Search results for: Yung Ming Li

Authors: Justie Su-Tzu Juan, Ming-Jheng Li, Ching-Fen Lee, Ruei-Yu Wu

Abstract:

A secret image sharing scheme is a way to protect images. The main idea is dispersing the secret image into numerous shadow images. A secret image sharing scheme can withstand the impersonal attack and achieve the highly practical property of multiuse  is more practical. Therefore, this paper proposes a verifiable and detectable secret image-sharing scheme called VDGMSISS to solve the impersonal attack and to achieve some properties such as encrypting multi-secret images at one time and multi-use. Moreover, our scheme can also be used for any genera access structure.

Keywords: Multi-secret images sharing scheme, verifiable, detectable, general access structure.

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Authors: Ming Cong, Yinghua Wu, Dong Liu, Haiying Wen, Junfa Yu

Abstract:

In order to improve control performance and eliminate steady, a coupling compensation for 6-DOF parallel robot is presented. Taking dynamic load Tank Simulator as the research object, this paper analyzes the coupling of 6-DOC parallel robot considering the degree of freedom of the 6-DOF parallel manipulator. The coupling angle and coupling velocity are derived based on inverse kinematics model. It uses the mechanism-model combined method which takes practical moving track that considering the performance of motion controller and motor as its input to make the study. Experimental results show that the coupling compensation improves motion stability as well as accuracy. Besides, it decreases the dither amplitude of dynamic load Tank Simulator.

Keywords: coupling compensation, screw theory, parallel robot, mechanism-model combined motion

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Authors: Zhang Yu

Abstract:

Shanxi Province is a province with a long history in China. The historical characteristics of Jinzhong Prefecture in Shaanxi Province are very prominent. This research has done a lot of field research and analysis, and has analyzed a large number of documents. The formation and characteristics of villages in Jinzhong Prefecture are summarized. But the remains of many areas have not been systematically discovered and analyzed. This study found that the reasons for the formation of villages are natural, cultural, traffic and economic reasons. It mainly includes water, mountain, and developed business culture during the Ming and Qing Dynasties. By analyzing the evolution characteristics of each period, the characteristics and remains of the existing villages are explained in detail. These types of relics mainly include courtyards, fortresses, and Exchange shops. This study can provide systematic guidance on the protection of future village remains.

Keywords: Jinzhong Prefecture, village, features, remains.

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Authors: Jheng-Long Wu, Pei-Chann Chang, Hsuan-Ming Chen

Abstract:

This research focus on the intrusion detection system (IDS) development which using artificial immune system (AIS) with population based incremental learning (PBIL). AIS have powerful distinguished capability to extirpate antigen when the antigen intrude into human body. The PBIL is based on past learning experience to adjust new learning. Therefore we propose an intrusion detection system call PBIL-AIS which combine two approaches of PBIL and AIS to evolution computing. In AIS part we design three mechanisms such as clonal selection, negative selection and antibody level to intensify AIS performance. In experimental result, our PBIL-AIS IDS can capture high accuracy when an intrusion connection attacks.

Keywords: Artificial immune system, intrusion detection, population-based incremental learning, evolution computing.

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Authors: Ali H. Mahfouz, Gao Ming-Jun, Mohamad Sharif

Abstract:

Slurry dredged soil at coastal area has a high water content, poor permeability, and low surface intensity. Hence, it is infeasible to use vacuum preloading method to treat this type of soil foundation. For the special case of super soft ground, a floating bridge is first constructed on muddy soil and used as a service road and platform for implementing the modified vacuum preloading method. The modified technique of vacuum preloading and its construction process for the super soft soil foundation improvement is then studied. Application of modified vacuum preloading method shows that the technology and its construction process are highly suitable for improving the super soft soil foundation in coastal areas.

Keywords: Super soft foundation, dredger fill, vacuum preloading, foundation treatment, construction technology.

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Authors: Ming-Tang Tsai, Chih-Wei Yen

Abstract:

In this paper, an Interactive Compromise Approach with Particle Swarm Optimization(ICA-PSO) is presented to solve the Economic Emission Dispatch(EED) problem. The cost function and emission function are modeled as the nonsmooth functions, respectively. The bi-objective including both the minimization of cost and emission is formulated in this paper. ICA-PSO is proposed to solve EED problem for finding a better compromise solution. The solution methodology can offer a global or near-global solution for decision-making requirements. The effectiveness and efficiency of ICA-PSO are demonstrated by a sample test system. Test results can be shown that the proposed method provide a practical and flexible framework for power dispatch.

Keywords: Interactive Compromise Approach, Emission Control, Economic Dispatch, Particle Swarm Optimization.

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Authors: Li Qiang, Yang Ze-Ming, Liu Bao-Xu, Jiang Zheng-Wei

Abstract:

With the increasing complexity of cyberspace security, the cyber-attack attribution has become an important challenge of the security protection systems. The difficult points of cyber-attack attribution were forced on the problems of huge data handling and key data missing. According to this situation, this paper presented a reasoning method of cyber-attack attribution based on threat intelligence. The method utilizes the intrusion kill chain model and Bayesian network to build attack chain and evidence chain of cyber-attack on threat intelligence platform through data calculation, analysis and reasoning. Then, we used a number of cyber-attack events which we have observed and analyzed to test the reasoning method and demo system, the result of testing indicates that the reasoning method can provide certain help in cyber-attack attribution.

Keywords: Reasoning, Bayesian networks, cyber-attack attribution, kill chain, threat intelligence.

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Authors: Chin-Hung Li, Te-Ming Chen, Ying-Chuan Chen, Shuen-Tai Wang

Abstract:

This paper proposes a new approach to offer a private cloud service in HPC clusters. In particular, our approach relies on automatically scheduling users- customized environment request as a normal job in batch system. After finishing virtualization request jobs, those guest operating systems will dismiss so that compute nodes will be released again for computing. We present initial work on the innovative integration of HPC batch system and virtualization tools that aims at coexistence such that they suffice for meeting the minimizing interference required by a traditional HPC cluster. Given the design of initial infrastructure, the proposed effort has the potential to positively impact on synergy model. The results from the experiment concluded that goal for provisioning customized cluster environment indeed can be fulfilled by using virtual machines, and efficiency can be improved with proper setup and arrangements.

Keywords: Cloud Computing, HPC Cluster, Private Cloud, Virtualization

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Authors: Su Yi Ming, Hou Ying, Zou Guang Ping

Abstract:

Metal-net rubber is a new dry friction damping material, compared with the traditional metal rubber, which has high mechanization degree, and the mechanical performance of metal-net rubber is more stable. Through the sine sweep experiment and random vibration experiment of metal-net rubber vibration isolator, the influence of several important factors such as the lines slope, relative density and wire diameter on the transfer rate, natural frequency and root-mean-square response acceleration of metal-net rubber vibration isolation system, were studied through the method of control variables. Also, several relevant change curves under different vibration levels were derived, and the effects of vibration level on the natural frequency and root-mean-square response acceleration were analyzed through the curves.

Keywords: Metal-net rubber vibration isolator, relative density, vibration level, wire diameter.

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Authors: Chang-Hsien Tai, Uzu-Kuei Hsu, Jr-Ming Miao, Yong-Jhou Lin

Abstract:

The development and application of wind power for renewable energy has attracted growing interest in recent years. Renewable energy sources are attracting much alteration as they can reduce both environmental damage and dependence on fossil fuels. With the growing need for sustainable energy supplies, a case is made for decentralized, stand-alone power supplies (SAPS) as an alternative to power grids. In the era which traditional petroleum energy resource decreasing and the green house affect significant increasing, the development and usage of regenerative resources is inevitable. Due to the contribution of the pioneers, the development of regenerative resources already has a remarkable achievement; however, in the view of economy and quantity, it is still a long road for regenerative energy to replace traditional petroleum energy. In our prospective, in stead of investigate larger regenerative energy equipment, it is much wiser to think about the blind side and breakthrough of the current technique.

Keywords: regenerative resources, hybrid system, transfer, storage, phase change

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Authors: Wei Lo, Ming-En Kuo

Abstract:

While to minimize the overall project cost is always one of the objectives of construction managers, to obtain the maximum economic return is definitely one the ultimate goals of the project investors. As there is a trade-off relationship between the project time and cost, and the project delivery time directly affects the timing of economic recovery of an investment project, to provide a method that can quantify the relationship between the project delivery time and cost, and identify the optimal delivery time to maximize economic return has always been the focus of researchers and industrial practitioners. Using genetic algorithms, this study introduces an optimization model that can quantify the relationship between the project delivery time and cost and furthermore, determine the optimal delivery time to maximize the economic return of the project. The results provide objective quantification for accurately evaluating the project delivery time and cost, and facilitate the analysis of the economic return of a project.

Keywords: Time-Cost Trade-Off, Genetic Algorithms, Resource Integration, Economic return.

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Authors: Rong-Jong Wai, Chia-Ming Liu

Abstract:

Generally speaking, the mobile robot is capable of sensing its surrounding environment, interpreting the sensed information to obtain the knowledge of its location and the environment, planning a real-time trajectory to reach the object. In this process, the issue of obstacle avoidance is a fundamental topic to be challenged. Thus, an adaptive path-planning control scheme is designed without detailed environmental information, large memory size and heavy computation burden in this study for the obstacle avoidance of a mobile robot. In this scheme, the robot can gradually approach its object according to the motion tracking mode, obstacle avoidance mode, self-rotation mode, and robot state selection. The effectiveness of the proposed adaptive path-planning control scheme is verified by numerical simulations of a differential-driving mobile robot under the possible occurrence of obstacle shapes.

Keywords: Adaptive Path Planning, Mobile Robot ObstacleAvoidance

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Authors: Ming-Hui Lee, Iau-Teh Wang

Abstract:

The innovative fuzzy estimator is used to estimate the ground motion acceleration of the retaining structure in this study. The Kalman filter without the input term and the fuzzy weighting recursive least square estimator are two main portions of this method. The innovation vector can be produced by the Kalman filter, and be applied to the fuzzy weighting recursive least square estimator to estimate the acceleration input over time. The excellent performance of this estimator is demonstrated by comparing it with the use of difference weighting function, the distinct levels of the measurement noise covariance and the initial process noise covariance. The availability and the precision of the proposed method proposed in this study can be verified by comparing the actual value and the one obtained by numerical simulation.

Keywords: Earthquake, Fuzzy Estimator, Kalman Filter, Recursive Least Square Estimator.

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Authors: Ming-Hui Lee, Tsung-Chien Chen, Yuh-Shiou Tai

Abstract:

The intelligent fuzzy input estimator is used to estimate the input force of the rigid bar structural system in this study. The fuzzy Kalman filter without the input term and the fuzzy weighting recursive least square estimator are two main portions of this method. The practicability and accuracy of the proposed method were verified with numerical simulations from which the input forces of a rigid bar structural system were estimated from the output responses. In order to examine the accuracy of the proposed method, a rigid bar structural system is subjected to periodic sinusoidal dynamic loading. The excellent performance of this estimator is demonstrated by comparing it with the use of difference weighting function and improper the initial process noise covariance. The estimated results have a good agreement with the true values in all cases tested.

Keywords: Fuzzy Input Estimator, Kalman Filter, RecursiveLeast Square Estimator.

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Authors: Hsiao-Ming Chang, Jui-Liang Hsu

Abstract:

The purpose of this study is to analyze the cognitive and travel experience the situation of the tourist attraction of the sport tourism in Penghu. This study used a questionnaires, the main island of Taiwan to Penghu in the way of marine sports tourists adopted the designated convenience sampling method, a total of 1447 valid questionnaires. After statistical analysis, this study found that: 1. Tourists to Penghu sports tourism attraction cognitive as “good air quality, suitable for water activities". 2. Tourists in Penghu's tourism experience, “Let me taste the delicious specialties and snacks". 3. The attraction of the sport tourism, travel experience and perceived value are correlated, and both the perceived value with a high degree of predictive ability. Based on the findings of this study not only for Penghu's tourism industry with the unit in charge of the proposed operating and suggestions for future research to other researchers.

Keywords: Sport tourism, travel experience, perceived value, sport attraction.

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Authors: Puntani Pongsumpun, I-Ming Tang

Abstract:

The incidences of dengue hemorrhagic disease (DHF) over the long term exhibit a seasonal behavior. It has been hypothesized that these behaviors are due to the seasonal climate changes which in turn induce a seasonal variation in the incubation period of the virus while it is developing the mosquito. The standard dynamic analysis is applied for analysis the Susceptible-Exposed- Infectious-Recovered (SEIR) model which includes an annual variation in the length of the extrinsic incubation period (EIP). The presence of both asymptomatic and symptomatic infections is allowed in the present model. We found that dynamic behavior of the endemic state changes as the influence of the seasonal variation of the EIP becomes stronger. As the influence is further increased, the trajectory exhibits sustained oscillations when it leaves the chaotic region.

Keywords: Chaotic behavior, dengue hemorrhagic fever, extrinsic incubation period, SEIR model.

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Authors: Cheng-Hsien Chang, Jyi-Tsong Lin, Po-Hsieh Lin, Hung-Pei Hsu, Chan-Hsiang Chang, Ming-Tsung Shih, Shih-Chuan Tseng, Min-Yan Lin

Abstract:

In this paper, we have proposed a novel FinFET with extended body under the poly gate, which is called EB-FinFET, and its characteristic is demonstrated by using three-dimensional (3-D) numerical simulation. We have analyzed and compared it with conventional FinFET. The extended body height dependence on the drain induced barrier lowering (DIBL) and subthreshold swing (S.S) have been also investigated. According to the 3-D numerical simulation, the proposed structure has a firm structure, an acceptable short channel effect (SCE), a reduced series resistance, an increased on state drain current (I on) and a large normalized I DS. Furthermore, the structure can also improve corner effect and reduce self-heating effect due to the extended body. Our results show that the EBFinFET is excellent for nanoscale device.

Keywords: SOI, FinFET, tri-gate, self-heating effect.

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Authors: Hung-Ming Lai, Andreas Albrecht, Kathleen Steinhöfel

Abstract:

Cancers could normally be marked by a number of differentially expressed genes which show enormous potential as biomarkers for a certain disease. Recent years, cancer classification based on the investigation of gene expression profiles derived by high-throughput microarrays has widely been used. The selection of discriminative genes is, therefore, an essential preprocess step in carcinogenesis studies. In this paper, we have proposed a novel gene selector using information-theoretic measures for biological discovery. This multivariate filter is a four-stage framework through the analyses of feature relevance, feature interdependence, feature redundancy-dependence and subset rankings, and having been examined on the colon cancer data set. Our experimental result show that the proposed method outperformed other information theorem based filters in all aspect of classification errors and classification performance.

Keywords: Colon cancer, feature interdependence, feature subset selection, gene selection, microarray data analysis.

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Authors: Aldy Gunawan, Kien Ming Ng, Kim Leng Poh

Abstract:

This paper presents a hybrid algorithm for solving a timetabling problem, which is commonly encountered in many universities. The problem combines both teacher assignment and course scheduling problems simultaneously, and is presented as a mathematical programming model. However, this problem becomes intractable and it is unlikely that a proven optimal solution can be obtained by an integer programming approach, especially for large problem instances. A hybrid algorithm that combines an integer programming approach, a greedy heuristic and a modified simulated annealing algorithm collaboratively is proposed to solve the problem. Several randomly generated data sets of sizes comparable to that of an institution in Indonesia are solved using the proposed algorithm. Computational results indicate that the algorithm can overcome difficulties of large problem sizes encountered in previous related works.

Keywords: Timetabling problem, mathematical programming model, hybrid algorithm, simulated annealing.

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Authors: Wen-Chi Hung, Tung-Kai Liu, Ming-Shan Tsai, Chun-Che Lee, I-Min Jiang

Abstract:

This study investigates a voltage-controllable liquid crystals lens with a Fresnel zone electrode. When applying a proper voltage on the liquid crystal cell, a Fresnel-zone-distributed electric field is induced to direct liquid crystals aligned in a concentric structure. Owing to the concentrically aligned liquid crystals, a Fresnel lens is formed. We probe the Fresnel liquid crystal lens using a polarized incident beam with a wavelength of 632.8 nm, finding that the diffraction efficiency depends on the applying voltage. A remarkable diffraction efficiency of ~39.5 % is measured at the voltage of 0.9V. Additionally, a dual focus lens is fabricated by attaching a plane-convex lens to the Fresnel liquid crystals cell. The Fresnel LC lens and the dual focus lens may be applied for DVD/CD pick-up head, confocal microscopy system, or electrically-controlling optical systems.

Keywords: Liquid Crystals Lens, Fresnel Lens, and Dual focus

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Authors: Chuan Li, Ming Liang, Qibing Yu

Abstract:

To improve the dynamics response of the vehicle passive suspension, a two-terminal mass is suggested to connect in parallel with the suspension strut. Three performance criteria, tire grip, ride comfort and suspension deflection, are taken into consideration to optimize the suspension parameters. However, the three criteria are conflicting and non-commensurable. For this reason, the Chebyshev goal programming method is applied to find the best tradeoff among the three objectives. A simulation case is presented to describe the multi-objective optimization procedure. For comparison, the Chebyshev method is also employed to optimize the design of a conventional passive suspension. The effectiveness of the proposed design method has been clearly demonstrated by the result. It is also shown that the suspension with a two-terminal mass in parallel has better performance in terms of the three objectives.

Keywords: Vehicle, passive suspension, two-terminal mass, optimization, Chebyshev goal programming

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Authors: Nchimbi Edward Pius, Liu Qin, Fion Yang, Zhu Hong Ming

Abstract:

The current Hadoop block placement policy do not fairly and evenly distributes replicas of blocks written to datanodes in a Hadoop cluster.

This paper presents a new solution that helps to keep the cluster in a balanced state while an HDFS client is writing data to a file in Hadoop cluster. The solution had been implemented, and test had been conducted to evaluate its contribution to Hadoop distributed file system.

It has been found that, the solution has lowered global execution time taken by Hadoop balancer to 22 percent. It also has been found that, Hadoop balancer respectively over replicate 1.75 and 3.3 percent of all re-distributed blocks in the modified and original Hadoop clusters.

The feature that keeps the cluster in a balanced state works as a core part to Hadoop system and not just as a utility like traditional balancer. This is one of the significant achievements and uniqueness of the solution developed during the course of this research work.

Keywords: Balancer, Datanode, Distributed file system, Hadoop, Replicas.

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Authors: Jiun-Wei Chen, Chih-Yang Wu, Ming-Feng Hou

Abstract:

A numerical study on the heat transfer in the thermal barrier coatings and the substrates of a parallel-plate enclosure is carried out. Some of the thermal barrier coatings, such as ceramics, are semitransparent and are of interest for high-temperature applications where radiation effects are significant. The radiative transfer equations and the energy equations are solved by using the discrete ordinates method and the finite difference method. Illustrative results are presented for temperature distributions in the coatings and the opaque walls under various heating conditions. The results show that the temperature distribution is more uniform in the interior portion of each coating away from its boundary for the case with a larger average of varying refractive index and a positive gradient of refractive index enhances radiative transfer to the substrates.

Keywords: Radiative transfer, parallel-plate enclosure, coatings, varying refractive index

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Authors: Zhen-Hui Hu, Jyh-Shong Ju, Ming-Hwei Perng

Abstract:

This paper presents a useful sub-pixel image registration method using line segments and a sub-pixel edge detector. In this approach, straight line segments are first extracted from gray images at the pixel level before applying the sub-pixel edge detector. Next, all sub-pixel line edges are mapped onto the orientation-distance parameter space to solve for line correspondence between images. Finally, the registration parameters with sub-pixel accuracy are analytically solved via two linear least-square problems. The present approach can be applied to various fields where fast registration with sub-pixel accuracy is required. To illustrate, the present approach is applied to the inspection of printed circuits on a flat panel. Numerical example shows that the present approach is effective and accurate when target images contain a sufficient number of line segments, which is true in many industrial problems.

Keywords: Defect detection, Image registration, Straight line segment, Sub-pixel.

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Authors: The Nan Chang, Ping-Tang Yu, Jyun-Ming Lin

Abstract:

A triple band circularly polarized antenna covering 1.17, 1.22, and 1.57 GHz is presented. To extend to the triple-band operation, we need to add one more ring while maintaining the mechanism to independently control each ring. The inset-part in the feeding scheme is used to excite the band at 1.22 GHz, while the proximate-part of the feeding scheme is used to excite not only the band at 1.57 GHz but also the band at 1.17 GHz. This is achieved by up-vertically coupled with one ring to radiate at 1.57 GHz and down-vertically coupled another ring to radiate at 1.17 GHz. It is also noted that the inset-part in our feeding scheme is by horizontal coupling. Furthermore, to increase the gain at all three bands, three air-layers are added to make the total height of the antenna be 7.8 mm. The total thickness of the three air-layers is 3 mm. The gains of the three bands are all greater than 5 dBiC after adding the air-layers.

Keywords: Circular polarization, global position system, triband antenna, high gain.

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Authors: Shyh-Ming Chern

Abstract:

Cubic equations of state (EoS), popular due to their simple mathematical form, ease of use, semi-theoretical nature and reasonable accuracy, are normally fitted to vapor-liquid equilibrium P-v-T data. As a result, they often show poor accuracy in the region near and above the critical point. In this study, the performance of the renowned Peng-Robinson (PR) and Patel-Teja (PT) EoS’s around the critical area has been examined against the P-v-T data of water. Both of them display large deviations at critical point. For instance, PR-EoS exhibits discrepancies as high as 47% for the specific volume, 28% for the enthalpy departure and 43% for the entropy departure at critical point. It is shown that incorporating P-v-T data of the supercritical region into the retuning of a cubic EoS can improve its performance at and above the critical point dramatically. Adopting a retuned acentric factor of 0.5491 instead of its genuine value of 0.344 for water in PR-EoS and a new F of 0.8854 instead of its original value of 0.6898 for water in PT-EoS reduces the discrepancies to about one third or less.

Keywords: Equation of state, EoS, supercritical water, SCW.

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Authors: Hung-Pei Hsu, Jyi-Tsong Lin, Po-Hsieh Lin, Cheng-Hsien Chang, Ming-Tsung Shih, Chan-Hsiang Chang, Shih-Chuan Tseng, Min-Yan Lin, Shih-Wen Hsu

Abstract:

In this paper, we propose a novel metal oxide semiconductor field effect transistor with L-shaped channel structure (LMOS), and several type of L-shaped structures are also designed, studied and compared with the conventional MOSFET device for the same average gate length (Lavg). The proposed device electrical characteristics are analyzed and evaluated by three dimension (3-D) ISE-TCAD simulator. It can be confirmed that the LMOS devices have higher on-state drain current and both lower drain-induced barrier lowering (DIBL) and subthreshold swing (S.S.) than its conventional counterpart has. In addition, the transconductance and voltage gain properties of the LMOS are also improved.

Keywords: Average gate length (Lavg), drain-induced barrier lowering (DIBL), L-shaped channel MOSFET (LMOS), subthreshold swing (S.S.).

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Authors: Shyh-Ming Chern, Hung-Chi Tu

Abstract:

One way to utilize biomass is to thermochemically convert it into gases and chemicals. For conversion of biomass, glucose is a particularly popular model compound for cellulose, or more generally for biomass. The present study takes a different approach by employing lactic acid as the model compound for cellulose. Since lactic acid and glucose have identical elemental composition, they are expected to produce similar results as they go through the conversion process. In the current study, lactic acid was thermochemically converted to assess its reactivity and reaction mechanism in subcritical and supercritical water, by using a 16-ml autoclave reactor. The major operating parameters investigated include: The reaction temperature, from 673 to 873 K, the reaction pressure, 10 and 25 MPa, the dosage of oxidizing agent, 0 and 0.5 chemical oxygen demand, and the concentration of lactic acid in the feed, 0.5 and 1.0 M. Gaseous products from the conversion were generally found to be comparable to those derived from the conversion of glucose.

Keywords: Lactic acid, subcritical water, supercritical water, thermochemical conversion.

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Authors: Ming Lun Wang, Yan Wang, Ning Ruo Sun

Abstract:

With the development of cloud computing, more and more users start to utilize the cloud storage service. However, there exist some issues: 1) cloud server steals the shared data, 2) sharers collude with the cloud server to steal the shared data, 3) cloud server tampers the shared data, 4) sharers and key generation center (KGC) conspire to steal the shared data. In this paper, we use advanced encryption standard (AES), hash algorithms, and accountable key-policy attribute-based encryption without key escrow (WOKE-AKP-ABE) to build a security cloud storage scheme. Moreover, the data are encrypted to protect the privacy. We use hash algorithms to prevent the cloud server from tampering the data uploaded to the cloud. Analysis results show that this scheme can resist conspired attacks.

Keywords: Cloud storage security, sharing storage, attributes, Hash algorithm.

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Authors: Sheng-Ming Huang, Nan-Chyuan Tsai, Chih-Che Lin, Chun-Chi Lin

Abstract:

An innovative design for intelligent Chemical Mechanical Polishing (CMP) system is proposed and verified by experiments in this report. On-line measurement and real-time feedback are integrated to eliminate the shortcomings of traditional approaches, e.g., the batch-to-batch discrepancy of required polishing time, over consumption of chemical slurry, and non-uniformity across the wafer. The major advantage of the proposed method is that the finish of local surface roughness can be consistent, no matter where the inner-ring region or outer-ring region is concerned. Secondly, it is able to eliminate the Edge effect. Conventionally, the interfacial induced stress near the wafer edge is generally much higher than that near the wafer center. At last, by using the proposed intelligent chemical mechanical polishing strategy, the cost of the entire machining cycle can be much reduced while the quality of the finished goods certainly upgraded.

Keywords: Chemical Mechanical Polishing, Active Magnetic Actuator, On-Line Measurement.

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