Search results for: Hiroshi Funakubo
Commenced in January 2007
Frequency: Monthly
Edition: International
Paper Count: 51

Search results for: Hiroshi Funakubo

51 Effect of CW Laser Annealing on Silicon Surface for Application of Power Device

Authors: Satoru Kaneko, Takeshi Ito, Kensuke Akiyama, Manabu Yasui, Chihiro Kato, Satomi Tanaka, Yasuo Hirabayashi, Takeshi Ozawa, Akira Matsuno, Takashi Nire, Hiroshi Funakubo, Mamoru Yoshimoto

Abstract:

As application of re-activation of backside on power device Insulated Gate Bipolar Transistor (IGBT), laser annealing was employed to irradiate amorphous silicon substrate, and resistivities were measured using four point probe measurement. For annealing the amorphous silicon two lasers were used at wavelength of visible green (532 nm) together with Infrared (793 nm). While the green laser efficiently increased temperature at top surface the Infrared laser reached more deep inside and was effective for melting the top surface. A finite element method was employed to evaluate time dependent thermal distribution in silicon substrate.

Keywords: laser, annealing, silicon, recrystallization, thermal distribution, resistivity, finite element method, absorption, melting point, latent heat of fusion.

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50 Slip Limit Prediction of High-Strength Bolt Joints Based on Local Approach

Authors: Chang He, Hiroshi Tamura, Hiroshi Katsuchi, Jiaqi Wang

Abstract:

In this study, the aim is to infer the slip limit (static friction limit) of contact interfaces in bolt friction joints by analyzing other bolt friction joints with the same contact surface but in a different shape. By using the Weibull distribution to deal with microelements on the contact surface statistically, the slip limit of a certain type of bolt joint was predicted from other types of bolt joint with the same contact surface. As a result, this research succeeded in predicting the slip limit of bolt joins with different numbers of contact surfaces and with different numbers of bolt rows.

Keywords: Bolt joints, slip coefficient, finite element method, Weibull distribution.

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49 Temperature-Based Detection of Initial Yielding Point in Loading of Tensile Specimens Made of Structural Steel

Authors: Aqsa Jamil, Hiroshi Tamura, Hiroshi Katsuchi, Jiaqi Wang

Abstract:

Yield point represents the upper limit of forces which can be applied on a specimen without causing any permanent deformation. After yielding, the behavior of specimen suddenly changes including the possibility of cracking or buckling. So, the accumulation of damage or type of fracture changes depending on this condition. As it is difficult to accurately detect yield points of the several stress concentration points in structural steel specimens, an effort has been made in this research work to develop a convenient technique using thermography (temperature-based detection) during tensile tests for the precise detection of yield point initiation. To verify the applicability of thermography camera, tests were conducted under different loading conditions and measuring the deformation by installing various strain gauges and monitoring the surface temperature with the help of thermography camera. The yield point of specimens was estimated by the help of temperature dip which occurs due to the thermoelastic effect during the plastic deformation. The scattering of the data has been checked by performing repeatability analysis. The effect of temperature imperfection and light source has been checked by carrying out the tests at daytime as well as midnight and by calculating the signal to noise ratio (SNR) of the noised data from the infrared thermography camera, it can be concluded that the camera is independent of testing time and the presence of a visible light source. Furthermore, a fully coupled thermal-stress analysis has been performed by using Abaqus/Standard exact implementation technique to validate the temperature profiles obtained from the thermography camera and to check the feasibility of numerical simulation for the prediction of results extracted with the help of thermographic technique.

Keywords: Signal to noise ratio, thermoelastic effect, thermography, yield point.

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48 Customer Value Creation by CRM System in Electronic Device Companies

Authors: Hideki.Kobayashi, Hiroshi.Osada

Abstract:

The service industry accounts for about 70% of GDP of Japan, and the importance of the service innovation is pointed out. The importance of the system use and the support service increases in the information system that is one of the service industries. However, because the system is not used enough, the purpose for which it was originally intended cannot often be achieved in the CRM system. To promote the use of the system, the effective service method is needed. It is thought that the service model's making and the clarification of the success factors are necessary to improve the operation service of the CRM system. In this research the model of the operation service in the CRM system is made.

Keywords: Information system, Operation service, Serviceinnovation, Solution

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47 Extending E-learning systems based on Clause-Rule model

Authors: Keisuke Nakamura, Kiyoshi Akama, Hiroshi Mabuchi

Abstract:

E-Learning systems are used by many learners and teachers. The developer is developing the e-Learning system. However, the developer cannot do system construction to satisfy all of users- demands. We discuss a method of constructing e-Learning systems where learners and teachers can design, try to use, and share extending system functions that they want to use; which may be nally added to the system by system managers.

Keywords: Clause-Rule-Model, database-access, e-Learning, Web-Application.

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46 Integration Process of Industrial Design and Engineering Design

Authors: Kazuhide Sugiyama, Hiroshi Osada

Abstract:

Lately management strategy that put Industrial Design (ID) in its core is recognized more important, as technology and price alone cannot differentiate a product. The needs to shorten the time to develop a product also shorten the development period of ID, and it necessitates the ID process management. This research analyzes the status of integration process of ID and Engineering Design (ED) of office equipment that requires the collaboration of ID and ED to clarify the issues for the efficiency of the development and to propose solutions.

Keywords: Industrial Design (ID), Engineering Design (ED), Integration process, Office equipment

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45 Measurement of Reverse Flow Generated at Cold Exit of Vortex Tube

Authors: Mohd Hazwan bin Yusof, Hiroshi Katanoda

Abstract:

In order to clarify the structure of the cold flow discharged from the vortex tube (VT), the pressure of the cold flow was measured, and a simple flow visualization technique using a 0.75mm-diameter needle and an oily paint is made to study the reverse flow at the cold exit. It is clear that a negative pressure and positive pressure region exist at a certain pressure and cold fraction area, and that a reverse flow is observed in the negative pressure region.

Keywords: Flow visualization, Pressure measurement, Reverse flow, Vortex tube.

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44 Adaptive Impedance Control for Unknown Time-Varying Environment Position and Stiffness

Authors: Norsinnira Zainul Azlan, Hiroshi Yamaura

Abstract:

This study is concerned with a new adaptive impedance control strategy to compensate for unknown time-varying environment stiffness and position. The uncertainties are expressed by Function Approximation Technique (FAT), which allows the update laws to be derived easily using Lyapunov stability theory. Computer simulation results are presented to validate the effectiveness of the proposed strategy.

Keywords: Adaptive Impedance Control, Function Approximation Technique (FAT), unknown time-varying environment position and stiffness.

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43 Initialization Method of Reference Vectors for Improvement of Recognition Accuracy in LVQ

Authors: Yuji Mizuno, Hiroshi Mabuchi

Abstract:

Initial values of reference vectors have significant influence on recognition accuracy in LVQ. There are several existing techniques, such as SOM and k-means, for setting initial values of reference vectors, each of which has provided some positive results. However, those results are not sufficient for the improvement of recognition accuracy. This study proposes an ACO-used method for initializing reference vectors with an aim to achieve recognition accuracy higher than those obtained through conventional methods. Moreover, we will demonstrate the effectiveness of the proposed method by applying it to the wine data and English vowel data and comparing its results with those of conventional methods.

Keywords: Clustering, LVQ, ACO, SOM, k-means.

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42 An ICA Algorithm for Separation of Convolutive Mixture of Speech Signals

Authors: Rajkishore Prasad, Hiroshi Saruwatari, Kiyohiro Shikano

Abstract:

This paper describes Independent Component Analysis (ICA) based fixed-point algorithm for the blind separation of the convolutive mixture of speech, picked-up by a linear microphone array. The proposed algorithm extracts independent sources by non- Gaussianizing the Time-Frequency Series of Speech (TFSS) in a deflationary way. The degree of non-Gaussianization is measured by negentropy. The relative performances of algorithm under random initialization and Null beamformer (NBF) based initialization are studied. It has been found that an NBF based initial value gives speedy convergence as well as better separation performance

Keywords: Blind signal separation, independent component analysis, negentropy, convolutive mixture.

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41 Corporate Sustainable Development Assessment Base on the Corporate Social Responsibility

Authors: Sun Mei, Nagata Katsuya, Onoda Hiroshi

Abstract:

With the resource exhaustion, bad affections of human activities and the awakening of the human rights, the corporate social responsibility became popular corporate strategy achieving sustainable development of both corporation and society. The issue of Guideline of Chinese Corporate Social Responsibility Report promotes greatly corporation to take social responsibility. This paper built the index system according to this guideline and takes the textile industry as an example, uses the analytical hierarchy process to identify the weightings of different responsibilities of corporation to guide the corporate social responsibility performance assessment.

Keywords: Sustainable development, analytical hierarchyprocess, index system, corporate social responsibility

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40 Frequency- and Content-Based Tag Cloud Font Distribution Algorithm

Authors: Ágnes Bogárdi-Mészöly, Takeshi Hashimoto, Shohei Yokoyama, Hiroshi Ishikawa

Abstract:

The spread of Web 2.0 has caused user-generated content explosion. Users can tag resources to describe and organize them. Tag clouds provide rough impression of relative importance of each tag within overall cloud in order to facilitate browsing among numerous tags and resources. The goal of our paper is to enrich visualization of tag clouds. A font distribution algorithm has been proposed to calculate a novel metric based on frequency and content, and to classify among classes from this metric based on power law distribution and percentages. The suggested algorithm has been validated and verified on the tag cloud of a real-world thesis portal.

Keywords: Tag cloud, font distribution algorithm, frequency-based, content-based, power law.

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39 Dynamic Voltage Stability Estimation using Particle Filter

Authors: Osea Zebua, Norikazu Ikoma, Hiroshi Maeda

Abstract:

Estimation of voltage stability based on optimal filtering method is presented. PV curve is used as a tool for voltage stability analysis. Dynamic voltage stability estimation is done by using particle filter method. Optimum value (nose point) of PV curve can be estimated by estimating parameter of PV curve equation optimal value represents critical voltage and condition at specified point of measurement. Voltage stability is then estimated by analyzing loading margin condition c stimating equation. This maximum loading ecified dynamically.

Keywords: normalized PV curve, optimal filtering method particle filter, voltage stability.

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38 Adaptive Impedance Control for Unknown Non-Flat Environment

Authors: Norsinnira Zainul Azlan, Hiroshi Yamaura

Abstract:

This paper presents a new adaptive impedance control strategy, based on Function Approximation Technique (FAT) to compensate for unknown non-flat environment shape or time-varying environment location. The target impedance in the force controllable direction is modified by incorporating adaptive compensators and the uncertainties are represented by FAT, allowing the update law to be derived easily. The force error feedback is utilized in the estimation and the accurate knowledge of the environment parameters are not required by the algorithm. It is shown mathematically that the stability of the controller is guaranteed based on Lyapunov theory. Simulation results presented to demonstrate the validity of the proposed controller.

Keywords: Adaptive impedance control, Function Approximation Technique (FAT), impedance control, unknown environment position.

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37 Energy Separation Mechanism in Uni-Flow Vortex Tube Using Compressible Vortex Flow

Authors: Hiroshi Katanoda, Mohd Hazwan bin Yusof

Abstract:

A theoretical investigation from the view point of gas-dynamics and thermodynamics was carried out, in order to clarify the energy separation mechanism in a viscous compressible vortex, as a primary flow element in a uni-flow vortex tube. The mathematical solutions of tangential velocity, density and temperature in a viscous compressible vortical flow were used in this study.It is clear that a total temperature in the vortex core falls well below that distant from the vortex core in the radial direction, causing aregion with higher total temperature,compared to the distant region,peripheral to the vortex core.

Keywords: Energy separation mechanism, theoretical analysis, vortex tube, vortical flow.

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36 Simultaneous Reaction-Separation in a Microchannel Reactor with the Aid of a Guideline Structure

Authors: Salah Aljbour, Hiroshi Yamada, Tomohiko Tagawa

Abstract:

A microchannel with two inlets and two outlets was tested as a potential reactor to carry out two-phase catalytic phase transfer reaction with phase separation at the exit of the microchannel. The catalytic phase transfer reaction between benzyl chloride and sodium sulfide was chosen as a model reaction. The effect of operational time on the conversion was studied. By utilizing a multiphase parallel flow inside the microchannel reactor with the aid of a guideline structure, the catalytic phase reaction followed by phase separation could be ensured. The organic phase could be separated completely from one exit and part of the aqueous phase was separated purely and could be reused with slightly affecting the catalytic phase transfer reaction.

Keywords: Green engineering, microchannel reactor, multiphase reaction, process intensification.

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35 Border Limited Adaptive Subdivision Based On Triangle Meshes

Authors: Pichayut Peerasathien, Hiroshi Nagahashi

Abstract:

Subdivision is a method to create a smooth surface from a coarse mesh by subdividing the entire mesh. The conventional ways to compute and render surfaces are inconvenient both in terms of memory and computational time as the number of meshes will increase exponentially. An adaptive subdivision is the way to reduce the computational time and memory by subdividing only certain selected areas. In this paper, a new adaptive subdivision method for triangle meshes is introduced. This method defines a new adaptive subdivision rules by considering the properties of each triangle's neighbors and is embedded in a traditional Loop's subdivision. It prevents some undesirable side effects that appear in the conventional adaptive ways. Models that were subdivided by our method are compared with other adaptive subdivision methods

Keywords: Subdivision, loop subdivision, handle cracks, smooth surface.

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34 Secure Bio Semantic Computing Scheme

Authors: Hiroshi Yamaguchi, Phillip C.-Y. Sheu, Ryo Fujita, Shigeo Tsujii

Abstract:

In this paper, the secure BioSemantic Scheme is presented to bridge biological/biomedical research problems and computational solutions via semantic computing. Due to the diversity of problems in various research fields, the semantic capability description language (SCDL) plays and important role as a common language and generic form for problem formalization. SCDL is expected the essential for future semantic and logical computing in Biosemantic field. We show several example to Biomedical problems in this paper. Moreover, in the coming age of cloud computing, the security problem is considered to be crucial issue and we presented a practical scheme to cope with this problem.

Keywords: Biomedical applications, private information retrieval (PIR), semantic capability description language (SCDL), semantic computing.

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33 Comparative Study of Fatigue and Drowsiness in the Night-time Passenger Transportation Industry in Japan

Authors: Hiroshi Ikeda

Abstract:

In this research, a questionnaire survey was conducted to measure nap, drowsiness and fatigue of drivers who work for long shifts, to discuss about the work environment and health conditions for taxi and bus drivers who work at night-time. The questionnaire sheet used for this research was organized into the following categories: tension/tiredness, drowsiness while driving, and the nap situation during night-time work. The number of taxi drivers was 127 and the number of bus drivers was 40. Concerning the results of a comparison of nap hours of taxi and bus drivers, the taxi drivers’ nap hours are overwhelmingly shorter, and also the frequency of drivers who experience drowsiness is higher. The burden on bus drivers does not change because of the system of a two-driver rotation shift. In particular, the working environment of the taxi driver may lead to greater fatigue accumulation than the bus driver’s environment.

Keywords: Bus and taxi, drowsiness, fatigue, nap.

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32 Ultraviolet Lasing from Vertically-Aligned ZnO Nanowall Array

Authors: Masahiro Takahashi, Kosuke Harada, Shihomi Nakao, Mitsuhiro Higashihata, Hiroshi Ikenoue, Daisuke Nakamura, Tatsuo Okada

Abstract:

Zinc oxide (ZnO) is one of the light emitting materials in ultraviolet (UV) region. In addition, ZnO nanostructures are also attracting increasing research interest as buildingblocks for UV optoelectronic applications. We have succeeded in synthesizing vertically-aligned ZnO nanostructures by laser interference patterning, which is catalyst-free and non-contact technique. In this study, vertically-aligned ZnO nanowall arrays were synthesized using two-beam interference. The maximum height and average thickness of the ZnO nanowalls were about 4.5µm and 200 nm, respectively.UV lasing from a piece of the ZnO nanowall was obtained under the third harmonic of a Q-switched Nd:YAG laser excitation, and the estimated threshold power density for lasing was about 150 kW/cm2. Furthermore, UV lasing from the vertically-aligned ZnO nanowall was also achieved. The results indicate that ZnO nanowalls can be applied to random laser.

Keywords: Zinc Oxide, nanowall, interference laser, UV lasing.

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31 Winged Test Rocket with Fully Autonomous Guidance and Control for Realizing Reusable Suborbital Vehicle

Authors: Koichi Yonemoto, Hiroshi Yamasaki, Masatomo Ichige, Yusuke Ura, Guna S. Gossamsetti, Takumi Ohki, Kento Shirakata, Ahsan R. Choudhuri, Shinji Ishimoto, Takashi Mugitani, Hiroya Asakawa, Hideaki Nanri

Abstract:

This paper presents the strategic development plan of winged rockets WIRES (WInged REusable Sounding rocket) aiming at unmanned suborbital winged rocket for demonstrating future fully reusable space transportation technologies, such as aerodynamics, Navigation, Guidance and Control (NGC), composite structure, propulsion system, and cryogenic tanks etc., by universities in collaboration with government and industries, as well as the past and current flight test results.

Keywords: Autonomous guidance and control, reusable rocket, space transportation system, suborbital vehicle, winged rocket.

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30 Application of “Multiple Risk Communicator“ to the Personal Information Leakage Problem

Authors: Mitsuhiro Taniyama, Yuu Hidaka, Masato Arai, Satoshi Kai, Hiromi Igawa, Hiroshi Yajima, Ryoichi Sasaki

Abstract:

Along with the progress of our information society, various risks are becoming increasingly common, causing multiple social problems. For this reason, risk communications for establishing consensus among stakeholders who have different priorities have become important. However, it is not always easy for the decision makers to agree on measures to reduce risks based on opposing concepts, such as security, privacy and cost. Therefore, we previously developed and proposed the “Multiple Risk Communicator" (MRC) with the following functions: (1) modeling the support role of the risk specialist, (2) an optimization engine, and (3) displaying the computed results. In this paper, MRC program version 1.0 is applied to the personal information leakage problem. The application process and validation of the results are discussed.

Keywords: Decision Making, Personal Information Leakage Problem, Risk Communication, Risk Management

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29 Advanced ILQ Control for Buck-Converter viaTwo-Degrees of Freedom Servo-System

Authors: Sidshchadhaa Aumted, Shuhei Shiina, Hiroshi Takami

Abstract:

In this paper, we propose an advanced ILQ control for the buck-converter via two-degrees of freedom servo-system. Our presented strategy is based on Inverse Linear Quadratic (ILQ) servo-system controller without solving Riccati-s equation directly. The optimal controller of the current and voltage control system is designed. The stability and robust control are analyzed. A conscious and persistent effort has been made to improve ILQ control via two-degrees of freedom guarantees the optimal gains on the basis of polynomial pole assignment, which our results of the proposed strategy shows that the advanced ILQ control can be controlled independently the step response and the disturbance response by appending a feed-forward compensator.

Keywords: Optimal voltage control, inverse LQ design method, second order polynomial, two-degrees of freedom.

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28 Photograph Based Pair-matching Recognition of Human Faces

Authors: Min Yao, Kota Aoki, Hiroshi Nagahashi

Abstract:

In this paper, a novel system recognition of human faces without using face different color photographs is proposed. It mainly in face detection, normalization and recognition. Foot method of combination of Haar-like face determined segmentation and region-based histogram stretchi (RHST) is proposed to achieve more accurate perf using Haar. Apart from an effective angle norm side-face (pose) normalization, which is almost a might be important and beneficial for the prepr introduced. Then histogram-based and photom normalization methods are investigated and ada retinex (ASR) is selected for its satisfactory illumin Finally, weighted multi-block local binary pattern with 3 distance measures is applied for pair-mat Experimental results show its advantageous perfo with PCA and multi-block LBP, based on a principle.

Keywords: Face detection, pair-matching rec normalization, skin color segmentation.

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27 A Novel Adaptive Voltage Control Strategy for Boost Converter via Inverse LQ Servo-Control

Authors: Sorawit Stapornchaisit, Sidshchadhaa Aumted, Hiroshi Takami

Abstract:

In this paper, we propose a novel adaptive voltage control strategy for boost converter via Inverse LQ Servo-Control. Our presented strategy is based on an analytical formula of Inverse Linear Quadratic (ILQ) design method, which is not necessary to solve Riccati’s equation directly. The optimal and adaptive controller of the voltage control system is designed. The stability and the robust control are analyzed. Whereas, we can get the analytical solution for the optimal and robust voltage control is achieved through the natural angular velocity within a single parameter and we can change the responses easily via the ILQ control theory. Our method provides effective results as the stable responses and the response times are not drifted even if the condition is changed widely.

Keywords: Boost converter, optimal voltage control, inverse LQ design method, type-1 servo-system, adaptive control.

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26 Comparative Study of Indoor Environment in Residential Buildings in Hot Humid Climate of Malaysia

Authors: M. I. Mohd Hafizal, Y. Hiroshi, T. Goto

Abstract:

There-s a lack in understanding the indoor climate of Malaysian residential. The assumption of traditional house could provide the best indoor environment is too good to be true. This research is to understand indoor environment in three types of Malaysian residential and thermo recorder TR72Ui were placed in indoor spaces for measurement. There are huge differences of indoor environment between housing types, and building material helps to control indoor climate. Traditional house indoor climate was similar to the outdoor. Temperature in the bedroom of terrace and town houses were slightly higher than the living room. Indoor temperature was 2oC lower in the rainy season than the hot season. It was hard to control indoor humidity level in traditional house compared with terrace and town house. As for conclusion, town house provides the best thermal environment to the building occupants and can be improved with good roof insulation.

Keywords: Indoor environment, residential, temperature.

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25 Specialization-based parallel Processing without Memo-trees

Authors: Hidemi Ogasawara, Kiyoshi Akama, Hiroshi Mabuchi

Abstract:

The purpose of this paper is to propose a framework for constructing correct parallel processing programs based on Equivalent Transformation Framework (ETF). ETF regards computation as In the framework, a problem-s domain knowledge and a query are described in definite clauses, and computation is regarded as transformation of the definite clauses. Its meaning is defined by a model of the set of definite clauses, and the transformation rules generated must preserve meaning. We have proposed a parallel processing method based on “specialization", a part of operation in the transformations, which resembles substitution in logic programming. The method requires “Memo-tree", a history of specialization to maintain correctness. In this paper we proposes the new method for the specialization-base parallel processing without Memo-tree.

Keywords: Parallel processing, Program correctness, Equivalent transformation, Specializer generation rule

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24 An Experiment on Personal Archiving and Retrieving Image System (PARIS)

Authors: Pei-Jeng Kuo, Terumasa Aoki, Hiroshi Yasuda

Abstract:

PARIS (Personal Archiving and Retrieving Image System) is an experiment personal photograph library, which includes more than 80,000 of consumer photographs accumulated within a duration of approximately five years, metadata based on our proposed MPEG-7 annotation architecture, Dozen Dimensional Digital Content (DDDC), and a relational database structure. The DDDC architecture is specially designed for facilitating the managing, browsing and retrieving of personal digital photograph collections. In annotating process, we also utilize a proposed Spatial and Temporal Ontology (STO) designed based on the general characteristic of personal photograph collections. This paper explains PRAIS system.

Keywords: Ontology, Databases and Information Retrieval, MPEG-7, Spatial-Temporal, Digital Library Designs l, metadata, Semantic Web, semi-automatic annotation

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23 BECOME: Body Experience-Based Co-Operation between Juveniles through Mutually Excited Team Gameplay

Authors: Tsugunosuke Sakai, Haruya Tamaki, Ryuichi Yoshida, Ryohei Egusa, Etsuji Yamaguchi, Shigenori Inagaki, Fusako Kusunoki, Miki Namatame, Masanori Sugimoto, Hiroshi Mizoguchi

Abstract:

We aim to develop a full-body interaction game that could let children cooperate and interact with other children in small groups. As the first step for our aim, the objective of the full-body interaction game developed in this study is to make interaction between children. The game requires two children to jump together with the same timing. We let children experience the game and answer the questionnaires. The children using several strategies to coordinate the timing of their jumps were observed. These included shouting time, watching each other, and jumping in a constant rhythm as if they were skipping rope. In this manner, we observed the children playing the game while cooperating with each other. The results of a questionnaire to evaluate the proposed interactive game indicate that the jumping game was a very enjoyable experience in which the participants could immerse themselves. Therefore, the game enabled children to experience cooperation with others by using body movements.

Keywords: Children, cooperation, full-body interaction game, kinect sensor.

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22 Preparation of CuAlO2 Thin Films on Si or Sapphire Substrate by Sol-Gel Method Using Metal Acetate or Nitrate

Authors: Takashi Ehara, Takayoshi Nakanishi, Kohei Sasaki, Marina Abe, Hiroshi Abe, Kiyoaki Abe, Ryo Iizaka, Takuya Sato

Abstract:

CuAlO2 thin films are prepared on Si or sapphire substrate by sol-gel method using two kinds of sols. One is combination of Cu acetate and Al acetate basic, and the other is Cu nitrate and Al nitrate. In the case of acetate sol, XRD peaks of CuAlO2 observed at annealing temperature of 800-950 ºC on both Si and sapphire substrates. In contrast, in the case of the films prepared using nitrate on Si substrate, XRD peaks of CuAlO2 have been observed only at the annealing temperature of 800-850 ºC. At annealing temperature of 850ºC, peaks of other species have been observed beside the CuAlO2 peaks, then, the CuAlO2 peaks disappeared at annealing temperature of 900 °C with increasing in intensity of the other peaks. Intensity of the other peaks decreased at annealing temperature of 950 ºC with appearance of broad SiO2 peak. In the present, we ascribe these peaks as metal silicide.

Keywords: CuAlO2, silicide, thin films, transparent conducting oxide, sol-gel.

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