Search results for: direct radiation

Authors: António L. Topa

Abstract:

A complete spectral representation for the electromagnetic field of planar multilayered waveguides inhomogeneously filled with omega media is presented. The problem of guided electromagnetic propagation is reduced to an eigenvalue equation related to a 2 ´ 2 matrix differential operator. Using the concept of adjoint waveguide, general bi-orthogonality relations for the hybrid modes (either from the discrete or from the continuous spectrum) are derived. For the special case of homogeneous layers the linear operator formalism is reduced to a simple 2 ´ 2 coupling matrix eigenvalue problem. Finally, as an example of application, the surface and the radiation modes of a grounded omega slab waveguide are analyzed.

Keywords: Metamaterials, linear operators, omega media, layered waveguide, orthogonality relations

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Authors: Khalid Alammar

Abstract:

Aim of this study is to evaluate a new three-equation turbulence model applied to flow and heat transfer through a pipe. Uncertainty is approximated by comparing with published direct numerical simulation results for fully-developed flow. Error in the mean axial velocity, temperature, friction, and heat transfer is found to be negligible.

Keywords: Heat Transfer, Nusselt number, Skin friction, Turbulence.

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Authors: Kumaresh Sarmah, Kandarpa Kumar Sarma

Abstract:

Artificial Neural Network (ANN)s are best suited for prediction and optimization problems. Trained ANNs have found wide spread acceptance in several antenna design systems. Four parameters namely antenna radiation resistance, loss resistance, efficiency, and inductance can be used to design an antenna layout though there are several other parameters available. An ANN can be trained to provide the best and worst case precisions of an antenna design problem defined by these four parameters. This work describes the use of an ANN to generate the four mentioned parameters for a loop antenna for the specified frequency range. It also provides insights to the prediction of best and worst-case design problems observed in applications and thereby formulate a model for physical layout design of a loop antenna.

Keywords: MLP, ANN, parameter, prediction, optimization.

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Authors: Hussam Elias, Ninovic Perez, Holger Hirsch

Abstract:

With ever-increasing use of equipment, device or more generally any electrical or electronic system, the chance of Electromagnetic incompatibility incidents has considerably increased which demands more attention to ensure the possible risks of these technologies. Therefore, complying with certain Electromagnetic compatibility (EMC) rules and not overtaking an acceptable level of radiated emissions are utmost importance for the diffusion of electronic products. In this paper, developed measure tool and a convolutional neural network were used to propose a method to reduce the required time to carry out the final measurement phase of Electromagnetic interference (EMI) measurement according to the norm EN 55032 by predicting the radiated emission and determining the height of the antenna that meets the maximum radiation value.

Keywords: Antenna height, Convolutional Neural Network, Electromagnetic Compatibility, Mean Absolute Error, position error.

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Authors: H. Ettouney, A. AL-Haddad, S. Saqer

Abstract:

This paper focuses on assessment of air pollution in Umm-Alhyman, Kuwait, which is located south to oil refineries, power station, oil field, and highways. The measurements were made over a period of four days in March and July in 2001, 2004, and 2008. The measured pollutants included methanated and nonmethanated hydrocarbons (MHC, NMHC), CO, CO2, SO2, NOX, O3, and PM10. Also, meteorological parameters were measured, which includes temperature, wind speed and direction, and solar radiation. Over the study period, data analysis showed increase in measured SO2, NOX and CO by factors of 1.2, 5.5 and 2, respectively. This is explained in terms of increase in industrial activities, motor vehicle density, and power generation. Predictions of the measured data were made by the ISC-AERMOD software package and by using the ISCST3 model option. Finally, comparison was made between measured data against international standards.

Keywords: Air pollution, Emission inventory, ISCST3 model, Modeling

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Authors: John Justo Ambuchi, Zhaohan Zhang, Yujie Feng

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Quick development and usage of nanotechnology have resulted to massive use of various nanoparticles, such as iron oxide nanoparticles (IONPs) and multi-wall carbon nanotubes (MWCNTs). Thus, this study investigated the role of IONPs and MWCNTs in enhancing bioenergy recovery. Results show that IONPs at a concentration of 750 mg/L and MWCNTs at a concentration of 1500 mg/L induced faster substrate utilization and biogas production rates than the control. IONPs exhibited higher carbon oxygen demand (COD) removal efficiency than MWCNTs while on the contrary, MWCNT performance on biogas generation was remarkable than IONPs. Furthermore, scanning electron microscopy (SEM) investigation revealed extracellular polymeric substances (EPS) excretion from AGS had an interaction with nanoparticles. This interaction created a protective barrier to microbial consortia hence reducing their cytotoxicity. Microbial community analyses revealed genus predominance of bacteria of Anaerolineaceae and Longilinea. Their role in biodegradation of the substrate could have highly been boosted by nanoparticles. The archaea predominance of the genus level of Methanosaeta and Methanobacterium enhanced methanation process. The presence of bacteria of genus Geobacter was also reported. Their presence might have significantly contributed to direct interspecies electron transfer in the system. Exposure of AGS to nanoparticles promoted direct interspecies electron transfer among the anaerobic fermenting bacteria and their counterpart methanogens during the anaerobic digestion process. This results provide useful insightful information in understanding the response of microorganisms to IONPs and MWCNTs in the complex natural environment.

Keywords: Anaerobic granular sludge, extracellular polymeric substances, iron oxide nanoparticles, multi-wall carbon nanotubes.

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Authors: Samira Berenji Ardestani, Hamid Reza Akhavan

Abstract:

Gamma irradiation greatly reduces the potential microbiological risk of fresh fruits, resulting in improved microbial safety as well as extending their shelf life. The effects of 0.5-2 kGy gamma doses on some physicochemical, microbial and sensory properties of fresh barberry fruits (Berberis vulgaris) during refrigerated storage for 40 days were evaluated. The total anthocyanin and total phenolic contents of barberry fruits decreased in a dose-dependent manner immediately after irradiation and after subsequent storage. In general, it is recommended that, according to the effect of gamma radiation on physicochemical, microbial and sensorial characteristics, doses of 1.25-2 kGy could be used.

Keywords: Antioxidant property, barberry fruit, chemical properties, gamma irradiation.

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Authors: Donepudi Jagadish

Abstract:

In the view of current requirements of power generation and the increased interest on renewable energy sources, many options are available for generation of clean power. Solar power generation would be one of the best options in this context. The solar pond uses the principle of conversion of solar energy into heat energy, and also has the capability of storing this energy for certain period of time. The solar ponds could be best option for the regions with high solar radiation throughout the day, and also has free land availability. The paper depicts the significance of solar pond for conversion of solar energy into heat energy with a sight towards the parameters like thermal efficiency, working conditions and cost of construction. The simulation of solar pond system has been carried out for understanding the trends of the thermal efficiencies with respect to time.

Keywords: Renewable Energy, Solar Pond, Energy Efficiency, Construction of Solar Pond.

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Authors: G. Kehl, P. Wagner

Abstract:

A novel simulation method to determine the displacements of machine tools due to thermal factors is presented. The specific characteristic of this method is the employment of original CAD data from the design process chain, which is interpreted by an algorithm in terms of geometry-based allocation of convection and radiation parameters. Furthermore analogous models relating to the thermal behaviour of machine elements are automatically implemented, which were gained by extensive experimental testing with thermography imaging. With this a transient simulation of the thermal field and in series of the displacement of the machine tool is possible simultaneously during the design phase. This method was implemented and is already used industrially in the design of machining centres in order to improve the quality of herewith manufactured workpieces.

Keywords: Accuracy, design process, finite element analysis, machine tools, thermal simulation.

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Authors: Christian Rathgeber, Franz Winkler, Xiaoyu Kang, Steffen Müller

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In this contribution two approaches for calculating optimal trajectories for highly automated vehicles are presented and compared. The first one is based on a non-linear vehicle model, used for evaluation. The second one is based on a simplified model and can be implemented on a current ECU. In usual driving situations both approaches show very similar results.

Keywords: Trajectory planning, direct method, indirect method, highly automated driving.

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Authors: J. Mendoza-López, S. Sánchez-Solano, J. L. Huertas-Díaz

Abstract:

An array of piezoelectric micro actuators can be used for radiation of an ultrasonic carrier signal modulated in amplitude with an acoustic signal, which yields audio frequency applications as the air acts as a self-demodulating medium. This application is known as the parametric array. We propose a parametric array with array elements based on existing piezoelectric micro ultrasonic transducer (pMUT) design techniques. In order to reach enough acoustic output power at a desired operating frequency, a proper ratio between number of array elements and array size needs to be used, with an array total area of the order of one cm square. The transducers presented are characterized via impedance, admittance, noise figure, transducer gain and frequency responses.

Keywords: Pizeoelectric, Microspeaker, MEMS, pMUT, Parametric Array

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Authors: C. R. Balamurugan, P. Vijayakumar, P. Kiruba, S. Arun Kanna, E. R. Hariprasath, C. Anu Priya

Abstract:

This paper studies in details about the need of quadcopter in various fields especially in the place of remote area where the road transportation facility is very less. It is used to monitor and collect data in a specific region. The movement of this quadcopter is controlled by the Raspberry Pi. FPV camera is used for capturing the image and will transmit the image to the receiver which can be monitored using an android smart phone. This is mainly used for surveillance purpose and hidden activities can be captured.

Keywords: FPV camera, A2212 brushless direct current motor, Raspberry Pi, lithium polymer battery.

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Authors: Petri Vaattovaara, Zoran D. Ristovski, Martin Graus, Marcus Müller, EijaAsmi, Luca Di Liberto, StaffanSjögren, Douglas Orsini, Caroline Leck, Ari Laaksonen

Abstract:

Due to climate warming and consequently due to ice and snow melting of the Arctic Ocean, the highly biologically active ocean surface area has been expanding quickly making possible longer marine biota growth seasons during polar summers. That increase the probability of the remote marine environment secondary contribution, especially secondary organic contribution, to the particle production and particle growth events and particle properties, consequently effecting on the open ocean, pack ice and ground based regions radiation budget and thus on the feedbacks between arctic biota, particles, clouds, and climate.

Keywords: Arctic Ocean, ice melting, nucleation, secondary organics, clouds, climate.

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Authors: Zahéra Mekkioui

Abstract:

Here we have considered non uniform microstrip leaky-wave antenna implemented on a dielectric waveguide by a sinusoidal profile of periodic metallic grating. The non distribution of the attenuation constant α along propagation axis, optimize the radiating characteristics and performances of such antennas. The method developped here is based on an integral method where the formalism of the admittance operator is combined to a BKW approximation. First, the effect of the modeling in the modal analysis of complex waves is studied in detail. Then, the BKW model is used for the dispersion analysis of the antenna of interest. According to antenna theory, a forced continuity of the leaky-wave magnitude at discontinuities of the non uniform structure is established. To test the validity of our dispersion analysis, computed radiation patterns are presented and compared in the millimeter band.

Keywords: antenna, leaky-wave, performances, sinusoidal.

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Authors: Afshin Moradi, Mohammad Hosain Teimourpour

Abstract:

We derive simple sets of equations to describe the microwave response of a thin film of magnetized hydrogen plasma in the presence of carbon nanotubes, which were grown by ironcatalyzed high-pressure disproportionation (HiPco). By considering the interference effects due to multiple reflections between thin plasma film interfaces, we present the effects of the continuously changing external magnetic field and plasma parameters on the reflected power, absorbed power, and transmitted power in the system. The simulation results show that the interference effects play an important role in the reflectance, transmittance and absorptance of microwave radiation at the magnetized plasma slab. As a consequence, the interference effects lead to a sinusoidal variation of the reflected intensity and can greatly reduce the amount of reflection power, but the absorption power increases.

Keywords:

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Authors: Do-Jin Jang, Sung-Ah Kim

Abstract:

A kinetic façade responds to user requirements and environmental conditions.  In designing a kinetic façade, kinetic patterns play a key role in determining its performance. This paper proposes a biomimetic method for the multi-objective optimization for kinetic façade design. The autonomous decentralized control system is combined with flocking algorithm. The flocking agents are autonomously reacting to sensor values and bring about kinetic patterns changing over time. A series of experiments were conducted to verify the potential and limitations of the flocking based decentralized control. As a result, it could show the highest performance balancing multiple objectives such as solar radiation and openness among the comparison group.

Keywords: Biomimicry, flocking algorithm, autonomous decentralized control, multi-objective optimization.

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Authors: Vanessa A. Segovia, Sonia E. Ruiz

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The use of energy dissipation systems for seismic applications has increased worldwide, thus it is necessary to develop practical and modern criteria for their optimal design. Here, a direct displacement-based seismic design approach for frame buildings with hysteretic energy dissipation systems (HEDS) is applied. The building is constituted by two individual structural systems consisting of: 1) a main elastic structural frame designed for service loads; and 2) a secondary system, corresponding to the HEDS, that controls the effects of lateral loads. The procedure implies to control two design parameters: a) the stiffness ratio (α=Kframe/Ktotal system), and b) the strength ratio (γ=Vdamper/Vtotal system). The proposed damage-controlled approach contributes to the design of a more sustainable and resilient building because the structural damage is concentrated on the HEDS. The reduction of the design displacement spectrum is done by means of a damping factor (recently published) for elastic structural systems with HEDS, located in Mexico City. Two limit states are verified: serviceability and near collapse. Instead of the traditional trial-error approach, a procedure that allows the designer to establish the preliminary sizes of the structural elements of both systems is proposed. The design methodology is applied to an 8-story steel building with buckling restrained braces, located in soft soil of Mexico City. With the aim of choosing the optimal design parameters, a parametric study is developed considering different values of હ and ઻. The simplified methodology is for preliminary sizing, design, and evaluation of the effectiveness of HEDS, and it constitutes a modern and practical tool that enables the structural designer to select the best design parameters. 

Keywords: Damage-controlled buildings, direct displacementbased seismic design, optimal hysteretic energy dissipation systems

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Authors: N. Seladji-Hassaine, L. Merad, S.M. Meriah, F.T. Bendimerad

Abstract:

UWB is a very attractive technology for many applications. It provides many advantages such as fine resolution and high power efficiency. Our interest in the current study is the use of UWB radar technique in microwave medical imaging systems, especially for early breast cancer detection. The Federal Communications Commission FCC allowed frequency bandwidth of 3.1 to 10.6 GHz for this purpose. In this paper we suggest an UWB Bowtie slot antenna with enhanced bandwidth. Effects of varying the geometry of the antenna on its performance and bandwidth are studied. The proposed antenna is simulated in CST Microwave Studio. Details of antenna design and simulation results such as return loss and radiation patterns are discussed in this paper. The final antenna structure exhibits good UWB characteristics and has surpassed the bandwidth requirements.

Keywords: Ultra Wide Band (UWB), microwave imaging system, Bowtie antenna, return loss, impedance bandwidth enhancement.

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Authors: Akim Borbuev, Francisco de León

Abstract:

Economic and population growth in densely-populated urban areas introduce major challenges to distribution system operators, planers, and designers. To supply added loads, utilities are frequently forced to invest in new distribution feeders. However, this is becoming increasingly more challenging due to space limitations and rising installation costs in urban settings. This paper proposes the conversion of critical alternating current (ac) distribution feeders into direct current (dc) feeders to increase the power transfer capacity by a factor as high as four. Current trends suggest that the return of dc transmission, distribution, and utilization are inevitable. Since a total system-level transformation to dc operation is not possible in a short period of time due to the needed huge investments and utility unreadiness, this paper recommends that feeders that are expected to exceed their limits in near future are converted to dc. The increase in power transfer capacity is achieved through several key differences between ac and dc power transmission systems. First, it is shown that underground cables can be operated at higher dc voltage than the ac voltage for the same dielectric stress in the insulation. Second, cable sheath losses, due to induced voltages yielding circulation currents, that can be as high as phase conductor losses under ac operation, are not present under dc. Finally, skin and proximity effects in conductors and sheaths do not exist in dc cables. The paper demonstrates that in addition to the increased power transfer capacity utilities substituting ac feeders by dc feeders could benefit from significant lower costs and reduced losses. Installing dc feeders is less expensive than installing new ac feeders even when new trenches are not needed. Case studies using the IEEE 342-Node Low Voltage Networked Test System quantify the technical and economic benefits of dc feeders.

Keywords: Dc power systems, distribution feeders, distribution networks, energy efficiency, power transfer capacity.

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Authors: V. Rednic, N. Aldea, P. Marginean, D. Macovei, C. M. Teodorescu, E. Dorolti, F. Matei

Abstract:

The supported Pd catalysts were analyzed by X-ray diffraction and X-ray absorption spectroscopy in order to determine their global and local structure. The average particle size of the supported Pd catalysts was determined by X-ray diffraction method. One of the main purposes of the present contribution is to focus on understanding the specific role of the Pd particle size determined by X-ray diffraction and that of the support oxide. Based on X-ray absorption fine structure spectroscopy analysis we consider that the whole local structure of the investigated samples are distorted concerning the atomic number but the distances between atoms are almost the same as for standard Pd sample. Due to the strong modifications of the Pd cluster local structure, the metal-support interface may influence the electronic properties of metal clusters and thus their reactivity for absorption of the reactant molecules.

Keywords: metal-support interaction, supported metal catalysts, synchrotron radiation, X-ray absorption spectroscopy, X-raydiffraction

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Authors: Gong Jie, Yu Qianxu, Liu Min, Shan Weiwei

Abstract:

The design of methods of the 20 K large dimension cold shield used for infrared radiation demarcating in space environment simulation test were introduced in this paper. The cold shield were cooled by five G-M cryocoolers , and the dimension of the cold shield is the largest in our country.Cold shield installation and distribution and compensator for contraction on cooling were introduced detailedly. The temperature distribution and cool-down time of cold shield surface were also calculated and analysed in this paper. The design of cold shield resolves the difficulty of compensator for contraction on cooling successfully. Test results show that the actual technical performance indicators of cold shield met and exceeded the design requirements.

Keywords: cold shield, G-M cryocooler，infrared radiometer demarcating, satellite, space environment simulation equipments

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Authors: G. Çelik Gül, F. Kurtuluş

Abstract:

Colemanite is the most common borate mineral, and the main source of the boron required by plants, human, and earth. Transition metals exhibit optical and physical properties such as; non-linear optical character, structural diversity, thermal stability, long cycle life and luminescent radiation. The doping of colemanite with a transition metal, bring it very interesting and attractive properties which make them applicable in industry. Iron doped calcium borate was synthesized by conventional solid state method at 1200 °C for 12 h with a systematic pathway. X-ray diffraction (XRD), Fourier transform infrared (FTIR) spectroscopy, scanning electron microscopy/energy dispersive analyze (SEM/EDS) were used to characterize structural and morphological properties. Also, thermal properties were recorded by thermogravimetric-differential thermal analysis (TG/DTA). 

Keywords: Colemanite, conventional synthesis, powder x-ray diffraction, borates.

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Authors: N. Nacereddine, M. Tridi, S. S. Belaïfa, M. Zelmat

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For the characterization of the weld defect region in the radiographic image, looking for features which are invariant regarding the geometrical transformations (rotation, translation and scaling) proves to be necessary because the same defect can be seen from several angles according to the orientation and the distance from the welded framework to the radiation source. Thus, panoply of geometrical attributes satisfying the above conditions is proposed and which result from the calculation of the geometrical parameters (surface, perimeter, etc.) on the one hand and the calculation of the different order moments, on the other hand. Because the large range in values of the raw features and taking into account other considerations imposed by some classifiers, the scaling of these values to lie between 0 and 1 is indispensable. The principal component analysis technique is used in order to reduce the number of the attribute variables in the aim to give better performance to the further defect classification.

Keywords: Geometric parameters, invariant attributes, principal component analysis, weld defect image.

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Authors: Z. Heirany, M. Ghaemian

Abstract:

Behavior of dams against the seismic loads has been studied by many researchers. Most of them proposed new numerical methods to investigate the dam safety. In this paper, to study the effect of nonlinear parameters of concrete in gravity dams, a twodimensional approach was used including the finite element method, staggered method and smeared crack approach. Effective parameters in the models are physical properties of concrete such as modulus of elasticity, tensile strength and specific fracture energy. Two different models were used in foundation (mass-less and massed) in order to determine the seismic response of concrete gravity dams. Results show that when the nonlinear analysis includes the dam- foundation interaction, the foundation-s mass, flexibility and radiation damping are important in gravity dam-s response.

Keywords: Numerical methods; concrete gravity dams; finiteelement method; boundary condition

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Authors: A. Guechi, M. Chegaar

Abstract:

This study investigates how AlGaAs/GaAs thin film solar cells perform under varying global solar spectrum due to the changes of environmental parameters such as the air mass and the atmospheric turbidity. The solar irradiance striking the solar cell is simulated using the spectral irradiance model SMARTS2 (Simple Model of the Atmospheric Radiative Transfer of Sunshine) for clear skies on the site of Setif (Algeria). The results show a reduction in the short circuit current due to increasing atmospheric turbidity, it is 63.09% under global radiation. However increasing air mass leads to a reduction in the short circuit current of 81.73%. The efficiency decreases with increasing atmospheric turbidity and air mass.

Keywords: AlGaAs/GaAs, Solar Cells, Environmental parameters, Spectral Variation, SMARTS.

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Authors: Krishna S. Raghuwaiya, Shonal Singh, Jito Vanualailai

Abstract:

In this paper, we study the formation control problem for car-like mobile robots. A team of nonholonomic mobile robots navigate in a terrain with obstacles, while maintaining a desired formation, using a leader-following strategy. A set of artificial potential field functions is proposed using the direct Lyapunov method for the avoidance of obstacles and attraction to their designated targets. The effectiveness of the proposed control laws to verify the feasibility of the model is demonstrated through computer simulations

Keywords: Control, Formation, Lyapunov, Nonholonomic

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Authors: Jae-Kyung LEE, Byung-Hak CHO, Kyung-Nam Jang, Sun-Chul Jung, Ki-Yong OH, Joon-Young PARK, Jong-Seog Kim

Abstract:

The cables in a nuclear power plant are designed to be used for about 40 years in safe operation environment. However, the heat and radiation in the nuclear power plant causes the rapid performance deterioration of cables in nuclear vessels and heat exchangers, which requires cable lifetime estimation. The most accurate method of estimating the cable lifetime is to evaluate the cables in a laboratory. However, removing cables while the plant is operating is not allowed because of its safety and cost. In this paper, a robot system to estimate the cable lifetime in nuclear power plants is developed and tested. The developed robot system can calculate a modulus value to estimate the cable lifetime even when the nuclear power plant is in operation.

Keywords: Autonomous robot, Cable Inspection, Indenter, Nuclear Power Plant

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Authors: Alfonso Bahillo, Juan Blas, Santiago Mazuelas, Patricia Fernanadez, Ruben Mateo Lorenzo, Evaristo Jose Abril

Abstract:

The wide increase and diffusion on telecommunication technologies have caused a huge spread of electromagnetic sources in most European Countries. Since the public is continuously being exposed to electromagnetic radiation the possible health effects have become the focus of population concerns. As a result, electromagnetic field monitoring stations which control field strength in commercial frequency bands are being placed on the flat roof of many buildings. However there is no guidance on where to place them. This paper presents an analysis of frequency, polarization and angles of incidence of a plane wave which impinges on a flat roof security wall and its dependence on electromagnetic field strength meters placement.

Keywords: EM field exposition, EM field strength meter, FDTD method, flat roof security wall, plane wave propagation.

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Authors: K. A. Weidenmann, M. Grigo, B. Brylka, P. Elsner, T. Böhlke

Abstract:

In order to reduce fuel consumption, the weight of automobiles has to be reduced. Fiber reinforced polymers offer the potential to reach this aim because of their high stiffness to weight ratio. Additionally, the use of fiber reinforced polymers in automotive applications has to allow for an economic large-scale production. In this regard, long fiber reinforced thermoplastics made by direct processing offer both mechanical performance and processability in injection moulding and compression moulding. The work presented in this contribution deals with long glass fiber reinforced polypropylene directly processed in compression moulding (D-LFT). For the use in automotive applications both the temperature and the time dependency of the materials properties have to be investigated to fulfill performance requirements during crash or the demands of service temperatures ranging from -40 °C to 80 °C. To consider both the influence of temperature and time, quasistatic tensile tests have been carried out at different temperatures. These tests have been complemented by high speed tensile tests at different strain rates. As expected, the increase in strain rate results in an increase of the elastic modulus which correlates to an increase of the stiffness with decreasing service temperature. The results are in good accordance with results determined by dynamic mechanical analysis within the range of 0.1 to 100 Hz. The experimental results from different testing methods were grouped and interpreted by using different time temperature shift approaches. In this regard, Williams-Landel-Ferry and Arrhenius approach based on kinetics have been used. As the theoretical shift factor follows an arctan function, an empirical approach was also taken into consideration. It could be shown that this approach describes best the time and temperature superposition for glass fiber reinforced polypropylene manufactured by D-LFT processing.

Keywords: Composite, long fiber reinforced thermoplastics, mechanical properties, dynamic mechanical analysis, time temperature superposition.

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Authors: G. Zuppardi, F. Romano

Abstract:

Technology of thin film deposition is of interest in many engineering fields, from electronic manufacturing to corrosion protective coating. A typical deposition process, like that developed at the University of Eindhoven, considers the deposition of a thin, amorphous film of C:H or of Si:H on the substrate, using the Expanding Thermal arc Plasma technique. In this paper a computing procedure is proposed to simulate the flow field in a deposition chamber similar to that at the University of Eindhoven and a sensitivity analysis is carried out in terms of: precursor mass flow rate, electrical power, supplied to the torch and fluid-dynamic characteristics of the plasma jet, using different nozzles. To this purpose a deposition chamber similar in shape, dimensions and operating parameters to the above mentioned chamber is considered. Furthermore, a method is proposed for a very preliminary evaluation of the film thickness distribution on the substrate. The computing procedure relies on two codes working in tandem; the output from the first code is the input to the second one. The first code simulates the flow field in the torch, where Argon is ionized according to the Saha-s equation, and in the nozzle. The second code simulates the flow field in the chamber. Due to high rarefaction level, this is a (commercial) Direct Simulation Monte Carlo code. Gas is a mixture of 21 chemical species and 24 chemical reactions from Argon plasma and Acetylene are implemented in both codes. The effects of the above mentioned operating parameters are evaluated and discussed by 2-D maps and profiles of some important thermo-fluid-dynamic parameters, as per Mach number, velocity and temperature. Intensity, position and extension of the shock wave are evaluated and the influence of the above mentioned test conditions on the film thickness and uniformity of distribution are also evaluated.

Keywords: Deposition chamber, Direct Simulation Mote Carlo method (DSMC), Plasma chemistry, Rarefied gas dynamics.

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