Search results for: Unreliable nodes and edges.

Authors: Ilef Ketata, Mohamed Khalil Baazaoui, Robert Fromm, Ahmad Fakhfakh, Faouzi Derbel

Abstract:

The integration of wireless communication, e.g. in realor quasi-real-time applications, is related to many challenges such as energy consumption, communication range, latency, quality of service, and reliability. The improvement of wireless sensor network performance starts by enhancing the capabilities of each sensor node. While consuming less energy, wake-up receiver (WuRx) nodes have an impact on reducing latency. The solution for sensitivity improvements of sensor nodes, and WuRx in particular, with an energy consumption expense is low-noise amplifier (LNAs) blocks placed in the RF Antenna. This paper presents a comparative study for improving communication range and decreasing the energy consumption of WuRx nodes.

Keywords: Wireless sensor network, wake-up receiver, duty-cycled, low-noise amplifier, envelope detector, range study.

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Authors: Zoran Nikoloski, Narsingh Deo, Ludek Kucera

Abstract:

Despite the recent surge of research in control of worm propagation, currently, there is no effective defense system against such cyber attacks. We first design a distributed detection architecture called Detection via Distributed Blackholes (DDBH). Our novel detection mechanism could be implemented via virtual honeypots or honeynets. Simulation results show that a worm can be detected with virtual honeypots on only 3% of the nodes. Moreover, the worm is detected when less than 1.5% of the nodes are infected. We then develop two control strategies: (1) optimal dynamic trafficblocking, for which we determine the condition that guarantees minimum number of removed nodes when the worm is contained and (2) predictive dynamic traffic-blocking–a realistic deployment of the optimal strategy on scale-free graphs. The predictive dynamic traffic-blocking, coupled with the DDBH, ensures that more than 40% of the network is unaffected by the propagation at the time when the worm is contained.

Keywords: Network worms, distributed detection, optimaltraffic-blocking, individual-based simulation.

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Authors: S. Mulholland

Abstract:

Octree compression techniques have been used for several years for compressing large three dimensional data sets into homogeneous regions. This compression technique is ideally suited to datasets which have similar values in clusters. Oil engineers represent reservoirs as a three dimensional grid where hydrocarbons occur naturally in clusters. This research looks at the efficiency of storing these grids using octree compression techniques where grid cells are broken into active and inactive regions. Initial experiments yielded high compression ratios as only active leaf nodes and their ancestor, header nodes are stored as a bitstream to file on disk. Savings in computational time and memory were possible at decompression, as only active leaf nodes are sent to the graphics card eliminating the need of reconstructing the original matrix. This results in a more compact vertex table, which can be loaded into the graphics card quicker and generating shorter refresh delay times.

Keywords: 3D visualisation, compressed vertex tables, octree compression techniques, oil reservoir grids.

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Authors: Toshihiko Sasama, Takao Kawamura, Kazunori Sugahara

Abstract:

Using Internet communication, new home electronics have functions of monitoring and control from remote. However in many case these electronics work as standalone, and old electronics are not followed. Then, we developed the total remote system include not only new electronics but olds. This systems node is a adapter of electrical power plug that embed relay switch and some sensors, and these nodes communicate with each other. the system server was build on the Internet, and users access to this system from web browsers. To reduce the cost to set up of this system, communication between adapters are used ZigBee wireless network instead of wired LAN cable[3]. From measured RSSI(received signal strength indicator) information between each nodes, the system can estimate roughly adapters were mounted on which room, and where in the room. So also it reduces the cost of mapping nodes. Using this system, energy saving and house monitoring are expected.

Keywords: outlet, remote monitor, remote control, mobile ad hocnetwork, sensor network, zigbee.

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Authors: Trevor E. Davis, Isaac Cassar, Yi-Kai Lo, Wentai Liu

Abstract:

This study models the use of transcutaneous electrical nerve stimulation on skin with a disk electrode in order to simulate tissue damage. The current density distribution above a disk electrode is known to be a dynamic and non-uniform quantity that is intensified at the edges of the disk. The non-uniformity is subject to change through using various electrode geometries or stimulation methods. One of these methods known as edge-retarded stimulation has shown to reduce this edge enhancement. Though progress has been made in modeling the behavior of a disk electrode, little has been done to test the validity of these models in simulating the actual heat transfer from the electrode. This simulation uses finite element software to couple the injection of current from a disk electrode to heat transfer described by the Pennesbioheat transfer equation. An example application of this model is studying an experimental form of stimulation, known as edge-retarded stimulation. The edge-retarded stimulation method will reduce the current density at the edges of the electrode. It is hypothesized that reducing the current density edge enhancement effect will, in turn, reduce temperature change and tissue damage at the edges of these electrodes. This study tests this hypothesis as a demonstration of the capabilities of this model. The edge-retarded stimulation proved to be safer after this simulation. It is shown that temperature change and the fraction of tissue necrosis is much greater in the square wave stimulation. These results bring implications for changes of procedures in transcutaneous electrical nerve stimulation and transcutaneous spinal cord stimulation as well.

Keywords: Bioheat transfer, Electrode, Neuroprosthetics, TENS, Transcutaneous stimulation.

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Authors: Paulo Fernando Silva Filho, Elcio Hideiti Shiguemori

Abstract:

The selection of specific landmarks for an Unmanned Aerial Vehicles’ Visual Navigation systems based on Automatic Landmark Recognition has significant influence on the precision of the system’s estimated position. At the same time, manual selection of the landmarks does not guarantee a high recognition rate, which would also result on a poor precision. This work aims to develop an automatic landmark selection that will take the image of the flight area and identify the best landmarks to be recognized by the Visual Navigation Landmark Recognition System. The criterion to select a landmark is based on features detected by ORB or AKAZE and edges information on each possible landmark. Results have shown that disposition of possible landmarks is quite different from the human perception.

Keywords: Clustering, edges, feature points, landmark selection, X-Means.

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Authors: A. K. Prajapati

Abstract:

In this paper, the periodic surveillance scheme has been proposed for any convex region using mobile wireless sensor nodes. A sensor network typically consists of fixed number of sensor nodes which report the measurements of sensed data such as temperature, pressure, humidity, etc., of its immediate proximity (the area within its sensing range). For the purpose of sensing an area of interest, there are adequate number of fixed sensor nodes required to cover the entire region of interest. It implies that the number of fixed sensor nodes required to cover a given area will depend on the sensing range of the sensor as well as deployment strategies employed. It is assumed that the sensors to be mobile within the region of surveillance, can be mounted on moving bodies like robots or vehicle. Therefore, in our scheme, the surveillance time period determines the number of sensor nodes required to be deployed in the region of interest. The proposed scheme comprises of three algorithms namely: Hexagonalization, Clustering, and Scheduling, The first algorithm partitions the coverage area into fixed sized hexagons that approximate the sensing range (cell) of individual sensor node. The clustering algorithm groups the cells into clusters, each of which will be covered by a single sensor node. The later determines a schedule for each sensor to serve its respective cluster. Each sensor node traverses all the cells belonging to the cluster assigned to it by oscillating between the first and the last cell for the duration of its life time. Simulation results show that our scheme provides full coverage within a given period of time using few sensors with minimum movement, less power consumption, and relatively less infrastructure cost.

Keywords: Sensor Network, Graph Theory, MSN, Communication.

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Authors: Alaa E. Abdallah, Bajes Y. Alskarnah

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Ant colony based routing algorithms are known to grantee the packet delivery, but they suffer from the huge overhead of control messages which are needed to discover the route. In this paper we utilize the network nodes positions to group the nodes in connected clusters. We use clusters-heads only on forwarding the route discovery control messages. Our simulations proved that the new algorithm has decreased the overhead dramatically without affecting the delivery rate.

Keywords: Ant colony-based routing, position-based routing, MANET.

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Authors: Iman Elyasi, Sadegh Zarmehi

Abstract:

Due to some reasons, observed images are degraded which are mainly caused by noise. Recently image denoising using the wavelet transform has been attracting much attention. Waveletbased approach provides a particularly useful method for image denoising when the preservation of edges in the scene is of importance because the local adaptivity is based explicitly on the values of the wavelet detail coefficients. In this paper, we propose several methods of noise removal from degraded images with Gaussian noise by using adaptive wavelet threshold (Bayes Shrink, Modified Bayes Shrink and Normal Shrink). The proposed thresholds are simple and adaptive to each subband because the parameters required for estimating the threshold depend on subband data. Experimental results show that the proposed thresholds remove noise significantly and preserve the edges in the scene.

Keywords: Image denoising, Bayes Shrink, Modified Bayes Shrink, Normal Shrink.

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Authors: Itziar Marín, Eduardo Arceredillo, Aitzol Zuloaga, Jagoba Arias

Abstract:

Distributed wireless sensor network consist on several scattered nodes in a knowledge area. Those sensors have as its only power supplies a pair of batteries that must let them live up to five years without substitution. That-s why it is necessary to develop some power aware algorithms that could save battery lifetime as much as possible. In this is document, a review of power aware design for sensor nodes is presented. As example of implementations, some resources and task management, communication, topology control and routing protocols are named.

Keywords: Low Power Design, Power Awareness, RemoteSensing, Wireless Sensor Networks (WSN).

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Authors: G. S. Ayyappan, M. Raja Raghavan, R. Poonthalir, Kota Srinivas, B. Ramesh Babu

Abstract:

Electrical energy demand in the World and particularly in India, is increasing drastically more than its production over a period of time. In order to reduce the demand-supply gap, conserving energy becomes mandatory. Induction motors are the main driving force in the industries and contributes to about half of the total plant energy consumption. By effective monitoring and control of induction motors, huge electricity can be saved. This paper deals about the design and development of such a system, which employs iLON Smart Server and motor performance monitoring nodes. These nodes will monitor the performance of induction motors on-line, on-site and in-situ in the industries. The node monitors the performance of motors by simply measuring the electrical power input and motor shaft speed; coupled to genetic algorithm to estimate motor efficiency. The nodes are connected to the iLON Server through RS485 network. The web server collects the motor performance data from nodes, displays online, logs periodically, analyzes, alerts, and generates reports. The system could be effectively used to operate the motor around its Best Operating Point (BOP) as well as to perform the Life Cycle Assessment of Induction motors used in the industries in continuous operation.

Keywords: Best operating point, iLON smart server, motor asset management, LONWORKS, Modbus RTU, motor performance.

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Authors: Hae Young Lee, Tae Ho Cho

Abstract:

In many sensor network applications, sensor nodes are deployed in open environments, and hence are vulnerable to physical attacks, potentially compromising the node's cryptographic keys. False sensing report can be injected through compromised nodes, which can lead to not only false alarms but also the depletion of limited energy resource in battery powered networks. Ye et al. proposed a statistical en-route filtering scheme (SEF) to detect such false reports during the forwarding process. In this scheme, the choice of a security threshold value is important since it trades off detection power and overhead. In this paper, we propose a fuzzy logic for determining a security threshold value in the SEF based sensor networks. The fuzzy logic determines a security threshold by considering the number of partitions in a global key pool, the number of compromised partitions, and the energy level of nodes. The fuzzy based threshold value can conserve energy, while it provides sufficient detection power.

Keywords: Fuzzy logic, security, sensor network.

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Authors: C. N. Vanitha, M. Usha

Abstract:

In a real world scenario, the viability of the sensor networks has been proved by standardizing the technologies. Wireless sensor networks are vulnerable to both electronic and physical security breaches because of their deployment in remote, distributed, and inaccessible locations. The compromised sensor nodes send malicious data to the base station, and thus, the total network effectiveness will possibly be compromised. To detect and seclude the Route modifiers, a neural network based Pattern Learning predictor (PLP) is presented. This algorithm senses data at any node on present and previous patterns obtained from the en-route nodes. The eminence of any node is upgraded by their predicted and reported patterns. This paper propounds a solution not only to detect the route modifiers, but also to seclude the malevolent nodes from the network. The simulation result proves the effective performance of the network by the presented methodology in terms of energy level, routing and various network conditions.

Keywords: Neural networks, pattern learning, security, wireless sensor networks.

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Authors: A. Nachour, L. Ouzizi, Y. Aoura

Abstract:

Recent developments on multi-agent system have brought a new research field on image processing. Several algorithms are used simultaneously and improved in deferent applications while new methods are investigated. This paper presents a new automatic method for edge detection using several agents and many different actions. The proposed multi-agent system is based on parallel agents that locally perceive their environment, that is to say, pixels and additional environmental information. This environment is built using Vector Field Convolution that attract free agent to the edges. Problems of partial, hidden or edges linking are solved with the cooperation between agents. The presented method was implemented and evaluated using several examples on different synthetic and medical images. The obtained experimental results suggest that this approach confirm the efficiency and accuracy of detected edge.

Keywords: Edge detection, medical MR images, multi-agent systems, vector field convolution.

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Authors: Manoranjan Das, Benudhar Sahu, Urmila Bhanja

Abstract:

Co-channel interference is one of the major problems in wireless systems. The effects of co-channel interference in a Nakagami fading channel on the ABER (Average Bit Error Rate) with static nodes are well analyzed. In this paper, we derive the ABER with the presence of mobile nodes. ABER is also derived for mobile systems in the presence of co-channel interference.

Keywords: ABER, co-channel interference, Nakagami fading.

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Authors: Dae Il Kim, Jungho Moon, Tae Yun Chung

Abstract:

This paper presents a car parking monitoring system using a wireless sensor network. The presented sensor network has a line-shaped topology and adopts a TDMA-based protocol for allowing multi-hop communications. Sensor nodes are deployed in the ground of an outdoor parking lot in such a way that a sensor node monitors a parking space. Each sensor node detects the availability of the associated parking space and transmits the detection result to a sink node via intermediate sensor nodes existing between the source sensor node and the sink node. We evaluate the feasibility of the presented sensor network and the TDMA-based communication protocol through experiments using 11 sensor nodes deployed in a real parking lot. The result shows that the presented car parking monitoring system is robust to changes in the communication environments and efficient for monitoring parking spaces of outdoor parking lots.

Keywords: Multi-hop communication, parking monitoring system, TDMA, wireless sensor network.

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Authors: Brahim Hamid, Bertrand Le Saec, Mohamed Mosbah

Abstract:

The vertex connectivity of a graph is the smallest number of vertices whose deletion separates the graph or makes it trivial. This work is devoted to the problem of vertex connectivity test of graphs in a distributed environment based on a general and a constructive approach. The contribution of this paper is threefold. First, using a preconstructed spanning tree of the considered graph, we present a protocol to test whether a given graph is 2-connected using only local knowledge. Second, we present an encoding of this protocol using graph relabeling systems. The last contribution is the implementation of this protocol in the message passing model. For a given graph G, where M is the number of its edges, N the number of its nodes and Δ is its degree, our algorithms need the following requirements: The first one uses O(Δ×N2) steps and O(Δ×logΔ) bits per node. The second one uses O(Δ×N2) messages, O(N2) time and O(Δ × logΔ) bits per node. Furthermore, the studied network is semi-anonymous: Only the root of the pre-constructed spanning tree needs to be identified.

Keywords: Distributed computing, fault-tolerance, graph relabeling systems, local computations, local knowledge, message passing system, networks, vertex connectivity.

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Authors: Heung Seok Chae, Jaegeol Park

Abstract:

Recently, there have been an increasing interest in RFID system and RFID systems have been applied to various applications. Load balancing is a fundamental technique for providing scalability of systems by moving workload from overloaded nodes to under-loaded nodes. This paper presents an approach to adaptive load balancing for RFID middlewares. Workloads of RFID middlewares can have a considerable variation according to the location of the connected RFID readers and can abruptly change at a particular instance. The proposed approach considers those characteristics of RFID middle- wares to provide an efficient load balancing.

Keywords: RFID middleware, Adaptive load balancing.

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Authors: Z.M. Hanapi, M. Ismail, K. Jumari, M. Mahdavi

Abstract:

Routing security is a major concerned in Wireless Sensor Network since a large scale of unattended nodes is deployed in ad hoc fashion with no possibility of a global addressing due to a limitation of node-s memory and the node have to be self organizing when the systems require a connection with the other nodes. It becomes more challenging when the nodes have to act as the router and tightly constrained on energy and computational capabilities where any existing security mechanisms are not allowed to be fitted directly. These reasons thus increasing vulnerabilities to the network layer particularly and to the whole network, generally. In this paper, a Dynamic Window Secured Implicit Geographic Forwarding (DWSIGF) routing is presented where a dynamic time is used for collection window to collect Clear to Send (CTS) control packet in order to find an appropriate hoping node. The DWIGF is expected to minimize a chance to select an attacker as the hoping node that caused by a blackhole attack that happen because of the CTS rushing attack, which promise a good network performance with high packet delivery ratios.

Keywords: sensor, security, routing, attack, random.

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Authors: J. Mehena, M. C. Adhikary

Abstract:

Edge detection is one of the most important tasks in image processing. Medical image edge detection plays an important role in segmentation and object recognition of the human organs. It refers to the process of identifying and locating sharp discontinuities in medical images. In this paper, a neuro-fuzzy based approach is introduced to detect the edges for noisy medical images. This approach uses desired number of neuro-fuzzy subdetectors with a postprocessor for detecting the edges of medical images. The internal parameters of the approach are optimized by training pattern using artificial images. The performance of the approach is evaluated on different medical images and compared with popular edge detection algorithm. From the experimental results, it is clear that this approach has better performance than those of other competing edge detection algorithms for noisy medical images.

Keywords: Edge detection, neuro-fuzzy, image segmentation, artificial image, object recognition.

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Authors: Hemanth KumarA.R, Sudhakara G., Satyanarayana B.S.

Abstract:

The Cluster Dimension of a network is defined as, which is the minimum cardinality of a subset S of the set of nodes having the property that for any two distinct nodes x and y, there exist the node Si, s2 (need not be distinct) in S such that ld(x,s1) — d(y, s1)1 > 1 and d(x,s2) < d(x,$) for all s E S — {s2}. In this paper, strictly non overlap¬ping clusters are constructed. The concept of LandMarks for Unique Addressing and Clustering (LMUAC) routing scheme is developed. With the help of LMUAC routing scheme, It is shown that path length (upper bound)PLN,d < PLD, Maximum memory space requirement for the networkMSLmuAc(Az) < MSEmuAc < MSH3L < MSric and Maximum Link utilization factor MLLMUAC(i=3) < MLLMUAC(z03) < M Lc

Keywords: Metric dimension, Cluster dimension, Cluster.

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Authors: P. W. C. Prasad, A. Assi, M. Raseen, A. Harb

Abstract:

The goal of this work is to describe a new algorithm for finding the optimal variable order, number of nodes for any order and other ROBDD parameters, based on a tabular method. The tabular method makes use of a pre-built backend database table that stores the ROBDD size for selected combinations of min-terms. The user uses the backend table and the proposed algorithm to find the necessary ROBDD parameters, such as best variable order, number of nodes etc. Experimental results on benchmarks are given for this technique.

Keywords: Tabular Method, Binary Decision Diagram, BDD Manipulation, Boolean Function.

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Authors: M. Tamilarasi, T.G. Palanivelu

Abstract:

Mobile Ad Hoc Networks (MANETs) are multi-hop wireless networks in which all nodes cooperatively maintain network connectivity. In such a multi-hop wireless network, every node may be required to perform routing in order to achieve end-to-end communication among nodes. These networks are energy constrained as most ad hoc mobile nodes today operate with limited battery power. Hence, it is important to minimize the energy consumption of the entire network in order to maximize the lifetime of ad hoc networks. In this paper, a mechanism involving the integration of load balancing approach and transmission power control approach is introduced to maximize the life-span of MANETs. The mechanism is applied on Ad hoc On-demand Vector (AODV) protocol to make it as energy aware AODV (EA_AODV). The simulation is carried out using GloMoSim2.03 simulator. The results show that the proposed mechanism reduces the average required transmission energy per packet compared to the standard AODV.

Keywords: energy aware routing, load balance, Mobile Ad HocNetworks, MANETs , on demand routing, transmission power control.

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Authors: Sung Jun Ban, Hyeonwoo Cho, ChangWoo Lee, Sang Woo Kim

Abstract:

A packet analyzer is a tool for debugging sensor network systems and is convenient for developers. In this paper, we introduce a new packet analyzer based on an embedded system. The proposed packet analyzer is compatible with IEEE 802.15.4, which is suitable for the wireless communication standard for sensor networks, and is available for remote control by adopting a server-client scheme based on the Ethernet interface. To confirm the operations of the packet analyzer, we have developed two types of sensor nodes based on PIC4620 and ATmega128L microprocessors and tested the functions of the proposed packet analyzer by obtaining the packets from the sensor nodes.

Keywords: Sensor network, embedded system, packet analyzer.

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Authors: M. Moslehpour, S. Khorsandi

Abstract:

As transition to widespread use of IPv6 addresses has gained momentum, it has been shown to be vulnerable to certain security attacks such as those targeting Neighbor Discovery Protocol (NDP) which provides the address resolution functionality in IPv6. To protect this protocol, Secure Neighbor Discovery (SEND) is introduced. This protocol uses Cryptographically Generated Address (CGA) and asymmetric cryptography as a defense against threats on integrity and identity of NDP. Although SEND protects NDP against attacks, it is computationally intensive due to Hash2 condition in CGA. To improve the CGA computation speed, we parallelized CGA generation process and used the available resources in a trusted network. Furthermore, we focused on the influence of the existence of malicious nodes on the overall load of un-malicious ones in the network. According to the evaluation results, malicious nodes have adverse impacts on the average CGA generation time and on the average number of tries. We utilized a Trust Management that is capable of detecting and isolating the malicious node to remove possible incentives for malicious behavior. We have demonstrated the effectiveness of the Trust Management System in detecting the malicious nodes and hence improving the overall system performance.

Keywords: NDP, SEND, CGA, modifier, malicious node.

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Authors: Minsoo Lee, Julee Choi, Sookyung Song

Abstract:

The increasing interest on processing data created by sensor networks has evolved into approaches to implement sensor networks as databases. The aggregation operator, which calculates a value from a large group of data such as computing averages or sums, etc. is an essential function that needs to be provided when implementing such sensor network databases. This work proposes to add the DURING clause into TinySQL to calculate values during a specific long period and suggests a way to implement the aggregation service in sensor networks by applying materialized view and incremental view maintenance techniques that is used in data warehouses. In sensor networks, data values are passed from child nodes to parent nodes and an aggregation value is computed at the root node. As such root nodes need to be memory efficient and low powered, it becomes a problem to recompute aggregate values from all past and current data. Therefore, applying incremental view maintenance techniques can reduce the memory consumption and support fast computation of aggregate values.

Keywords: Aggregation, Incremental View Maintenance, Materialized view, Sensor Network.

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Authors: Insung Jung, Gi-Nam Wang

Abstract:

The objective of this paper is to a design of pattern classification model based on the back-propagation (BP) algorithm for decision support system. Standard BP model has done full connection of each node in the layers from input to output layers. Therefore, it takes a lot of computing time and iteration computing for good performance and less accepted error rate when we are doing some pattern generation or training the network. However, this model is using exclusive connection in between hidden layer nodes and output nodes. The advantage of this model is less number of iteration and better performance compare with standard back-propagation model. We simulated some cases of classification data and different setting of network factors (e.g. hidden layer number and nodes, number of classification and iteration). During our simulation, we found that most of simulations cases were satisfied by BP based using exclusive connection network model compared to standard BP. We expect that this algorithm can be available to identification of user face, analysis of data, mapping data in between environment data and information.

Keywords: Neural network, Back-propagation, classification.

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Authors: Ching-Fen Jiang

Abstract:

Edge detection is usually the first step in medical image processing. However, the difficulty increases when a conventional kernel-based edge detector is applied to ultrasonic images with a textural pattern and speckle noise. We designed an adaptive diffusion filter to remove speckle noise while preserving the initial edges detected by using a Sobel edge detector. We also propose a genetic algorithm for edge selection to form complete boundaries of the detected entities. We designed two fitness functions to evaluate whether a criterion with a complex edge configuration can render a better result than a simple criterion such as the strength of gradient. The edges obtained by using a complex fitness function are thicker and more fragmented than those obtained by using a simple fitness function, suggesting that a complex edge selecting scheme is not necessary for good edge detection in medical ultrasonic images; instead, a proper noise-smoothing filter is the key.

Keywords: edge detection, ultrasonic images, speckle noise

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Authors: Y. Harold Robinson, M. Rajaram, E. Golden Julie, S. Balaji

Abstract:

A mobile ad hoc network (MANET) is a wireless communication network where nodes that are not within direct transmission range establish their communication via the help of other nodes to forward data. Routing protocols in MANETs are usually categorized as proactive. Tree Based Opportunistic Routing (TBOR) finds a multipath link based on maximum probability of the throughput. The simulation results show that the presented method is performed very well compared to the existing methods in terms of throughput, delay and routing overhead.

Keywords: Mobile ad hoc networks, opportunistic data forwarding, proactive Source routing, BFS.

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Authors: Dahi Ghareab Abdelsalam Ibrahim

Abstract:

Axial and lateral measurements of a step depth standard are presented. The axial measurement is performed based on the ISO 5436 profile analysis. The lateral measurement is performed based on the Hamming window band-pass filter method. The method is applied to calibrate a groove structure of a step depth standard of 60 nm. For the axial measurement, the computed results show that the depth of the groove structure is 59.7 ± 0.6 nm. For the lateral measurement, the computed results show that the difference between the two line edges of the groove structure is 151.7 ± 2.5 nm. The method can be applied to any step height/depth regardless of the sharpness of the line edges.

Keywords: Hamming window, band-pass filter, metrology, interferometry.

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