Search results for: Process modeling

Authors: Mohammad Javadi

Abstract:

Serial hierarchical support vector machine (SHSVM) is proposed to discriminate three brain tissues which are white matter (WM), gray matter (GM), and cerebrospinal fluid (CSF). SHSVM has novel classification approach by repeating the hierarchical classification on data set iteratively. It used Radial Basis Function (rbf) Kernel with different tuning to obtain accurate results. Also as the second approach, segmentation performed with DAGSVM method. In this article eight univariate features from the raw DTI data are extracted and all the possible 2D feature sets are examined within the segmentation process. SHSVM succeed to obtain DSI values higher than 0.95 accuracy for all the three tissues, which are higher than DAGSVM results.

Keywords: Brain segmentation, DTI, hierarchical, SVM.

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Authors: Shao-Ku Kao

Abstract:

This paper presents an active rectifier with time-domain delay compensation to enhance the efficiency. A delay calibration circuit is designed to convert delay time to voltage and adaptive control on/off delay in variable input voltage. This circuit is designed in 0.18 mm CMOS process. The input voltage range is from 2 V to 3.6 V with the output voltage from 1.8 V to 3.4 V. The efficiency can maintain more than 85% when the load from 50 Ω ~ 1500 Ω for 3.6 V input voltage. The maximum efficiency is 92.4 % at output power to be 38.6 mW for 3.6 V input voltage.

Keywords: Wireless power transfer, active diode, delay compensation, time to voltage converter, PCE.

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Authors: Sara Sharifi Rad, Hassan Haghighi

Abstract:

Due to important issues, such as deadlock, starvation, communication, non-deterministic behavior and synchronization, concurrent systems are very complex, sensitive, and error-prone. Thus ensuring reliability and accuracy of these systems is very essential. Therefore, there has been a big interest in the formal specification of concurrent programs in recent years. Nevertheless, some features of concurrent systems, such as dynamic process creation, scheduling and starvation have not been specified formally yet. Also, some other features have been specified partially and/or have been described using a combination of several different formalisms and methods whose integration needs too much effort. In other words, a comprehensive and integrated specification that could cover all aspects of concurrent systems has not been provided yet. Thus, this paper makes two major contributions: firstly, it provides a comprehensive formal framework to specify all well-known features of concurrent systems. Secondly, it provides an integrated specification of these features by using just a single formal notation, i.e., the Z language.

Keywords: Concurrent systems, Formal methods, Formal specification, Z language

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Authors: Chiung-Hui Chen

Abstract:

Diagram and drawing are important ways to communicate and the reproduce of architectural design, Due to the development of information and communication technology, the professional thinking of architecture and interior design are also change rapidly. In development process of design, diagram always play very important role. This study is based on diagram theories, observe and record interaction between man and objects, objects and space, and space and time in a modern nuclear family. Construct a method for diagram to systematically and visualized describe the space plan of a modern nuclear family toward an intelligent design, to assist designer to retrieve information and review event pattern of past and present.

Keywords: Digital diagram, information model, context aware, data analysis.

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Authors: Alaa Al Hawari, Mohammad Khader, Tarek Zayed, Osama Moselhi

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In this paper, an effective non-destructive, noninvasive approach for leak detection was proposed. The process relies on analyzing thermal images collected by an IR viewer device that captures thermo-grams. In this study a statistical analysis of the collected thermal images of the ground surface along the expected leak location followed by a visual inspection of the thermo-grams was performed in order to locate the leak. In order to verify the applicability of the proposed approach the predicted leak location from the developed approach was compared with the real leak location. The results showed that the expected leak location was successfully identified with an accuracy of more than 95%.

Keywords: Thermography, Leakage, Water pipelines, Thermograms.

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Authors: M. Bastanfard, B. Jalaeian, S. Jafari

Abstract:

Sonogram images of normal and lymphocyte thyroid tissues have considerable overlap which makes it difficult to interpret and distinguish. Classification from sonogram images of thyroid gland is tackled in semiautomatic way. While making manual diagnosis from images, some relevant information need not to be recognized by human visual system. Quantitative image analysis could be helpful to manual diagnostic process so far done by physician. Two classes are considered: normal tissue and chronic lymphocyte thyroid (Hashimoto's Thyroid). Data structure is analyzed using K-nearest-neighbors classification. This paper is mentioned that unlike the wavelet sub bands' energy, histograms and Haralick features are not appropriate to distinguish between normal tissue and Hashimoto's thyroid.

Keywords: Sonogram, thyroid, Haralick feature, wavelet.

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Authors: Yurii Bloshko, Oksana Olar

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This paper presents the analysis of six different classes of Petri nets: fuzzy Petri nets (FPN), generalized fuzzy Petri nets (GFPN), parameterized fuzzy Petri nets (PFPN), T2GFPN, flexible generalized fuzzy Petri nets (FGFPN), binary Petri nets (BPN). These classes were simulated in the special software PNeS® for the analysis of its pros and cons on the example of models which are dedicated to the decision-making process of passenger transport logistics. The paper includes the analysis of two approaches: when input values are filled with the experts’ knowledge; when fuzzy expectations represented by output values are added to the point. These approaches fulfill the possibilities of triples of functions which are replaced with different combinations of t-/s-norms.

Keywords: Fuzzy petri net, intelligent computational techniques, knowledge representation, triangular norms.

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Authors: P. Jomsri

Abstract:

Currently searching through internet is very popular especially in a field of academic. A huge of educational information such as research papers are overload for user. So community-base web sites have been developed to help user search information more easily from process of customizing a web site to need each specifies user or set of user. In this paper propose to use association rule analyze the community group on research paper bookmarking. A set of design goals for community group frameworks is developed and discussed. Additionally Researcher analyzes the initial relation by using association rule discovery between the antecedent and the consequent of a rule in the groups of user for generate the idea to improve ranking search result and development recommender system.

Keywords: association rule, information retrieval, research paper bookmarking.

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Authors: Kureshi Abdul Kadir, Mohd. Hasan

Abstract:

Each new semiconductor technology node brings smaller transistors and wires. Although this makes transistors faster, wires get slower. In nano-scale regime, the standard copper (Cu) interconnect will become a major hurdle for FPGA interconnect due to their high resistivity and electromigration. This paper presents the comprehensive evaluation of mixed CNT bundle interconnects and investigates their prospects as energy efficient and high speed interconnect for future FPGA routing architecture. All HSPICE simulations are carried out at operating frequency of 1GHz and it is found that mixed CNT bundle implemented in FPGAs as interconnect can potentially provide a substantial delay and energy reduction over traditional interconnects at 32nm process technology.

Keywords: CMOS, Copper Interconnect, Mixed CNT Bundle Interconnect, FPGAs.

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Authors: H. El Fadili, K. Zenkouar, H. Qjidaa

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This paper proposes a neural network weights and topology optimization using genetic evolution and the backpropagation training algorithm. The proposed crossover and mutation operators aims to adapt the networks architectures and weights during the evolution process. Through a specific inheritance procedure, the weights are transmitted from the parents to their offsprings, which allows re-exploitation of the already trained networks and hence the acceleration of the global convergence of the algorithm. In the preprocessing phase, a new feature extraction method is proposed based on Legendre moments with the Maximum entropy principle MEP as a selection criterion. This allows a global search space reduction in the design of the networks. The proposed method has been applied and tested on the well known MNIST database of handwritten digits.

Keywords: Genetic algorithm, Legendre Moments, MEP, Neural Network.

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Authors: R. Nootjarat, W. Chantatub, P. Chongstitvatana

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This research attempts to explore gaps in Information Systems (IS) and innovation literatures by developing a model of Information Technology (IT) capability in enabling innovation. The research was conducted by using semi-structured interview with six innovators in business consulting, financial, healthcare and academic organizations. The interview results suggest four elements of ITenabled innovation capability which are information (ability to capture ideas and knowledge), connectivity (ability to bridge geographical boundary and mobilize human resources), communication (ability to attain and engage relationships between human resources) and transformation (ability to change the functions and process integrations) in defining IT-enabled innovation platform. The results also suggests innovators- roles and IT capability.

Keywords: Innovation Platform, IT Capability, Innovators, Innovation Delivery

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Authors: Shigenori Togashi, Kei Takenaka

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We developed new processes which can collect and detect rapidly airborne pathogens such as the avian flu virus for the pandemic prevention. The fluorescence antibody technique is known as one of high-sensitive detection methods for viruses, but this needs up to a few hours to bind sufficient fluorescence dyes to viruses for detection. In this paper, we developed a mist-labeling can detect substitution viruses in a short time to improve the binding rate of fluorescent dyes and substitution viruses by the micro reaction process. Moreover, we developed the rapid detection system with the above “mist labeling”. The detection system set with a sampling bag collecting patient’s breath and a cartridge can detect automatically pathogens within 10 minutes.

Keywords: Viruses, Sampler, Mist, Detection, Fluorescent dyes, Microreaction.

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Authors: M. F. Sung, Y.D. Kuan, R.J. Shyu, S.M. Lee

Abstract:

Tread design has evolved over the years to achieve the common tread pattern used in current vehicles. However, to meet safety and comfort requirements, tread design considers more than one design factor. Tread design must consider the grip and drainage, and the manner in which to reduce rolling noise, which is one of the main factors considered by manufacturers. The main objective of this study was the application the computational fluid dynamics (CFD) technique to simulate the contact surface of the tire and ground. The results demonstrated an air-Pumping and large pressure drop effect in the process of contact surface. The results also revealed that the pressure can be used to analyze sound pressure level (SPL).

Keywords: Air-pumping, computational fluid dynamics, sound pressure level, tire.

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Authors: Kai-Lin Hsu, Jie-Chung Lou, Jia-Yun Han

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In recent years, the underground water sources in southern Taiwan have become salinized because of saltwater intrusions. This study explores the adsorption characteristics of activated carbon on salinizing inorganic salts using isothermal adsorption experiments and provides a model analysis. The temperature range for the isothermal adsorption experiments ranged between 5 to 45 ℃, and the amount adsorbed varied between 28.21 to 33.87 mg/g. All experimental data of adsorption can be fitted to both the Langmuir and the Freundlich models. The thermodynamic parameters for per chlorate onto granular activated carbon were calculated as -0.99 to -1.11 kcal/mol for DG°, -0.6 kcal/mol for DH°, and 1.21 to 1.84 kcal/mol for DS°. This shows that the adsorption process of granular activated carbon is spontaneously exothermic. The observation of adsorption behaviors under low ionic strength, low pH values, and low temperatures is beneficial to the adsorption removal of perchlorate with granular activated carbon.

Keywords: Water Treatment, Per Chlorate, Adsorption, Granular Activated Carbon

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Authors: Michael Tupý, Dagmar Měřínská, Alice Tesaříková-Svobodová, Christian Carrot, Caroline Pillon, Vít Petránek

Abstract:

The mechanical properties of blends consisting of plasticized poly(vinyl butyral) (PVB) and plasticized poly(vinyl chloride) (PVC) are studied, in order to evaluate the possibility of using recycled PVB waste derived from windshields. PVC was plasticized with 38% of diisononyl phthalate (DINP), while PVB was plasticized with 28% of triethylene glycol, bis(2-ethylhexanoate) (3GO). The optimal process conditions for the PVB/PVC blend in 1:1 ratio were determined. Entropy was used in order to theoretically predict the blends miscibility. The PVB content of each blend composition used was ranging from zero to 100%. Tensile strength and strain were tested. In addition, a comparison between recycled and original PVB, used as constituents of the blend, was performed.

Keywords: Poly(vinyl butyral), poly(vinyl chloride), windshield, polymer waste, mechanical properties.

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Authors: Katrin Zaiß, Tim Schlüter, Stefan Conrad

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Ontology Matching is a task needed in various applica-tions, for example for comparison or merging purposes. In literature,many algorithms solving the matching problem can be found, butmost of them do not consider instances at all. Mappings are deter-mined by calculating the string-similarity of labels, by recognizinglinguistic word relations (synonyms, subsumptions etc.) or by ana-lyzing the (graph) structure. Due to the facts that instances are oftenmodeled within the ontology and that the set of instances describesthe meaning of the concepts better than their meta information,instances should definitely be incorporated into the matching process.In this paper several novel instance-based matching algorithms arepresented which enhance the quality of matching results obtainedwith common concept-based methods. Different kinds of formalismsare use to classify concepts on account of their instances and finallyto compare the concepts directly.KeywordsInstances, Ontology Matching, Semantic Web

Keywords: Instances, Ontology Matching, Semantic Web

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Authors: Muhaned Zaidi, Ian Grout, Abu Khari bin A’ain

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In this paper, a two-stage op-amp design is considered using both Miller and negative Miller compensation techniques. The first op-amp design uses Miller compensation around the second amplification stage, whilst the second op-amp design uses negative Miller compensation around the first stage and Miller compensation around the second amplification stage. The aims of this work were to compare the gain and phase margins obtained using the different compensation techniques and identify the ability to choose either compensation technique based on a particular set of design requirements. The two op-amp designs created are based on the same two-stage rail-to-rail output CMOS op-amp architecture where the first stage of the op-amp consists of differential input and cascode circuits, and the second stage is a class AB amplifier. The op-amps have been designed using a 0.35mm CMOS fabrication process.

Keywords: Op-amp, rail-to-rail output, Miller compensation, negative Miller capacitance.

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Authors: Fatemeh Panjeh Ali Beik

Abstract:

In the present work, we propose a new projection method for solving the matrix equation AXB = F. For implementing our new method, generalized forms of block Krylov subspace and global Arnoldi process are presented. The new method can be considered as an extended form of the well-known global generalized minimum residual (Gl-GMRES) method for solving multiple linear systems and it will be called as the extended Gl-GMRES (EGl- GMRES). Some new theoretical results have been established for proposed method by employing Schur complement. Finally, some numerical results are given to illustrate the efficiency of our new method.

Keywords: Matrix equation, Iterative method, linear systems, block Krylov subspace method, global generalized minimum residual (Gl-GMRES).

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Authors: H. Rong, X. C. Yin, J. Yang, Y. N. Shen

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Based on Rayleigh beam theory, the sub-impacts of a free-free beam struck horizontally by a round-nosed rigid mass is simulated by the finite difference method and the impact-separation conditions. In order to obtain the sub-impact force, a uniaxial compression elastic-plastic contact model is employed to analyze the local deformation field on contact zone. It is found that the horizontal impact is a complicated process including the elastic plastic sub-impacts in sequence. There are two sub-zones of sub-impact. In addition, it found that the elastic energy of the free-free beam is more suitable for the Poisson collision hypothesis to explain compression and recovery processes.

Keywords: beam, sub-impact, elastic-plastic deformation, finite difference method.

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Authors: Anna Romanova, Mojtaba Mahmoodian, Morteza A. Alani

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Concrete sewer pipes are known to suffer from a process of hydrogen sulfide gas induced sulfuric acid corrosion. This leads to premature pipe degradation, performance failure and collapses which in turn may lead to property and health damage. The above work reports on a field study undertaken in working sewer manholes where the parameters of effluent temperature and pH as well as ambient temperature and concentration of hydrogen sulfide were continuously measured over a period of two months. Early results suggest that effluent pH has no direct effect on hydrogen sulfide build up; on average the effluent temperature is 3.5°C greater than the ambient temperature inside the manhole and also it was observed that hydrogen sulfate concentration increases with increasing temperature.

Keywords: Concrete corrosion, hydrogen sulphide gas, temperature, sewer pipe.

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Authors: Marcello Bettoni

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As a learning theory tries to borrow from science a framework to found its method, it shows paradoxes and paralysing contraddictions. This results, on one hand, from adopting a learning/teaching model as it were a mere “transfer of data" (mechanical learning approach), and on the other hand from borrowing the complexity theory (an indeterministic and non-linear model), that risks to vanish every educational effort. This work is aimed at describing existing criticism, unveiling the antinomic nature of such paradoxes, focussing on a view where neither the mechanical learning perspective nor the chaotic and nonlinear model can threaten and jeopardize the educational work. Author intends to go back over the steps that led to these paradoxes and to unveil their antinomic nature. Actually this could serve the purpose to explain some current misunderstandings about the real usefulness of Ict within the youth-s learning process and growth.

Keywords: Antinomy, complexity, Leibniz, paradox

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Authors: Arthur Yan

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Recent theorizations on the cognitive process of moral judgment have focused on the role of intuitions and emotions, marking a departure from previous emphasis on conscious, step-by-step reasoning. My study investigated how being in a disgusted mood state affects moral judgment. Participants were induced to enter a disgusted mood state through listening to disgusting sounds and reading disgusting descriptions. Results shows that they, when compared to control who have not been induced to feel disgust, are more likely to endorse actions that are emotionally aversive but maximizes utilitarian return The result is analyzed using the 'emotion-as-information' approach to decision making. The result is consistent with the view that emotions play an important role in determining moral judgment.

Keywords: Disgust, mood induction, moral judgment, emotion-as-information.

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Authors: C. Cruz, A. Breda

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Emotions are manifestations of everything that happens around us, influencing, consequently, our actions. People experience emotions continuously when socialize with friends, when facing complex situations, and when at school, among many other situations. Although the influence of emotions in the teaching and learning process is nothing new, its study in the academic field has been more popular in recent years, distinguishing between positive (e.g., enjoyment and curiosity) and negative emotions (e.g., boredom and frustration). There is no doubt that emotions play an important role in the students’ learning process since the development of knowledge involves thoughts, actions, and emotions. Nowadays, one of the most significant changes in acquiring knowledge, accessing information, and communicating is the way we do it through technological and digital resources. Faced with an increasingly frequent use of technological or digital means with different purposes, whether in the acquisition of knowledge or in communicating with others, the emotions involved in these processes change naturally. The speed with which the Internet provides information reduces the excitement for searching for the answer, the gratification of discovering something through our own effort, the patience, the capacity for effort, and resilience. Thus, technological and digital devices are bringing changes to the emotional domain. For this reason and others, it is essential to educate children from an early age to understand that it is not possible to have everything with just one click and to deal with negative emotions. Currently, many curriculum guidelines highlight the importance of the development of so-called soft skills, in which the emotional domain is present, in academic contexts. Within the scope of the Portuguese reality, the “Students’ profile by the end of compulsory schooling” and the “Health education reference” also emphasize the importance of emotions in education. There are several resources to stimulate good emotions in articulation with cognitive development. One of the most predictable and not very used resources in the most diverse areas of knowledge after pre-school education is the literature. Due to its characteristics, in the narrative or in the illustrations, literature provides the reader with a journey full of emotions. On the other hand, literature makes it possible to establish bridges between narrative and different areas of knowledge, reconciling the cognitive and emotional domains. This study results from the presentation session of a children's book, entitled “From the Outside to Inside and from the Inside to Outside”, to children attending the 2nd, 3rd, and 4th years of basic education in the Portuguese education system. In this book, rationale and emotion are in constant dialogue, so in this session, based on excerpts from the book dramatized by the authors, some questions were asked to the children in a large group, with an aim to explore their perception regarding certain emotions or events that trigger them. According to the aim of this study, qualitative, descriptive, and interpretative research was carried out based on participant observation and audio records.

Keywords: Emotions, children’s literature, basic education, soft skills.

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Authors: Abhijit Mitra

Abstract:

A special case of floating point data representation is block floating point format where a block of operands are forced to have a joint exponent term. This paper deals with the finite wordlength properties of this data format. The theoretical errors associated with the error model for block floating point quantization process is investigated with the help of error distribution functions. A fast and easy approximation formula for calculating signal-to-noise ratio in quantization to block floating point format is derived. This representation is found to be a useful compromise between fixed point and floating point format due to its acceptable numerical error properties over a wide dynamic range.

Keywords: Block floating point, Roundoff error, Block exponent dis-tribution fuction, Signal factor.

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Authors: Chaitanya Sharma, Vikas Upadhyay, A. Tripathi

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Friction stir welding and tungsten inert gas welding techniques were employed to weld armor grade aluminum alloy to investigate the effect of welding processes on tensile behavior of weld joints. Tensile tests, Vicker microhardness tests and optical microscopy were performed on developed weld joints and base metal. Welding process influenced tensile behavior and microstructure of weld joints. Friction stir welded joints showed tensile behavior better than tungsten inert gas weld joints.

Keywords: Friction stir welding, microstructure, tensile properties and fracture locations.

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Authors: Zuzana Crhová, Marie Paseková

Abstract:

This contribution aims to compare legislation adjusting the course of insolvency proceedings in France, Germany and Slovakia. On the basis of an investigation of the legislative adjustment of this problem, an attempt is made to ascertain in the given countries the extent to which the outcome of the entire proceedings is influenced by legislation and to determine the fundamental moments that influence costs, recovery rate and the duration of proceedings. A comparative analysis was utilized in order to achieve the set goal. The results of the survey could be used to improve legislation so as to lead in the best and most expedient way to a departure from the market of those subjects that are for economic reasons unable to continue with their activities whilst burdening the entire process with the lowest possible costs, which would lead to a high level of satisfaction for creditors. 

Keywords: Costs, Insolvency Proceeding, Recovery Rate, Time.

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Authors: Anuruddha Jayasuriya, Thanakorn Pheeraphan

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In this paper, a review of different mathematical models which can be used as prediction tools to assess the time to crack reinforced concrete (RC) due to corrosion is investigated. This investigation leads to an experimental study to validate a selected prediction model. Most of these mathematical models depend upon the mechanical behaviors, chemical behaviors, electrochemical behaviors or geometric aspects of the RC members during a corrosion process. The experimental program is designed to verify the accuracy of a well-selected mathematical model from a rigorous literature study. Fundamentally, the experimental program exemplifies both one-dimensional chloride diffusion using RC squared slab elements of 500 mm by 500 mm and two-dimensional chloride diffusion using RC squared column elements of 225 mm by 225 mm by 500 mm. Each set consists of three water-to-cement ratios (w/c); 0.4, 0.5, 0.6 and two cover depths; 25 mm and 50 mm. 12 mm bars are used for column elements and 16 mm bars are used for slab elements. All the samples are subjected to accelerated chloride corrosion in a chloride bath of 5% (w/w) sodium chloride (NaCl) solution. Based on a pre-screening of different models, it is clear that the well-selected mathematical model had included mechanical properties, chemical and electrochemical properties, nature of corrosion whether it is accelerated or natural, and the amount of porous area that rust products can accommodate before exerting expansive pressure on the surrounding concrete. The experimental results have shown that the selected model for both one-dimensional and two-dimensional chloride diffusion had ±20% and ±10% respective accuracies compared to the experimental output. The half-cell potential readings are also used to see the corrosion probability, and experimental results have shown that the mass loss is proportional to the negative half-cell potential readings that are obtained. Additionally, a statistical analysis is carried out in order to determine the most influential factor that affects the time to corrode the reinforcement in the concrete due to chloride diffusion. The factors considered for this analysis are w/c, bar diameter, and cover depth. The analysis is accomplished by using Minitab statistical software, and it showed that cover depth is the significant effect on the time to crack the concrete from chloride induced corrosion than other factors considered. Thus, the time predictions can be illustrated through the selected mathematical model as it covers a wide range of factors affecting the corrosion process, and it can be used to predetermine the durability concern of RC structures that are vulnerable to chloride exposure. And eventually, it is further concluded that cover thickness plays a vital role in durability in terms of chloride diffusion.

Keywords: Accelerated corrosion, chloride diffusion, corrosion cracks, passivation layer, reinforcement corrosion.

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Authors: Ghada Karaki

Abstract:

The bridge vibration due to traffic loading has been a subject of extensive research during the last decades. A number of these studies are concerned with the effects of the unevenness of roadways on the dynamic responses of highway bridges. The road unevenness is often described as a random process that constitutes of different wavelengths. Thus, the study focuses on examining the effects of the random description of roadways on the dynamic response and its variance. A new setting of variance based sensitivity analysis is proposed and used to identify and quantify the contributions of the roadway-s wavelengths to the variance of the dynamic response. Furthermore, the effect of the vehicle-s speed on the dynamic response is studied.

Keywords: vehicle bridge interaction, sensitivity analysis, road unevenness, random processes, critical speeds

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Authors: Nor'Aini Yusof, Ismael Younis Abu-Jarad

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This paper investigated the organizational innovativeness of public listed housing developers in Malaysia. We conceptualized organizational innovativeness as a multi-dimensional construct consisting of 5 dimensions: market innovativeness, product innovativeness, process innovativeness, behavior innovativeness and strategic innovativeness. We carried out questionnaire survey with all accessible public listed developers in Malaysia and received a 56 percent response. We found that the innovativeness of public listed housing developers is low. The study extends the knowledge on innovativeness theory by using a multi-dimensional contructs to conceptualize the innovativeness of public listed housing developers in Malaysia where all this while most studies focused on single dimensional construct of innovativeness. The paper ends by providing some explanations for the results.

Keywords: innovativeness, housing industry, measurement ofinnovativeness, public listed housing developers.

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Authors: Dirk Hegemann, Martin Amberg

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Sputter deposition processes, especially for sputtering from metal targets, are well investigated. For practical reasons, i.e. for industrial processes, energetic considerations for sputter deposition are useful in order to optimize the sputtering process. In particular, for substrates at floating conditions it is required to obtain energetic conditions during film growth that enables sufficient dense metal films of good quality. The influence of ion energies, energy density and momentum transfer is thus examined both for sputtering at the target as well as during film growth. Different regimes dominated by ion energy, energy density and momentum transfer were identified by using different plasma sources and by varying power input, pressure and bias voltage.

Keywords: Energy density, film growth, momentum transfer, sputtering.

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