Step Height Calibration Using Hamming Window Band-Pass Filter

Authors: Dahi Ghareab Abdelsalam Ibrahim

Abstract:

Axial and lateral measurements of a step depth standard are presented. The axial measurement is performed based on the ISO 5436 profile analysis. The lateral measurement is performed based on the Hamming window band-pass filter method. The method is applied to calibrate a groove structure of a step depth standard of 60 nm. For the axial measurement, the computed results show that the depth of the groove structure is 59.7 ± 0.6 nm. For the lateral measurement, the computed results show that the difference between the two line edges of the groove structure is 151.7 ± 2.5 nm. The method can be applied to any step height/depth regardless of the sharpness of the line edges.

Keywords: Hamming window, band-pass filter, metrology, interferometry.

References:

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