroxy vitamin D3, 25(OH)D). Vitamin D values above 30.0 ng/ml were accepted as sufficient. SPSS statistical package program was used for the evaluation of data. The statistical significance degree was accepted as p < 0.05. The important points were the correlations found between vitamin D and magnesium as well as phosphorus (p < 0.05) that existed in the group with normal BMI values. These correlations were lost in the other groups. The ratio of phosphorus to magnesium was even much more highly correlated with vitamin D (p < 0.001). The negative correlation between magnesium and total fat mass (p < 0.01) was confined to the MetS group showing the inverse relationship between magnesium levels and obesity degree. In this group, calcium*magnesium product exhibited the highest correlation with total fat mass (p < 0.001) among all groups. Only in the MetS group was a negative correlation found between BMR and calcium*magnesium product (p < 0.05). In conclusion, magnesium is located at the center of attraction concerning its relationships with vitamin D, fat mass and MetS. The ratios and products derived from macrominerals including magnesium have pointed out stronger associations other than each element alone. Final considerations have shown that unique correlations of magnesium as well as calcium*magnesium product with total fat mass have drawn attention particularly in the MetS group, possibly due to the derangements in some basic elements of carbohydrate as well as lipid metabolism.

Keywords: Macrominerals, metabolic syndrome, pediatric obesity, vitamin D.

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1197 Evaluating Service Quality of Online Auction by Fuzzy MCDM

Authors: Wei-Hsuan Lee, Chien-Hua Wang, Chin-Tzong Pang

Abstract:

This paper applies fuzzy set theory to evaluate the service quality of online auction. Service quality is a composition of various criteria. Among them many intangible attributes are difficult to measure. This characteristic introduces the obstacles for respondent in replying to the survey. So as to overcome this problem, we invite fuzzy set theory into the measurement of performance. By using AHP in obtaining criteria and TOPSIS in ranking, we found the most concerned dimension of service quality is Transaction Safety Mechanism and the least is Charge Item. Regarding to the most concerned attributes are information security, accuracy and information.

Keywords: AHP, Fuzzy set theory, TOPSIS, Online auction, Servicequality

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1196 Emissions of Euro 3-5 Passenger Cars Measured Over Different Driving Cycles

Authors: C. A. Alves, A. I. Calvo, D. J. Lopes, T. Nunes, A. Charron, M. Goriaux, P. Tassel, P. Perret

Abstract:

The reduction in vehicle exhaust emissions achieved in the last two decades is offset by the growth in traffic, as well as by changes in the composition of emitted pollutants. The present investigation illustrates the emissions of in-use gasoline and diesel passenger cars using the official European driving cycle and the ARTEMIS real-world driving cycle. It was observed that some of the vehicles do not comply with the corresponding regulations. Significant differences in emissions were observed between driving cycles. Not all pollutants showed a tendency to decrease from Euro 3 to Euro 5.

Keywords: Chassis dynamometer, driving cycles, emission factors, exhaust emissions, light-duty vehicles.

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1195 Hydrogenation of Acetic Acid on Alumina-Supported Pt-Sn Catalysts

Authors: Ke Zhang, Fang Li, Haitao Zhang, Hongfang Ma, Weiyong Ying, Dingye Fang

Abstract:

Three alumina-supported Pt-Sn catalysts have been prepared by means of co-impregnation and characterized by XRD and N2 adsorption. The influence of catalyst composition and reaction conditions on the conversion and selectivity were investigated in the hydrogenation of acetic acid in an isothermal integral fixed bed reactor. The experiments were performed on the temperature interval 468-548 K, liquid hourly space velocity (LHSV) of 0.3-0.7h-1, pressures between 1.0 and 5.0Mpa. A good compromise of 0.75%Pt-1.5%Sn can act as an optimized acetic acid hydrogenation catalyst, and the conversion and selectivity can be tuned through the variation of reaction conditions.

Keywords: Acetic acid, hydrogenation, Pt-Sn catalysts, ethanol.

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1194 Extraction of Squalene from Lebanese Olive Oil

Authors: Henri El Zakhem, Christina Romanos, Charlie Bakhos, Hassan Chahal, Jessica Koura

Abstract:

Squalene is a valuable component of the oil composed of 30 carbon atoms and is mainly used for cosmetic materials. The main concern of this article is to study the Squalene composition in the Lebanese olive oil and to compare it with foreign oil results. To our knowledge, extraction of Squalene from the Lebanese olive oil has not been conducted before. Three different techniques were studied and experiments were performed on three brands of olive oil, Al Wadi Al Akhdar, Virgo Bio and Boulos. The techniques performed are the Fractional Crystallization, the Soxhlet and the Esterification. By comparing the results, it is found that the Lebanese oil contains squalene and Soxhlet method is the most effective between the three methods extracting about 6.5E-04 grams of Squalene per grams of olive oil.

Keywords: Squalene, extraction, crystallization, Soxhlet.‎

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1193 Description of Kinetics of Propane Fragmentation with a Support of Ab Initio Simulation

Authors: Amer Al Mahmoud Alsheikh, Jan Žídek, František Krčma

Abstract:

Using ab initio theoretical calculations, we present analysis of fragmentation process. The analysis is performed in two steps. The first step is calculation of fragmentation energies by ab initio calculations. The second step is application of the energies to kinetic description of process. The energies of fragments are presented in this paper. The kinetics of fragmentation process can be described by numerical models. The method for kinetic analysis is described in this paper. The result - composition of fragmentation products - will be calculated in future. The results from model can be compared to the concentrations of fragments from mass spectrum.

Keywords: Ab initio, Density functional theory, Fragmentation energy, Geometry optimization.

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1192 Observation and Experience of Using Mechanically Activated Fly Ash in Concrete

Authors: R. Hela, L. Bodnarova

Abstract:

Paper focuses on experimental testing of possibilities of mechanical activation of fly ash and observation of influence of specific surface and granulometry on final properties of fresh and hardened concrete. Mechanical grinding prepared various fineness of fly ash, which was classed by specific surface in accordance with Blain and their granulometry was determined by means of laser granulometer. Then, sets of testing specimens were made from mix designs of identical composition with 25% or Portland cement CEM I 42.5 R replaced with fly ash with various specific surface and granulometry. Mix design with only Portland cement was used as reference. Mix designs were tested on consistency of fresh concrete and compressive strength after 7, 28, 60 and 90 days.

Keywords: Concrete, fly ash, latent hydraulicity, mechanically activated fly ash.

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1191 Artificial Neural Networks for Identification and Control of a Lab-Scale Distillation Column Using LABVIEW

Authors: J. Fernandez de Canete, S. Gonzalez-Perez, P. del Saz-Orozco

Abstract:

LABVIEW is a graphical programming language that has its roots in automation control and data acquisition. In this paper we have utilized this platform to provide a powerful toolset for process identification and control of nonlinear systems based on artificial neural networks (ANN). This tool has been applied to the monitoring and control of a lab-scale distillation column DELTALAB DC-SP. The proposed control scheme offers high speed of response for changes in set points and null stationary error for dual composition control and shows robustness in presence of externally imposed disturbance.

Keywords: Distillation, neural networks, LABVIEW, monitoring, identification, control.

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1190 Distribution Sampling of Vector Variance without Duplications

Authors: Erna T. Herdiani, Maman A. Djauhari

Abstract:

In recent years, the use of vector variance as a measure of multivariate variability has received much attention in wide range of statistics. This paper deals with a more economic measure of multivariate variability, defined as vector variance minus all duplication elements. For high dimensional data, this will increase the computational efficiency almost 50 % compared to the original vector variance. Its sampling distribution will be investigated to make its applications possible.

Keywords: Asymptotic distribution, covariance matrix, likelihood ratio test, vector variance.

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1189 Adolescents’ Role in Family Buying Decision Making

Authors: Harleen Kaur, Deepika Jindal Singla

Abstract:

Buying decision making is a complicated process, in which consumer’s decision is under the impact of others. The buying decision making is directed in a way that they have to act as customers in the society. Media and family are key socialising agents for adolescents’. Moreover, changes in the socio-cultural environment in India necessitate that adolescents’ influence in family’s buying decision-making should be investigated. In comparison to Western society, Indian is quite different, when compared in terms of family composition and structure, behaviour, values and norms which effect adolescents’ buying decision-making.

Keywords: Adolescents’, buying behaviour, Indian urban families, consumer socialization.

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1188 A Optimal Subclass Detection Method for Credit Scoring

Authors: Luciano Nieddu, Giuseppe Manfredi, Salvatore D'Acunto, Katia La Regina

Abstract:

In this paper a non-parametric statistical pattern recognition algorithm for the problem of credit scoring will be presented. The proposed algorithm is based on a clustering k- means algorithm and allows for the determination of subclasses of homogenous elements in the data. The algorithm will be tested on two benchmark datasets and its performance compared with other well known pattern recognition algorithm for credit scoring.

Keywords: Constrained clustering, Credit scoring, Statistical pattern recognition, Supervised classification.

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1187 Long-term Flexural Behavior of HSC Beams

Authors: Andreea Muntean, Cornelia Măgureanu

Abstract:

This article presents the analysis of experimental values regarding cracking pattern, specific strains and deformability for reinforced high strength concrete beams. The beams have the concrete class C80/95 and a longitudinal reinforcement ratio of 2.01%, respectively 3.39%. The elements were subjected to flexure under static short-term and long-term loading. The experimental values are compared with calculation values using the design relationships according to Eurocode 2.

Keywords: High strength concrete, beams, flexure.

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1186 On the Coupled Electromechanical Behavior of Artificial Materials with Chiral-Shell Elements

Authors: Anna Girchenko, Victor A. Eremeyev, Holm Altenbach

Abstract:

In the present work we investigate both the elastic and electric properties of a chiral material. We consider a composite structure made from a polymer matrix and anisotropic inclusions of GaAs taking into account piezoelectric and dielectric properties of the composite material. The principal task of the work is the estimation of the functional properties of the composite material.

Keywords: Coupled electromechanical behavior, Composite structure, Chiral metamaterial.

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1185 The Effect on Rolling Mill of Waviness in Hot Rolled Steel

Authors: Sunthorn S., Kittiphat R.

Abstract:

The edge waviness in hot rolled steel is a common defect. Variables that affect such defect include raw material and machine. These variables are necessary to consider to understand such defect. This research studied the defect of edge waviness for SS 400 of metal sheet manufacture. Defect of metal sheets were divided into two groups. The specimens were investigated on chemical composition and mechanical properties to find the difference. The results of investigation showed that the difference was not significant. Therefore the roll mill machine should be used to adjust to support another location on a roller to avoide edge waviness.

Keywords: Edge waviness, Hot rolling steel, Metal sheet defect, SS 400, Roll leveler.

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1184 Two Active Elements Based All-Pass Section Suited for Current-Mode Cascading

Authors: J. Mohan, S. Maheshwari

Abstract:

A new circuit topology realizing a first-order currentmode all-pass filter is proposed using two dual-output second generation current conveyor and two passive components. The circuit possesses low-input and high-output impedance, which makes it ideal for current-mode systems. The proposed circuit is verified through PSPICE simulation results.

Keywords: active filter, all-pass filter, current-mode, current conveyor.

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1183 Kinematic Analysis of a Novel Complex DoF Parallel Manipulator

Authors: M.A. Hosseini, P. Ebrahimi Naghani

Abstract:

In this research work, a novel parallel manipulator with high positioning and orienting rate is introduced. This mechanism has two rotational and one translational degree of freedom. Kinematics and Jacobian analysis are investigated. Moreover, workspace analysis and optimization has been performed by using genetic algorithm toolbox in Matlab software. Because of decreasing moving elements, it is expected much more better dynamic performance with respect to other counterpart mechanisms with the same degrees of freedom. In addition, using couple of cylindrical and revolute joints increased mechanism ability to have more extended workspace.

Keywords: Kinematics, Workspace, 3-CRS/PU, Parallel robot

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1182 How to Build and Evaluate a Solution Method: An Illustration for the Vehicle Routing Problem

Authors: Nicolas Zufferey

Abstract:

The vehicle routing problem (VRP) is a famous combinatorial optimization problem. Because of its well-known difficulty, metaheuristics are the most appropriate methods to tackle large and realistic instances. The goal of this paper is to highlight the key ideas for designing VRP metaheuristics according to the following criteria: efficiency, speed, robustness, and ability to take advantage of the problem structure. Such elements can obviously be used to build solution methods for other combinatorial optimization problems, at least in the deterministic field.

Keywords: Vehicle routing problem, Metaheuristics, Combinatorial optimization.

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1181 Effect of Castration on CLA in Meat Goats

Authors: P. Paengkoum, T. Phonmun, S. Paengkoum

Abstract:

Twenty four male Thai native × Anglo-Nubian crossbred goats were randomly allocated to receive four treatments. The experiment was conducted for four months and slaughtered that the Longissimus dorsi muscle was collected for fatty acid analysis. The results conclude that either castrated method or ages had no significantly different on monounsaturated fatty acid (MUFA) (P>0.05) except erucic acid (C22:1n9). Interaction between castrated method and ages had significantly different in MUFA (P<0.01). Although the effect of castration method and age are not difference on fatty acid composition, it contributed to known that difference castration method and age (surgical and budizzo) no effect on accumulation fatty acid in meat goats.

Keywords: Castration, goat, CLA, meat.

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1180 Behavior Model Mapping and Transformation using Model-Driven Architecture

Authors: Mohammed Abdalla Osman Mukhtar, Azween Abdullah, Alan Giffin Downe

Abstract:

Model mapping and transformation are important processes in high level system abstractions, and form the cornerstone of model-driven architecture (MDA) techniques. Considerable research in this field has devoted attention to static system abstraction, despite the fact that most systems are dynamic with high frequency changes in behavior. In this paper we provide an overview of work that has been done with regard to behavior model mapping and transformation, based on: (1) the completeness of the platform independent model (PIM); (2) semantics of behavioral models; (3) languages supporting behavior model transformation processes; and (4) an evaluation of model composition to effect the best approach to describing large systems with high complexity.

Keywords: MDA; PIM, PSM, QVT, Model Transformation

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1179 An Overview of Construction and Demolition Waste as Coarse Aggregate in Concrete

Authors: S. R. Shamili, J. Karthikeyan

Abstract:

Fast development of the total populace and far and wide urbanization has surprisingly expanded the advancement of the construction industry. As a result of these activities, old structures are being demolished to make new buildings. Due to these large-scale demolitions, a huge amount of debris is generated all over the world, which results in a landfill. The use of construction and demolition waste as landfill causes groundwater contamination, which is hazardous. Using construction and demolition waste as aggregate can reduce the use of natural aggregates and the problem of mining. The objective of this study is to provide a detailed overview on how the construction and demolition waste material has been used as aggregate in structural concrete. In this study, the preparation, classification, and composition of construction and demolition wastes are also discussed.

Keywords: Aggregate, construction and demolition waste, landfill, large scale demolition.

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1178 Rational Points on Elliptic Curves 2 3 3y = x + a inF , where p 5(mod 6) is Prime

Authors: Gokhan Soydan, Musa Demirci, Nazli Yildiz Ikikardes, Ismail Naci Cangul

Abstract:

In this work, we consider the rational points on elliptic curves over finite fields Fp where p ≡ 5 (mod 6). We obtain results on the number of points on an elliptic curve y2 ≡ x3 + a3(mod p), where p ≡ 5 (mod 6) is prime. We give some results concerning the sum of the abscissae of these points. A similar case where p ≡ 1 (mod 6) is considered in [5]. The main difference between two cases is that when p ≡ 5 (mod 6), all elements of Fp are cubic residues.

Keywords: Elliptic curves over finite fields, rational points.

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1177 Aroma Composition and Polyphenol Content of Ciders Available in Latvian Market

Authors: Rita Riekstina-Dolge, Zanda Kruma, Daina Karklina

Abstract:

Aroma forming volatiles are important components of fermented beverages. The aim of current research is to evaluate the volatile compounds and phenolic compounds of commercial ciders. Volatile aroma compounds and TPC of seven commercial ciders were determined. Extraction of aroma compounds was performed using solid phase microextraction (DVB/Car/PDMS fibre). Analysis of volatile aroma compounds was made using a Perkin Elmer Clarus 500 GC/MS. Total phenol content (TPC) was determined according to the Folin-Ciocalteu spectrophotometric method and results were expressed as gallic acid equivalents. The highest volatile compounds were in apple ciders with pear flavor. The highest TPC and lower content of volatile compounds were detected in French ciders.

Keywords: cider, TPC, volatile compounds

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1176 Synthesis and Thermoelectric Behavior in Nanoparticles of Doped Co Ferrites

Authors: M. Anis-ur- Rehman, A. Abdullah, Mariam Ansari , Zeb-un-Nisa, M. S. Awan

Abstract:

Samples of CoFe2-xCrxO4 where x varies from 0.0 to 0.5 were prepared by co-precipitation route. These samples were sintered at 750°C for 2 hours. These particles were characterized by X-ray diffraction (XRD) at room temperature. The FCC spinel structure was confirmed by XRD patterns of the samples. The crystallite sizes of these particles were calculated from the most intense peak by Scherrer formula. The crystallite sizes lie in the range of 37-60 nm. The lattice parameter was found decreasing upon substitution of Cr. DC electrical resistivity was measured as a function of temperature. The room temperature thermoelectric power was measured for the prepared samples. The magnitude of Seebeck coefficient depends on the composition and resistivity of the samples.

Keywords: Ferrites, crystallite size, drift mobility, seebeck coefficient, thermopower.

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1175 The Effect of the Parameters of the Grinding on the Characteristics of the Deposit Phosphate Ore of Kef Es Sennoun, Djebel Onk-Tebessa, Algeria

Authors: N. Benabdeslam, N. Bouzidi, F. Atmani, R. Boucif, A. Sakhri

Abstract:

The objective of this study was to provide answers for a better understanding of the mechanisms involved during grinding. To obtain a phosphate powder, we carry out sieving - grinding circuits for each parameter influencing the process. The analysis of the average particle size of the different tests carried out served in the first place as a basis for the determination of the granulometric curve area, the characteristics and the granular coefficients, then the exploitation of the different results for the calculation of the energies consumed for the fragmentation of different ore types, the energy coefficients as well as the ability to grind. Indeed, a time of 5 to 10 minutes can be chosen as the optimal grinding time in a disc mill for a % in weight of the highest pass. However, grinding time can influence the granular characteristics of ore.

Keywords: Energy, granular characteristics, grinding, mineralogical composition, phosphate ore.

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1174 A Comparative Study of Electrical Transport Phenomena in Ultrathin vs. Nanoscale SOI MOSFETs Devices

Authors: A. Karsenty, A. Chelly

Abstract:

Ultrathin (UTD) and Nanoscale (NSD) SOI-MOSFET devices, sharing a similar W/L but with a channel thickness of 46nm and 1.6nm respectively, were fabricated using a selective “gate recessed” process on the same silicon wafer. The electrical transport characterization at room temperature has shown a large difference between the two kinds of devices and has been interpreted in terms of a huge unexpected series resistance. Electrical characteristics of the Nanoscale device, taken in the linear region, can be analytically derived from the ultrathin device ones. A comparison of the structure and composition of the layers, using advanced techniques such as Focused Ion Beam (FIB) and High Resolution TEM (HRTEM) coupled with Energy Dispersive X-ray Spectroscopy (EDS), contributes an explanation as to the difference of transport between the devices.

Keywords: Nanoscale Devices, SOI MOSFET, Analytical Model, Electron Transport.

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1173 Predictions of Values in a Causticizing Process

Authors: R. Andreola, O. A. A. Santos, L. M. M, Jorge

Abstract:

An industrial system for the production of white liquor of a paper industry, Klabin Paraná Papéis, formed by ten reactors was modeled, simulated, and analyzed. The developed model considered possible water losses by evaporation and reaction, in addition to variations in volumetric flow of lime mud across the reactors due to composition variations. The model predictions agreed well with the process measurements at the plant and the results showed that the slaking reaction is nearly complete at the third causticizing reactor, while causticizing ends by the seventh reactor. Water loss due to slaking reaction and evaporation occurs more pronouncedly in the slaking reaction than in the final causticizing reactors; nevertheless, the lime mud flow remains nearly constant across the reactors.

Keywords: Causticizing, lime, prediction, process.

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1172 Novel and Different Definitions for Fuzzy Union and Intersection Operations

Authors: Aarthi Chandramohan, M. V. C. Rao

Abstract:

This paper presents three new methodologies for the basic operations, which aim at finding new ways of computing union (maximum) and intersection (minimum) membership values by taking into effect the entire membership values in a fuzzy set. The new methodologies are conceptually simple and easy from the application point of view and are illustrated with a variety of problems such as Cartesian product of two fuzzy sets, max –min composition of two fuzzy sets in different product spaces and an application of an inverted pendulum to determine the impact of the new methodologies. The results clearly indicate a difference based on the nature of the fuzzy sets under consideration and hence will be highly useful in quite a few applications where different values have significant impact on the behavior of the system.

Keywords: Centroid, fuzzy set operations, intersection, triangular norms , triangular S-norms, union.

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1171 Study of Fast Etching of Silicon for the Fabrication of Bulk Micromachined MEMS Structures

Authors: V. Swarnalatha, A. V. Narasimha Rao, P. Pal

Abstract:

The present research reports the investigation of fast etching of silicon for the fabrication of microelectromechanical systems (MEMS) structures using silicon wet bulk micromachining. Low concentration tetramethyl-ammonium hydroxide (TMAH) and hydroxylamine (NH2OH) are used as main etchant and additive, respectively. The concentration of NH2OH is varied to optimize the composition to achieve best etching characteristics such as high etch rate, significantly high undercutting at convex corner for the fast release of the microstructures from the substrate, and improved etched surface morphology. These etching characteristics are studied on Si{100} and Si{110} wafers as they are most widely used in the fabrication of MEMS structures as wells diode, transistors and integrated circuits.

Keywords: KOH, MEMS, micromachining, silicon, TMAH, wet anisotropic etching.

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