@article{(Open Science Index):https://publications.waset.org/pdf/10013599,
	  title     = {Step Height Calibration Using Hamming Window Band-Pass Filter},
	  author    = {Dahi Ghareab Abdelsalam Ibrahim},
	  country	= {},
	  institution	= {},
	  abstract     = {Axial and lateral measurements of a step depth standard are presented. The axial measurement is performed based on the ISO 5436 profile analysis. The lateral measurement is performed based on the Hamming window band-pass filter method. The method is applied to calibrate a groove structure of a step depth standard of 60 nm. For the axial measurement, the computed results show that the depth of the groove structure is 59.7 ± 0.6 nm. For the lateral measurement, the computed results show that the difference between the two line edges of the groove structure is 151.7 ± 2.5 nm. The method can be applied to any step height/depth regardless of the sharpness of the line edges.},
	    journal   = {International Journal of Mechanical and Mechatronics Engineering},
	  volume    = {18},
	  number    = {4},
	  year      = {2024},
	  pages     = {138 - 143},
	  ee        = {https://publications.waset.org/pdf/10013599},
	  url   	= {https://publications.waset.org/vol/208},
	  bibsource = {https://publications.waset.org/},
	  issn  	= {eISSN: 1307-6892},
	  publisher = {World Academy of Science, Engineering and Technology},
	  index 	= {Open Science Index 208, 2024},
	}