Search results for: piezoelectric patches

Authors: Deepak Chhabra, Gian Bhushan, Pankaj Chandna

Abstract:

The present work deals with the optimal placement of piezoelectric actuators on a thin plate using Modified Control Matrix and Singular Value Decomposition (MCSVD) approach. The problem has been formulated using the finite element method using ten piezoelectric actuators on simply supported plate to suppress first six modes. The sizes of ten actuators are combined to outline one actuator by adding the ten columns of control matrix to form a column matrix. The singular value of column control matrix is considered as the fitness function and optimal positions of the actuators are obtained by maximizing it with GA. Vibration suppression has been studied for simply supported plate with piezoelectric patches in optimal positions using Linear Quadratic regulator) scheme. It is observed that MCSVD approach has given the position of patches adjacent to each-other, symmetric to the centre axis and given greater vibration suppression than other previously published results on SVD. 

Keywords: Closed loop Average dB gain, Genetic Algorithm (GA), LQR Controller, MCSVD, Optimal positions, Singular Value Decomposition (SVD) Approaches.

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Authors: Ruediger Schmidt, Thang Duy Vu

Abstract:

Two geometrically nonlinear plate theories, based either on first- or third-order transverse shear deformation theory are used for finite element modeling and simulation of the transient response of smart structures incorporating piezoelectric layers. In particular the time histories of nonlinear vibrations and sensor voltage output of a thin beam with a piezoelectric patch bonded to the surface due to an applied step force are studied.

Keywords: Nonlinear vibrations, piezoelectric patches, sensor voltage output, smart structures.

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Authors: C. Worakitjaroenphon, A. Oonsivilai

Abstract:

The study of piezoelectric material in the past was in T-Domain form; however, no one has studied piezoelectric material in the S-Domain form. This paper will present the piezoelectric material in the transfer function or S-Domain model. S-Domain is a well known mathematical model, used for analyzing the stability of the material and determining the stability limits. By using S-Domain in testing stability of piezoelectric material, it will provide a new tool for the scientific world to study this material in various forms.

Keywords: Piezoelectric, Stability, S-Domain, Transfer function

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Authors: Thomas Jin-Chee Liu, Yu-Shen Chen, Hsi-Yang Ho, Jyun-Ting Liu, Chih-Chun Lee

Abstract:

This paper discusses some notes on the vibration design for the piezoelectric cooling fan. After reviewing the fundamental formulas of the cantilever Euler beam, it is not easy to find the optimal design of the piezoelectric fan. The experiments also show the complicated results of the vibration behavior and air flow.

Keywords: Piezoelectric cooling fan, vibration, cantilever Euler beam, air flow.

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Authors: Thomas Jin-Chee Liu, Yu-Shen Chen

Abstract:

Using the numerical and experimental methods, this paper discusses some primary studies on the vibration and cooling performances of the piezoelectric cooling fan with the rectangular blade. When the fan works at its natural frequency, the vibrating displacement is largest and the cooling performance is best. Due to the vibration behavior, the cooling performance is affected by the geometry, material property, and working frequency of the piezoelectric cooling fan. 

Keywords: Piezoelectric cooling fan, finite element, vibration, natural frequency.

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Authors: M. Derayatifar, M. Packirisamy, R.B. Bhat

Abstract:

Role of piezoelectric energy harvesters has gained interest in supplying power for micro devices such as health monitoring sensors. In this study, in order to enhance the piezoelectric energy harvesting in capturing energy from broader range of excitation and to improve the mechanical and electrical responses, bimorph piezoelectric energy harvester beam with magnetic mass attached at the end is presented. In view of overcoming the brittleness of piezo-ceramics, functionally graded piezoelectric layers comprising of both piezo-ceramic and piezo-polymer is employed. The nonlinear equations of motions are derived using energy method and then solved analytically using perturbation scheme. The frequency responses of the forced vibration case are obtained for the near resonance case. The nonlinear dynamic responses of the MEMS scaled functionally graded piezoelectric energy harvester in this paper may be utilized in different design scenarios to increase the efficiency of the harvester.

Keywords: Energy harvesting, functionally graded piezoelectric material, magnetic force, MEMS piezoelectric, perturbation method.

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Authors: H. Ucar, U. Aridogan

Abstract:

Composite structures become intriguing for the design of aerospace, automotive and marine applications due to weight reduction, corrosion resistance and radar signature reduction demands and requirements. Studies on piezoelectric ceramic transducers (PZT) for diagnostics and health monitoring have gained attention for their sensing capabilities, however PZT structures are prone to fail in case of heavy operational loads. In this paper, we develop a piezo-based Glass Fiber Reinforced Polymer (GFRP) composite finite element (FE) model, validate with experimental setup, and identify the applicability and limitations of PZTs for a marine application. A case study is conducted to assess the piezo-based sensing capabilities in a representative marine composite structure. A FE model of the composite structure combined with PZT patches is developed, afterwards the response and functionality are investigated according to the sea conditions. Results of this study clearly indicate the blockers and critical aspects towards industrialization and wide-range use of PZTs for marine composite applications.

Keywords: FRP, marine composite, piezoelectric transducer, sea state, wave-induced loads.

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Authors: D. G. Piliposyan

Abstract:

Propagation of electro-elastic waves in a piezoelectric waveguide with finite stacks and a defect layer is studied using a modified transfer matrix method. The dispersion equation for a periodic structure consisting of unit cells made up from two piezoelectric materials with metallized interfaces is obtained. An analytical expression, for the transmission coefficient for a waveguide with finite stacks and a defect layer, that is found can be used to accurately detect and control the position of the passband within a stopband. The result can be instrumental in constructing a tunable waveguide made of layers of different or identical piezoelectric crystals and separated by metallized interfaces.

Keywords: Defect mode, Bloch waves, periodic phononic crystal, piezoelectric composite waveguide.

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Authors: J. H. Kim, J. H. Kwon, J. S. Park, K. J. Lim

Abstract:

This paper has been investigated a technique that predicts the performance of a bar-type unimorph piezoelectric vibration actuator depending on the frequency. This paper has been proposed an equivalent circuit that can be easily analyzed for the bar-type unimorph piezoelectric vibration actuator. In the dynamic analysis, rigidity and resonance frequency, which are important mechanical elements, were derived using the basic beam theory. In the equivalent circuit analysis, the displacement and bandwidth of the piezoelectric vibration actuator depending on the frequency were predicted. Also, for the reliability of the derived equations, the predicted performance depending on the shape change was compared with the result of a finite element analysis program.

Keywords: Actuator, performance, piezoelectric, unimorph.Actuator, performance, piezoelectric, unimorph.

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Authors: C. Panya-Isara, T. Kulworawanichpong, P. Pao-La-Or

Abstract:

Piezoelectric transformers are electronic devices made from piezoelectric materials. The piezoelectric transformers as the name implied are used for changing voltage signals from one level to another. Electrical energy carried with signals is transferred by means of mechanical vibration. Characterizing in both electrical and mechanical properties leads to extensively use and efficiency enhancement of piezoelectric transformers in various applications. In this paper, study and analysis of electrical and mechanical properties of multi-layer piezoelectric transformers in forms of potential and displacement distribution throughout the volume, respectively. This paper proposes a set of quasi-static mathematical model of electromechanical coupling for piezoelectric transformer by using a set of partial differential equations. Computer-based simulation utilizing the three-dimensional finite element method (3-D FEM) is exploited as a tool for visualizing potentials and displacements distribution within the multi-layer piezoelectric transformer. This simulation was conducted by varying a number of layers. In this paper 3, 5 and 7 of the circular ring type were used. The computer simulation based on the use of the FEM has been developed in MATLAB programming environment.

Keywords: Multi-layer Piezoelectric Transformer, 3-D Finite Element Method (3-D FEM), Electro-mechanical Coupling, Mechanical Vibration

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Authors: C. Kumjeera, T. Unchim, B. Marungsri, A. Oonsivilai

Abstract:

The study of piezoelectric material in the past was in T-Domain form; however, no one has studied piezoelectric material in the S-Domain form. This paper will present the piezoelectric material in the transfer function or S-Domain model. S-Domain is a well known mathematical model, used for analyzing the stability of the material and determining the stability limits. By using S-Domain in testing stability of piezoelectric material, it will provide a new tool for the scientific world to study this material in various forms.

Keywords: Hard disk drive, failure analysis, tool, time

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Authors: A. R. Nezamabadi, M. Karami Khorramabadi

Abstract:

This paper presents the elastic buckling of homogeneous beams with a pair of piezoelectric layers surface bonded on both sides of the beams. The displacement field of beam is assumed based on the Engesser-Timoshenko beam theory. Applying the Hamilton's principle, the equilibrium equation is established. The influences of applied voltage, dimensionless geometrical parameter and piezoelectric thickness on the critical buckling load of beam are presented. To investigate the accuracy of the present analysis, a compression study is carried out with a known data.

Keywords: Mechanical Buckling, Engesser-Timoshenko beam theory - Piezoelectric layer.

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Authors: Arian Bahrami, Mojtaba Tafaoli-Masoule, Mansour Nikkhah Bahrami

Abstract:

This paper demonstrates the potential of applying PD-like fuzzy logic controller for active vibration control of piezoelectric Stewart platforms. Through simulation, the control authority of the piezo stack actuators for effectively damping the Stewart platform vibration can be evaluated for further implementation of the system. Each leg of the piezoelectric Stewart platform consists of a linear piezo stack actuator, a collocated velocity sensor, a collocated displacement sensor and flexible tips for the connections with the two end plates. The piezoelectric stack is modeled as a bar element and the electro-mechanical coupling property is simulated using Matlab/Simulink software. Then, the open loop and closed loop dynamic responses are performed for the system to characterize the effect of the control on the vibration of the piezoelectric Stewart platform. A significant improvement in the damping of the structure can be observed by using the PD-like fuzzy controller.

Keywords: Active vibration control, Fuzzy controller, Piezoelectric stewart platform.

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Authors: A. R. Nezamabadi, M. Karami Khorramabadi

Abstract:

This paper studies dynamic stability of homogeneous beams with piezoelectric layers subjected to periodic axial compressive load that is simply supported at both ends lies on a continuous elastic foundation. The displacement field of beam is assumed based on Bernoulli-Euler beam theory. Applying the Hamilton's principle, the governing dynamic equation is established. The influences of applied voltage, foundation coefficient and piezoelectric thickness on the unstable regions are presented. To investigate the accuracy of the present analysis, a compression study is carried out with a known data.

Keywords: Dynamic stability, Homogeneous graded beam-Piezoelectric layer, Harmonic balance method.

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Authors: O. Miraliyari

Abstract:

This article attempts to analyze functionally graded beam thermal buckling along with piezoelectric layers applying based on the third order shearing deformation theory considering various boundary conditions. The beam properties are assumed to vary continuously from the lower surface to the upper surface of the beam. The equilibrium equations are derived using the total potential energy equations, Euler equations, piezoelectric material constitutive equations and third order shear deformation theory assumptions. In order to fulfill such an aim, at first functionally graded beam with piezoelectric layers applying the third order shearing deformation theory along with clamped -clamped boundary conditions are thoroughly analyzed, and then following making sure of the correctness of all the equations, the very same beam is analyzed with piezoelectric layers through simply-simply and simply-clamped boundary conditions. In this article buckling critical temperature for functionally graded beam is derived in two different ways, without piezoelectric layer and with piezoelectric layer and the results are compared together. Finally, all the conclusions obtained will be compared and contrasted with the same samples in the same and distinguished conditions through tables and charts. It would be noteworthy that in this article, the software MAPLE has been applied in order to do the numeral calculations.

Keywords: Thermal buckling, functionally graded beam, piezoelectric layer, various boundary conditions.

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Authors: José E. Q. Souza, Marcio Fontana, Antonio C. C. Lima

Abstract:

This paper presents analysis and characterization of a piezoelectric micro-generator for energy harvesting application. A low-cost experimental prototype was designed to operate as piezoelectric micro-generator in the laboratory. An input acceleration of 9.8m/s2 using a sine signal (peak-to-peak voltage: 1V, offset voltage: 0V) at frequencies ranging from 10Hz to 160Hz generated a maximum average power of 432.4μW (linear mass position = 25mm) and an average power of 543.3μW (angular mass position = 35°). These promising results show that the prototype can be considered for low consumption load application as an energy harvesting micro-generator.

Keywords: Piezoelectric, microgenerator, energy harvesting, cantilever beam.

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Authors: M. Karami Khorramabadi, A. R. Nezamabadi

Abstract:

Stability of functionally graded beams with piezoelectric layers subjected to axial compressive load that is simply supported at both ends is studied in this paper. The displacement field of beam is assumed based on first order shear deformation beam theory. Applying the Hamilton's principle, the governing equation is established. The influences of applied voltage, dimensionless geometrical parameter, functionally graded index and piezoelectric thickness on the critical buckling load of beam are presented. To investigate the accuracy of the present analysis, a compression study is carried out with a known data.

Keywords: Stability, Functionally graded beam, First order shear deformation theory, Piezoelectric layer.

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Authors: Bijay Kumar Sahoo, Ashok Kumar Srivastav

Abstract:

We have investigated the effect of piezoelectric (PZ) polarization property in binary as well as in ternary wurtzite nitrides. It is found that with the presence of PZ polarization property, the phonon group velocity is modified. The change in phonon group velocity due to PZ polarization effect directly depends on piezoelectric tensor value. Using different piezoelectric tensor values recommended by different workers in the literature, percent change in group velocities of phonons has been estimated. The Debye temperatures and frequencies of binary nitrides GaN, AlN and InN are also calculated using the modified group velocities. For ternary nitrides AlxGa(1-x)N, InxGa(1-x)N and InxAl(1-x)N, the phonon group velocities have been calculated as a functions of composition. A small positive bowing is observed in phonon group velocities of ternary alloys. Percent variations in phonon group velocities are also calculated for a straightforward comparison among ternary nitrides. The results are expected to show a change in phonon relaxation rates and thermal conductivity of III-nitrides when piezoelectric polarization property is taken into consideration.

Keywords: Wirtzite nitrides, piezoelectric polarization, Phonon group velocity, Debye frequency and Debye temperature.

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Authors: Chiang-Ho Cheng, Hong-Yih Cheng, An-Shik Yang, Tung-Hsun Hsu

Abstract:

This paper reports a novel actuating design that uses the shear deformation of a piezoelectric actuator to deflect a bulge-diaphragm for driving an array microdroplet ejector. In essence, we employed a circular-shaped actuator poled radial direction with remnant polarization normal to the actuating electric field for inducing the piezoelectric shear effect. The array microdroplet ejector consists of a shear type piezoelectric actuator, a vibration plate, two chamber plates, two channel plates and a nozzle plate. The vibration, chamber and nozzle plate components are fabricated using nickel electroforming technology, whereas the channel plate is fabricated by etching of stainless steel. The diaphragm displacement was measured by the laser two-dimensional scanning vibrometer. The ejected droplets of the microejector were also observed via an optic visualization system.

Keywords: Actuator, nozzle, microejector, piezoelectric.

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Authors: Chao Yi, Cunyue Lu, Lingwei Quan

Abstract:

Piezoelectric linear motors have the characteristics of great electromagnetic compatibility, high positioning accuracy, compact structure and no deceleration mechanism, which make it promising to applicate in micro-miniature precision drive systems. However, most piezoelectric motors are employed by flexible clamping, which has insufficient rigidity and is difficult to use in rapid positioning. Another problem is that this clamping method seriously affects the vibration efficiency of the vibrating unit. In order to solve these problems, this paper proposes a piezoelectric stack linear motor based on double-end rigid clamping. First, a piezoelectric linear motor with a length of only 35.5 mm is designed. This motor is mainly composed of a motor stator, a driving foot, a ceramic friction strip, a linear guide, a pre-tightening mechanism and a base. This structure is much simpler and smaller than most similar motors, and it is easy to assemble as well as to realize precise control. In addition, the properties of piezoelectric stack are reviewed and in order to obtain the elliptic motion trajectory of the driving head, a driving scheme of the longitudinal-shear composite stack is innovatively proposed. Finally, impedance analysis and speed performance testing were performed on the piezoelectric linear motor prototype. The motor can measure speed up to 25.5 mm/s under the excitation of signal voltage of 120 V and frequency of 390 Hz. The result shows that the proposed piezoelectric stacked linear motor obtains great performance. It can run smoothly in a large speed range, which is suitable for various precision control in medical images, aerospace, precision machinery and many other fields.

Keywords: Elliptical trajectory, linear motor, piezoelectric stack, rigid clamping.

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Authors: Yoji Yamato

Abstract:

In this paper, we propose an automatic verification technology of software patches for user virtual environments on IaaS Cloud to decrease verification costs of patches. In these days, IaaS services have been spread and many users can customize virtual machines on IaaS Cloud like their own private servers. Regarding to software patches of OS or middleware installed on virtual machines, users need to adopt and verify these patches by themselves. This task increases operation costs of users. Our proposed method replicates user virtual environments, extracts verification test cases for user virtual environments from test case DB, distributes patches to virtual machines on replicated environments and conducts those test cases automatically on replicated environments. We have implemented the proposed method on OpenStack using Jenkins and confirmed the feasibility. Using the implementation, we confirmed the effectiveness of test case creation efforts by our proposed idea of 2-tier abstraction of software functions and test cases. We also evaluated the automatic verification performance of environment replications, test cases extractions and test cases conductions.

Keywords: OpenStack, Cloud Computing, Automatic verification, Jenkins.

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Authors: J. H. Park, S. C. Jeong, J. H. Koo, H. Y. Jung, S. M. Lee

Abstract:

We propose an integral tracking control method for a piezoelectric actuator system. The proposed method achieves the output tracking without requiring any hysteresis observer or schemes to compensate the hysteresis effect. With the proposed control law, the system is converted into the standard singularly perturbed model. Using Tikhonov-s theorem, we guarantee that the tracking error can be reduced to arbitrarily small bound. A numerical example is given to illustrate the effectiveness of our proposed method.

Keywords: Piezoelectric actuator, tracking control, hysteresis effect.

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Authors: A. Pourkamali Anaraki, G. H. Payganeh, F. Ashena ghasemi, A. Fallah

Abstract:

Repairing of the cracks by fiber metal laminates (FMLs) was first done by some aeronautical laboratories in early 1970s. In this study, experimental investigations were done on the effect of repairing the center-cracked aluminum plates using the FML patches. The repairing processes were conducted to characterize the response of the repaired structures to tensile tests. The composite patches were made of one aluminum layer and two woven glassepoxy composite layers. Three different crack lengths in three crack angles and different patch lay-ups were examined. It was observed for the lengthen cracks, the effect of increasing the crack angle on ultimate tensile load in the structure was increase. It was indicated that the situation of metal layer in the FML patches had an important effect on the tensile response of the tested specimens. It was found when the aluminum layer is farther, the ultimate tensile load has the highest amount.

Keywords: Crack, Composite patch repair, Fiber metal laminate (FML), Patch Lay-up, Repair surface, Ultimate load

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Authors: I Made Darmayuda, Chai Tshun Chuan Kevin, Je Minkyu

Abstract:

Plenty researches have reported techniques to harvest energy from piezoelectric transducer. In the earlier years, the researches mainly report linear energy harvesting techniques whereby interface circuitry is designed to have input impedance that match with the impedance of the piezoelectric transducer. In recent years non-linear techniques become more popular. The non-linear technique employs voltage waveform manipulation to boost the available-for-extraction energy at the time of energy transfer.  The fact that non-linear energy extraction provides larger available-for-extraction energy doesn’t mean the linear energy extraction is completely obsolete. In some scenarios, such as where initial power is not available, linear energy extraction is still preferred. A modified Buck Boost circuit which is capable of harvesting piezoelectric energy using both linear and non-linear techniques is reported in this paper. Efficiency of at least 64% can be achieved using this circuit. For linear extraction, the modified Buck Boost circuit is controlled using a fix frequency and duty cycle clock. A voltage sensor and a pulse generator are added as the controller for the non-linear extraction technique. 

Keywords: Buck boost, energy harvester, linear energy harvester, non-linear energy harvester, piezoelectric, synchronized charge extraction.

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Authors: Say Wei Foo, Qi Dong

Abstract:

In this paper, a novel feature-based image watermarking scheme is proposed. Zernike moments which have invariance properties are adopted in the scheme. In the proposed scheme, feature points are first extracted from host image and several circular patches centered on these points are generated. The patches are used as carriers of watermark information because they can be regenerated to locate watermark embedding positions even when watermarked images are severely distorted. Zernike transform is then applied to the patches to calculate local Zernike moments. Dither modulation is adopted to quantize the magnitudes of the Zernike moments followed by false alarm analysis. Experimental results show that quality degradation of watermarked image is visually transparent. The proposed scheme is very robust against image processing operations and geometric attacks.

Keywords: Image watermarking, Zernike moments, Featurepoint, Invariance, Robustness.

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Authors: K. C. R. Perera, B. G. Sampath, V. P. C. Dassanayake, B. M. Hapuwatte.

Abstract:

This paper presents a methodology to harvest the kinetic energy of the raindrops using piezoelectric devices. In the study 1m×1m PVDF (Polyvinylidene fluoride) piezoelectric membrane, which is fixed by the four edges, is considered for the numerical simulation on deformation of the membrane due to the impact of the raindrops. Then according to the drop size of the rain, the simulation is performed classifying the rainfall types into three categories as light stratiform rain, moderate stratiform rain and heavy thundershower. The impact force of the raindrop is dependent on the terminal velocity of the raindrop, which is a function of raindrop diameter. The results were then analyzed to calculate the harvestable energy from the deformation of the piezoelectric membrane.

Keywords: Raindrop, piezoelectricity, deformation, terminal velocity.

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Authors: Sun-Ki Hong, Nam-HeeByeon, Jung-Seop Lee, Tae-Sam Kang

Abstract:

For Common R or R-L load to apply arbitrary voltage, the bridge traditional inverters don’t have any difficulties by PWM method. However for driving some piezoelectric actuator, arbitrary voltage not a pulse but a steady voltage should be applied. Piezoelectric load is considered as R-C load and its voltage does not decrease even though the applied voltage decreases. Therefore it needs some special inverter with circuit that can discharge the capacitive energy. Especially for unidirectional arbitrary voltage driving like as sine wave, it becomes more difficult problem. In this paper, a charge and discharge circuit for unidirectional arbitrary voltage driving for piezoelectric actuator is proposed. The circuit has charging and discharging switches for increasing and decreasing output voltage. With the proposed simple circuit, the load voltage can have any unidirectional level with tens of bandwidth because the load voltage can be adjusted by switching the charging and discharging switch appropriately. The appropriateness is proved from the simulation of the proposed circuit.

Keywords: DC-DC converter, analog output voltage, sinusoidal drive, piezoelectric load, discharging circuit.

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Authors: Sun-Ki Hong, Yong-Ho Cho, Ki-Seok Kim, Tae-Sam Kang

Abstract:

Piezoelectric actuator is treated as RC load when it is modeled electrically. For some piezoelectric actuator applications, arbitrary voltage is required to actuate. Especially for unidirectional arbitrary voltage driving like as sine wave, some special inverter with circuit that can charge and discharge the capacitive energy can be used. In this case, the difference between power supply level and the object voltage level for RC load is varied. Because the control gain is constant, the controlled output is not uniform according to the voltage difference. In this paper, for charge and discharge circuit for unidirectional arbitrary voltage driving for piezoelectric actuator, the controller gain is controlled according to the voltage difference. With the proposed simple idea, the load voltage can have controlled smoothly although the voltage difference is varied. The appropriateness is proved from the simulation of the proposed circuit.

Keywords: Analog voltage inverter, Capacitive load, Gain control, DC-DC converter, Piezoelectric, Voltage waveform.

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Authors: Chiang-Ho Cheng, An-Shik Yang, Hong-Yih Cheng

Abstract:

This paper applies the MEMS technology to design and fabricate a micro-bubble generator by a piezoelectric actuator. Coupled with a nickel nozzle plate, an annular piezoelectric ceramic was utilized as the primary structure of the generator. In operations, the piezoelectric element deforms transversely under an electric field applied across the thickness of the generator. The surface of the nozzle plate can expand or contract because of the induction of radial strain, resulting in the whole structure to bend, and successively transport oxygen micro-bubbles into the blood flow for enhancing the oxygen content in blood. In the tests, a high magnification microscope and a high speed CCD camera were employed to photograph the time evolution of meniscus shape of gaseous bubbles dispensed from the micro-bubble generator for flow visualization. This investigation thus explored the bubble formation process including the influences of inlet gas pressure along with driving voltage and resonance frequency on the formed bubble extent.

Keywords: Micro-bubble, nozzle, oxygenator, piezoelectric.

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Authors: Chiang-Ho Cheng, An-Shik Yang, Hong-Yih Cheng, Ming-Yu Lai

Abstract:

This paper presents the design and fabrication of a novel piezoelectric actuator for a gas micro pump with check valve having the advantages of miniature size, light weight and low power consumption. The micro pump is designed to have eight major components, namely a stainless steel upper cover layer, a piezoelectric actuator, a stainless steel diaphragm, a PDMS chamber layer, two stainless steel channel layers with two valve seats, a PDMS check valve layer with two cantilever-type check valves and an acrylic substrate. A prototype of the gas micro pump, with a size of 52 mm × 50 mm × 5.0 mm, is fabricated by precise manufacturing. This device is designed to pump gases with the capability of performing the self-priming and bubble-tolerant work mode by maximizing the stroke volume of the membrane as well as the compression ratio via minimization of the dead volume of the micro pump chamber and channel. By experiment apparatus setup, we can get the real-time values of the flow rate of micro pump and the displacement of the piezoelectric actuator, simultaneously. The gas micro pump obtained higher output performance under the sinusoidal waveform of 250 Vpp. The micro pump achieved the maximum pumping rates of 1185 ml/min and back pressure of 7.14 kPa at the corresponding frequency of 120 and 50 Hz.

Keywords: PDMS, Check valve, Micro pump, Piezoelectric.

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