Search results for: Zhao Ming

Authors: Wei Lo, Ming-En Kuo

Abstract:

While to minimize the overall project cost is always one of the objectives of construction managers, to obtain the maximum economic return is definitely one the ultimate goals of the project investors. As there is a trade-off relationship between the project time and cost, and the project delivery time directly affects the timing of economic recovery of an investment project, to provide a method that can quantify the relationship between the project delivery time and cost, and identify the optimal delivery time to maximize economic return has always been the focus of researchers and industrial practitioners. Using genetic algorithms, this study introduces an optimization model that can quantify the relationship between the project delivery time and cost and furthermore, determine the optimal delivery time to maximize the economic return of the project. The results provide objective quantification for accurately evaluating the project delivery time and cost, and facilitate the analysis of the economic return of a project.

Keywords: Time-Cost Trade-Off, Genetic Algorithms, Resource Integration, Economic return.

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Authors: Dangjun Zhao, Yongji Wang, Lei Liu

Abstract:

Based on general proportional integral (GPI) observers and sliding mode control technique, a robust control method is proposed for the master-slave synchronization of chaotic systems in the presence of parameter uncertainty and with partially measurable output signal. By using GPI observer, the master dynamics are reconstructed by the observations from a measurable output under the differential algebraic framework. Driven by the signals provided by GPI observer, a sliding mode control technique is used for the tracking control and synchronization of the master-slave dynamics. The convincing numerical results reveal the proposed method is effective, and successfully accommodate the system uncertainties, disturbances, and noisy corruptions.

Keywords: GPI observer, sliding mode control, master-slave synchronization, chaotic systems.

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Authors: Rong-Jong Wai, Chia-Ming Liu

Abstract:

Generally speaking, the mobile robot is capable of sensing its surrounding environment, interpreting the sensed information to obtain the knowledge of its location and the environment, planning a real-time trajectory to reach the object. In this process, the issue of obstacle avoidance is a fundamental topic to be challenged. Thus, an adaptive path-planning control scheme is designed without detailed environmental information, large memory size and heavy computation burden in this study for the obstacle avoidance of a mobile robot. In this scheme, the robot can gradually approach its object according to the motion tracking mode, obstacle avoidance mode, self-rotation mode, and robot state selection. The effectiveness of the proposed adaptive path-planning control scheme is verified by numerical simulations of a differential-driving mobile robot under the possible occurrence of obstacle shapes.

Keywords: Adaptive Path Planning, Mobile Robot ObstacleAvoidance

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Authors: Ming-Hui Lee, Iau-Teh Wang

Abstract:

The innovative fuzzy estimator is used to estimate the ground motion acceleration of the retaining structure in this study. The Kalman filter without the input term and the fuzzy weighting recursive least square estimator are two main portions of this method. The innovation vector can be produced by the Kalman filter, and be applied to the fuzzy weighting recursive least square estimator to estimate the acceleration input over time. The excellent performance of this estimator is demonstrated by comparing it with the use of difference weighting function, the distinct levels of the measurement noise covariance and the initial process noise covariance. The availability and the precision of the proposed method proposed in this study can be verified by comparing the actual value and the one obtained by numerical simulation.

Keywords: Earthquake, Fuzzy Estimator, Kalman Filter, Recursive Least Square Estimator.

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Authors: Ming-Hui Lee, Tsung-Chien Chen, Yuh-Shiou Tai

Abstract:

The intelligent fuzzy input estimator is used to estimate the input force of the rigid bar structural system in this study. The fuzzy Kalman filter without the input term and the fuzzy weighting recursive least square estimator are two main portions of this method. The practicability and accuracy of the proposed method were verified with numerical simulations from which the input forces of a rigid bar structural system were estimated from the output responses. In order to examine the accuracy of the proposed method, a rigid bar structural system is subjected to periodic sinusoidal dynamic loading. The excellent performance of this estimator is demonstrated by comparing it with the use of difference weighting function and improper the initial process noise covariance. The estimated results have a good agreement with the true values in all cases tested.

Keywords: Fuzzy Input Estimator, Kalman Filter, RecursiveLeast Square Estimator.

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Authors: Xu Zhang, Qi Jiang, Liwei Li, Weiwei Cui, Jijun Cui, Yang Cao, Hairong Zhao

Abstract:

A kind of crash energy absorption structure adopted by vehicle simulator crash testing equipment based on mechanical energy storage was studied. Dynamic explicit finite element simulation was achieved for thin-walled tube structure under different conditions of section shape, thickness and inducement groove style. Crash energy absorption property of the structure was obtained. After optimization, a reasonable structure was given which can meet current vehicle crash regulation. And the optimized structure can be adopted in vehicle simulator, which can increase the practicability of the testing equipment.

Keywords: thin-walled tube structure, crash energy absorption, deceleration, finite element simulation

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Authors: Tharini N. de Silva, Xiao Zhibo, Zhao Rui, Mao Kezhi

Abstract:

Causal relation identification is a crucial task in information extraction and knowledge discovery. In this work, we present two approaches to causal relation identification. The first is a classification model trained on a set of knowledge-based features. The second is a deep learning based approach training a model using convolutional neural networks to classify causal relations. We experiment with several different convolutional neural networks (CNN) models based on previous work on relation extraction as well as our own research. Our models are able to identify both explicit and implicit causal relations as well as the direction of the causal relation. The results of our experiments show a higher accuracy than previously achieved for causal relation identification tasks.

Keywords: Causal relation identification, convolutional neural networks, natural Language Processing, Machine Learning.

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Authors: Yannan Wu, An Chen, Yan Zhao

Abstract:

Termination Mechanism is an indispensible part of the emergency management mechanism. Despite of its importance in both theory and practice, it is almost a brand new field for researching. The concept of termination mechanism is proposed firstly in this paper, and the design and implementation which are helpful to guarantee the effect and integrity of emergency management are discussed secondly. Starting with introduction of the problems caused by absent termination and incorrect termination, the essence of termination mechanism is analyzed, a model based on Optimal Stopping Theory is constructed and the termination index is given. The model could be applied to find the best termination time point.. Termination decision should not only be concerned in termination stage, but also in the whole emergency management process, which makes it a dynamic decision making process. Besides, the main subjects and the procedure of termination are illustrated after the termination time point is given. Some future works are discussed lastly.

Keywords: Emergency management, Termination Mechanism, Optimal Termination Model, Decision Making, Optimal StoppingTheory.

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Authors: Hsiao-Ming Chang, Jui-Liang Hsu

Abstract:

The purpose of this study is to analyze the cognitive and travel experience the situation of the tourist attraction of the sport tourism in Penghu. This study used a questionnaires, the main island of Taiwan to Penghu in the way of marine sports tourists adopted the designated convenience sampling method, a total of 1447 valid questionnaires. After statistical analysis, this study found that: 1. Tourists to Penghu sports tourism attraction cognitive as “good air quality, suitable for water activities". 2. Tourists in Penghu's tourism experience, “Let me taste the delicious specialties and snacks". 3. The attraction of the sport tourism, travel experience and perceived value are correlated, and both the perceived value with a high degree of predictive ability. Based on the findings of this study not only for Penghu's tourism industry with the unit in charge of the proposed operating and suggestions for future research to other researchers.

Keywords: Sport tourism, travel experience, perceived value, sport attraction.

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Authors: Lien-Fa Lin, Yung-Ming Li, Fu-Shun Hsieh

Abstract:

With the advancement of information technology and development of group commerce, people have obviously changed in their lifestyle. However, group commerce faces some challenging problems. The products or services provided by vendors do not satisfactorily reflect customers’ opinions, so that the sale and revenue of group commerce gradually become lower. On the other hand, the process for a formed customer group to reach group-purchasing consensus is time-consuming and the final decision is not the best choice for each group members. In this paper, we design a social decision support mechanism, by using group discussion message to recommend suitable options for group members and we consider social influence and personal preference to generate option ranking list. The proposed mechanism can enhance the group purchasing decision making efficiently and effectively and venders can provide group products or services according to the group option ranking list.

Keywords: Social network, group decision, text mining, group commerce.

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Authors: Puntani Pongsumpun, I-Ming Tang

Abstract:

The incidences of dengue hemorrhagic disease (DHF) over the long term exhibit a seasonal behavior. It has been hypothesized that these behaviors are due to the seasonal climate changes which in turn induce a seasonal variation in the incubation period of the virus while it is developing the mosquito. The standard dynamic analysis is applied for analysis the Susceptible-Exposed- Infectious-Recovered (SEIR) model which includes an annual variation in the length of the extrinsic incubation period (EIP). The presence of both asymptomatic and symptomatic infections is allowed in the present model. We found that dynamic behavior of the endemic state changes as the influence of the seasonal variation of the EIP becomes stronger. As the influence is further increased, the trajectory exhibits sustained oscillations when it leaves the chaotic region.

Keywords: Chaotic behavior, dengue hemorrhagic fever, extrinsic incubation period, SEIR model.

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Authors: Cheng-Hsien Chang, Jyi-Tsong Lin, Po-Hsieh Lin, Hung-Pei Hsu, Chan-Hsiang Chang, Ming-Tsung Shih, Shih-Chuan Tseng, Min-Yan Lin

Abstract:

In this paper, we have proposed a novel FinFET with extended body under the poly gate, which is called EB-FinFET, and its characteristic is demonstrated by using three-dimensional (3-D) numerical simulation. We have analyzed and compared it with conventional FinFET. The extended body height dependence on the drain induced barrier lowering (DIBL) and subthreshold swing (S.S) have been also investigated. According to the 3-D numerical simulation, the proposed structure has a firm structure, an acceptable short channel effect (SCE), a reduced series resistance, an increased on state drain current (I on) and a large normalized I DS. Furthermore, the structure can also improve corner effect and reduce self-heating effect due to the extended body. Our results show that the EBFinFET is excellent for nanoscale device.

Keywords: SOI, FinFET, tri-gate, self-heating effect.

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Authors: Hu Haibo, Zhao Hong

Abstract:

Gaussian mixture background model is widely used in moving target detection of the image sequences. However, traditional Gaussian mixture background model usually considers the time continuity of the pixels, and establishes background through statistical distribution of pixels without taking into account the pixels- spatial similarity, which will cause noise, imperfection and other problems. This paper proposes a new Gaussian mixture modeling approach, which combines the color and gradient of the spatial information, and integrates the spatial information of the pixel sequences to establish Gaussian mixture background. The experimental results show that the movement background can be extracted accurately and efficiently, and the algorithm is more robust, and can work in real time in tracking applications.

Keywords: Gaussian mixture model, real-time tracking, sequence image, gradient.

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Authors: Jianwei Wang, Timo Korhonen, Yuping Zhao

Abstract:

Cross layer optimization based on utility functions has been recently studied extensively, meanwhile, numerous types of utility functions have been examined in the corresponding literature. However, a major drawback is that most utility functions take a fixed mathematical form or are based on simple combining, which can not fully exploit available information. In this paper, we formulate a framework of cross layer optimization based on Adaptively Weighted Utility Functions (AWUF) for fairness balancing in OFDMA networks. Under this framework, a two-step allocation algorithm is provided as a sub-optimal solution, whose control parameters can be updated in real-time to accommodate instantaneous QoS constrains. The simulation results show that the proposed algorithm achieves high throughput while balancing the fairness among multiple users.

Keywords: OFDMA, Fairness, AWUF, QoS.

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Authors: Hung-Ming Lai, Andreas Albrecht, Kathleen Steinhöfel

Abstract:

Cancers could normally be marked by a number of differentially expressed genes which show enormous potential as biomarkers for a certain disease. Recent years, cancer classification based on the investigation of gene expression profiles derived by high-throughput microarrays has widely been used. The selection of discriminative genes is, therefore, an essential preprocess step in carcinogenesis studies. In this paper, we have proposed a novel gene selector using information-theoretic measures for biological discovery. This multivariate filter is a four-stage framework through the analyses of feature relevance, feature interdependence, feature redundancy-dependence and subset rankings, and having been examined on the colon cancer data set. Our experimental result show that the proposed method outperformed other information theorem based filters in all aspect of classification errors and classification performance.

Keywords: Colon cancer, feature interdependence, feature subset selection, gene selection, microarray data analysis.

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Authors: Aldy Gunawan, Kien Ming Ng, Kim Leng Poh

Abstract:

This paper presents a hybrid algorithm for solving a timetabling problem, which is commonly encountered in many universities. The problem combines both teacher assignment and course scheduling problems simultaneously, and is presented as a mathematical programming model. However, this problem becomes intractable and it is unlikely that a proven optimal solution can be obtained by an integer programming approach, especially for large problem instances. A hybrid algorithm that combines an integer programming approach, a greedy heuristic and a modified simulated annealing algorithm collaboratively is proposed to solve the problem. Several randomly generated data sets of sizes comparable to that of an institution in Indonesia are solved using the proposed algorithm. Computational results indicate that the algorithm can overcome difficulties of large problem sizes encountered in previous related works.

Keywords: Timetabling problem, mathematical programming model, hybrid algorithm, simulated annealing.

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Authors: Wen-Chi Hung, Tung-Kai Liu, Ming-Shan Tsai, Chun-Che Lee, I-Min Jiang

Abstract:

This study investigates a voltage-controllable liquid crystals lens with a Fresnel zone electrode. When applying a proper voltage on the liquid crystal cell, a Fresnel-zone-distributed electric field is induced to direct liquid crystals aligned in a concentric structure. Owing to the concentrically aligned liquid crystals, a Fresnel lens is formed. We probe the Fresnel liquid crystal lens using a polarized incident beam with a wavelength of 632.8 nm, finding that the diffraction efficiency depends on the applying voltage. A remarkable diffraction efficiency of ~39.5 % is measured at the voltage of 0.9V. Additionally, a dual focus lens is fabricated by attaching a plane-convex lens to the Fresnel liquid crystals cell. The Fresnel LC lens and the dual focus lens may be applied for DVD/CD pick-up head, confocal microscopy system, or electrically-controlling optical systems.

Keywords: Liquid Crystals Lens, Fresnel Lens, and Dual focus

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Authors: Chuan Li, Ming Liang, Qibing Yu

Abstract:

To improve the dynamics response of the vehicle passive suspension, a two-terminal mass is suggested to connect in parallel with the suspension strut. Three performance criteria, tire grip, ride comfort and suspension deflection, are taken into consideration to optimize the suspension parameters. However, the three criteria are conflicting and non-commensurable. For this reason, the Chebyshev goal programming method is applied to find the best tradeoff among the three objectives. A simulation case is presented to describe the multi-objective optimization procedure. For comparison, the Chebyshev method is also employed to optimize the design of a conventional passive suspension. The effectiveness of the proposed design method has been clearly demonstrated by the result. It is also shown that the suspension with a two-terminal mass in parallel has better performance in terms of the three objectives.

Keywords: Vehicle, passive suspension, two-terminal mass, optimization, Chebyshev goal programming

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Authors: Nchimbi Edward Pius, Liu Qin, Fion Yang, Zhu Hong Ming

Abstract:

The current Hadoop block placement policy do not fairly and evenly distributes replicas of blocks written to datanodes in a Hadoop cluster.

This paper presents a new solution that helps to keep the cluster in a balanced state while an HDFS client is writing data to a file in Hadoop cluster. The solution had been implemented, and test had been conducted to evaluate its contribution to Hadoop distributed file system.

It has been found that, the solution has lowered global execution time taken by Hadoop balancer to 22 percent. It also has been found that, Hadoop balancer respectively over replicate 1.75 and 3.3 percent of all re-distributed blocks in the modified and original Hadoop clusters.

The feature that keeps the cluster in a balanced state works as a core part to Hadoop system and not just as a utility like traditional balancer. This is one of the significant achievements and uniqueness of the solution developed during the course of this research work.

Keywords: Balancer, Datanode, Distributed file system, Hadoop, Replicas.

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Authors: Jiun-Wei Chen, Chih-Yang Wu, Ming-Feng Hou

Abstract:

A numerical study on the heat transfer in the thermal barrier coatings and the substrates of a parallel-plate enclosure is carried out. Some of the thermal barrier coatings, such as ceramics, are semitransparent and are of interest for high-temperature applications where radiation effects are significant. The radiative transfer equations and the energy equations are solved by using the discrete ordinates method and the finite difference method. Illustrative results are presented for temperature distributions in the coatings and the opaque walls under various heating conditions. The results show that the temperature distribution is more uniform in the interior portion of each coating away from its boundary for the case with a larger average of varying refractive index and a positive gradient of refractive index enhances radiative transfer to the substrates.

Keywords: Radiative transfer, parallel-plate enclosure, coatings, varying refractive index

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Authors: Liang Zhao, Guangwen Wang, Guichang Liu

Abstract:

Constant potometer is an important component of pipeline anti-corrosion systems in the chemical industry. Based on Internet of Things (IoT) technology, Programmable Logic Controller (PLC) technology and database technology, this paper developed a set of a constant potometer remote monitoring management system. The remote monitoring and remote adjustment of the working status of the constant potometer are realized. The system has real-time data display, historical data query, alarm push management, user permission management, and supporting Web access and mobile client application (APP) access. The actual engineering project test results show the stability of the system, which can be widely used in cathodic protection systems.

Keywords: Internet of Things, pipe corrosion protection, potentiostat, remote monitoring.

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Authors: Zhen-Hui Hu, Jyh-Shong Ju, Ming-Hwei Perng

Abstract:

This paper presents a useful sub-pixel image registration method using line segments and a sub-pixel edge detector. In this approach, straight line segments are first extracted from gray images at the pixel level before applying the sub-pixel edge detector. Next, all sub-pixel line edges are mapped onto the orientation-distance parameter space to solve for line correspondence between images. Finally, the registration parameters with sub-pixel accuracy are analytically solved via two linear least-square problems. The present approach can be applied to various fields where fast registration with sub-pixel accuracy is required. To illustrate, the present approach is applied to the inspection of printed circuits on a flat panel. Numerical example shows that the present approach is effective and accurate when target images contain a sufficient number of line segments, which is true in many industrial problems.

Keywords: Defect detection, Image registration, Straight line segment, Sub-pixel.

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Authors: Lien Fa Lin, Yung Ming Li, Hsin Chen Hsieh

Abstract:

The rise of smartphones brings new concept So-Lo-Mo (social-local-mobile) in mobile commerce area in recent years. However, current So-Lo-Mo services only focus on individual users but not a group of users, and the development of group commerce is not enough to satisfy the demand of real-time group buying and less to think about the social relationship between customers. In this research, we integrate mobile intelligence with group commerce and consider customers' preference, real-time context, and social influence as components in the mechanism. With the support of this mechanism, customers are able to gather near customers with the same potential purchase willingness through mobile devices when he/she wants to purchase products or services to have a real-time group-buying. By matching the demand and supply of mobile group-buying market, this research improves the business value of mobile commerce and group commerce further.

Keywords: Group formation, group commerce, mobile commerce, So-Lo-Mo, social influence.

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Authors: The Nan Chang, Ping-Tang Yu, Jyun-Ming Lin

Abstract:

A triple band circularly polarized antenna covering 1.17, 1.22, and 1.57 GHz is presented. To extend to the triple-band operation, we need to add one more ring while maintaining the mechanism to independently control each ring. The inset-part in the feeding scheme is used to excite the band at 1.22 GHz, while the proximate-part of the feeding scheme is used to excite not only the band at 1.57 GHz but also the band at 1.17 GHz. This is achieved by up-vertically coupled with one ring to radiate at 1.57 GHz and down-vertically coupled another ring to radiate at 1.17 GHz. It is also noted that the inset-part in our feeding scheme is by horizontal coupling. Furthermore, to increase the gain at all three bands, three air-layers are added to make the total height of the antenna be 7.8 mm. The total thickness of the three air-layers is 3 mm. The gains of the three bands are all greater than 5 dBiC after adding the air-layers.

Keywords: Circular polarization, global position system, triband antenna, high gain.

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Authors: Shyh-Ming Chern

Abstract:

Cubic equations of state (EoS), popular due to their simple mathematical form, ease of use, semi-theoretical nature and reasonable accuracy, are normally fitted to vapor-liquid equilibrium P-v-T data. As a result, they often show poor accuracy in the region near and above the critical point. In this study, the performance of the renowned Peng-Robinson (PR) and Patel-Teja (PT) EoS’s around the critical area has been examined against the P-v-T data of water. Both of them display large deviations at critical point. For instance, PR-EoS exhibits discrepancies as high as 47% for the specific volume, 28% for the enthalpy departure and 43% for the entropy departure at critical point. It is shown that incorporating P-v-T data of the supercritical region into the retuning of a cubic EoS can improve its performance at and above the critical point dramatically. Adopting a retuned acentric factor of 0.5491 instead of its genuine value of 0.344 for water in PR-EoS and a new F of 0.8854 instead of its original value of 0.6898 for water in PT-EoS reduces the discrepancies to about one third or less.

Keywords: Equation of state, EoS, supercritical water, SCW.

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Authors: Hung-Pei Hsu, Jyi-Tsong Lin, Po-Hsieh Lin, Cheng-Hsien Chang, Ming-Tsung Shih, Chan-Hsiang Chang, Shih-Chuan Tseng, Min-Yan Lin, Shih-Wen Hsu

Abstract:

In this paper, we propose a novel metal oxide semiconductor field effect transistor with L-shaped channel structure (LMOS), and several type of L-shaped structures are also designed, studied and compared with the conventional MOSFET device for the same average gate length (Lavg). The proposed device electrical characteristics are analyzed and evaluated by three dimension (3-D) ISE-TCAD simulator. It can be confirmed that the LMOS devices have higher on-state drain current and both lower drain-induced barrier lowering (DIBL) and subthreshold swing (S.S.) than its conventional counterpart has. In addition, the transconductance and voltage gain properties of the LMOS are also improved.

Keywords: Average gate length (Lavg), drain-induced barrier lowering (DIBL), L-shaped channel MOSFET (LMOS), subthreshold swing (S.S.).

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Authors: Shyh-Ming Chern, Hung-Chi Tu

Abstract:

One way to utilize biomass is to thermochemically convert it into gases and chemicals. For conversion of biomass, glucose is a particularly popular model compound for cellulose, or more generally for biomass. The present study takes a different approach by employing lactic acid as the model compound for cellulose. Since lactic acid and glucose have identical elemental composition, they are expected to produce similar results as they go through the conversion process. In the current study, lactic acid was thermochemically converted to assess its reactivity and reaction mechanism in subcritical and supercritical water, by using a 16-ml autoclave reactor. The major operating parameters investigated include: The reaction temperature, from 673 to 873 K, the reaction pressure, 10 and 25 MPa, the dosage of oxidizing agent, 0 and 0.5 chemical oxygen demand, and the concentration of lactic acid in the feed, 0.5 and 1.0 M. Gaseous products from the conversion were generally found to be comparable to those derived from the conversion of glucose.

Keywords: Lactic acid, subcritical water, supercritical water, thermochemical conversion.

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Authors: Hyeongbok Kim, Lingling Zhao, Xiaohong Su, Junjie Wang

Abstract:

The Bernoulli filter is a precise Bayesian filter for single target tracking based on the random finite set theory. The standard Bernoulli filter often underestimates the number of the targets. This study proposes a Gaussian particle flow (GPF) Bernoulli filter employing particle flow to migrate particles from prior to posterior positions to improve the performance of the standard Bernoulli filter. By employing the particle flow filter, the computational speed of the Bernoulli filters is significantly improved. In addition, the GPF Bernoulli filter provides more accurate estimation compared with that of the standard Bernoulli filter. Simulation results confirm the improved tracking performance and computational speed in two- and three-dimensional scenarios compared with other algorithms.

Keywords: Bernoulli filter, particle filter, particle flow filter, random finite sets, target tracking.

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Authors: Ming Lun Wang, Yan Wang, Ning Ruo Sun

Abstract:

With the development of cloud computing, more and more users start to utilize the cloud storage service. However, there exist some issues: 1) cloud server steals the shared data, 2) sharers collude with the cloud server to steal the shared data, 3) cloud server tampers the shared data, 4) sharers and key generation center (KGC) conspire to steal the shared data. In this paper, we use advanced encryption standard (AES), hash algorithms, and accountable key-policy attribute-based encryption without key escrow (WOKE-AKP-ABE) to build a security cloud storage scheme. Moreover, the data are encrypted to protect the privacy. We use hash algorithms to prevent the cloud server from tampering the data uploaded to the cloud. Analysis results show that this scheme can resist conspired attacks.

Keywords: Cloud storage security, sharing storage, attributes, Hash algorithm.

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Authors: Sheng-Ming Huang, Nan-Chyuan Tsai, Chih-Che Lin, Chun-Chi Lin

Abstract:

An innovative design for intelligent Chemical Mechanical Polishing (CMP) system is proposed and verified by experiments in this report. On-line measurement and real-time feedback are integrated to eliminate the shortcomings of traditional approaches, e.g., the batch-to-batch discrepancy of required polishing time, over consumption of chemical slurry, and non-uniformity across the wafer. The major advantage of the proposed method is that the finish of local surface roughness can be consistent, no matter where the inner-ring region or outer-ring region is concerned. Secondly, it is able to eliminate the Edge effect. Conventionally, the interfacial induced stress near the wafer edge is generally much higher than that near the wafer center. At last, by using the proposed intelligent chemical mechanical polishing strategy, the cost of the entire machining cycle can be much reduced while the quality of the finished goods certainly upgraded.

Keywords: Chemical Mechanical Polishing, Active Magnetic Actuator, On-Line Measurement.

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