Search results for: Vapor Pressure Booster.

Authors: E. Elgendy

Abstract:

There are several ways of improving the performance of a vapor compression refrigeration cycle. Use of an ejector as expansion device is one of the alternative ways. The present paper aims at evaluate the performance improvement of a vapor compression refrigeration cycle under a wide range of operating conditions. A numerical model is developed and a parametric study of important parameters such as condensation (30-50°C) and evaporation temperatures (-20-5°C), nozzle and diffuser efficiencies (0.75-0.95), subcooling and superheating degrees (0-15K) are investigated. The model verification gives a good agreement with the literature data. The simulation results revealed that condensation temperature has the highest effect (129%) on the performance improvement ratio while superheating has the lowest one (6.2%). Among ejector efficiencies, the diffuser efficiency has a significant effect on the COP of ejector expansion refrigeration cycle. The COP improvement percentage decreases from 10.9% to 4.6% as subcooling degrees increases by 15K.

Keywords: Numerical modeling, R134a, Two phase ejector, Vapor compression refrigeration system.

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Authors: Karuna Tuchinda, Sasithon Bland

Abstract:

This work investigates the wear of a steam turbine blade coated with titanium nitride (TiN), and compares to the wear of uncoated blades. The coating is deposited on by physical vapor deposition (PVD) method. The working conditions of the blade were simulated and surface temperature and pressure values as well as flow velocity and flow direction were obtained. This data was used in the finite element wear model developed here in order to predict the wear of the blade. The wear mechanisms considered are erosive wear due to particle impingement and fluid jet, and fatigue wear due to repeated impingement of particles and fluid jet. Results show that the life of the TiN-coated blade is approximately 1.76 times longer than the life of the uncoated one.

Keywords: Physical vapour deposition, steam turbine blade, titanium-based coating, wear prediction.

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Authors: Nurul Amziah Md Yunus, Izhal Abdul Halin, Nasri Sulaiman, Noor Faezah Ismail, Ong Kai Sheng

Abstract:

The MEMS pressure sensor has been introduced and presented in this paper. The types of pressure sensor and its theory of operation are also included. The latest MEMS technology, the fabrication processes of pressure sensor are explored and discussed. Besides, various device applications of pressure sensor such as tire pressure-monitoring system, diesel particulate filter and others are explained. Due to further miniaturization of the device nowadays, the pressure sensor with nanotechnology (NEMS) is also reviewed. The NEMS pressure sensor is expected to have better performance as well as lower in its cost. It has gained an excellent popularity in many applications.

Keywords: Pressure sensor, diaphragm, MEMS, automotive application, biomedical application, NEMS.

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Authors: Yasser M. Moustafa, Rania E. Morsi, Mohammed Fathy

Abstract:

Multiwall carbon nanotubes, prepared by chemical vapor deposition, have an average diameter of 60-100 nm as shown by High Resolution Transmittance Electron Microscope, HR-TEM. The Multiwall carbon nanotubes (MWCNTs) were further characterized using X-ray Diffraction and Raman Spectroscopy. Mercury uptake capacity of MWCNTs was studied using batch adsorption method at different concentration ranges up to 150 ppm. Mercury concentration (before and after the treatment) was measured using cold vapor atomic absorption spectroscopy. The effect of time, concentration, pH and adsorbent dose were studied. MWCNT were found to perform complete absorption in the sub-ppm concentrations (parts per billion levels) while for high concentrations, the adsorption efficiency was 92% at the optimum conditions; 0.1 g of the adsorbent at 150 ppm mercury (II) solution. The adsorption of mercury on MWCNTs was found to follow the Freundlich adsorption isotherm and the pseudo-second order kinetic model.

Keywords: Cold Vapor Atomic Absorption Spectroscopy, Hydride System, Mercury Removing, Multi Wall Carbon Nanotubes.

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Authors: Farid Amidi-Fazli, Neda Amidi-Fazli

Abstract:

Replacement of plastics used in the food industry seems to be a serious issue to overcome mainly the environmental problems in recent years. This study investigates the hydrophilicity and permeability properties of starch biopolymer which ethylene vinyl alcohol (EVOH) (0-10%) and nanocrystalline cellulose (NCC) (1-15%) were used to enhance its properties. Starch -EVOH nanocomposites were prepared by casting method in different formulations. NCC production by acid hydrolysis was confirmed by scanning electron microscopy. Solubility, water vapor permeability, water vapor transmission rate and moisture absorbance were measured on each of the nanocomposites. The results were analyzed by SAS software. The lowest moisture absorbance was measured in pure starch nanocomposite containing 8% NCC. The lowest permeability to water vapor belongs to starch nanocomposite containing 8% NCC and the sample containing 7.8% EVOH and 13% NCC. Also the lowest solubility was observed in the composite contains the highest amount of EVOH. Applied Process resulted in production of bio films which have good resistance to water vapor permeability and solubility in water. The use of NCC and EVOH leads to reduced moisture absorbance property of the biofilms.

Keywords: Starch, EVOH, nanocrystalline cellulose, Hydrophilicity.

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Authors: Fridhi Hadia, Soua Wadhah, Hidouri Ammar, Omri Ahmed

Abstract:

In this research, the effects of the engine parameters like compression ratios and steam injection on igniting timing and emission characteristics have been investigated numerically. The in-cylinder temperature and pressure at four different compression ratios have been compared with numerical results, and they show a good agreement with the published data. Two different fuels have been used in this study: Isooctane (IC₈H₁₈), and ethanol (C₂H₅OH). The increasing of the compression ratio (CR) advances the ignition timing, decreases the burn duration and increases the temperature and the pressure. The injection of water vapor lower than 40% decreased the peak temperature and slowed the combustion rate which leads to a lower NOx emission.

Keywords: Compression ratio, emission, HCCI engine, ignition timing, steam injection.

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Authors: L. Parisi

Abstract:

A blood pressure monitor or sphygmomanometer can be either manual or automatic, employing respectively either the auscultatory method or the oscillometric method. The manual version of the sphygmomanometer involves an inflatable cuff with a stethoscope adopted to detect the sounds generated by the arterial walls to measure blood pressure in an artery. An automatic sphygmomanometer can be effectively used to monitor blood pressure through a pressure sensor, which detects vibrations provoked by oscillations of the arterial walls. The pressure sensor implemented in this device improves the accuracy of the measurements taken.

Keywords: Blood pressure, blood saturation, sensors, actuators, design improvement.

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Authors: Azza M. Anis, M. M. Abutaleb, Hani F. Ragai, M. I. Eladawy

Abstract:

This paper presents the characterization and design of a capacitive pressure sensor with LC-based 0.35 µm CMOS readout circuit. SPICE is employed to evaluate the characteristics of the readout circuit and COMSOL multiphysics structural analysis is used to simulate the behavior of the pressure sensor. The readout circuit converts the capacitance variation of the pressure sensor into the frequency output. Simulation results show that the proposed pressure sensor has output frequency from 2.50 to 2.28 GHz in a pressure range from 0.1 to 2 MPa almost linearly. The sensitivity of the frequency shift with respect to the applied pressure load is 0.11 GHz/MPa.

Keywords: CMOS LC-based oscillator, micro pressure sensor, silicon carbide

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Authors: Suvradip Mullick, Yuvraj K. Madhukar, Subhranshu Roy, Ashish K. Nath

Abstract:

We present the development of a new underwater laser cutting process in which a water-jet has been used along with the laser beam to remove the molten material through kerf. The conventional underwater laser cutting usually utilizes a high pressure gas jet along with laser beam to create a dry condition in the cutting zone and also to eject out the molten material. This causes a lot of gas bubbles and turbulence in water, and produces aerosols and waste gas. This may cause contamination in the surrounding atmosphere while cutting radioactive components like burnt nuclear fuel. The water-jet assisted underwater laser cutting process produces much less turbulence and aerosols in the atmosphere. Some amount of water vapor bubbles is formed at the laser-metal-water interface; however, they tend to condense as they rise up through the surrounding water. We present the design and development of a water-jet assisted underwater laser cutting head and the parametric study of the cutting of AISI 304 stainless steel sheets with a 2 kW CW fiber laser. The cutting performance is similar to that of the gas assist laser cutting; however, the process efficiency is reduced due to heat convection by water-jet and laser beam scattering by vapor. This process may be attractive for underwater cutting of nuclear reactor components.

Keywords: Laser, underwater cutting, water-jet.

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Authors: S. Chikh, S. Boulifa

Abstract:

The present study addresses the problem of ammonia evaporation during filling of a vertical cylindrical tank and the influence of various external factors on the stability of storage by determining the conditions for minimum evaporation. Numerical simulation is carried out by solving the governing equations namely, continuity, momentum, energy, and diffusion of species. The effect of temperature of surrounding air, the filling speed of the reservoir and the temperature of the filling liquid ammonia on the evaporation rate is investigated. Results show that the temperature of the filling liquid has little effect on the liquid ammonia for a short period, which, in fact, is function of the filling speed. The evaporation rate along the free surface of the liquid is non-uniform. The inlet temperature affects the vapor ammonia temperature because of pressure increase. The temperature of the surrounding air affects the temperature of the vapor phase rather than the liquid phase. The maximum of evaporation is reached at the final step of filling. In order to minimize loss of ammonia vapors automatically causing losses in quantity of the liquid stored, it is suggested to ensure the proper insulation for the walls and roof of the reservoir and to increase the filling speed.

Keywords: Evaporation, liquid ammonia, storage tank, numerical simulation.

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Authors: Mohammadreza Nezamirad, Azadeh Yazdi, Sepideh Amirahmadian, Nasim Sabetpour, Amirmasoud Hamedi

Abstract:

In this study, the Reynolds-Stress-Navier-Stokes framework is utilized to investigate the flow inside the diesel injector nozzle. The flow is assumed to be multiphase as the formation of vapor by pressure drop is visualized. For pressure and velocity linkage, the coupled algorithm is used. Since the cavitation phenomenon inherently is unsteady, the quasi-steady approach is utilized for saving time and resources in the current study. Schnerr-Sauer cavitation model is used, which was capable of predicting flow behavior both at the initial and final steps of the cavitation process. Two different turbulent models were used in this study to clarify which one is more capable in predicting cavitation inception and super-cavitation. It was found that K-ε was more compatible with the Shnerr-Sauer cavitation model; therefore, the mentioned model is used for the rest of this study.

Keywords: CFD, RANS, cavitation, fuel, injector.

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Authors: Soo-young Ye, Gi-Ryon Kim, Dong-Keun Jung, Seong-wan Baik, Gye-rok Jeon

Abstract:

In this paper, algorithm estimating the blood pressure was proposed using the pulse transit time (PTT) as a more convenient method of measuring the blood pressure. After measuring ECG and pressure pulse, and photoplethysmography, the PTT was calculated from the acquired signals. Thereafter, the system to indirectly measure the systolic pressure and the diastolic pressure was composed using the statistic method. In comparison between the blood pressure indirectly measured by proposed algorithm estimating the blood pressure and real blood pressure measured by conventional sphygmomanometer, the systolic pressure indicates the mean error of ±3.24mmHg and the standard deviation of 2.53mmHg, while the diastolic pressure indicates the satisfactory result, that is, the mean error of ±1.80mmHg and the standard deviation of 1.39mmHg. These results are satisfied with the regulation of ANSI/AAMI for certification of sphygmomanometer that real measurement error value should be within the mean error of ±5mmHg and the standard deviation of 8mmHg. These results are suggest the possibility of applying to portable and long time blood pressure monitoring system hereafter.

Keywords: Blood pressure, Systolic, Diastolic, Pulse transit time.

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Authors: Sri Raman A., A.K.Ghosh

Abstract:

At very high speeds, bubbles form in the underwater vehicles because of sharp trailing edges or of places where the local pressure is lower than the vapor pressure. These bubbles are called cavities and the size of the cavities grows as the velocity increases. A properly designed cavitator can induce the formation of a single big cavity all over the vehicle. Such a vehicle travelling in the vaporous cavity is called a supercavitating vehicle and the present research work mainly focuses on the dynamic modeling of such vehicles. Cavitation of the fins is also accounted and the effect of the same on trajectory is well explained. The entire dynamics has been developed using the state space approach and emphasis is given on the effect of size and angle of attack of the cavitator. Control law has been established for the motion of the vehicle using Non-linear Dynamic Inverse (NDI) with cavitator as the control surface.

Keywords: High speed underwater vehicle, Non-Linear Dynamic Inverse (NDI), six-dof modeling, Supercavitation, Torpedo.

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Authors: K. Hiro, Y. Imai, T. Sasayama

Abstract:

Cavitation under static negative pressure is not revealed well. The Berthelot method to generate such negative pressure can be a means to study cavitation inception. In this study, metal Berthelot tubes built in observation windows are newly developed and are checked whether high static negative pressure is generated or not. Negative pressure in the tube with a pair of a corundum plate and an aluminum gasket increased with temperature cycles. The trend was similar to that as reported before.

Keywords: Berthelot method, negative pressure, cavitation.

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Authors: Aicha Rima Cheniti, Hatem Besbes, Joseph Haggege, Christophe Sintes

Abstract:

In this paper, we are interested to determine the carbon dioxide pressure in the arterial blood through radial velocity difference. The blood was modeled as a two phase mixture (an aqueous carbon dioxide solution with carbon dioxide gas) by Drift flux model and the Young-Laplace equation. The distributions of mixture velocities determined from the considered model permitted the calculation of the radial velocity distributions with different values of mean mixture pressure and the calculation of the mean carbon dioxide pressure knowing the mean mixture pressure. The radial velocity distributions are used to deduce a calculation method of the mean mixture pressure through the radial velocity difference between two positions which is measured by ultrasound. The mean carbon dioxide pressure is then deduced from the mean mixture pressure.

Keywords: Mean carbon dioxide pressure, mean mixture pressure, mixture velocity, radial velocity difference.

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Authors: Maha BenHamad, Ali Snoussi, Ammar Ben Brahim

Abstract:

A steady-state analysis of triple-effect thermal vapor compressor desalination unit was performed. A mathematical model based on mass, salinity and energy balances is developed. The purpose of this paper is to develop a connection between process simulator and process optimizer in order to study the influence of several operating variables on the performance and the produced water cost of the unit. A MATLAB program is used to solve the model equations, and Aspen HYSYS is used to model the plant. The model validity is examined against a commercial plant and showed a good agreement between industrial data and simulations results. Results show that the pressures of the last effect and the compressed vapor have an important influence on the produced cost, and the increase of the difference temperature in the condenser decreases the specific heat area about 22%.

Keywords: Steady-state, triple effect, thermal vapor compressor, MATLAB, Aspen HYSYS.

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Authors: Vinod Kumar, Navin Kumar, Surjit Angra, Prince Sharma

Abstract:

This paper presents the design analysis of saddle support of a horizontal pressure vessel. Since saddle have the vital role to support the pressure vessel and to maintain its stability, it should be designed in such a way that it can afford the vessel load and internal pressure of the vessel due to liquid contained in the vessel. A model of horizontal pressure vessel and saddle support is created in ANSYS. Stresses are calculated using mathematical approach and ANSYS software. The analysis reveals the zone of high localized stress at the junction part of the pressure vessel and saddle support due to operating conditions. The results obtained by both the methods are compared with allowable stress value for safe designing.

Keywords: ANSYS, Pressure Vessel, Saddle, Support.

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Authors: Arash Mir Abdolah Lavasani

Abstract:

The pressure drag from a cam shaped tube in cross flows have been investigated experimentally using pressure distribution measurement. The range of angle of attack and Reynolds number based on an equivalent circular tube are within 0≤α≤360° and 2×104< Reeq < 3.4 ×104, respectively. It is found that the pressure drag coefficient is at its highest at α=90° and 270° over the whole range of Reynolds number. Results show that the pressure drag coefficient of the cam shaped tube is lower than that of circular tube with the same surface area for more of the angles of attack. Furthermore, effects of the diameter ratio and finite length of the cam shaped tube upon the pressure drag coefficient are discussed.

Keywords: Pressure Drag, Cam Shaped, Experimental.

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Authors: G. Bhushan, S. S. Rattan, N. P. Mehta

Abstract:

A four-lobe pressure dam bearing which is produced by cutting two pressure dams on the upper two lobes and two relief-tracks on the lower two lobes of an ordinary four-lobe bearing is found to be more stable than a conventional four-lobe bearing. In this paper a four-lobe pressure dam bearing supporting rigid and flexible rotors is analytically investigated to determine its performance when L/D ratio is varied in the range 0.75 to 1.5. The static and dynamic characteristics are studied at various L/D ratios. The results show that the stability of a four-lobe pressure dam bearing increases with decrease in L/D ratios both for rigid as well as flexible rotors.

Keywords: Four-lobe pressure dam bearing, finite-elementmethod, L/D ratio.

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Authors: Jürgen Geiser, Robert Röhle

Abstract:

In this paper we present modeling and simulation for physical vapor deposition for metallic bipolar plates. In the models we discuss the application of different models to simulate the transport of chemical reactions of the gas species in the gas chamber. The so called sputter process is an extremely sensitive process to deposit thin layers to metallic plates. We have taken into account lower order models to obtain first results with respect to the gas fluxes and the kinetics in the chamber. The model equations can be treated analytically in some circumstances and complicated multi-dimensional models are solved numerically with a software-package (UG unstructed grids, see [1]). Because of multi-scaling and multi-physical behavior of the models, we discuss adapted schemes to solve more accurate in the different domains and scales. The results are discussed with physical experiments to give a valid model for the assumed growth of thin layers.

Keywords: Convection-diffusion equations, multi-scale problem, physical vapor deposition, reaction equations, splitting methods.

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Authors: Mohd Hazwan bin Yusof, Hiroshi Katanoda

Abstract:

In order to clarify the structure of the cold flow discharged from the vortex tube (VT), the pressure of the cold flow was measured, and a simple flow visualization technique using a 0.75mm-diameter needle and an oily paint is made to study the reverse flow at the cold exit. It is clear that a negative pressure and positive pressure region exist at a certain pressure and cold fraction area, and that a reverse flow is observed in the negative pressure region.

Keywords: Flow visualization, Pressure measurement, Reverse flow, Vortex tube.

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Authors: Raed H. Allawi

Abstract:

Fracture pressure is the main parameter applied in wells design and used to avoid drilling problems like lost circulation. Thus, this study aims to predict the fracture pressure of oil reservoirs in the southern Iraq Oilfield. The data required to implement this study included bulk density, compression wave velocity, gamma-ray, and leak-off test. In addition, this model is based on the pore pressure which is measured based on the Modular Formation Dynamics Tester (MDT). Many measured values of pore pressure were used to validate the accurate model. Using sonic velocity approaches, the mean absolute percentage error (MAPE) was about 4%. The fracture pressure results were consistent with the measurement data, actual drilling report, and events. The model's results will be a guide for successful drilling in future wells in the same oilfield.

Keywords: Pore pressure, fracture pressure, overburden pressure, effective stress, drilling events.

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Authors: Zainul Huda, Muhammad Hani Ajani

Abstract:

The design, manufacture, and operation of thin-walled pressure vessels must be based on maximum safe operating pressure and an adequate factor of safety (FoS). This research paper first reports experimental evaluation of longitudinal and hoops stresses based on working pressure as well as maximum pressure; and then includes a critical study of factor of safety (FoS) in the design of a glass fiber pressure vessel. Experimental work involved the use of measuring instruments and the readings from pressure gauges. Design calculations involved the computations of design stress and FoS; the latter was based on breaking strength of 55 MPa for the glass fiber (pressure-vessel material). The experimentally determined FoS value has been critically compared with the general FoS allowed in the design of glass fiber pressure vessels.

Keywords: Thin-walled pressure vessel, hoop stress, longitudinal stress, factor of safety (FoS), fiberglass.

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Authors: A. V. Budin, Ph. G. Rutberg, M. E. Pinchuk, A. A. Bogomaz, V. Yu. Svetova

Abstract:

The investigation results of high-density hydrogen heating by high-current electric arc are presented at initial pressure from 5 MPa to 160 MPa with current amplitude up to 1.6 MA and current rate of rise 109-1011 A/s. When changing the initial pressure and current rate of rise, channel temperature varies from several electronvolts to hundreds electronvolts. Arc channel radius is several millimeters. But the radius of the discharge chamber greater than the radius of the arc channel on approximately order of magnitude. High efficiency of gas heating is caused by radiation absorption of hydrogen surrounding the arc. Current channel consist from vapor of the initiating wire. At current rate of rise of 109 A/s and relatively small current amplitude gas heating occurs due to radiation absorption in the band transparency of hydrogen by the wire vapours with photon energies less than 13.6 eV. At current rate of rise of 1011 A/s gas heating is due to hydrogen absorption of soft X-rays from discharge channel.

Keywords: High-density hydrogen heating by high-current electric arc.

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Authors: W. Paraguassu, S. Guerini, C. M. R. Remédios, P. T. C. Freire

Abstract:

High Pressure Raman scattering measurements of KDP:Mn were performed at room temperatures. The X-ray powder diffraction patterns taken at room temperature by Rietveld refinement showed that doped samples of KDP-Mn have the same tetragonal structure of a pure KDP crystal, but with a contraction of the crystalline cell. The behavior of the Raman spectra, in particular the emergence of a new modes at 330 cm-1, indicates that KDP:Mn undergoes a structural phase transition with onset at around 4 GP. First principle density-functional theory (DFT) calculations indicate that tetrahedral rotation with pressure is predominantly around the c crystalline direction. Theoretical results indicates that pressure induced tetrahedral rotations leads to change tetrahedral neighborhood, activating librations/bending modes observed for high pressure phase of KDP:Mn with stronger Raman activity.

Keywords: Dipotassium molybdate, High pressure, Raman scattering, Phase transition, ab initio

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Authors: H. Pahlavanzadeh, A.R.Jahangiri, I. Noshadi

Abstract:

In this paper, the solubility of CO2 in AMP solution have been measured at temperature range of ( 293, 303 ,313,323) K.The amine concentration ranges studied are (2.0, 2.8, and 3.4) M. A solubility apparatus was used to measure the solubility of CO2 in AMP solution on samples of flue gases from Thermal and Central Power Plants of Esfahan Steel Company. The modified Kent Eisenberg model was used to correlate and predict the vapor-liquid equilibria of the (CO2 + AMP + H2O) system. The model predicted results are in good agreement with the experimental vapor-liquid equilibrium measurements.

Keywords: AMP, Carbon dioxide; loading, Flue gases, Modified Kent Eisenberg model

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Authors: B. Dehghan, T. Toppi, M. Aprile, M. Motta

Abstract:

The environmental concerns related to global warming and ozone layer depletion along with the growing worldwide demand for heating and cooling have brought an increasing attention toward ecological and efficient Heating, Ventilation, and Air Conditioning (HVAC) systems. Furthermore, since space heating accounts for a considerable part of the European primary/final energy use, it has been identified as one of the sectors with the most challenging targets in energy use reduction. Heat pumps are commonly considered as a technology able to contribute to the achievement of the targets. Current research focuses on the full load operation and seasonal performance assessment of three gas-driven absorption heat pump cycles. To do this, investigations of the gas-driven air-source ammonia-water absorption heat pump systems for small-scale space heating applications are presented. For each of the presented cycles, both full-load under various temperature conditions and seasonal performances are predicted by means of numerical simulations. It has been considered that small capacity appliances are usually equipped with fixed geometry restrictors, meaning that the solution mass flow rate is driven by the pressure difference across the associated restrictor valve. Results show that gas utilization efficiency (GUE) of the cycles varies between 1.2 and 1.7 for both full and partial loads and vapor exchange (VX) cycle is found to achieve the highest efficiency. It is noticed that, for typical space heating applications, heat pumps operate over a wide range of capacities and thermal lifts. Thus, partially, the novelty introduced in the paper is the investigation based on a seasonal performance approach, following the method prescribed in a recent European standard (EN 12309). The overall result is a modest variation in the seasonal performance for analyzed cycles, from 1.427 (single-effect) to 1.493 (vapor-exchange).

Keywords: Absorption cycles, gas utilization efficiency, heat pump, seasonal performance, vapor exchange cycle.

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Authors: Hidetoshi Nonaka, Masahito Kurihara

Abstract:

In this paper, an authentication system using keystroke dynamics is presented. We introduced pressure sensing for the improvement of the accuracy of measurement and durability against intrusion using key-logger, and so on, however additional instrument is needed. As the result, it has been found that the pressure sensing is also effective for estimation of real moment of keystroke.

Keywords: Biometric authentication, Keystroke dynamics, Pressure sensing, Time-frequency analysis.

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Authors: R. Kiš, M. Malcho, M. Janovcová

Abstract:

This work aims to present a numerical analysis of the natural gas which flows through a high-pressure pipeline and an orifice plate, through the use of CFD methods. The paper contains CFD calculations for the flow of natural gas in a pipe with different geometry used for the orifice plates. One of them has a standard geometry and a shape without any deformation and the other is deformed by the action of the pressure differential. It shows the behavior of natural gas in a pipeline using the velocity profiles and pressure fields of the gas in both models with their differences. The entire research is based on the elimination of any inaccuracy which should appear in the flow of the natural gas measured in the high-pressure pipelines of the gas industry and which is currently not given in the relevant standard.

Keywords: Orifice plate, high-pressure pipeline, natural gas, CFD analysis.

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Authors: D. Geringswald, B. Hintze

Abstract:

The miniaturization of circuits is advancing. During chip manufacturing, structures are filled for example by metal organic chemical vapor deposition (MOCVD). Since this process reaches its limits in case of very high aspect ratios, the use of alternatives such as the atomic layer deposition (ALD) is possible, requiring the extension of existing coating systems. However, it is an unsolved question to what extent MOCVD can achieve results similar as an ALD process. In this context, this work addresses the characterization of a metal organic vapor deposition of titanium nitride. Based on the current state of the art, the film properties coating thickness, sheet resistance, resistivity, stress and chemical composition are considered. The used setting parameters are temperature, plasma gas ratio, plasma power, plasma treatment time, deposition time, deposition pressure, number of cycles and TDMAT flow. The derived process instructions for unstructured wafers and inside a structure with high aspect ratio include lowering the process temperature and increasing the number of cycles, the deposition and the plasma treatment time as well as the plasma gas ratio of hydrogen to nitrogen (H₂:N₂). In contrast to the current process configuration, the deposited titanium nitride (TiN) layer is more uniform inside the entire test structure. Consequently, this paper provides approaches to employ the MOCVD for structures with increasing aspect ratios.

Keywords: ALD, high aspect ratio, PE-MOCVD, TiN.

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