%0 Journal Article
	%A Dahi Ghareab Abdelsalam Ibrahim
	%D 2024
	%J International Journal of Mechanical and Mechatronics Engineering
	%B World Academy of Science, Engineering and Technology
	%I Open Science Index 208, 2024
	%T Step Height Calibration Using Hamming Window Band-Pass Filter
	%U https://publications.waset.org/pdf/10013599
	%V 208
	%X Axial and lateral measurements of a step depth standard are presented. The axial measurement is performed based on the ISO 5436 profile analysis. The lateral measurement is performed based on the Hamming window band-pass filter method. The method is applied to calibrate a groove structure of a step depth standard of 60 nm. For the axial measurement, the computed results show that the depth of the groove structure is 59.7 ± 0.6 nm. For the lateral measurement, the computed results show that the difference between the two line edges of the groove structure is 151.7 ± 2.5 nm. The method can be applied to any step height/depth regardless of the sharpness of the line edges.
	%P 138 - 143