Search results for: piezoelectric material

Authors: C. Worakitjaroenphon, A. Oonsivilai

Abstract:

The study of piezoelectric material in the past was in T-Domain form; however, no one has studied piezoelectric material in the S-Domain form. This paper will present the piezoelectric material in the transfer function or S-Domain model. S-Domain is a well known mathematical model, used for analyzing the stability of the material and determining the stability limits. By using S-Domain in testing stability of piezoelectric material, it will provide a new tool for the scientific world to study this material in various forms.

Keywords: Piezoelectric, Stability, S-Domain, Transfer function

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Authors: C. Kumjeera, T. Unchim, B. Marungsri, A. Oonsivilai

Abstract:

The study of piezoelectric material in the past was in T-Domain form; however, no one has studied piezoelectric material in the S-Domain form. This paper will present the piezoelectric material in the transfer function or S-Domain model. S-Domain is a well known mathematical model, used for analyzing the stability of the material and determining the stability limits. By using S-Domain in testing stability of piezoelectric material, it will provide a new tool for the scientific world to study this material in various forms.

Keywords: Hard disk drive, failure analysis, tool, time

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Authors: Thomas Jin-Chee Liu, Yu-Shen Chen

Abstract:

Using the numerical and experimental methods, this paper discusses some primary studies on the vibration and cooling performances of the piezoelectric cooling fan with the rectangular blade. When the fan works at its natural frequency, the vibrating displacement is largest and the cooling performance is best. Due to the vibration behavior, the cooling performance is affected by the geometry, material property, and working frequency of the piezoelectric cooling fan. 

Keywords: Piezoelectric cooling fan, finite element, vibration, natural frequency.

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Authors: M. Derayatifar, M. Packirisamy, R.B. Bhat

Abstract:

Role of piezoelectric energy harvesters has gained interest in supplying power for micro devices such as health monitoring sensors. In this study, in order to enhance the piezoelectric energy harvesting in capturing energy from broader range of excitation and to improve the mechanical and electrical responses, bimorph piezoelectric energy harvester beam with magnetic mass attached at the end is presented. In view of overcoming the brittleness of piezo-ceramics, functionally graded piezoelectric layers comprising of both piezo-ceramic and piezo-polymer is employed. The nonlinear equations of motions are derived using energy method and then solved analytically using perturbation scheme. The frequency responses of the forced vibration case are obtained for the near resonance case. The nonlinear dynamic responses of the MEMS scaled functionally graded piezoelectric energy harvester in this paper may be utilized in different design scenarios to increase the efficiency of the harvester.

Keywords: Energy harvesting, functionally graded piezoelectric material, magnetic force, MEMS piezoelectric, perturbation method.

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Authors: F.Ebrahimi, A.Rastgo

Abstract:

Analytical investigation of the free vibration behavior of circular functionally graded (FG) plates integrated with two uniformly distributed actuator layers made of piezoelectric (PZT4) material on the top and bottom surfaces of the circular FG plate based on the classical plate theory (CPT) is presented in this paper. The material properties of the functionally graded substrate plate are assumed to be graded in the thickness direction according to the power-law distribution in terms of the volume fractions of the constituents and the distribution of electric potential field along the thickness direction of piezoelectric layers is simulated by a quadratic function. The differential equations of motion are solved analytically for clamped edge boundary condition of the plate. The detailed mathematical derivations are presented and Numerical investigations are performed for FG plates with two surface-bonded piezoelectric layers. Emphasis is placed on investigating the effect of varying the gradient index of FG plate on the free vibration characteristics of the structure. The results are verified by those obtained from threedimensional finite element analyses.

Keywords: Circular plate, CPT, Functionally graded, Piezoelectric.

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Authors: O. Miraliyari

Abstract:

This article attempts to analyze functionally graded beam thermal buckling along with piezoelectric layers applying based on the third order shearing deformation theory considering various boundary conditions. The beam properties are assumed to vary continuously from the lower surface to the upper surface of the beam. The equilibrium equations are derived using the total potential energy equations, Euler equations, piezoelectric material constitutive equations and third order shear deformation theory assumptions. In order to fulfill such an aim, at first functionally graded beam with piezoelectric layers applying the third order shearing deformation theory along with clamped -clamped boundary conditions are thoroughly analyzed, and then following making sure of the correctness of all the equations, the very same beam is analyzed with piezoelectric layers through simply-simply and simply-clamped boundary conditions. In this article buckling critical temperature for functionally graded beam is derived in two different ways, without piezoelectric layer and with piezoelectric layer and the results are compared together. Finally, all the conclusions obtained will be compared and contrasted with the same samples in the same and distinguished conditions through tables and charts. It would be noteworthy that in this article, the software MAPLE has been applied in order to do the numeral calculations.

Keywords: Thermal buckling, functionally graded beam, piezoelectric layer, various boundary conditions.

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Authors: Thomas Jin-Chee Liu, Yu-Shen Chen, Hsi-Yang Ho, Jyun-Ting Liu, Chih-Chun Lee

Abstract:

This paper discusses some notes on the vibration design for the piezoelectric cooling fan. After reviewing the fundamental formulas of the cantilever Euler beam, it is not easy to find the optimal design of the piezoelectric fan. The experiments also show the complicated results of the vibration behavior and air flow.

Keywords: Piezoelectric cooling fan, vibration, cantilever Euler beam, air flow.

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Authors: D. G. Piliposyan

Abstract:

Propagation of electro-elastic waves in a piezoelectric waveguide with finite stacks and a defect layer is studied using a modified transfer matrix method. The dispersion equation for a periodic structure consisting of unit cells made up from two piezoelectric materials with metallized interfaces is obtained. An analytical expression, for the transmission coefficient for a waveguide with finite stacks and a defect layer, that is found can be used to accurately detect and control the position of the passband within a stopband. The result can be instrumental in constructing a tunable waveguide made of layers of different or identical piezoelectric crystals and separated by metallized interfaces.

Keywords: Defect mode, Bloch waves, periodic phononic crystal, piezoelectric composite waveguide.

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Authors: Nidhal Jamia, Sami El-Borgi

Abstract:

In this paper, the problem of a mixed-Mode crack embedded in an infinite medium made of a functionally graded piezoelectric material (FGPM) with crack surfaces subjected to electro-mechanical loadings is investigated. Eringen’s non-local theory of elasticity is adopted to formulate the governing electro-elastic equations. The properties of the piezoelectric material are assumed to vary exponentially along a perpendicular plane to the crack. Using Fourier transform, three integral equations are obtained in which the unknown variables are the jumps of mechanical displacements and electric potentials across the crack surfaces. To solve the integral equations, the unknowns are directly expanded as a series of Jacobi polynomials, and the resulting equations solved using the Schmidt method. In contrast to the classical solutions based on the local theory, it is found that no mechanical stress and electric displacement singularities are present at the crack tips when nonlocal theory is employed to investigate the problem. A direct benefit is the ability to use the calculated maximum stress as a fracture criterion. The primary objective of this study is to investigate the effects of crack length, material gradient parameter describing FGPMs, and lattice parameter on the mechanical stress and electric displacement field near crack tips.

Keywords: Functionally graded piezoelectric material, mixed-mode crack, non-local theory, Schmidt method.

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Authors: J. H. Kim, J. H. Kwon, J. S. Park, K. J. Lim

Abstract:

This paper has been investigated a technique that predicts the performance of a bar-type unimorph piezoelectric vibration actuator depending on the frequency. This paper has been proposed an equivalent circuit that can be easily analyzed for the bar-type unimorph piezoelectric vibration actuator. In the dynamic analysis, rigidity and resonance frequency, which are important mechanical elements, were derived using the basic beam theory. In the equivalent circuit analysis, the displacement and bandwidth of the piezoelectric vibration actuator depending on the frequency were predicted. Also, for the reliability of the derived equations, the predicted performance depending on the shape change was compared with the result of a finite element analysis program.

Keywords: Actuator, performance, piezoelectric, unimorph.Actuator, performance, piezoelectric, unimorph.

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Authors: C. Panya-Isara, T. Kulworawanichpong, P. Pao-La-Or

Abstract:

Piezoelectric transformers are electronic devices made from piezoelectric materials. The piezoelectric transformers as the name implied are used for changing voltage signals from one level to another. Electrical energy carried with signals is transferred by means of mechanical vibration. Characterizing in both electrical and mechanical properties leads to extensively use and efficiency enhancement of piezoelectric transformers in various applications. In this paper, study and analysis of electrical and mechanical properties of multi-layer piezoelectric transformers in forms of potential and displacement distribution throughout the volume, respectively. This paper proposes a set of quasi-static mathematical model of electromechanical coupling for piezoelectric transformer by using a set of partial differential equations. Computer-based simulation utilizing the three-dimensional finite element method (3-D FEM) is exploited as a tool for visualizing potentials and displacements distribution within the multi-layer piezoelectric transformer. This simulation was conducted by varying a number of layers. In this paper 3, 5 and 7 of the circular ring type were used. The computer simulation based on the use of the FEM has been developed in MATLAB programming environment.

Keywords: Multi-layer Piezoelectric Transformer, 3-D Finite Element Method (3-D FEM), Electro-mechanical Coupling, Mechanical Vibration

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Authors: Shun-Qi Zhang, Shu-Yang Zhang, Min Chen

Abstract:

Applying strong electric field on piezoelectric actuators, on one hand very significant electroelastic material nonlinear effects will occur, on the other hand piezo plates and shells may undergo large displacements and rotations. In order to give a precise prediction of piezolaminated smart structures under large electric field, this paper develops a finite element (FE) model accounting for both electroelastic material nonlinearity and geometric nonlinearity with large rotations based on the first order shear deformation (FSOD) hypothesis. The proposed FE model is applied to analyze a piezolaminated semicircular shell structure.

Keywords: Smart structures, piezolamintes, material nonlinearity, geometric nonlinearity, strong electric field.

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Authors: A. R. Nezamabadi, M. Karami Khorramabadi

Abstract:

This paper presents the elastic buckling of homogeneous beams with a pair of piezoelectric layers surface bonded on both sides of the beams. The displacement field of beam is assumed based on the Engesser-Timoshenko beam theory. Applying the Hamilton's principle, the equilibrium equation is established. The influences of applied voltage, dimensionless geometrical parameter and piezoelectric thickness on the critical buckling load of beam are presented. To investigate the accuracy of the present analysis, a compression study is carried out with a known data.

Keywords: Mechanical Buckling, Engesser-Timoshenko beam theory - Piezoelectric layer.

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Authors: Amir Atrian, Javad Jafari Fesharaki, Gh. Hossein Majzoobi, Mahsa Sheidaee

Abstract:

The analytical solution of functionally graded piezoelectric hollow cylinder which is under radial electric potential and non-axisymmetric thermo-mechanical loads, are presented in this paper. Using complex Fourier series and estimation of power law for variations of material characterizations through the thickness, the electro thermo mechanical behavior of the FGPM cylinder is obtained. The stress and displacement distributions and the effect of electric potential field on the cylinder behavior are also presented and some applicable results are offered at the end of the paper.

Keywords: Analytical, FGM, Fourier series, Non-axisymmetric, Piezoelectric, Thermo-elasticity

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Authors: Arian Bahrami, Mojtaba Tafaoli-Masoule, Mansour Nikkhah Bahrami

Abstract:

This paper demonstrates the potential of applying PD-like fuzzy logic controller for active vibration control of piezoelectric Stewart platforms. Through simulation, the control authority of the piezo stack actuators for effectively damping the Stewart platform vibration can be evaluated for further implementation of the system. Each leg of the piezoelectric Stewart platform consists of a linear piezo stack actuator, a collocated velocity sensor, a collocated displacement sensor and flexible tips for the connections with the two end plates. The piezoelectric stack is modeled as a bar element and the electro-mechanical coupling property is simulated using Matlab/Simulink software. Then, the open loop and closed loop dynamic responses are performed for the system to characterize the effect of the control on the vibration of the piezoelectric Stewart platform. A significant improvement in the damping of the structure can be observed by using the PD-like fuzzy controller.

Keywords: Active vibration control, Fuzzy controller, Piezoelectric stewart platform.

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Authors: Umar Alhaji Mukhtar, Abubakar Mohammed El-jummah

Abstract:

This research involved the utilization of fluid flow energy to predict power output using Lead Zirconate Titanate (PZT) piezoelectric stacks. The aim of this work is to extract energy from a controlled level of pressure fluctuation in single-phase flow which forms a part of the energy harvesting technology that powers flow meters. A device- Perspex box was developed and fixed to 50.8 mm rig to induce pressure fluctuation in the flow. An experimental test was carried out using the single-phase water flow in the developed rig in order to measure the power output generation from the piezoelectric stacks. 16 sets of experimental tests were conducted to ensure the maximum output result. The acquired signal of the pressure fluctuation was used to simulate the expected electrical output from the piezoelectric material. The results showed a maximum output voltage of 12 V with an instantaneous output power of 1 µW generated, when the pressure amplitude is 2.6 kPa at a frequency of 2.4 Hz.

Keywords: Energy harvesting, experimental test, perspex rig, pressure fluctuation.

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Authors: A. R. Nezamabadi, M. Karami Khorramabadi

Abstract:

This paper studies dynamic stability of homogeneous beams with piezoelectric layers subjected to periodic axial compressive load that is simply supported at both ends lies on a continuous elastic foundation. The displacement field of beam is assumed based on Bernoulli-Euler beam theory. Applying the Hamilton's principle, the governing dynamic equation is established. The influences of applied voltage, foundation coefficient and piezoelectric thickness on the unstable regions are presented. To investigate the accuracy of the present analysis, a compression study is carried out with a known data.

Keywords: Dynamic stability, Homogeneous graded beam-Piezoelectric layer, Harmonic balance method.

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Authors: Kuen-Ming Shu, Cheng-Yu Chen

Abstract:

A vibrating-fork sensor can measure the level height of solids and liquids and operates according to the principle that vibrations created by piezoelectric ceramics are transmitted to the vibrating fork, which produces resonance. When the vibrating fork touches an object, its resonance frequency changes and produces a signal that returns to a controller for immediate adjustment, so as to effectively monitor raw material loading. The design of the vibrating fork in a vibrating-fork material sensor is crucial. In this paper, ANSYS finite element analysis software is used to perform modal analysis on the vibrations of the vibrating fork. In addition, to design and produce a superior vibrating fork, the dimensions and welding shape of the vibrating fork are compared in a simulation performed using the Taguchi method.

Keywords: Vibrating fork, piezoelectric ceramics, sound wave, ANSYS, Taguchi method, modal analysis.

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Authors: José E. Q. Souza, Marcio Fontana, Antonio C. C. Lima

Abstract:

This paper presents analysis and characterization of a piezoelectric micro-generator for energy harvesting application. A low-cost experimental prototype was designed to operate as piezoelectric micro-generator in the laboratory. An input acceleration of 9.8m/s2 using a sine signal (peak-to-peak voltage: 1V, offset voltage: 0V) at frequencies ranging from 10Hz to 160Hz generated a maximum average power of 432.4μW (linear mass position = 25mm) and an average power of 543.3μW (angular mass position = 35°). These promising results show that the prototype can be considered for low consumption load application as an energy harvesting micro-generator.

Keywords: Piezoelectric, microgenerator, energy harvesting, cantilever beam.

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Authors: M. Karami Khorramabadi, A. R. Nezamabadi

Abstract:

Stability of functionally graded beams with piezoelectric layers subjected to axial compressive load that is simply supported at both ends is studied in this paper. The displacement field of beam is assumed based on first order shear deformation beam theory. Applying the Hamilton's principle, the governing equation is established. The influences of applied voltage, dimensionless geometrical parameter, functionally graded index and piezoelectric thickness on the critical buckling load of beam are presented. To investigate the accuracy of the present analysis, a compression study is carried out with a known data.

Keywords: Stability, Functionally graded beam, First order shear deformation theory, Piezoelectric layer.

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Authors: Bijay Kumar Sahoo, Ashok Kumar Srivastav

Abstract:

We have investigated the effect of piezoelectric (PZ) polarization property in binary as well as in ternary wurtzite nitrides. It is found that with the presence of PZ polarization property, the phonon group velocity is modified. The change in phonon group velocity due to PZ polarization effect directly depends on piezoelectric tensor value. Using different piezoelectric tensor values recommended by different workers in the literature, percent change in group velocities of phonons has been estimated. The Debye temperatures and frequencies of binary nitrides GaN, AlN and InN are also calculated using the modified group velocities. For ternary nitrides AlxGa(1-x)N, InxGa(1-x)N and InxAl(1-x)N, the phonon group velocities have been calculated as a functions of composition. A small positive bowing is observed in phonon group velocities of ternary alloys. Percent variations in phonon group velocities are also calculated for a straightforward comparison among ternary nitrides. The results are expected to show a change in phonon relaxation rates and thermal conductivity of III-nitrides when piezoelectric polarization property is taken into consideration.

Keywords: Wirtzite nitrides, piezoelectric polarization, Phonon group velocity, Debye frequency and Debye temperature.

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Authors: Chiang-Ho Cheng, Hong-Yih Cheng, An-Shik Yang, Tung-Hsun Hsu

Abstract:

This paper reports a novel actuating design that uses the shear deformation of a piezoelectric actuator to deflect a bulge-diaphragm for driving an array microdroplet ejector. In essence, we employed a circular-shaped actuator poled radial direction with remnant polarization normal to the actuating electric field for inducing the piezoelectric shear effect. The array microdroplet ejector consists of a shear type piezoelectric actuator, a vibration plate, two chamber plates, two channel plates and a nozzle plate. The vibration, chamber and nozzle plate components are fabricated using nickel electroforming technology, whereas the channel plate is fabricated by etching of stainless steel. The diaphragm displacement was measured by the laser two-dimensional scanning vibrometer. The ejected droplets of the microejector were also observed via an optic visualization system.

Keywords: Actuator, nozzle, microejector, piezoelectric.

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Authors: Chao Yi, Cunyue Lu, Lingwei Quan

Abstract:

Piezoelectric linear motors have the characteristics of great electromagnetic compatibility, high positioning accuracy, compact structure and no deceleration mechanism, which make it promising to applicate in micro-miniature precision drive systems. However, most piezoelectric motors are employed by flexible clamping, which has insufficient rigidity and is difficult to use in rapid positioning. Another problem is that this clamping method seriously affects the vibration efficiency of the vibrating unit. In order to solve these problems, this paper proposes a piezoelectric stack linear motor based on double-end rigid clamping. First, a piezoelectric linear motor with a length of only 35.5 mm is designed. This motor is mainly composed of a motor stator, a driving foot, a ceramic friction strip, a linear guide, a pre-tightening mechanism and a base. This structure is much simpler and smaller than most similar motors, and it is easy to assemble as well as to realize precise control. In addition, the properties of piezoelectric stack are reviewed and in order to obtain the elliptic motion trajectory of the driving head, a driving scheme of the longitudinal-shear composite stack is innovatively proposed. Finally, impedance analysis and speed performance testing were performed on the piezoelectric linear motor prototype. The motor can measure speed up to 25.5 mm/s under the excitation of signal voltage of 120 V and frequency of 390 Hz. The result shows that the proposed piezoelectric stacked linear motor obtains great performance. It can run smoothly in a large speed range, which is suitable for various precision control in medical images, aerospace, precision machinery and many other fields.

Keywords: Elliptical trajectory, linear motor, piezoelectric stack, rigid clamping.

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Authors: A. Zemirline, M. Ouali, A. Mahieddine

Abstract:

The FOSDT (the First Order Shear Deformation Theory) is taking into consideration to study the static behavior of a bimorph beam, with a delamination zone between the upper and the lower layer. The effect of limit conditions and lengths of the delamination zone are presented in this paper, with a PVDF piezoelectric material application. A FEM “Finite Element Method” is used to discretize the beam. In the axial displacement, a displacement field appears in the debonded zone with inverse effect between the upper and the lower layer was observed.

Keywords: Beam, Delamination, Piezoelectricity, Static.

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Authors: Irene Perez-Alfaro, Nieves Murillo, Carlos Bernal, Daniel Gil-Hernandez

Abstract:

Nowadays, the increasing applicability of internet of things (IoT) systems has changed the way that the world around is perceived. The massive interconnection of systems by means of sensing, processing and communication, allows multitude of data to be at our fingertips. In this way, countless advances have been made in different fields such as personal care, predictive maintenance in industry, quality control in production processes, security, and in everything imaginable. However, all these electronic systems have in common the need to be electrically powered. In this context, batteries and wires are the most commonly used solutions, but they are not a definitive solution in some applications, because of the attainability, the serviceability, or the performance requirements. Therefore, the need arises to look for other types of solutions based on energy harvesting and long-life electronics. Energy Harvesting can be defined as the action of capturing energy from the environment and store it for an instantaneous use or later use. Among the materials capable of harvesting energy from the environment, such as thermoelectrics, electromagnetics, photovoltaics or triboelectrics, the most suitable is the piezoelectric material. The phenomenon of piezoelectricity is one of the most powerful sources for energy harvesting, ranging from a few micro wats to hundreds of wats, depending on certain factors such as material type, geometry, excitation frequency, mechanical and electrical configurations, among others. In this research work, an exhaustive study is carried out on how different types of piezoelectric materials and electrical configurations influence the maximum power that a bimorph harvester is able to extract from mechanical vibrations. A series of experiments has been carried out in which the manufactured bimorph specimens are excited under fixed inertial vibrational conditions. In addition, in order to evaluate the dependence of the maximum transferred power, different load resistors are tested. In this way, the pure active power that achieves the maximum power transfer can be approximated. In this paper, we present the design of low-cost energy harvesting solutions based on piezoelectric smart materials with tunable frequency. The results obtained show the differences in energy extraction between the PZT materials studied and their electrical configurations. The aim of this work is to gain a better understanding of the behavior of piezoelectric materials, and the design process of bimorph PZT harvesters to optimize environmental energy extraction.

Keywords: Bimorph harvesters, electrical impedance, energy harvesting, piezoelectric, smart material.

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Authors: Anna Girchenko, Victor A. Eremeyev, Holm Altenbach

Abstract:

In the present work we investigate both the elastic and electric properties of a chiral material. We consider a composite structure made from a polymer matrix and anisotropic inclusions of GaAs taking into account piezoelectric and dielectric properties of the composite material. The principal task of the work is the estimation of the functional properties of the composite material.

Keywords: Coupled electromechanical behavior, Composite structure, Chiral metamaterial.

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Authors: J. H. Park, S. C. Jeong, J. H. Koo, H. Y. Jung, S. M. Lee

Abstract:

We propose an integral tracking control method for a piezoelectric actuator system. The proposed method achieves the output tracking without requiring any hysteresis observer or schemes to compensate the hysteresis effect. With the proposed control law, the system is converted into the standard singularly perturbed model. Using Tikhonov-s theorem, we guarantee that the tracking error can be reduced to arbitrarily small bound. A numerical example is given to illustrate the effectiveness of our proposed method.

Keywords: Piezoelectric actuator, tracking control, hysteresis effect.

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Authors: Ruediger Schmidt, Thang Duy Vu

Abstract:

Two geometrically nonlinear plate theories, based either on first- or third-order transverse shear deformation theory are used for finite element modeling and simulation of the transient response of smart structures incorporating piezoelectric layers. In particular the time histories of nonlinear vibrations and sensor voltage output of a thin beam with a piezoelectric patch bonded to the surface due to an applied step force are studied.

Keywords: Nonlinear vibrations, piezoelectric patches, sensor voltage output, smart structures.

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Authors: I Made Darmayuda, Chai Tshun Chuan Kevin, Je Minkyu

Abstract:

Plenty researches have reported techniques to harvest energy from piezoelectric transducer. In the earlier years, the researches mainly report linear energy harvesting techniques whereby interface circuitry is designed to have input impedance that match with the impedance of the piezoelectric transducer. In recent years non-linear techniques become more popular. The non-linear technique employs voltage waveform manipulation to boost the available-for-extraction energy at the time of energy transfer.  The fact that non-linear energy extraction provides larger available-for-extraction energy doesn’t mean the linear energy extraction is completely obsolete. In some scenarios, such as where initial power is not available, linear energy extraction is still preferred. A modified Buck Boost circuit which is capable of harvesting piezoelectric energy using both linear and non-linear techniques is reported in this paper. Efficiency of at least 64% can be achieved using this circuit. For linear extraction, the modified Buck Boost circuit is controlled using a fix frequency and duty cycle clock. A voltage sensor and a pulse generator are added as the controller for the non-linear extraction technique. 

Keywords: Buck boost, energy harvester, linear energy harvester, non-linear energy harvester, piezoelectric, synchronized charge extraction.

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Authors: Hailu Dessalegn, T. Srinivas

Abstract:

We propose new multiple-channel piezoelectric (PZT) actuated tunable optical filter based on racetrack multi-ring resonators for wavelength de-multiplexing network applications. We design tunable eight-channel wavelength de-multiplexer consisting of eight cascaded PZT actuated tunable multi-ring resonator filter with a channel spacing of 1.6nm. The filter for each channel is basically structured on a suspended beam, sandwiched with piezoelectric material and built in integrated ring resonators which are placed on the middle of the beam to gain uniform stress and linearly varying longitudinal strain. A reference single mode serially coupled multi stage racetrack ring resonator with the same radii and coupling length is designed with a line width of 0.8974nm with a flat top pass band at 1dB of 0.5205nm and free spectral range of about 14.9nm. In each channel, a small change in the perimeter of the rings is introduced to establish the shift in resonance wavelength as per the defined channel spacing. As a result, when a DC voltage is applied, the beams will elongate, which involves mechanical deformation of the ring resonators that induces a stress and a strain, which brings a change in refractive index and perimeter of the rings leading to change in the output spectrum shift providing the tunability of central wavelength in each channel. Simultaneous wave length shift as high as 45.54pm/

Keywords: Optical MEMS, piezoelectric (PZT) actuation, tunable optical filter, wavelength de-multiplexer.

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