Search results for: wet anisotropic etching.

Authors: Shujun Fu, Qiuqi Ruan, Wenqia Wang

Abstract:

Image interpolation is a common problem in imaging applications. However, most interpolation algorithms in existence suffer visually the effects of blurred edges and jagged artifacts in the image to some extent. This paper presents an adaptive feature preserving bidirectional flow process, where an inverse diffusion is performed to sharpen edges along the normal directions to the isophote lines (edges), while a normal diffusion is done to remove artifacts (“jaggies") along the tangent directions. In order to preserve image features such as edges, corners and textures, the nonlinear diffusion coefficients are locally adjusted according to the directional derivatives of the image. Experimental results on synthetic images and nature images demonstrate that our interpolation algorithm substantially improves the subjective quality of the interpolated images over conventional interpolations.

Keywords: anisotropic diffusion, bidirectional flow, directional derivatives, edge enhancement, image interpolation, inverse flow, shock filter.

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Authors: Shujun Fu, Qiuqi Ruan, Wenqia Wang

Abstract:

Image interpolation is a common problem in imaging applications. However, most interpolation algorithms in existence suffer visually to some extent the effects of blurred edges and jagged artifacts in the image. This paper presents an adaptive feature preserving bidirectional flow process, where an inverse diffusion is performed to enhance edges along the normal directions to the isophote lines (edges), while a normal diffusion is done to remove artifacts (''jaggies'') along the tangent directions. In order to preserve image features such as edges, angles and textures, the nonlinear diffusion coefficients are locally adjusted according to the first and second order directional derivatives of the image. Experimental results on synthetic images and nature images demonstrate that our interpolation algorithm substantially improves the subjective quality of the interpolated images over conventional interpolations.

Keywords: anisotropic diffusion, bidirectional flow, directionalderivatives, edge enhancement, image interpolation, inverse flow, shock filter.

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Authors: Ibrahim Naeimifar, Omid Naeemifar

Abstract:

Evaluation of the excavation-induced ground movements is an important design aspect of support systems in urban areas. Geological and geotechnical conditions of an excavation area have significant effects on excavation-induced ground movements and the related damage. This paper is aimed at studying the performance of excavation walls supported by nails in jointed rock medium. The performance of nailed walls is investigated based on evaluating the excavation-induced ground movements. For this purpose, a set of calibrated 2D finite element models are developed by taking into account the nail-rock-structure interactions, the anisotropic properties of jointed rock, and the staged construction process. The results of this paper highlight effects of different parameters such as joint inclinations, anisotropy of rocks and nail inclinations on deformation parameters of excavation wall supported by nails.

Keywords: Finite element, jointed rock, nailing, performance.

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Authors: Tokuei Sako, Paul-Antoine Hervieux

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The energy-level structure of a pair of electron and positron confined in a quasi-one-dimensional nano-scale potential well has been investigated focusing on its trend in the small limit of confinement strength ω, namely, the Wigner molecular regime. An anisotropic Gaussian-type basis functions supplemented by high angular momentum functions as large as l = 19 has been used to obtain reliable full configuration interaction (FCI) wave functions. The resultant energy spectrum shows a band structure characterized by ω for the large ω regime whereas for the small ω regime it shows an energy-level pattern dominated by excitation into the in-phase motion of the two particles. The observed trend has been rationalized on the basis of the nodal patterns of the FCI wave functions. 

Keywords: Confined systems, positron, wave function, Wigner molecule, quantum dots.

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Authors: M. Shah Alam, Sarkar Rahat M. Anwar

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The effect of thermally induced stress on the modal properties of highly elliptical core optical fibers is studied in this work using a finite element method. The stress analysis is carried out and anisotropic refractive index change is calculated using both the conventional plane strain approximation and the generalized plane strain approach. After considering the stress optical effect, the modal analysis of the fiber is performed to obtain the solutions of fundamental and higher order modes. The modal effective index, modal birefringence, group effective index, group birefringence, and dispersion of different modes of the fiber are presented. For propagation properties, it can be seen that the results depend much on the approach of stress analysis.

Keywords: Birefringence, dispersion, elliptical core fiber, optical mode analysis, stress-optic effect, stress analysis.

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Authors: Chung-Yao Yang, Lin-Ya Huang, Tang-Long Shen, J. Andrew Yeh

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The importance for manipulating an incorporated scaffold and directing cell behaviors is well appreciated for tissue engineering. Here, we developed newly nano-topographic oxidized silicon nanosponges capable of being various chemical modifications to provide much insight into the fundamental biology of how cells interact with their surrounding environment in vitro. A wet etching technique is exerted to allow us fabricated the silicon nanosponges in a high-throughput manner. Furthermore, various organo-silane chemicals enabled self-assembled on the surfaces by vapor deposition. We have found that Chinese hamster ovary (CHO) cells displayed certain distinguishable morphogenesis, adherent responses, and biochemical properties while cultured on these chemical modified nano-topographic structures in compared with the planar oxidized silicon counterparts, indicating that cell behaviors can be influenced by certain physical characteristic derived from nano-topography in addition to the hydrophobicity of contact surfaces crucial for cell adhesion and spreading. Of particular, there were predominant nano-actin punches and slender protrusions formed while cells were cultured on the nano-topographic structures. This study shed potential applications of these nano-topographic biomaterials for controlling cell development in tissue engineering or basic cell biology research.

Keywords: Nanosponge, Cell adhesion, Cell morphology

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Authors: M. Palizvan, M. H. Sadr, M. T. Abadi

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The representative volume element (RVE) plays a central role in the mechanics of random heterogeneous materials with a view to predicting their effective properties. In this paper, a computational homogenization methodology, developed to determine effective linear elastic properties of composite materials, is extended to predict the effective nonlinear elastoplastic response of long fiber reinforced composite. Finite element simulations of volumes of different sizes and fiber volume fractures are performed for calculation of the overall response RVE. The dependencies of the overall stress-strain curves on the number of fibers inside the RVE are studied in the 2D cases. Volume averaged stress-strain responses are generated from RVEs and compared with the finite element calculations available in the literature at moderate and high fiber volume fractions. For these materials, the existence of an RVE is demonstrated for the sizes of RVE corresponding to 10–100 times the diameter of the fibers. In addition, the response of small size RVE is found anisotropic, whereas the average of all large ones leads to recover the isotropic material properties.

Keywords: Homogenization, periodic boundary condition, elastoplastic properties, RVE.

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Authors: Pin-Hsu Kao, Wen-Shou Tseng, Hung-Ming Tai, Yuan-Ming Chang, Jenh-Yih Juang

Abstract:

We report a lithography-free approach to fabricate the biomimetics, quasi-beehive Si nanostructures (QBSNs), on Si-substrates. The self-assembled SiGe nanoislands via the strain induced surface roughening (Asaro-Tiller-Grinfeld instability) during in-situ annealing play a key role as patterned sacrifice regions for subsequent reactive ion etching (RIE) process performed for fabricating quasi-beehive nanostructures on Si-substrates. As the measurements of field emission, the bare QBSNs show poor field emission performance, resulted from the existence of the native oxide layer which forms an insurmountable barrier for electron emission. In order to dramatically improve the field emission characteristics, the platinum nanopillars (Pt-NPs) were deposited on QBSNs to form Pt-NPs/QBSNs heterostructures. The turn-on field of Pt-NPs/QBSNs is as low as 2.29 V/μm (corresponding current density of 1 μA/cm2), and the field enhancement factor (β-value) is significantly increased to 6067. More importantly, the uniform and continuous electrons excite light emission, due to the surrounding filed emitters from Pt-NPs/QBSNs, can be easily obtained. This approach does not require an expensive photolithographic process and possesses great potential for applications.

Keywords: Biomimetics, quasi-beehive Si, SiGe nanoislands, platinum nanopillars, field emission.

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Authors: R. Yeghnem, L. Boulefrakh, S. A. Meftah, A. Tounsi, E. A. Adda Bedia

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In this study, the time-dependent behavior of damaged reinforced concrete shear wall structures strengthened with composite plates having variable fibers spacing was investigated to analyze their seismic response. In the analytical formulation, the adherent and the adhesive layers are all modeled as shear walls, using the mixed Finite Element Method (FEM). The anisotropic damage model is adopted to describe the damage extent of the Reinforced Concrete shear walls. The phenomenon of creep and shrinkage of concrete has been determined by Eurocode 2. Large earthquakes recorded in Algeria (El-Asnam and Boumerdes) have been tested to demonstrate the accuracy of the proposed method. Numerical results are obtained for non-uniform distributions of carbon fibers in epoxy matrices. The effects of damage extent and the delay mechanism creep and shrinkage of concrete are highlighted. Prospects are being studied.

Keywords: RC shear wall structures, composite plates, creep and shrinkage, damaged reinforced concrete structures, finite element method.

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Authors: N. Massoum, B. Bouazza, H. Tahir, C. Sayah, A. Guen Bouazza

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to simulate the phenomenon of electronic transport in semiconductors, we try to adapt a numerical method, often and most frequently it’s that of Monte Carlo. In our work, we applied this method in the case of a ternary alloy semiconductor GaInP in its cubic form; The Calculations are made using a non-parabolic effective-mass energy band model. We consider a band of conduction to three valleys (ΓLX), major of the scattering mechanisms are taken into account in this modeling, as the interactions with the acoustic phonons (elastic collisions) and optics (inelastic collisions). The polar optical phonons cause anisotropic collisions, intra-valleys, very probable in the III-V semiconductors. Other optical phonons, no polar, allow transitions inter-valleys. Initially, we present the full results obtained by the simulation of Monte Carlo in GaInP in stationary regime. We consider thereafter the effects related to the application of an electric field varying according to time, we thus study the transient phenomenon which make their appearance in ternary material

Keywords: Monte Carlo simulation, steady-state electron transport, transient electron transport, alloy scattering.

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Authors: Mohamed Gouskir, Belaid Bouikhalene, Hicham Aissaoui, Benachir Elhadadi

Abstract:

In this paper, we present an application of Riemannian geometry for processing non-Euclidean image data. We consider the image as residing in a Riemannian manifold, for developing a new method to brain edge detection and brain extraction. Automating this process is a challenge due to the high diversity in appearance brain tissue, among different patients and sequences. The main contribution, in this paper, is the use of an edge-based anisotropic diffusion tensor for the segmentation task by integrating both image edge geometry and Riemannian manifold (geodesic, metric tensor) to regularize the convergence contour and extract complex anatomical structures. We check the accuracy of the segmentation results on simulated brain MRI scans of single T1-weighted, T2-weighted and Proton Density sequences. We validate our approach using two different databases: BrainWeb database, and MRI Multiple sclerosis Database (MRI MS DB). We have compared, qualitatively and quantitatively, our approach with the well-known brain extraction algorithms. We show that using a Riemannian manifolds to medical image analysis improves the efficient results to brain extraction, in real time, outperforming the results of the standard techniques.

Keywords: Riemannian manifolds, Riemannian Tensor, Brain Segmentation, Non-Euclidean data, Brain Extraction.

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Authors: Abed Ahmed, Mehrdad Asadi, Jennifer Martay

Abstract:

Stainless steel pipelines are crucial components to transportation and storage in the oil and gas industry. However, the rise of random attacks and vandalism on these pipes for their valuable transport has led to more security and protection for incoming surface impacts. These surface impacts can lead to large global deformations of the pipe and place the pipe under strain, causing the eventual failure of the pipeline. Therefore, understanding how these surface impact loads affect the pipes is vital to improving the pipes’ security and protection. In this study, experimental test and finite element analysis (FEA) have been carried out on EN3B stainless steel specimens to study the impact behaviour. Low velocity impact tests at 9 m/s with 16 kg dome impactor was used to simulate for high momentum impact for localised failure. FEA models of clamped and deformable boundaries were modelled to study the effect of the boundaries on the pipes impact behaviour on its impact resistance, using experimental and FEA approach. Comparison of experimental and FE simulation shows good correlation to the deformable boundaries in order to validate the robustness of the FE model to be implemented in pipe models with complex anisotropic structure.

Keywords: Dynamic impact, deformable boundary conditions, finite element modeling, FEM, finite element, FE, LS-DYNA, Stainless steel pipe.

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Authors: W. Swiderski

Abstract:

In the paper introduced the diagnostic technique making possible the research of internal structures in composite materials reinforced fibres using in different applications. The main reason of damages in structures of these materials is the changing distribution of load in constructions in the lifetime. Appearing defect is largely complicated because of the appearance of disturbing of continuity of reinforced fibres, binder cracks and loss of fibres adhesiveness from binders. Defect in composite materials is usually more complicated than in metals. At present, infrared thermography is the most effective method in non-destructive testing composite. One of IR thermography methods used in non-destructive evaluation is vibrothermography. The vibrothermography is not a new non-destructive method, but the new solution in this test is use ultrasonic waves to thermal stimulation of materials. In this paper, both modelling and experimental results which illustrate the advantages and limitations of ultrasonic IR thermography in inspecting composite materials will be presented. The ThermoSon computer program for computing 3D dynamic temperature distribuions in anisotropic layered solids with subsurface defects subject to ulrasonic stimulation was used to optimise heating parameters in the detection of subsurface defects in composite materials. The program allows for the analysis of transient heat conduction and ultrasonic wave propagation phenomena in solids. The experiments at MIAT were fulfilled by means of FLIR SC 7600 IR camera. Ultrasonic stimulation was performed with the frequency from 15 kHz to 30 kHz with maximum power up to 2 kW.

Keywords: Composite material, ultrasonic, infrared thermography, non-destructive testing.

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Authors: R. A. Shahmiri, O. C. Standard, J. N. Hart, C. C. Sorrell

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The ceramic yttria-stabilized tetragonal zirconia polycrystal (Y-TZP) has been used as a dental biomaterial for several decades. The strength and toughness of this material can be accounted for by its toughening mechanisms, which include transformation toughening, crack deflection, zone shielding, contact shielding, and crack bridging. Prevention of crack propagation is of critical importance in high-fatigue situations, such as those encountered in mastication and para-function. However, the poor translucence of Y-TZP in polycrystalline form is such that it may not meet the aesthetic requirements due to its white/grey appearance. To improve the optical properties of Y-TZP, more detailed study of the optical properties is required; in particular, precise evaluation of the refractive index, absorption coefficient, and scattering coefficient are necessary. The measurement of the optical parameters has been based on the assumption that light scattered from biological media is isotropically distributed over all angles. In fact, the optical behavior of real biological materials depends on the angular scattering of light due to the anisotropic nature of the materials. The purpose of the present work is to evaluate the optical properties (including color, opacity/translucence, scattering, and fluorescence) of zirconia dental ceramics and their control through modification of the chemical composition, phase composition, and surface microstructure.

Keywords: Optical properties, opacity/translucence, scattering, fluorescence, chemical composition, phase composition, surface microstructure.

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Authors: Kanokkan Titipornpun, Tripob Bhongsuwan, Jan Gimsa

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The Ko Samui district of Surat Thani province is located in the high amounts of equivalent uranium in the ground surface that is the source of radon. Our research in the Ko Samui district aimed at comparing the indoor radon concentrations between dwellings and workplaces. Measurements of indoor radon concentrations were carried out in 46 dwellings and 127 workplaces, using CR-39 alpha-track detectors in closed-cup. A total of 173 detectors were distributed in 7 sub-districts. The detectors were placed in bedrooms of dwellings and workrooms of workplaces. All detectors were exposed to airborne radon for 90 days. After exposure, the alpha tracks were made visible by chemical etching before they were manually counted under an optical microscope. The track densities were assumed to be correlated with the radon concentration levels. We found that the radon concentrations could be well described by a log-normal distribution. Most concentrations (37%) were found in the range between 16 and 30 Bq.m^-3. The radon concentrations in dwellings and workplaces varied from a minimum of 11 Bq.m^-3 to a maximum of 305 Bq.m^-3. The minimum (11 Bq.m^-3) and maximum (305 Bq.m^-3) values of indoor radon concentrations were found in a workplace and a dwelling, respectively. Only for four samples (3%), the indoor radon concentrations were found to be higher than the reference level recommended by the WHO (100 Bq.m^-3). The overall geometric mean in the surveyed area was 32.6±1.65 Bq.m^-3, which was lower than the worldwide average (39 Bq.m^-3). The statistic comparison of the geometric mean indoor radon concentrations between dwellings and workplaces showed that the geometric mean in dwellings (46.0±1.55 Bq.m^-3) was significantly higher than in workplaces (28.8±1.58 Bq.m^-3) at the 0.05 level. Moreover, our study found that the majority of the bedrooms in dwellings had a closed atmosphere, resulting in poorer ventilation than in most of the workplaces that had access to air flow through open doors and windows at daytime. We consider this to be the main reason for the higher geometric mean indoor radon concentration in dwellings compared to workplaces.

Keywords: CR-39 detector, indoor radon, radon in dwelling, radon in workplace.

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Authors: Murtaza Adil, Sen Yang, Zhou Chao, Song Xiaoping

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The morphotropic phase boundary (MPB) recently has attracted constant interest in ferromagnetic systems for obtaining enhanced large magnetoelastic response. In the present study, structural and magnetoelastic properties of MPB involved ferromagnetic Tb_1-xGd_xFe₂ (0≤x≤1) system has been investigated. The change of easy magnetic direction from <111> to <100> with increasing x up MPB composition of x=0.9 is detected by step-scanned [440] synchrotron X-ray diffraction reflections. The Gd substitution for Tb changes the composition for the anisotropy compensation near MPB composition of x=0.9, which was confirmed by the analysis of detailed scanned XRD, magnetization curves and the calculation of the first anisotropy constant K₁. The spin configuration diagram accompanied with different crystal structures for Tb_1-xGd_xFe₂ was designed. The calculated first anisotropy constant K₁ shows a minimum value at MPB composition of x=0.9. In addition, the large ratio between magnetostriction, and the absolute values of the first anisotropy constant │λ_S∕K₁│ appears at MPB composition, which makes it a potential material for magnetostrictive application. Based on experimental results, a theoretically approach was also proposed to signify that the facilitated magnetization rotation and enhanced magnetoelastic effect near MPB composition are a consequence of the anisotropic flattening of free energy of ferromagnetic crystal. Our work specifies the universal existence of MPB in ferromagnetic materials which is important for substantial improvement of magnetic and magnetostrictive properties and may provide a new route to develop advanced functional materials.

Keywords: Free energy, lattice distortion, magnetic anisotropy, magnetostriction, morphotropic phase boundary.

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Authors: K. F. Khan, Samsuddin Khan

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The Paleoproterozoic phosphorite deposit of Sallopat block of Banswara district of Rajasthan belongs to kalinjara formation of lunavada group of Aravalli Super Group. The phosphorites are found to occur as massive, brecciated, laminated and stromatolitic associated with calcareous quartzite, interbedded dolomite and multi coloured chert. The phosphorites are showing alternate brown and grey coloured concentric rims which are composed of phosphate, calcite and quartz minerals. Petro-mineralogical studies of phosphorite samples using petrological microscope, XRD, FEG- SEM and EDX reveal that apatite-(CaF) and apatite-(CaOH) are phosphate minerals which are intermixed with minor amount of carbonate materials. Sporadic findings of the uniform tiny granules of partially anisotropic apatite-(CaF) along with dolomite, calcite, quartz, muscovite, zeolite and other gangue minerals have been observed with the replacement of phosphate material by quartz and carbonate. The presence of microbial filaments of organic matter and alternate concentric rims of stromatolitic structure may suggest that the deposition of the phosphate took place in shallow marine oxidizing environmental conditions leading to the formation of phosphorite layers as primary biogenic precipitates by bacterial or algal activities. Different forms and texture of phosphate minerals may be due to environmental vicissitudes at the time of deposition followed by some replacement processes and biogenic activities.

Keywords: Petro-mineralogy, phosphorites, sallopat, apatite.

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Authors: Musaab Salman Sultan

Abstract:

The surface and bulk magnetization behavior of template released isolated ferromagnetic Ni₆₀Fe₄₀ nanowires of relatively thick diameters (~200 nm), deposited from a dilute suspension onto pre-patterned insulating chips have been investigated experimentally, using a highly sensitive Magneto-Optical Ker Effect (MOKE) magnetometry and Magneto-Resistance (MR) measurements, respectively. The MR data were consistent with the theoretical predictions of the anisotropic magneto-resistance (AMR) effect. The MR measurements, in all the angles of investigations, showed large features and a series of nonmonotonic "continuous small features" in the resistance profiles. The extracted switching fields from these features and from MOKE loops were compared with each other and with the switching fields reported in the literature that adopted the same analytical techniques on the similar compositions and dimensions of nanowires. A large difference between MOKE and MR measurments was noticed. The disparate between MOKE and MR results is attributed to the variance in the micro-magnetic structure of the surface and the bulk of such ferromagnetic nanowires. This result was ascertained using micro-magnetic simulations on an individual: cylindrical and rectangular cross sections NiFe nanowires, with the same diameter/thickness of the experimental wires, using the Object Oriented Micro-magnetic Framework (OOMMF) package where the simulated loops showed different switching events, indicating that such wires have different magnetic states in the reversal process and the micro-magnetic spin structures during switching behavior was complicated. These results further supported the difference between surface and bulk magnetization behavior in these nanowires. This work suggests that a combination of MOKE and MR measurements is required to fully understand the magnetization behavior of such relatively thick isolated cylindrical ferromagnetic nanowires.

Keywords: MOKE magnetometry, MR measurements, OOMMF package, micro-magnetic simulations, ferromagnetic nanowires, surface magnetic properties.

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Authors: Karam Y. Maalawi

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This paper presents a generalized formulation for the problem of buckling optimization of anisotropic, radially graded, thin-walled, long cylinders subject to external hydrostatic pressure. The main structure to be analyzed is built of multi-angle fibrous laminated composite lay-ups having different volume fractions of the constituent materials within the individual plies. This yield to a piecewise grading of the material in the radial direction; that is the physical and mechanical properties of the composite material are allowed to vary radially. The objective function is measured by maximizing the critical buckling pressure while preserving the total structural mass at a constant value equals to that of a baseline reference design. In the selection of the significant optimization variables, the fiber volume fractions adjoin the standard design variables including fiber orientation angles and ply thicknesses. The mathematical formulation employs the classical lamination theory, where an analytical solution that accounts for the effective axial and flexural stiffness separately as well as the inclusion of the coupling stiffness terms is presented. The proposed model deals with dimensionless quantities in order to be valid for thin shells having arbitrary thickness-to-radius ratios. The critical buckling pressure level curves augmented with the mass equality constraint are given for several types of cylinders showing the functional dependence of the constrained objective function on the selected design variables. It was shown that material grading can have significant contribution to the whole optimization process in achieving the required structural designs with enhanced stability limits.

Keywords: Buckling instability, structural optimization, functionally graded material, laminated cylindrical shells, externalhydrostatic pressure.

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Authors: G. A. Khalid, M. D. Jones, R. Prabhu, A. Mason-Jones, W. Whittington, H. Bakhtiarydavijani, P. S. Theobald

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Head injury in childhood is a common cause of death or permanent disability from injury. However, despite its frequency and significance, there is little understanding of how a child’s head responds during injurious loading. Whilst Infant Post Mortem Human Subject (PMHS) experimentation is a logical approach to understand injury biomechanics, it is the authors’ opinion that a lack of subject availability is hindering potential progress. Computer modelling adds great value when considering adult populations; however, its potential remains largely untapped for infant surrogates. The complexities of child growth and development, which result in age dependent changes in anatomy, geometry and physical response characteristics, present new challenges for computational simulation. Further geometric challenges are presented by the intricate infant cranial bones, which are separated by sutures and fontanelles and demonstrate a visible fibre orientation. This study presents an FE model of a newborn infant’s head, developed from high-resolution computer tomography scans, informed by published tissue material properties. To mimic the fibre orientation of immature cranial bone, anisotropic properties were applied to the FE cranial bone model, with elastic moduli representing the bone response both parallel and perpendicular to the fibre orientation. Biofiedility of the computational model was confirmed by global validation against published PMHS data, by replicating experimental impact tests with a series of computational simulations, in terms of head kinematic responses. Numerical results confirm that the FE head model’s mechanical response is in favourable agreement with the PMHS drop test results.

Keywords: Finite element analysis, impact simulation, infant head trauma, material properties, post mortem human subjects.

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Authors: C. Virgilio, J. Carlier, P. Campistron, M. Toubal, P. Garnier, L. Broussous, V. Thomy, B. Nongaillard

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Wetting efficiency of microstructures or nanostructures patterned on Si wafers is a real challenge in integrated circuits manufacturing. In fact, bad or non-uniform wetting during wet processes limits chemical reactions and can lead to non-complete etching or cleaning inside the patterns and device defectivity. This issue is more and more important with the transistors size shrinkage and concerns mainly high aspect ratio structures. Deep Trench Isolation (DTI) structures enabling pixels’ isolation in imaging devices are subject to this phenomenon. While low-frequency acoustic reflectometry principle is a well-known method for Non Destructive Test applications, we have recently shown that it is also well suited for nanostructures wetting characterization in a higher frequency range. In this paper, we present a high-frequency acoustic reflectometry characterization of DTI wetting through a confrontation of both experimental and modeling results. The acoustic method proposed is based on the evaluation of the reflection of a longitudinal acoustic wave generated by a 100 µm diameter ZnO piezoelectric transducer sputtered on the silicon wafer backside using MEMS technologies. The transducers have been fabricated to work at 5 GHz corresponding to a wavelength of 1.7 µm in silicon. The DTI studied structures, manufactured on the wafer frontside, are crossing trenches of 200 nm wide and 4 µm deep (aspect ratio of 20) etched into a Si wafer frontside. In that case, the acoustic signal reflection occurs at the bottom and at the top of the DTI enabling its characterization by monitoring the electrical reflection coefficient of the transducer. A Finite Difference Time Domain (FDTD) model has been developed to predict the behavior of the emitted wave. The model shows that the separation of the reflected echoes (top and bottom of the DTI) from different acoustic modes is possible at 5 Ghz. A good correspondence between experimental and theoretical signals is observed. The model enables the identification of the different acoustic modes. The evaluation of DTI wetting is then performed by focusing on the first reflected echo obtained through the reflection at Si bottom interface, where wetting efficiency is crucial. The reflection coefficient is measured with different water / ethanol mixtures (tunable surface tension) deposited on the wafer frontside. Two cases are studied: with and without PFTS hydrophobic treatment. In the untreated surface case, acoustic reflection coefficient values with water show that liquid imbibition is partial. In the treated surface case, the acoustic reflection is total with water (no liquid in DTI). The impalement of the liquid occurs for a specific surface tension but it is still partial for pure ethanol. DTI bottom shape and local pattern collapse of the trenches can explain these incomplete wetting phenomena. This high-frequency acoustic method sensitivity coupled with a FDTD propagative model thus enables the local determination of the wetting state of a liquid on real structures. Partial wetting states for non-hydrophobic surfaces or low surface tension liquids are then detectable with this method.

Keywords: Wetting, acoustic reflectometry, gigahertz, semiconductor.

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