Search results for: control process

Authors: Ö. Tolga Altınöz

Abstract:

The adaptive backstepping controller for inverted pendulum is designed by using the general motion control model. Backstepping is a novel nonlinear control technique based on the Lyapunov design approach, used when higher derivatives of parameter estimation appear. For easy parameter adaptation, the mathematical model of the inverted pendulum converted into the motion control model. This conversion is performed by taking functions of unknown parameters and dynamics of the system. By using motion control model equations, inverted pendulum is simulated without any information about not only parameters but also measurable dynamics. Also these results are compare with the adaptive backstepping controller which extended with integral action that given from [1].

Keywords: Adaptive backstepping, inverted pendulum, nonlinear adaptive control.

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Authors: Ljubica Milanović Glavan

Abstract:

Because of the increasing business pressures, companies must be adaptable and flexible in order to withstand them. Inadequate business processes and low level of business process orientation, that in its core accentuates business processes as opposed to business functions and focuses on process performance and customer satisfaction, hider the ability to adapt to changing environment. It has been shown in previous studies that the companies which have reached higher business process maturity level consistently outperform those that have not reached them. The aim of this paper is to provide a basic understanding of business process orientation concept and business process maturity model. Besides that the paper presents the state of business process orientation in Croatia that has been captured with a study conducted in 2013. Based on the results some practical implications and guidelines for managers are given.

Keywords: Business process orientation, business process maturity, Croatia, maturity score.

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Authors: Taiki Baba, Tomoaki Hashimoto

Abstract:

The random dither quantization method enables us to achieve much better performance than the simple uniform quantization method for the design of quantized control systems. Motivated by this fact, the stochastic model predictive control method in which a performance index is minimized subject to probabilistic constraints imposed on the state variables of systems has been proposed for linear feedback control systems with random dither quantization. In other words, a method for solving optimal control problems subject to probabilistic state constraints for linear discrete-time control systems with random dither quantization has been already established. To our best knowledge, however, the feasibility of such a kind of optimal control problems has not yet been studied. Our objective in this paper is to investigate the feasibility of stochastic model predictive control problems for linear discrete-time control systems with random dither quantization. To this end, we provide the results of numerical simulations that verify the feasibility of stochastic model predictive control problems for linear discrete-time control systems with random dither quantization.

Keywords: Model predictive control, stochastic systems, probabilistic constraints, random dither quantization.

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Authors: Soltani Amir, Hu Jiaxin

Abstract:

Determination of optimal parameters of a passive  control system device is the primary objective of this study.  Expanding upon the use of control devices in wind and earthquake  hazard reduction has led to development of various control systems.  The advantage of non-linearity characteristics in a passive control  device and the optimal control method using LQR algorithm are  explained in this study. Finally, this paper introduces a simple  approach to determine optimum parameters of a nonlinear viscous  damper for vibration control of structures. A MATLAB program is  used to produce the dynamic motion of the structure considering the  stiffness matrix of the SDOF frame and the non-linear damping  effect. This study concluded that the proposed system (variable  damping system) has better performance in system response control  than a linear damping system. Also, according to the energy  dissipation graph, the total energy loss is greater in non-linear  damping system than other systems.

 

Keywords: Passive Control System, Damping Devices, Viscous Dampers, Control Algorithm.

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Authors: Martin Hans Knahl

Abstract:

The Internet is the global data communications infrastructure based on the interconnection of both public and private networks using protocols that implement Internetworking on a global scale. Hence the control of protocol and infrastructure development, resource allocation and network operation are crucial and interlinked aspects. Internet Governance is the hotly debated and contentious subject that refers to the global control and operation of key Internet infrastructure such as domain name servers and resources such as domain names. It is impossible to separate technical and political positions as they are interlinked. Furthermore the existence of a global market, transparency and competition impact upon Internet Governance and related topics such as network neutrality and security. Current trends and developments regarding Internet governance with a focus on the policy-making process, security and control have been observed to evaluate current and future implications on the Internet. The multi stakeholder approach to Internet Governance discussed in this paper presents a number of opportunities, issues and developments that will affect the future direction of the Internet. Internet operation, maintenance and advisory organisations such as the Internet Corporation for Assigned Names and Numbers (ICANN) or the Internet Governance Forum (IGF) are currently in the process of formulating policies for future Internet Governance. Given the controversial nature of the issues at stake and the current lack of agreement it is predicted that institutional as well as market governance will remain present for the network access and content.

Keywords: Internet Governance, ICANN, Democracy, Security

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Authors: Marwan Abukhaled, Ibrahim Sadek

Abstract:

This paper presents the vibrations suppression of a thermoelastic beam subject to sudden heat input by a distributed piezoelectric actuators. An optimization problem is formulated as the minimization of a quadratic functional in terms of displacement and velocity at a given time and with the least control effort. The solution method is based on a combination of modal expansion and variational approaches. The modal expansion approach is used to convert the optimal control of distributed parameter system into the optimal control of lumped parameter system. By utilizing the variational approach, an explicit optimal control law is derived and the determination of the corresponding displacement and velocity is reduced to solving a set of ordinary differential equations.

Keywords: Optimal control, Thermoelastic beam, variational approach, modal expansion approach

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Authors: R. Meier, M. Pander

Abstract:

In accordance with the industry 4.0 concept, manufacturing process steps as well as the materials themselves are going to be more and more digitalized within the next years. The “digital twin” representing the simulated and measured dataset of the (semi-finished) product can be used to control and optimize the individual processing steps and help to reduce costs and expenditure of time in product development, manufacturing, and recycling. In the present work, two material characterization methods based on Lamb waves were evaluated and compared. For demonstration purpose, both methods were shown at a standard industrial product - copper ribbons, often used in photovoltaic modules as well as in high-current microelectronic devices. By numerical approximation of the Rayleigh-Lamb dispersion model on measured phase velocities second order elastic constants (Young’s modulus, Poisson’s ratio) were determined. Furthermore, the effective third order elastic constants were evaluated by applying elastic, “non-destructive”, mechanical stress on the samples. In this way, small microstructural variations due to mechanical preconditioning could be detected for the first time. Both methods were compared with respect to precision and inline application capabilities. Microstructure of the samples was systematically varied by mechanical loading and annealing. Changes in the elastic ultrasound transport properties were correlated with results from microstructural analysis and mechanical testing. In summary, monitoring the elastic material properties of plate-like structures using Lamb waves is valuable for inline and non-destructive material characterization and manufacturing process control. Second order elastic constants analysis is robust over wide environmental and sample conditions, whereas the effective third order elastic constants highly increase the sensitivity with respect to small microstructural changes. Both Lamb wave based characterization methods are fitting perfectly into the industry 4.0 concept.

Keywords: Lamb waves, industry 4.0, process control, elasticity, acoustoelasticity.

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Authors: Amit Kohli, Aashim Wadhwa, Tapan Virmani, Ujjwal Jain

Abstract:

The objective of present work is to stimulate the machining of material by electrical discharge machining (EDM) to give effect of input parameters like discharge current (Ip), pulse on time (Ton), pulse off time (Toff) which can bring about changes in the output parameter, i.e. material removal rate. Experimental data was gathered from die sinking EDM process using copper electrode and Medium Carbon Steel (AISI 1040) as work-piece. The rules of membership function (MF) and the degree of closeness to the optimum value of the MMR are within the upper and lower range of the process parameters. It was found that proposed fuzzy model is in close agreement with the experimental results. By Intelligent, model based design and control of EDM process parameters in this study will help to enable dramatically decreased product and process development cycle times.

Keywords: Electrical discharge Machining (EDM), Fuzzy Logic, Material removal rate (MRR), Membership functions (MF).

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Authors: Ei Ei Moe, Zaw Min Aung, Kyawt Khin

Abstract:

This paper puts forward one kind of air-fuel ratio control method with PI controller. With the help of MATLAB/SIMULINK software, the mathematical model of air-fuel ratio control system for distributorless CNG engine is constructed. The objective is to maintain cylinder-to-cylinder air-fuel ratio at a prescribed set point, determined primarily by the state of the Three- Way-Catalyst (TWC), so that the pollutants in the exhaust are removed with the highest efficiency. The concurrent control of airfuel under transient conditions could be implemented by Proportional and Integral (PI) controller. The simulation result indicates that the control methods can easily eliminate the air/fuel maldistribution and maintain the air/fuel ratio at the stochiometry within minimum engine events.

Keywords: Distributorless CNG Engine, Mathematical Modelof Air-fuel control, MATLAB/SIMULINK, PI controller

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Authors: Regius Asiimwe, Amir Anvar

Abstract:

This paper describes the process used in the automation of the Maritime UAV commands using the Kinect sensor. The AR Drone is a Quadrocopter manufactured by Parrot [1] to be controlled using the Apple operating systems such as iPhones and Ipads. However, this project uses the Microsoft Kinect SDK and Microsoft Visual Studio C# (C sharp) software, which are compatible with Windows Operating System for the automation of the navigation and control of the AR drone. The navigation and control software for the Quadrocopter runs on a windows 7 computer. The project is divided into two sections; the Quadrocopter control system and the Kinect sensor control system. The Kinect sensor is connected to the computer using a USB cable from which commands can be sent to and from the Kinect sensors. The AR drone has Wi-Fi capabilities from which it can be connected to the computer to enable transfer of commands to and from the Quadrocopter. The project was implemented in C#, a programming language that is commonly used in the automation systems. The language was chosen because there are more libraries already established in C# for both the AR drone and the Kinect sensor. The study will contribute toward research in automation of systems using the Quadrocopter and the Kinect sensor for navigation involving a human operator in the loop. The prototype created has numerous applications among which include the inspection of vessels such as ship, airplanes and areas that are not accessible by human operators.

Keywords: UAV, AR drone, Kinect Sensors, Automation, Real time, C sharp, Microsoft Kinect SDK.

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Authors: S. Leghmizi, S. Liu, F. Naeim

Abstract:

This paper presents a fuzzy control system for a three degree of freedom (3-DOF) stabilized platform with explicit decoupling scheme. The system under consideration is a system with strong interactions between three channels. By using the concept of decentralized control, a control structure is developed that is composed of three control loops, each of which is associated with a single-variable fuzzy controller and a decoupling unit. Takagi-Sugeno (TS) fuzzy control algorithm is used to implement the fuzzy controller. The decoupling units design is based on the adaptive theory reasoning. Simulation tests were established using Simulink of Matlab. The obtained results have demonstrated the feasibility and effectiveness of the proposed approach. Simulation results are represented in this paper.

Keywords: 3-DOF platform of a ship carried antenna, the concept of decentralized control, Takagi-Sugeno (TS) fuzzy control algorithm, Simulink.

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Authors: Markus Reichhartinger, Martin Horn

Abstract:

In this paper, the application of sliding-mode control to a permanent-magnet synchronous motor (PMSM) is presented. The control design is based on a generic mathematical model of the motor. Some dynamics of the motor and of the power amplification stage remain unmodelled. This model uncertainty is estimated in realtime. The estimation is based on the differentiation of measured signals using the ideas of robust exact differentiator (RED). The control law is implemented on an industrial servo drive. Simulations and experimental results are presented and compared to the same control strategy without uncertainty estimation. It turns out that the proposed concept is superior to the same control strategy without uncertainty estimation especially in the case of non-smooth reference signals.

Keywords: sliding-mode control, Permanent-magnet synchronous motor, uncertainty estimation, robust exact differentiator.

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Authors: Jan Erik Stellet

Abstract:

This article presents a detailed analysis and comparative performance evaluation of model reference adaptive control systems. In contrast to classical control theory, adaptive control methods allow to deal with time-variant processes. Inspired by the works [1] and [2], two methods based on the MIT rule and Lyapunov rule are applied to a linear first order system. The system is simulated and it is investigated how changes to the adaptation gain affect the system performance. Furthermore, variations in the reference model parameters, that is changing the desired closed-loop behaviour are examinded.

Keywords: Adaptive control systems, Adaptation gain, MIT rule, Lyapunov rule, Model reference adaptive control.

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Authors: U. Tancredi, D. Accardo, M. Grassi, G. Fasano, A. E. Tirri, A. Vitale, N. Genito, F. Montemari, L. Garbarino

Abstract:

The development of guidance, navigation and control algorithms and avionic procedures requires the disposability of suitable analysis and verification tools, such as simulation environments, which support the design process and allow detecting potential problems prior to the flight test, in order to make new technologies available at reduced cost, time and risk. This paper presents a simulation environment for avionic software development and qualification, especially aimed at equipment for general aviation aircrafts and unmanned aerial systems. The simulation environment includes models for short and medium-range radio-navigation aids, flight assistance systems, and ground control stations. All the software modules are able to simulate the modeled systems both in fast-time and real-time tests, and were implemented following component oriented modeling techniques and requirement based approach. The paper describes the specific models features, the architectures of the implemented software systems and its validation process. Performed validation tests highlighted the capability of the simulation environment to guarantee in real-time the required functionalities and performance of the simulated avionics systems, as well as to reproduce the interaction between these systems, thus permitting a realistic and reliable simulation of a complete mission scenario.

Keywords: ADS-B, avionics, NAVAIDs, real time simulation, TCAS, UAS ground control station.

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Authors: Archana S. Nanoty, A. R. Chudasama

Abstract:

Three-phase induction machines are today a standard for industrial electrical drives. Cost, reliability, robustness and maintenance free operation are among the reasons these machines are replacing dc drive systems. The development of power electronics and signal processing systems has eliminated one of the greatest disadvantages of such ac systems, which is the issue of control. With modern techniques of field oriented vector control, the task of variable speed control of induction machines is no longer a disadvantage. The need to increase system performance, particularly when facing limits on the power ratings of power supplies and semiconductors, motivates the use of phase number other than three, In this paper a novel scheme of connecting two, three phase induction motors in parallel fed by two inverters; viz. VSI and CSI and their vector control is presented.

Keywords: Field oriented control, multiphase induction motor, power electronics converter.

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Authors: Nur Aisyah Jalalludin, Arwindra Rizqiawan, Goro Fujita

Abstract:

In this study, we aim to demonstrate a microgrid system experimental simulation for an easy understanding of a large-scale microgrid system. This model is required for industrial training and learning environments. However, in order to create an exact representation of a microgrid system, the laboratory-scale system must fulfill the requirements of a grid-connected inverter, in which power values are assigned to the system to cope with the intermittent output from renewable energy sources. Aside from that, during fluctuations in load capacity, the grid-connected system must be able to supply power from the utility grid side and microgrid side in a balanced manner. Therefore, droop control is installed in the inverter’s control board to maintain a balanced power sharing in both sides. This power control in a stand-alone condition and droop control in a grid-connected condition must be implemented in order to maintain a stabilized system. Based on the experimental results, power control and droop control can both be applied in the system by comparing the experimental and reference values.

Keywords: Droop control, droop characteristic, grid-connected inverter, microgrid, power control.

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Authors: Hina Gull, Farooque Azam, Wasi Haider Butt, Sardar Zafar Iqbal

Abstract:

The software system goes through a number of stages during its life and a software process model gives a standard format for planning, organizing and running a project. The article presents a new software development process model named as “Divide and Conquer Process Model", based on the idea first it divides the things to make them simple and then gathered them to get the whole work done. The article begins with the backgrounds of different software process models and problems in these models. This is followed by a new divide and conquer process model, explanation of its different stages and at the end edge over other models is shown.

Keywords: Process Model, Waterfall, divide and conquer, Requirements.

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Authors: M. Peña Aguilar Juan, E. Nava Galván Claudia, Pastrana Palma Alberto

Abstract:

In this work was developed and implemented a thermal fogging disinfection system to counteract pathogens from poultry feces in agribusiness farms, to reduce mortality rates and increase biosafety in them. The control system consists of two phases for the conditioning of the farm during the sanitary break. In the first phase, viral and bacterial inactivation was performed by treating the stool dry cleaning, along with the development of a specialized product that foster the generation of temperatures above 55 °C in less than 24 hr, for virus inactivation. In the second phase, a process for disinfection by fogging was implemented, along with the development of a specialized disinfectant that guarantee no risk for the operators’ health or birds. As a result of this process, it was possible to minimize the level of mortality of chickens on farms from 12% to 5.49%, representing a reduction of 6.51% in the death rate, through the formula applied to the treatment of poultry litter based on oxidising agents used as antiseptics, hydrogen peroxide solutions, glacial acetic acid and EDTA in order to act on bacteria, viruses, micro bacteria and spores.

Keywords: Innovation, triple-helix, innovation, poultry farms.

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Authors: B. Farhadinia

Abstract:

In this article, it is considered a class of optimal control problems constrained by differential and integral constraints are called canonical form. A modified measure theoretical approach is introduced to solve this class of optimal control problems.

Keywords: control problem, Canonical form, Measure theory.

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Authors: Amir Badkoubeh, Guchuan Zhu

Abstract:

This paper addresses the problem of asymptotic tracking control of a linear parabolic partial differential equation with indomain point actuation. As the considered model is a non-standard partial differential equation, we firstly developed a map that allows transforming this problem into a standard boundary control problem to which existing infinite-dimensional system control methods can be applied. Then, a combination of energy multiplier and differential flatness methods is used to design an asymptotic tracking controller. This control scheme consists of stabilizing state-feedback derived from the energy multiplier method and feed-forward control based on the flatness property of the system. This approach represents a systematic procedure to design tracking control laws for a class of partial differential equations with in-domain point actuation. The applicability and system performance are assessed by simulation studies.

Keywords: Tracking Control, In-domain point actuation, PartialDifferential Equations.

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Authors: Shyue-Ran Li, Kuohsiang Chen

Abstract:

The study explored varied types of human smiles and extracted most of the key factors affecting the smiles. These key factors then were converted into a set of control points which could serve to satisfy the needs for creation of facial expression for 3D animators and be further applied to the face simulation for robots in the future. First, hundreds of human smile pictures were collected and analyzed to identify the key factors for face expression. Then, the factors were converted into a set of control points and sizing parameters calculated proportionally. Finally, two different faces were constructed for validating the parameters via the process of simulating smiles of the same type as the original one.

Keywords: 3D animation, facial expression, numerical, robot, smile parameter.

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Authors: A. N. K. Nasir, R. M. T. Raja Ismail, M. A. Ahmad

Abstract:

The objective of this paper is to compare the time specification performance between conventional controller PID and modern controller SMC for an inverted pendulum system. The goal is to determine which control strategy delivers better performance with respect to pendulum-s angle and cart-s position. The inverted pendulum represents a challenging control problem, which continually moves toward an uncontrolled state. Two controllers are presented such as Sliding Mode Control (SMC) and Proportional- Integral-Derivatives (PID) controllers for controlling the highly nonlinear system of inverted pendulum model. Simulation study has been done in Matlab Mfile and simulink environment shows that both controllers are capable to control multi output inverted pendulum system successfully. The result shows that Sliding Mode Control (SMC) produced better response compared to PID control strategies and the responses are presented in time domain with the details analysis.

Keywords: SMC, PID, Inverted Pendulum System.

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Authors: Jiaqi Yan, Sherry Sun, Huaiqing Wang, Zhongsheng Hua

Abstract:

In the highly competitive and rapidly changing global marketplace, independent organizations and enterprises often come together and form a temporary alignment of virtual enterprise in a supply chain to better provide products or service. As firms adopt the systems approach implicit in supply chain management, they must manage the quality from both internal process control and external control of supplier quality and customer requirements. How to incorporate quality management of upstream and downstream supply chain partners into their own quality management system has recently received a great deal of attention from both academic and practice. This paper investigate the collaborative feature and the entities- relationship in a supply chain, and presents an ontology of collaborative supply chain from an approach of aligning service-oriented framework with service-dominant logic. This perspective facilitates the segregation of material flow management from manufacturing capability management, which provides a foundation for the coordination and integration of the business process to measure, analyze, and continually improve the quality of products, services, and process. Further, this approach characterizes the different interests of supply chain partners, providing an innovative approach to analyze the collaborative features of supply chain. Furthermore, this ontology is the foundation to develop quality management system which internalizes the quality management in upstream and downstream supply chain partners and manages the quality in supply chain systematically.

Keywords: Ontology, supply chain quality management, service-oriented architecture, service-dominant logic.

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Authors: A. Bellar, M.K. Fellah, A.M. Si Mohammed, M. Bensaada, L. Boukhris

Abstract:

This paper presents the use of the predictive fuzzy logic controller (PFLC) applied to attitude control system for agile micro-satellite. In order to reduce the effect of unpredictable time delays and large uncertainties, the algorithm employs predictive control to predict the attitude of the satellite. Comparison of the PFLC and conventional fuzzy logic controller (FLC) is presented to evaluate the performance of the control system during attitude maneuver. The two proposed models have been analyzed with the same level of noise and external disturbances. Simulation results demonstrated the feasibility and advantages of the PFLC on the attitude determination and control system (ADCS) of agile satellite.

Keywords: Agile micro-satellite, Attitude control, fuzzy logic, predictive control

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Authors: Pingping Zhang, Yanpeng Cai, Jianlong Wang

Abstract:

Stormwater storage tank (SST) is a popular low impact development technology for reducing stormwater runoff in the construction of sponge city. At present, it is difficult to perform the automatic control of SST for reducing peak flow. In this paper, fuzzy control was introduced into the peak control of SST to improve the efficiency of reducing stormwater runoff. Firstly, the design of SST was investigated. A catchment area and a return period were assumed, a SST model was manufactured, and then the storage capacity of the SST was verified. Secondly, the control parameters of the SST based on reducing stormwater runoff were analyzed, and a schematic diagram of real-time control (RTC) system based on peak control SST was established. Finally, fuzzy control system of a double input (flow and water level) and double output (inlet and outlet valve) was designed. The results showed that 1) under the different return periods (one year, three years, five years), the SST had the effect of delayed peak control and storage by increasing the detention time, 2) rainfall, pipeline flow, the influent time and the water level in the SST could be used as RTC parameters, and 3) the response curves of flow velocity and water level fluctuated very little and reached equilibrium in a short time. The combination of online monitoring and fuzzy control was feasible to control the SST automatically. This paper provides a theoretical reference for reducing stormwater runoff and improving the operation efficiency of SST.

Keywords: Stormwater runoff, stormwater storage tank, real-time control, fuzzy control.

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Authors: Ahmed Abbas, M.R. M Rizk, Mohamed El-Sayed

Abstract:

This paper presents a new adaptive DMC controller that improves the controller performance in case of plant-model mismatch. The new controller monitors the plant measured output, compares it with the model output and calculates weights applied to the controller move. Simulations show that the new controller can help improve control performance and avoid instability in case of severe model mismatches.

Keywords: Adaptive control, dynamic matrix control, DMC, model predictive control

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Authors: Rohana Musa, Yuzman Yusoff, Chia Chieu Yin, Hanif Che Lah

Abstract:

This paper presents the design and characterization of a low power Complementary Metal Oxide Semiconductor (CMOS) process sensor. The design is targeted for implementation using Silterra’s 180 nm CMOS process technology. The proposed process sensor employs a voltage threshold (V_th) extractor architecture for detection of variations in the fabrication process. The process sensor generates output voltages in the range of 401 mV (fast-fast corner) to 443 mV (slow-slow corner) at nominal condition. The power dissipation for this process sensor is 6.3 µW with a supply voltage of 1.8V with a silicon area of 190 µm X 60 µm. The preliminary result of this process sensor that was fabricated indicates a close resemblance between test and simulated results.

Keywords: CMOS Process sensor, Process, Voltage and Temperature (PVT) sensor, threshold extractor circuit, Vth extractor circuit.

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Authors: Amirhossein Asadabadi, Amir Anvar

Abstract:

Small satellites have become increasingly popular recently as a means of providing educational institutes with the chance to design, construct, and test their spacecraft from beginning to the possible launch due to the low launching cost. This approach is remarkably cost saving because of the weight and size reduction of such satellites. Weight reduction could be realised by utilising electromagnetic coils solely, instead of different types of actuators. This paper describes the restrictions of using only “Electromagnetic" actuation for 3D stabilisation and how to make the magnetorquer based attitude control feasible using Fuzzy Logic Control (FLC). The design is developed to stabilize the spacecraft against gravity gradient disturbances with a three-axis stabilizing capability.

Keywords: Fuzzy, Attitude Control, Small Satellite, Fuzzy Logic Control, Electromagnetic, Magnetic Control.

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Authors: Ian A. Grout

Abstract:

In this paper, the design and development of a system to provide hand motion and gesture control of laboratory test equipment is considered and discussed. The Leap Motion controller is used to provide an input to control a laboratory power supply as part of an electronic circuit experiment. By suitable hand motions and gestures, control of the power supply is provided remotely and without the need to physically touch the equipment used. As such, it provides an alternative manner in which to control electronic equipment via a PC and is considered here within the field of human computer interaction (HCI).

Keywords: Control, hand gesture, human computer interaction, test equipment.

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Authors: Siti Kudnie Sahari, Jane Chai Hai Sing, Khairuddin Ab. Hamid

Abstract:

Shrunken patterning for integrated device manufacturing requires surface cleanliness and surface smoothness in wet chemical processing [1]. It is necessary to control all process parameters perfectly especially for the common cleaning technique RCA clean (SC-1 and SC-2) [2]. In this paper the characteristic and effect of surface preparation parameters are discussed. The properties of RCA wet chemical processing in silicon technology is based on processing time, temperature, concentration and megasonic power of SC-1 and QDR. An improvement of wafer surface preparation by the enhanced variables of the wet cleaning chemical process is proposed.

Keywords: RCA, SC-1, SC-2, QDR

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