Search results for: collapse investigation
Commenced in January 2007
Frequency: Monthly
Edition: International
Paper Count: 1747

Search results for: collapse investigation

1327 Investigation of Enhancement of Heat Transfer in Natural Convection Utilizing of Nanofluids

Authors: S. Etaig, R. Hasan, N. Perera

Abstract:

This paper analyses the heat transfer performance and fluid flow using different nanofluids in a square enclosure. The energy equation and Navier-Stokes equation are solved numerically using finite volume scheme. The effect of volume fraction concentration on the enhancement of heat transfer has been studied icorporating the Brownian motion; the influence of effective thermal conductivity on the enhancement was also investigated for a range of volume fraction concentration. The velocity profile for different Rayleigh number. Water-Cu, water AL2O3 and water-TiO2 were tested.

Keywords: Computational fluid Dynamics, Natural convection, Nanofluid and Thermal conductivity.

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1326 Physical and Chemical Investigation of Polycaprolactone, Nanohydroxyapatite and Poly (Vinyl Alcohol) Nanocomposite Scaffolds

Authors: A.Doustgani, E.Vasheghani- Farahani, M. Soleimani, S. Hashemi-Najafabadi

Abstract:

Aligned and random nanofibrous scaffolds of PVA/PCL/nHA were fabricated by electrospinning method. The composite nanofibrous scaffolds were subjected to detailed analysis. Morphological investigations revealed that the prepared nanofibers have uniform morphology and the average fiber diameters of aligned and random scaffolds were 135.5 and 290 nm, respectively. The obtained scaffolds have a porous structure with porosity of 88 and 76% for random and aligned nanofibers, respectively. Furthermore, FTIR analysis demonstrated that there were strong intramolecular interactions between the molecules of PVA/PCL/nHA. On the other hand, mechanical characterizations show that aligning the nanofibers, could significantly improve the rigidity of the resultant biocomposite nanofibrous scaffolds.

Keywords: Electrospinnig, nanofibrous scaffold, poly (vinyl alcohol), polycaprolactone.

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1325 Investigation of Tearing in Hydroforming Process with Analytical Equations and Finite Element Method

Authors: H.Seidi, M.Jalali Azizpour, S.A.Zahedi

Abstract:

Today, Hydroforming technology provides an attractive alternative to conventional matched die forming, especially for cost-sensitive, lower volume production, and for parts with irregular contours. In this study the critical fluid pressures which lead to rupture in the workpiece has been investigated by theoretical and finite element methods. The axisymmetric analysis was developed to investigate the tearing phenomenon in cylindrical Hydroforming Deep Drawing (HDD). By use of obtained equations the effect of anisotropy, drawing ratio, sheet thickness and strain hardening exponent on tearing diagram were investigated.

Keywords: Hydroforming deep drawing, Pressure path, Axisymmetric analysis, Finite element simulation.

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1324 An Investigation on Hot-Spot Temperature Calculation Methods of Power Transformers

Authors: Ahmet Y. Arabul, Ibrahim Senol, Fatma Keskin Arabul, Mustafa G. Aydeniz, Yasemin Oner, Gokhan Kalkan

Abstract:

In the standards of IEC 60076-2 and IEC 60076-7, three different hot-spot temperature estimation methods are suggested. In this study, the algorithms which used in hot-spot temperature calculations are analyzed by comparing the algorithms with the results of an experimental set-up made by a Transformer Monitoring System (TMS) in use. In tested system, TMS uses only top oil temperature and load ratio for hot-spot temperature calculation. And also, it uses some constants from standards which are on agreed statements tables. During the tests, it came out that hot-spot temperature calculation method is just making a simple calculation and not uses significant all other variables that could affect the hot-spot temperature.

Keywords: Hot-spot temperature, monitoring system, power transformer, smart grid.

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1323 Radioactivity of the Agricultural Soil in Northern Province of Serbia, Vojvodina

Authors: I. Bikit, S. Forkapic, J. Nikolov, N. Todorovic, D. Mrdja

Abstract:

During the year 1999, Serbia (ex Yugoslavia) and their northern province, Vojvodina, has been bombarded. Because of that general public believe is that this region was contaminated by depleted uranium and that there is a potential contaminant of agricultural products due to soil radioactivity. This paper presents the repeated analysis of agricultural soil samples in Vojvodina. The same investigation was carried out during the year 2001, and it was concluded that, based on the gamma-spectrometric analysis of 50 soil samples taken from the region of Vojvodina, there haven-t been registered any increase of radioactivity that could endanger the food production. We continue with the monitoring of this region. The comparison between those two sets of results is presented.

Keywords: gamma spectrometry analysis, radioactivity of theagricultural soil.

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1322 EBSD Investigation of Friction Stir Welded Duplex Stainless Steel

Authors: T. Saeid, A. Abdollah-zadeh, T. Shibayanagi, K. Ikeuchi, H. Assadi

Abstract:

Electron back-scattered diffraction was used to follow the evolution of microstructure from the base metal to the stir zone (SZ) in a duplex stainless steel subjected to friction stir welding. In the stir zone (SZ), a continuous dynamic recrystallization (CDRX) was evidenced for ferrite, while it was suggested that a static recrystallization together with CDRX may occur for austenite. It was found that ferrite and austenite grains in the SZ take a typical shear texture of bcc and fcc materials respectively.

Keywords: Friction stir welding, Dynamic recrystallization, Electron backscattering diffraction (EBSD), Duplex stainless steel

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1321 The Event of the World in Martin Heidegger’s Early Hermeneutical Phenomenology

Authors: Guelfo Carbone

Abstract:

The paper focuses on Heidegger’s 1919-1920 early research in order to point out his hermeneutical phenomenology of the life-world, arguing that the concept of world (Welt) is the main philosophical trigger for the phenomenology of factical life. Accordingly, the argument of the paper is twofold: First, the phenomenological hermeneutics of facticity is preceded both chronologically and philosophically by an original phenomenological investigation of life-world, in which the world is construed as the context of the givenness of life. Second, the phenomenology of life-world anticipates the question of being (Seinsfrage), but it also follows it, once this latter is shattered, the question of world as event remaining at the very core of Heidegger’s last meditations on the dominion of technology and the post-metaphysical abode of human beings on earth.

Keywords: Life-world, Heidegger, phenomenology, hermeneutics.

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1320 Winding Numbers of Paths of Analytic Functions Zeros in Finite Quantum Systems

Authors: Muna Tabuni

Abstract:

The paper contains an investigation of winding numbers of paths of zeros of analytic theta functions. We have considered briefly an analytic representation of finite quantum systems ZN. The analytic functions on a torus have exactly N zeros. The brief introduction to the zeros of analytic functions and there time evolution is given. We have discussed the periodic finite quantum systems. We have introduced the winding numbers in general. We consider the winding numbers of the zeros of analytic theta functions.

Keywords: Winding numbers, period, paths of zeros.

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1319 Experimental Investigation of the Effect of Hydrogen Manifold Injection on the Performance of Compression Ignition Engines

Authors: Haroun A.K. Shahad, Nabeel Abdul-Hadi

Abstract:

Experiments were carried out to evaluate the influence of the addition of hydrogen to the inlet air on the performance of a single cylinder direct injection diesel engine. Hydrogen was injected in the inlet manifold. The addition of hydrogen was done on energy replacement basis. It was found that the addition of hydrogen improves the combustion process due to superior combustion characteristics of hydrogen in comparison to conventional diesel fuels. It was also found that 10% energy replacement improves the engine thermal efficiency by about 40% and reduces the sfc by about 35% however the volumetric efficiency was reduced by about 35%.

Keywords: Hydrogen, Blended fuel, Manifold injection , Performance , Combustion

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1318 Numerical Investigation of the Jacketing Method of Reinforced Concrete Column

Authors: S. Boukais, A. Nekmouche, N. Khelil, A. Kezmane

Abstract:

The first intent of this study is to develop a finite element model that can predict correctly the behavior of the reinforced concrete column. Second aim is to use the finite element model to investigate and evaluate the effect of the strengthening method by jacketing of the reinforced concrete column, by considering different interface contact between the old and the new concrete. Four models were evaluated, one by considering perfect contact, the other three models by using friction coefficient of 0.1, 0.3 and 0.5. The simulation was carried out by using Abaqus software. The obtained results show that the jacketing reinforcement led to significant increase of the global performance of the behavior of the simulated reinforced concrete column.

Keywords: Strengthening, jacketing, reinforced concrete column, 3D simulation, Abaqus.

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1317 A Framework for SQL Learning: Linking Learning Taxonomy, Cognitive Model and Cross Cutting Factors

Authors: Huda Al Shuaily, Karen Renaud

Abstract:

Databases comprise the foundation of most software systems. System developers inevitably write code to query these databases. The de facto language for querying is SQL and this, consequently, is the default language taught by higher education institutions. There is evidence that learners find it hard to master SQL, harder than mastering other programming languages such as Java. Educators do not agree about explanations for this seeming anomaly. Further investigation may well reveal the reasons. In this paper, we report on our investigations into how novices learn SQL, the actual problems they experience when writing SQL, as well as the differences between expert and novice SQL query writers. We conclude by presenting a model of SQL learning that should inform the instructional material design process better to support the SQL learning process.

Keywords: Pattern, SQL, learning, model.

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1316 Characterization of Silica Nanoparticles in Interaction with Escherichia coli Bacteria

Authors: Ibtissem Gammoudi, Ndeye Rokhaya Faye, Fabien Moroté, Daniel Moynet, Christine Grauby-Heywang, Touria Cohen-Bouhacina

Abstract:

The objective of the present investigation was to evaluate the morphology of Escherchia coli bacteria in interaction with SiO2 nanoparticles. This study was made by atomic force microscopy and quartz crystal microbalance using SiO2 nanoparticles with 10nm, 50nm and 100nm diameter and bacteria immobilized on polyelectrolyte multilayer films obtained by spin coating or by “layer by layer” (LbL) method.

Keywords: Atomic Force Microscopy, Escherichia coli, Quartz Crystal Microbalance, polyelectrolyte, silica nanoparticle.

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1315 Investigation of Main Operating Parameters Affecting Gas Turbine Efficiency and Gas Releases

Authors: Farhat Hajer, Khir Tahar, Ammar Ben Brahim

Abstract:

This work presents a study on the influence of the main operating variables on the gas turbine cycle. A numerical simulation of a gas turbine cycle is performed for a real net power of 100 MW. A calculation code is developed using EES software. The operating variables are taken in conformity with the local environmental conditions adopted by the Tunisian Society of Electricity and Gas. Results show that the increase of ambient temperature leads to an increase of Tpz and NOx emissions rate and a decrease of cycle efficiency and UHC emissions. The CO emissions decrease with the raise of residence time, while NOx emissions rate increases and UHC emissions rate decreases. Furthermore, both of cycle efficiency and NOx emissions increase with the increase of the pressure ratio.

Keywords: CO, efficiency, gas turbine, NOx, UHC.

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1314 Identification of Impact of Electromagnetic Fields at Low and High Frequency on Human Body

Authors: P. Sowa

Abstract:

The article reviews the current state of large-scale studies about the impact of electromagnetic field on natural environment. The scenario of investigations – simulation of natural conditions at the workplace, taking into consideration the influence both low and high frequency electromagnetic fields is shown.The biological effects of low and high frequency electromagnetic fields are below presented. Results of investigation with animals are shown. The norms and regulations concerning the levels of electromagnetic field intensity are reviewed.

Keywords: Electromagnetic field and environment, biological effects of electric field on human body, simulation of natural condition at workplace

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1313 Compressive Strength Development of Normal Concrete and Self-Consolidating Concrete Incorporated with GGBS

Authors: M. Nili, S. Tavasoli, A. R. Yazdandoost

Abstract:

In this paper, an experimental investigation on the effect of Isfahan Ground Granulate Blast Furnace Slag (GGBS) on the compressive strength development of self-consolidating concrete (SCC) and normal concrete (NC) was performed. For this purpose, Portland cement type I was replaced with GGBS in various Portions. For NC and SCC Mixes, 10*10*10 cubic cm specimens were tested in 7, 28 and 91 days. It must be stated that in this research water to cement ratio was 0.44, cement used in cubic meter was 418 Kg/m³ and Superplasticizer (SP) Type III used in SCC based on Poly-Carboxylic acid. The results of experiments have shown that increasing GGBS Percentages in both types of concrete reduce Compressive strength in early ages.

Keywords: Compressive strength, GGBS, normal concrete, self-consolidating concrete.

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1312 Thermodynamic Study of Uranium Extraction from Tunisian Wet Process Phosphoric Acid

Authors: N. Khleifia, A. Hannachi, N. Abbes

Abstract:

In the present paper, an experimental investigation was conducted to study the thermodynamic of uranium extraction from Tunisian wet phosphoric acid using the synergistic solvent mixture of di-2-ethylhexyl phosphoric acid (DEHPA) and trioctyl phosphine oxid (TOPO) diluted in kerosene. The effect of different factors affecting the extraction process (temperature, TOPO and DEHPA concentrations) has been investigated. The obtained data of temperature effect on the extraction showed that the enthalpy change is -35.8 kJ.mol-1. The slope analysis method was used for determining the stoichiometry of the extracted species.

Keywords: DEHPA-TOPO, extraction, phosphoric acid, stoichiometry, uranium.

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1311 Compact Slotted Broadband Antenna for Wireless Applications

Authors: M. M. Sharma, Swati Gupta, Deepak Bhatnagar, R. P. Yadav

Abstract:

This paper presents the theoretical investigation of a slotted patch antenna. The main objective of proposed work is to obtain a large bandwidth antenna with reduced size. The antenna has a compact size of 21.1mm x 20.25mm x 8.5mm. Two designs with minor variation are studied which provide wide impedance bandwidths of 24.056% and 25.63% respectively with the use of parasitic elements when excited by a probe feed. The advantages of this configuration are its compact size and the wide range of frequencies covered. A parametric study is also conducted to investigate the characteristics of the antenna under different conditions. The measured return loss and radiation pattern indicate the suitability of this design for WLAN applications, namely, Wi- Max, 802.11a/b/g and ISM bands.

Keywords: Inset feed, microstrip antenna, parasitic patch, shorting wall, slot, wi-max.

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1310 Analysis and Experimentation of Interleaved Boost Converter with Ripple Steering for Power Factor Correction

Authors: A. Inba Rexy, R. Seyezhai

Abstract:

Through the fast growing technologies, design of power factor correction (PFC) circuit is facing several challenges. In this paper, a two-phase interleaved boost converter with ripple steering technique is proposed. Among the various topologies, Interleaved Boost converter (IBC) is considered as superior due to enriched performance, lower ripple content, compact weight and size. A thorough investigation is presented here for the proposed topology. Simulation study for the IBC has been carried out using MATLAB/SIMULINK. Theoretical analysis and hardware prototype has been performed to validate the results.

Keywords: Interleaved Boost Converter (IBC), Power Factor Correction (PFC), Ripple Steering Technique, Ripple, and Simulation.

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1309 An Investigation of Quality Practices in Libyan Industrial Companies

Authors: Mostafa A. Shokshok, Omran Ali Abu Krais

Abstract:

This paper describes the collection and analysis of data obtained from face-to-face interviews conducted in selected Libyan industrial companies. The objectives of the interviews are to enhance understanding, and generate explanations of current issues in culture and quality management systems in Libyan companies. The method used in analyzing the questions, as well as the main finding of each question are explained. The interviews probed areas identify national and organizational culture, quality management systems, current methods, effects, barriers and other factors affecting the success of quality management implementation. Eleven questions are prepared and been discussed with the interviewees.

Keywords: Interviews, quality, culture, Libyan industrial companies.

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1308 Conceptual Design of Aeroelastic Demonstrator for Whirl Flutter Simulation

Authors: J. Cecrdle, J. Malecek

Abstract:

This paper deals with the conceptual design of the new aeroelastic demonstrator for the whirl flutter simulation. The paper gives a theoretical background of the whirl flutter phenomenon and describes the events of the whirl flutter occurrence in the aerospace practice. The second part is focused on the experimental research of the whirl flutter on aeroelastic similar models. Finally the concept of the new aeroelastic demonstrator is described. The demonstrator represents the wing and engine of the twin turboprop commuter aircraft including a driven propeller. It allows the changes of the main structural parameters influencing the whirl flutter stability characteristics. It is intended for the experimental investigation of the whirl flutter in the wind tunnel. The results will be utilized for validation of analytical methods and software tools.

Keywords: aeroelasticity, flutter, whirl flutter, W-WING demonstrator

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1307 Detection of Leaks in Water Mains Using Ground Penetrating Radar

Authors: Alaa Al Hawari, Mohammad Khader, Tarek Zayed, Osama Moselhi

Abstract:

Ground Penetrating Radar (GPR) is one of the most effective electromagnetic techniques for non-destructive non-invasive subsurface features investigation. Water leak from pipelines is the most common undesirable reason of potable water losses. Rapid detection of such losses is going to enhance the use of the Water Distribution Networks (WDN) and decrease threatens associated with water mains leaks. In this study, GPR approach was developed to detect leaks by implementing an appropriate imaging analyzing strategy based on image refinement, reflection polarity and reflection amplitude that would ease the process of interpreting the collected raw radargram image.

Keywords: Water Networks, Leakage, Water pipelines, Ground Penetrating Radar.

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1306 The Attitude towards Sustainable Development Issues among Malaysian Engineering Undergraduates

Authors: Balamuralithara Balakrishnan

Abstract:

This paper reports the findings of the perception and attitude towards Sustainable Development among Malaysian undergraduates. The study was carried out involving 86 engineering undergraduates from three universities in Malaysia. This research was conducted based on a survey whereby the respondents were given a questionnaire to gauge their attitude towards sustainable development. The output of the analyses showed that the respondents have an appropriate attitude towards the sustainability issues expect for economic and social equality aspects. These findings suggest that the engineering educators involved in sustainable development education need to educate undergraduate students on this important issue. This investigation serves as a cornerstone to which the current paradigm of sustainable development education can be examined for further improvement by related stakeholders.

Keywords: Sustainable development, engineering education, Malaysia, attitude.

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1305 Estimating the Technological Deviation Impact on the Value of the Output Parameter of the Induction Converter

Authors: Marinka K. Baghdasaryan, Siranush M. Muradyan, Avgen A. Gasparyan

Abstract:

Based on the experimental data, the impact of resistance and reactance of the winding, as well as the magnetic permeability of the magnetic circuit steel material on the value of the electromotive force of the induction converter is investigated. The obtained results allow estimating the main technological spreads and determining the maximum level of the electromotive force change. By the method of experiment planning, the expression of a polynomial for the electromotive force which can be used to estimate the adequacy of mathematical models to be used at the investigation and design of induction converters is obtained.

Keywords: Induction converter, electromotive force, expectation, technological spread, deviation, planning an experiment, polynomial, confidence level.

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1304 Numerical Investigation of Flow Past Cylinderin Cross Flow

Authors: M. H. Alhajeri, Jasem Alrajhi, Mohsen Alardhi, Saleh Alhajeri

Abstract:

A numerical prediction of flow in a tube bank is reported. The flow regimes considered cover a wide range of Reynolds numbers, which range from 380 to 99000 and which are equivalent to a range of inlet velocities from very low (0.072 m/s) to very high (60 m/s). In this study, calculations were made using the standard k-e model with standard wall function. The drag coefficient, skin friction drag, pressure drag, and pressure distribution around a tube were investigated. As the velocity increased, the drag coefficient decreased until the velocity exceeded 45 m/s, after which it increased. Furthermore, the pressure drag and skin friction drag depend on the velocity.

Keywords: Numerical, Fluid, Flow, Turbine, Cooling, Blade.

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1303 Operation Stability Enhancement in Once-Through Micro Evaporators

Authors: Cor M. Rops, Giaco C. Oosterbaan, Cees W.M. v/d Geld

Abstract:

Equipment miniaturisation offers several opportunities such as an increased surface-to-volume ratio and higher heat transfer coefficients. However, moving towards small-diameter channels demands extra attention to fouling, reliability and stable operation of the system. The present investigation explores possibilities to enhance the stability of the once-through micro evaporator by reducing its flow boiling induced pressure fluctuations. Experimental comparison shows that the measured reduction factor approaches a theoretically derived value. Pressure fluctuations are reduced by a factor of ten in the solid conical channel and a factor of 15 in the porous conical channel. This presumably leads to less backflow and therefore to a better flow control.

Keywords: Flow boiling, Operation stability, Microfluidics, Microchannels.

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1302 Investigation on Fluid Flow and Heat Transfer Characteristics in Spray Cooling Systems Using Nanofluids

Authors: D. H. Lee, Nur Irmawati

Abstract:

This paper aims to study the heat transfer and fluid flow characteristics of nanofluids used in spray cooling systems. The effect of spray height, type of nanofluids and concentration of nanofluids are numerically investigated. Five different nanofluids such as AgH2O, Al2O3, CuO, SiO2 and TiO2 with volume fraction range of 0.5% to 2.5% are used. The results revealed that the heat transfer performance decreases as spray height increases. It is found that TiO2 has the highest transfer coefficient among other nanofluids. In dilute spray conditions, low concentration of nanofluids is observed to be more effective in heat removal in a spray cooling system.

Keywords: Numerical simulation, Spray cooling, Heat transfer, Nanofluids.

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1301 Investigation of Stability of Functionally Graded Material when Encountering Periodic Loading

Authors: M. Amiri

Abstract:

In this work, functionally graded materials (FGMs), subjected to loading, which varies with time has been studied. The material properties of FGM are changing through the thickness of material as power law distribution. The conical shells have been chosen for this study so in the first step capability equations for FGM have been obtained. With Galerkin method, these equations have been replaced with time dependant differential equations with variable coefficient. These equations have solved for different initial conditions with variation methods. Important parameters in loading conditions are semi-vertex angle, external pressure and material properties. Results validation has been done by comparison between with those in previous studies of other researchers.

Keywords: Impulsive semi-vertex angle, loading, functionally graded materials, composite material.

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1300 Artificial Neural Network Model Based Setup Period Estimation for Polymer Cutting

Authors: Zsolt János Viharos, Krisztián Balázs Kis, Imre Paniti, Gábor Belső, Péter Németh, János Farkas

Abstract:

The paper presents the results and industrial applications in the production setup period estimation based on industrial data inherited from the field of polymer cutting. The literature of polymer cutting is very limited considering the number of publications. The first polymer cutting machine is known since the second half of the 20th century; however, the production of polymer parts with this kind of technology is still a challenging research topic. The products of the applying industrial partner must met high technical requirements, as they are used in medical, measurement instrumentation and painting industry branches. Typically, 20% of these parts are new work, which means every five years almost the entire product portfolio is replaced in their low series manufacturing environment. Consequently, it requires a flexible production system, where the estimation of the frequent setup periods' lengths is one of the key success factors. In the investigation, several (input) parameters have been studied and grouped to create an adequate training information set for an artificial neural network as a base for the estimation of the individual setup periods. In the first group, product information is collected such as the product name and number of items. The second group contains material data like material type and colour. In the third group, surface quality and tolerance information are collected including the finest surface and tightest (or narrowest) tolerance. The fourth group contains the setup data like machine type and work shift. One source of these parameters is the Manufacturing Execution System (MES) but some data were also collected from Computer Aided Design (CAD) drawings. The number of the applied tools is one of the key factors on which the industrial partners’ estimations were based previously. The artificial neural network model was trained on several thousands of real industrial data. The mean estimation accuracy of the setup periods' lengths was improved by 30%, and in the same time the deviation of the prognosis was also improved by 50%. Furthermore, an investigation on the mentioned parameter groups considering the manufacturing order was also researched. The paper also highlights the manufacturing introduction experiences and further improvements of the proposed methods, both on the shop floor and on the quotation preparation fields. Every week more than 100 real industrial setup events are given and the related data are collected.

Keywords: Artificial neural network, low series manufacturing, polymer cutting, setup period estimation.

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1299 Information and Communication Technologies vs. Education and Training: Contribution to Understand the Millennials’ Generational Effect

Authors: Fauquet-Alekhine Philippe

Abstract:

Information and Communication Technologies (ICT) are increasing in importance everyday, especially since the 90’s (last decade of birth for the Millennials generation). While social interactions involving the Millennials generation have been studied, a lack of investigation remains regarding the use of the ICT by this generation as well as the impact on outcomes in education and professional training. Observing and interviewing students preparing a MSc, we aimed at characterizing the interaction students-ICT during the courses. We found that up to 50% of the students (mainly female) could use ICT during courses at a rate of 0.84 occurrence/minutes for some of them, and they thought this involvement did not disturb learning, even was helpful. As recent researches show that multitasking leads people think they are much better than they actually are, further observations with assessments are needed to conclude whether or not the use ICT by students during the courses is a real strength.

Keywords: Education, ICT, generational effect, training.

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1298 Study of Fast Etching of Silicon for the Fabrication of Bulk Micromachined MEMS Structures

Authors: V. Swarnalatha, A. V. Narasimha Rao, P. Pal

Abstract:

The present research reports the investigation of fast etching of silicon for the fabrication of microelectromechanical systems (MEMS) structures using silicon wet bulk micromachining. Low concentration tetramethyl-ammonium hydroxide (TMAH) and hydroxylamine (NH2OH) are used as main etchant and additive, respectively. The concentration of NH2OH is varied to optimize the composition to achieve best etching characteristics such as high etch rate, significantly high undercutting at convex corner for the fast release of the microstructures from the substrate, and improved etched surface morphology. These etching characteristics are studied on Si{100} and Si{110} wafers as they are most widely used in the fabrication of MEMS structures as wells diode, transistors and integrated circuits.

Keywords: KOH, MEMS, micromachining, silicon, TMAH, wet anisotropic etching.

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