Search results for: Technological Device.
822 The Development of New Technologies for Medicine and Agroecology by Using Spherosomes
Authors: Gilmanov M. K., Gilmanova S. M.
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Article devoted to the development of technologies for medicine and agroecology by using plant organelle – spherosome. Technological method of purification and isolation of this organelle by using novel nanostructured carbon sorbent – “nanocarbosorb" ARK type are presented. Also the methods of preparation of nanocontainers based on using of spherosome with loaded isosorbide dinitrate, piroxicam or diclofenak are exhibited. We found that the spherosome could be applied for ecological aims as bioregulator and also as biosensor for determination of ammonia ions in water reservoirs at concentration range 1mM to 100mM.Keywords: Biosensor, nanocontainer, phosphatidylinositol, spherosome, vegetative reproduction.
Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 1430821 The Journey from Lean Manufacturing to Industry 4.0: The Rail Manufacturing Process in Mexico
Authors: Diana Flores Galindo, Richard Gil Herrera
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Nowadays, Lean Manufacturing and Industry 4.0 are very important in every country. One of the main benefits is continued market presence. It has been identified that there is a need to change existing educational programs, as well as update the knowledge and skills of existing employees. It should be borne in mind that behind each technological improvement, there is a human being. Human talent cannot be neglected. The main objectives of this article are to review the link between Lean Manufacturing, the incorporation of Industry 4.0 and the steps to follow to implement it; analyze the current situation and study the implications and benefits of this new trend, with a particular focus on Mexico. Lean Manufacturing and Industry 4.0 implementation waves must always take care of the most important capital – intellectual capital. The methodology used in this article comprised the following steps: reviewing the reality of the fourth industrial revolution, reviewing employees’ skills on the journey to become world-class, and analyzing the situation in Mexico. Lean Manufacturing and Industry 4.0 were studied not as exclusive concepts, but as complementary ones. The methodological framework used is focused on motivating companies’ collaborators to guarantee common results, innovate, and remain in the market in the face of new requirements from company stakeholders. The key findings were that both trends emphasize the need to improve communication across the entire company and incorporate new technologies into everyday work, from the shop floor to administrative staff, to help improve processes. Taking care of people, activities and processes will bring a company success. In the specific case of Mexico, companies in all sectors need to be aware of and implement technological improvements according to their specific needs. Low-cost labor represents one of the most typical barriers. In conclusion, companies must build a roadmap according to their strategy and needs to achieve their short, medium- and long-term goals.
Keywords: Lean management, lean manufacturing, industry 4.0, motivation, SWOT analysis, Hoshin Kanri.
Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 838820 On the Characteristics of Liquid Explosive Dispersing Flow
Authors: Lei Li, Xiaobing Ren, Xiaoxia Lu, Xiaofang Yan
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In this paper, some experiments of liquid dispersion flow driven by explosion in vertical plane were carried out using a liquid explosive dispersion device with film cylindrical constraints. The separated time series describing the breakup shape and dispersion process of liquid were recorded with high speed CMOS camera. The experimental results were analyzed and some essential characteristics of liquid dispersing flow are presented.
Keywords: Explosive Disseminations, liquid dispersion Flow, Cavitations, Gasification.
Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 1809819 Estimating the Absorbed Dose to THYROID during Chest wall Radiotherapy
Authors: Seid Ali Asghar Terohid, Vahid Fayaz
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Thyroid cancer-s overall contribution to the worldwide cancer burden is relatively small, but incidence rates have increased over the last three decades throughout the world. This trend has been hypothesised to reflect a combination of technological advances enabling increased detection, but also changes in environmental factors, including population exposure to ionising radiation from fallout, diagnostic tests and treatment for benign and malignant conditions. The Thyroid dose received apparently shielded by cerrobend blocks was about 8cGy in 100cGy ExposeKeywords: Absorbed Dose, Thyroid, Radiotherapy
Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 1702818 Experimental Analyses of Thermoelectric Generator Behavior Using Two Types of Thermoelectric Modules for Marine Application
Authors: A. Nour Eddine, D. Chalet, L. Aixala, P. Chessé, X. Faure, N. Hatat
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Thermal power technology such as the TEG (Thermo-Electric Generator) arouses significant attention worldwide for waste heat recovery. Despite the potential benefits of marine application due to the permanent heat sink from sea water, no significant studies on this application were to be found. In this study, a test rig has been designed and built to test the performance of the TEG on engine operating points. The TEG device is built from commercially available materials for the sake of possible economical application. Two types of commercial TEM (thermo electric module) have been studied separately on the test rig. The engine data were extracted from a commercial Diesel engine since it shares the same principle in terms of engine efficiency and exhaust with the marine Diesel engine. An open circuit water cooling system is used to replicate the sea water cold source. The characterization tests showed that the silicium-germanium alloys TEM proved a remarkable reliability on all engine operating points, with no significant deterioration of performance even under sever variation in the hot source conditions. The performance of the bismuth-telluride alloys was 100% better than the first type of TEM but it showed a deterioration in power generation when the air temperature exceeds 300 °C. The temperature distribution on the heat exchange surfaces revealed no useful combination of these two types of TEM with this tube length, since the surface temperature difference between both ends is no more than 10 °C. This study exposed the perspective of use of TEG technology for marine engine exhaust heat recovery. Although the results suggested non-sufficient power generation from the low cost commercial TEM used, it provides valuable information about TEG device optimization, including the design of heat exchanger and the types of thermo-electric materials.
Keywords: Internal combustion engine application, Seebeck, thermo-electricity, waste heat recovery.
Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 1619817 Implementation of Parallel Interface for Microprocessor Trainer
Authors: Moe Moe Htun, Khin Htar Nwe
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In this paper, parallel interface for microprocessor trainer was implemented. A programmable parallel–port device such as the IC 8255A is initialized for simple input or output and for handshake input or output by choosing kinds of modes. The hardware connections and the programs can be used to interface microprocessor trainer and a personal computer by using IC 8255A. The assembly programs edited on PC-s editor can be downloaded to the trainer.Keywords: Parallel I/O ports, parallel interface, trainer, two 8255 ICs.
Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 3169816 Experimental Characterization of a Thermoacoustic Travelling-Wave Refrigerator
Authors: M. Pierens, J.-P. Thermeau, T. Le Pollès, P. Duthil
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The performances of a thermoacoustic travelling-wave refrigerator are presented. Developed in the frame of the European project called THATEA, it is designed for providing 600 W at a temperature of 233 K with an efficiency of 40 % relative to the Carnot efficiency. This paper presents the device and the results of the first measurements. For a cooling power of 210 W, a coefficient of performance relative to Carnot of 30 % is achieved when the refrigerator is coupled with an existing standing-wave engine.Keywords: Refrigeration, sustainable energy, thermoacoustics, travelling-wave type heat pump
Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 1628815 Addressing Scheme for IOT Network Using IPV6
Authors: H. Zormati, J. Chebil, J. Bel Hadj Taher
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The goal of this paper is to present an addressing scheme that allows for assigning a unique IPv6 address to each node in the Internet of Things (IoT) network. This scheme guarantees uniqueness by extracting the clock skew of each communication device and converting it into an IPv6 address. Simulation analysis confirms that the presented scheme provides reductions in terms of energy consumption, communication overhead and response time as compared to four studied addressing schemes Strong DAD, LEADS, SIPA and CLOSA.
Keywords: Addressing, IoT, IPv6, network, nodes.
Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 966814 Customer Value Creation by CRM System in Electronic Device Companies
Authors: Hideki.Kobayashi, Hiroshi.Osada
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The service industry accounts for about 70% of GDP of Japan, and the importance of the service innovation is pointed out. The importance of the system use and the support service increases in the information system that is one of the service industries. However, because the system is not used enough, the purpose for which it was originally intended cannot often be achieved in the CRM system. To promote the use of the system, the effective service method is needed. It is thought that the service model's making and the clarification of the success factors are necessary to improve the operation service of the CRM system. In this research the model of the operation service in the CRM system is made.Keywords: Information system, Operation service, Serviceinnovation, Solution
Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 1316813 A Review on the Comparison of EU Countries Based on Research and Development Efficiencies
Authors: Yeliz Ekinci, Raife Merve Ön
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Nowadays, technological progress is one of the most important components of economic growth and the efficiency of R&D activities is particularly essential for countries. This study is an attempt to analyze the R&D efficiencies of EU countries. The indicators related to R&D efficiencies should be determined in advance in order to use DEA. For this reason a list of input and output indicators are derived from the literature review. Considering the data availability, a final list is given for the numerical analysis for future research.Keywords: Data envelopment analysis, economic growth, EU Countries, R&D efficiency.
Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 2043812 Numerical Analysis of All-Optical Microwave Mixing and Bandpass Filtering in an RoF Link
Authors: S. Khosroabadi, M. R. Salehi
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In this paper, all-optical signal processors that perform both microwave mixing and bandpass filtering in a radio-over-fiber (RoF) link are presented. The key device is a Mach-Zehnder modulator (MZM) which performs all-optical microwave mixing. An up-converted microwave signal is obtained and other unwanted frequency components are suppressed at the end of the fiber span.Keywords: Microwave mixing, bandpass filtering, all-optical, signal processing, MZM.
Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 1719811 Renewable Energy Trends Analysis: A Patents Study
Authors: Sepulveda Juan
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This article explains the elements and considerations taken into account when implementing and applying patent evaluation and scientometric study in the identifications of technology trends, and the tools that led to the implementation of a software application for patent revision. Univariate analysis helped recognize the technological leaders in the field of energy, and steered the way for a multivariate analysis of this sample, which allowed for a graphical description of the techniques of mature technologies, as well as the detection of emerging technologies. This article ends with a validation of the methodology as applied to the case of fuel cells.Keywords: Energy, technology mapping, patents.
Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 2187810 Education of Purchasing Professionals in Austria: Competence Based View
Authors: Volker Koch
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This paper deals with the education of purchasing professionals in Austria. In this education, equivalent and measurable criteria are collected in order to create a comparison. The comparison shows the problem. To make the aforementioned comparison possible, methodologies such as KODE-Competence Atlas or presentations in a matrix form are used. The result shows the content taught and whether there are any similarities or interesting differences in the current Austrian purchasers’ formations. Purchasing professionals learning competencies are also illustrated in the study result.Keywords: Competencies, education, purchasing professional, technological-oriented.
Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 1060809 Organizational Strategy for Technology Convergence
Authors: Seongykyoon Jeong, Sungki Lee, Jaeyun Kim, Seunghun Oh, Kiho Kwak
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The purpose of this article is to identify the practical strategies of R&D (research and development) entities for developing converging technology in organizational context. Based on the multi-assignation technological domains of patents derived from entire government-supported R&D projects for 13 years, we find that technology convergence is likely to occur when a university solely develops technology or when university develops technology as one of the collaborators. These results reflect the important role of universities in developing converging technology
Keywords: Interdisciplinary, Research and development strategy, Technology convergence
Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 1932808 Energy Saving Suction Hood
Authors: I.Daut, N. Gomesh, M. Irwanto, Y. M. Irwan
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Public awareness towards green energy are on the rise and this can be prove by many product being manufactured or prerequired to be made as energy saving devices mainly to save consumer from spending more on utility billing. These schemes are popular nowadays and many homemade appliances are turned into energy saving gadget which attracts the attention of consumers. Knowing the public demands and pattern towards purchasing home appliances thus the idea of “energy saving suction hood (ESSH)" is proposed. The ESSH can be used in many places that require smoke ventilation or even to reduce the room temperature as many conventional suction hoods (CSH) do, but this device works automatically by the usage of sensors that detects the smoke/temperature and automatically spins the exhaust fan. As it turns, the mechanical rotation rotates the AC generator which is coupled together with the fan and then charges the battery. The innovation of this product is, it does not rely on the utility supply as it is also hook up with a solar panel which also charges the battery, Secondly, it generates energy as the exhaust fan mechanically rotates. Thirdly, an energy loop back feature is introduced to this system which will supply for the ventilator fan. Another major innovation is towards interfacing this device with an in house production of generator. This generator is produced by proper design on stator as well as rotor to reduce the losses. A comparison is made between the ESSH and the CSH and result shows that the ESSH saves 172.8kWh/year of utility supply which is used by CSH. This amount of energy can save RM 3.14 from monthly utility bill and a total of RM 37.67 per year. In fact this product can generate 175 Watt of power from generator(75W) and solar panel(100W) that can be used either to supply other household appliances and/or to loop back to supply the fans motor. The innovation of this system is essential for future production of other equipment by using the loopback power method and turning most equipment into a standalone system.
Keywords: Energy saving suction hood (ESSH), conventional suction hoods (CSH), energy, and power
Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 1886807 Angle Analyzer of an Encoder using the LabVIEW
Authors: Hyun-Min Kim, Yun-Seok Lim, Hyeok-Jin Yun, Jang-Mok Kim, Hee-je Kim
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As we make progressive products for good works, and future industries want to get higher speed and resolution from various developments in the robotics as well as precise control system, the concept of control feedback is getting more important. Within a range of industrial developments, the concept is most responsible for the high reliability of a device. We explain an efficient analyzing method of a rotary encoder such as an incremental type encoder and absolute type encoder using the LabVIEW programKeywords: LabVIEW, PFI Function, Angle analyzer, Incremental encoder, Absolute encoder
Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 3999806 A Primer to the Learning Readiness Assessment to Raise the Sharing of e-Health Knowledge amongst Libyan Nurses
Authors: Mohamed Elhadi M. Sharif, Mona Masood
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The usage of e-health facilities is seen to be the first priority by the Libyan government. As such this paper focuses on how the key factors or elements of working size in terms of technological availability, structural environment, and other competence-related matters may affect nurses’ sharing of knowledge in e-health. Hence, this paper investigates learning readiness assessment to raise e-health for Libyan regional hospitals by using ehealth services in nursing education.
Keywords: Libyan nurses, e-Learning readiness, e-Health.
Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 2172805 Loop Heat Pipe: Simple Thermodynamic
Authors: Mohammad Hamdan, Emad Elnajjar
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The LHP is a two-phase device with extremely high effective thermal conductivity that utilizes the thermodynamic pressure difference to circulate a cooling fluid. A thermodynamics analytical model is developed to explore different parameters effects on a Loop Heat Pipe (LHP).. The effects of pipe length, pipe diameter, condenser temperature, and heat load are reported. As pipe length increases and/or pipe diameter decreases, a higher temperature is expected in the evaporator.Keywords: Loop Heat Pipe, LHP, Passive Cooling, CapillaryForce.
Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 2813804 High Wire Act: the Perils, Pitfalls and Possibilities of Online Discussions
Authors: Karen Armstrong
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Online discussions are an important component of both blended and online courses. This paper examines the varieties of online discussions and the perils, pitfalls and possibilities of this rather new technological tool for enhanced learning. The discussion begins with possible perils and pitfalls inherent in this educational tool and moves to a consideration of the advantages of the varieties of online discussions feasible for use in teacher education programs.Keywords: online discussions, computer-mediatedcommunication (CMC), computer-supported collaborative learning(CSCL), e-learning, teacher education
Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 2599803 The Impact of e-Learning and e-Teaching
Authors: Mohammad Mohammad
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With the exponential progress of technological development comes a strong sense that events are moving too quickly for our schools and that teachers may be losing control of them in the process. This paper examines the impact of e-learning and e-teaching in universities, from both the student and teacher perspective. In particular, it is shown that e-teachers should focus not only on the technical capacities and functions of IT materials and activities, but must attempt to more fully understand how their e-learners perceive the learning environment. From the e-learner perspective, this paper indicates that simply having IT tools available does not automatically translate into all students becoming effective learners. More evidence-based evaluative research is needed to allow e-learning and e-teaching to reach full potential.Keywords: e-learning, e-teaching, distance learning, education
Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 4825802 Temperature Sensor IC Design for Intracranial Monitoring Device
Authors: Wai Pan Chan, Minkyu Je
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A precision CMOS chopping amplifier is adopted in this work to improve a CMOS temperature sensor high sensitive enough for intracranial temperature monitoring. An amplified temperature sensitivity of 18.8 ± 3*0.2 mV/oC is attained over the temperature range from 20 oC to 80 oC from a given 10 samples of the same wafer. The analog frontend design outputs the temperature dependent and the temperature independent signals which can be directly interfaced to a 10 bit ADC to accomplish an accurate temperature instrumentation system.
Keywords: Chopping, analog frontend, CMOS temperature sensor, traumatic brain injury (TBI), intracranial temperature monitoring.
Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 1979801 Realization of Autonomous Guidance Service by Integrating Information from NFC and MEMS
Authors: Dawei Cai
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In this paper, we present an autonomous guidance service by combinating the position information from NFC and the orientation information from 6 a 6 axis acceleration and terrestrial magnetism sensor. We developed an algorithm to calculate the device orientation based on the data from acceleration and terrestrial magnetism sensor.With this function, a autonomous guidance service can be provided, according the visitors's position and orientation. This service may be convient for old people or disables or children.
Keywords: NFC, Ubiquitous Computing, Guide Sysem, MEMS.
Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 1656800 Non Inmersive Virtual Reality for Improving Teaching Processes
Authors: Galeano R. Katherine, Rincon L. David, Luengas. Lely, Guevara. Juan Carlos
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The following paper shows an interactive tool which main purpose is to teach how to play a flute. It consists of three stages the first one is the instruction and teaching process through a software application, the second is the practice part when the user starts to play the flute (hardware specially designed for this application) this flute is capable of capturing how is being played the flute and the final stage is the one in which the data captured are sent to the software and the user is evaluated in order to give him / she a correction or an acceptanceKeywords: acoustoelectric devices, computer applications, learning systems, music, technological innovation, virtual reality
Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 1613799 e-Commerce versus m-Commerce: Where is the Dividing Line?
Authors: Priscilla Omonedo, Paul Bocij
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Since the emergence of e-Commerce, the world of business has witnessed a radical shift in the way business activities are conducted. However, the emergence of m-Commerce has further pushed the boundaries of virtual commerce revolution. As a result, there seems to be a growing blur in the distinction between e- Commerce and m-Commerce. In addition, existing definitions for both forms of commerce highlight characteristics (e.g. type of device and activity conducted) that may be applicable to both concepts. The aim of this paper is to identify the characteristics that help define and delineate between e- and m- Commerce. The paper concludes that characteristics of mobility, ubiquity and immediacy provide a clearer and simpler template to distinguish between e-Commerce and m- Commerce.
Keywords: e-Commerce, m-Commerce, mobility, ubiquity.
Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 5360798 Digital Filter for Cochlear Implant Implemented on a Field- Programmable Gate Array
Authors: Rekha V. Dundur , M.V.Latte, S.Y. Kulkarni, M.K.Venkatesha
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The advent of multi-million gate Field Programmable Gate Arrays (FPGAs) with hardware support for multiplication opens an opportunity to recreate a significant portion of the front end of a human cochlea using this technology. In this paper we describe the implementation of the cochlear filter and show that it is entirely suited to a single device XC3S500 FPGA implementation .The filter gave a good fit to real time data with efficiency of hardware usage.Keywords: Cochlea, FPGA, IIR (Infinite Impulse Response), Multiplier.
Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 2322797 Signalling Cost Analysis of PDE-NEMO
Authors: Kamarularifin Abd Jalil, John Dunlop
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A Personal Distributed Environment (PDE) is an example of an IP-based system architecture designed for future mobile communications. In a single PDE, there exist several Subnetworks hosting devices located across the infrastructure, which will inter-work with one another through the coordination of a Device Management Entity (DME). Some of these Sub-networks are fixed and some are mobile. In order to support Mobile Sub-networks mobility in the PDE, the PDE-NEMO protocol was proposed. This paper discussed the signalling cost analysis of PDE-NEMO by use of a detailed simulation model. The paper started with the introduction of the protocol, followed by the experiments and results and then followed by discussions.Keywords: Mobile Network, PDE-NEMO, Signallling Cost.
Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 1397796 Comparison of Fundamental Frequency Model and PWM Based Model of UPFC
Authors: S.A. Al-Qallaf, S.A. Al-Mawsawi, A. Haider
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Among all FACTS devices, the unified power flow controller (UPFC) is considered to be the most versatile device. This is due to its capability to control all the transmission system parameters (impedance, voltage magnitude, and phase angle). With the growing interest in UPFC, the attention to develop a mathematical model has increased. Several models were introduced for UPFC in literature for different type of studies in power systems. In this paper a novel comparison study between two dynamic models of UPFC with their proposed control strategies.
Keywords: FACTS, UPFC, Dynamic Modeling, PWM, Fundamental Frequency.
Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 2220795 Determining the Workability of the New Metallurgical Materials
Authors: Ondrej Dupala, Josef Brychta, Robert Cep, Adam Janasek
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The aim of this paper is to experimentally discover the workability coefficient of the Inconel 718 material by using a slide turning machining. Two different types of cutting inserts, one made of carbide and the other one made of ceramic, are being used. The purpose is to compare measured results and recommend the appropriate materials and cutting parameters for a machining of the Inconel 718. Furthermore, the durability of inserts with the chosen wear criterion is being compared for different cutting speeds. Machinability of these materials is a crucial characteristic as it allows us to shorten the technological cycle time and increase the machining productivity. And this is of great importance from an economic point of view.
Keywords: Workability, Inconel 718, Turning Machining, Durability.
Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 1643794 Richtmyer-Meshkov Instability and Gas-Particle Interaction of Contoured Shock-Tube Flows: A Numerical Study
Authors: Yi Liu
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In this paper, computational fluid dynamics (CFD) is utilized to characterize a prototype biolistic delivery system, the biomedical device based on the contoured-shock-tube design (CST), with the aim at investigating shocks induced flow instabilities within the contoured shock tube. The shock/interface interactions, the growth of perturbation at an interface between two fluids of different density are interrogated. The key features of the gas dynamics and gas-particle interaction are discussed
Keywords: Simulation, Shock wave, Particle, Interface, Supersonic, Richtmyer-Meshkov Instability
Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 1763793 The Effects of RCA Clean Variables on Particle Removal Efficiency
Authors: Siti Kudnie Sahari, Jane Chai Hai Sing, Khairuddin Ab. Hamid
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Shrunken patterning for integrated device manufacturing requires surface cleanliness and surface smoothness in wet chemical processing [1]. It is necessary to control all process parameters perfectly especially for the common cleaning technique RCA clean (SC-1 and SC-2) [2]. In this paper the characteristic and effect of surface preparation parameters are discussed. The properties of RCA wet chemical processing in silicon technology is based on processing time, temperature, concentration and megasonic power of SC-1 and QDR. An improvement of wafer surface preparation by the enhanced variables of the wet cleaning chemical process is proposed.Keywords: RCA, SC-1, SC-2, QDR
Procedia APA BibTeX Chicago EndNote Harvard JSON MLA RIS XML ISO 690 PDF Downloads 3242