Search results for: measurement system analysis.

Authors: P. H. Mukti, I. Kurniawati, F. Oktaviansyah, A. D. Adhitya, N. Rachmadani, R. Corputty, G. Hendrantoro, T. Fukusako

Abstract:

HF Communication system is one of the attractive fields among many researchers since it can be reached long-distance areas with low-cost. This long-distance communication can be achieved by exploiting the ionosphere as a transmission medium for the HF radio wave. However, due to the dynamic nature of ionosphere, the channel characteristic of HF communication has to be investigated in order to gives better performances. Many techniques to characterize HF channel are available in the literature. However, none of those techniques describe the HF channel characteristic in low-latitude regions, especially equatorial areas. Since the ionosphere around equatorial region has an ESF phenomenon, it becomes an important investigation to characterize the wideband HF Channel in low-latitude region. On the other sides, the appearance of software-defined radio attracts the interest of many researchers. Accordingly, in this paper a SDR-based channel measurement system is proposed to be used for characterizing the HF channel in low-latitude region.

Keywords: Channel Characteristic, HF Communication System, LabVIEW, Software-Defined Radio, Universal Software Radio Pheripheral.

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Authors: Syed Javed Arif, Mohd Ayyub Khan, Saleem Anwar Khan

Abstract:

In this paper, a simple method is presented for measurement of power frequency deviations. A phase locked loop (PLL) is used to multiply the signal under test by a factor of 100. The number of pulses in this pulse train signal is counted over a stable known period, using decade driving assemblies (DDAs) and flip-flops. These signals are combined using logic gates and then passed through decade counters to give a unique combination of pulses or levels, which are further encoded. These pulses are equally suitable for both control applications and display units. The experimental circuit developed gives a resolution of 1 Hz within the measurement period of 20 ms. The proposed circuit is also simulated in Verilog Hardware Description Language (VHDL) and implemented using Field Programing Gate Arrays (FPGAs). A Mixed signal Oscilloscope (MSO) is used to observe the results of FPGA implementation. These results are compared with the results of the proposed circuit of discrete components. The proposed system is useful for frequency deviation measurement and control in power systems.

Keywords: Frequency measurement, digital control, phase locked loop, encoding, Verilog HDL.

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Authors: M. Mahboubkhah, H. Fayazfar

Abstract:

In this research, Forming Limit Diagrams for supertension sheet metals which are using in automobile industry have been obtained. The exerted strains to sheet metals have been measured with four different methods and the errors of each method have also been represented. These methods have been compared with together and the most efficient and economic way of extracting of the exerted strains to sheet metals has been introduced. In this paper total error and uncertainty of FLD extraction procedures have been derived. Determination of the measurement uncertainty in extracting of FLD has a great importance in design and analysis of the sheet metal forming process.

Keywords: Forming Limit Diagram, Major and Minor Strain, Measurement Uncertainty.

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Authors: Iliana Marinova, Valentin Mateev

Abstract:

In this paper a computer system for electromagnetic properties measurements is designed. The system employs Agilent 4294A precision impedance analyzer to measure the amplitude and the phase of a signal applied over a tested biological tissue sample. Measured by the developed computer system data could be used for tissue characterization in wide frequency range from 40Hz to 110MHz. The computer system can interface with output devices acquiring flexible testing process.

Keywords: Electromagnetic properties, human tissue, bioimpedance, measurement system.

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Authors: L. C. Gómez-Pavón, M. A. Rojas Aparicio, E. Juárez Ruiz, M. A. Flores Guerrero, and O. Gómez-de la Fuente

Abstract:

In this work the design and characterization of an optoelectronic automated measurement system it is presented. The optoelectronic devices of this system are an optical transmitter, the optical components and the optical receiver, which were selected for a great precision of the system. The mechanical system allows free displacement of the components as well as the devices that generate the movement. The results, length and profile of the objects are display in Lab View.

Keywords: Automated, optoelectronic, triangulation method.

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Authors: Young-San Shin, Seongsoo Lee

Abstract:

Hall sensor is widely used to measure rotation angle. When the Hall voltage is measured for linear displacement, it is converted to angular displacement using arctangent function, which requires a large lookup table. In this paper, a lookup table reduction technique is presented for angle measurement. When the input of the lookup table is small within a certain threshold, the change of the outputs with respect to the change of the inputs is relatively small. Thus, several inputs can share same output, which significantly reduce the lookup table size. Its error analysis was also performed, and the threshold was determined so as to maintain the error less than 1°. When the Hall voltage has 11-bit resolution, the lookup table size is reduced from 1,024 samples to 279 samples.

Keywords: Hall sensor, angle measurement, lookup table, arctangent.

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Authors: Jongwoo Lee, Dae-Eun Kang, Sang-Young Park

Abstract:

This study presents a precise relative navigational method for satellites flying in formation using laser-based intermittent measurement data. The measurement data for the relative navigation between two satellites consist of a relative distance measured by a laser instrument and relative attitude angles measured by attitude determination. The relative navigation solutions are estimated by both the Extended Kalman filter (EKF) and unscented Kalman filter (UKF). The solutions estimated by the EKF may become inaccurate or even diverge as measurement outage time gets longer because the EKF utilizes a linearization approach. However, this study shows that the UKF with the appropriate scaling parameters provides a stable and accurate relative navigation solutions despite the long measurement outage time and large initial error as compared to the relative navigation solutions of the EKF. Various navigation results have been analyzed by adjusting the scaling parameters of the UKF.

Keywords: Satellite relative navigation, laser-based measurement, intermittent measurement, unscented kalman filter.

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Authors: Mbaitiga Zacharie

Abstract:

This paper discusses the implementation of the Kalman Filter along with the Global Positioning System (GPS) for indoor robot navigation. Two dimensional coordinates is used for the map building, and refers to the global coordinate which is attached to the reference landmark for position and direction information the robot gets. The Discrete Kalman Filter is used to estimate the robot position, project the estimated current state ahead in time through time update and adjust the projected estimated state by an actual measurement at that time via the measurement update. The navigation test has been performed and has been found to be robust.

Keywords: Global positioning System, kalman filter, robot navigation.

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Authors: R. Oonsivilai, M. Oonsivilai, J. Sanguemrum, N. Thumsirirat, A. Oonsivilai

Abstract:

Chaiyaphum Starch Co. Ltd. is one of many starch manufacturers that has introduced machinery to aid in manufacturing. Even though machinery has replaced many elements and is now a significant part in manufacturing processes, problems that must be solved with respect to current process flow to increase efficiency still exist. The paper-s aim is to increase productivity while maintaining desired quality of starch, by redesigning the flipping machine-s mechanical control system which has grossly low functional lifetime. Such problems stem from the mechanical control system-s bearings, as fluids and humidity can access into said bearing directly, in tandem with vibrations from the machine-s function itself. The wheel which is used to sense starch thickness occasionally falls from its shaft, due to high speed rotation during operation, while the shaft may bend from impact when processing dried bread. Redesigning its mechanical control system has increased its efficiency, allowing quality thickness measurement while increasing functional lifetime an additional 62 days.

Keywords: Control system, Machinery, Measurement, Potato starch

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Authors: Hyuck Ki Hong, Young Chang Jo, Yeon Shik Choi, Beom Joon Kim, Hyo Derk Park

Abstract:

To measure the thickness of the subcutaneous adipose tissue layer, a non-invasive optical measurement system (λ=1300 nm) is introduced. Animal and human subjects are used for the experiments. The results of human subjects are compared with the data of ultrasound device measurements, and a high correlation (r=0.94 for n=11) is observed. There are two modes in the corresponding signals measured by the optical system, which can be explained by two-layered and three-layered tissue models. If the target tissue is thinner than the critical thickness, detected data using diffuse reflectance method follow the three-layered tissue model, so the data increase as the thickness increases. On the other hand, if the target tissue is thicker than the critical thickness, the data follow the two-layered tissue model, so they decrease as the thickness increases.

Keywords: Subcutaneous adipose tissue layer, non-invasive measurement system, two-layered and three-layered tissue models.

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Authors: Easa Ali Abbasi, Akbar Allahverdizadeh, Reza Jahangiri, Behnam Dadashzadeh

Abstract:

Electrical current measurement is a suitable method for the performance determination of electrical devices. There are two contact and noncontact methods in this measuring process. Contact method has some disadvantages like having direct connection with wire which may endamage the system. Thus, in this paper, a bimorph piezoelectric cantilever beam which has a permanent magnet on its free end is used to measure electrical current in a noncontact way. In mathematical modeling, based on Galerkin method, the governing equation of the cantilever beam is solved, and the equation presenting the relation between applied force and beam’s output voltage is presented. Magnetic force resulting from current carrying wire is considered as the external excitation force of the system. The results are compared with other references in order to demonstrate the accuracy of the mathematical model. Finally, the effects of geometric parameters on the output voltage and natural frequency are presented.

Keywords: Cantilever beam, electrical current measurement, forced excitation, piezoelectric.

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Authors: Carolina Senabre, Sergio Valero, Emilio Velasco

Abstract:

The brake systems of vehicles are tested periodically by a “brake tester” at Ministry of Transport (MOT) stations. This tester measures the effectiveness of vehicle. This parameter is established by the International Committee of Vehicle Inspection (CITA). In this paper, we present an investigation of the influence of the tire size on the measurements of brake force on three MOT brake testers. We performed an analysis of the vehicle braking capacity test at MOT stations. The influence of varying wheel diameter and width on the measurement of braking at MOT stations has been analyzed. Thereby, the MOT brake tester as a verification system for a vehicle has been evaluated.

Keywords: Brake tester, wheel diameter, Ministry of transport facilities.

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Authors: M. Daoud-Marrakchi, S. Fendri-Elouze, Ch. Ill, B. Bejar-Ghadhab

Abstract:

The aim of this research is to propose a Measurement Scale for Patient Satisfaction (MSPS) in the context of Tunisian private clinics. This scale is developed using value management methods and is validated by statistic tools with SPSS.

Keywords: Functional analysis, Patient satisfaction, Questionnaire, Reliability, Validity.

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Authors: Muhibul H. Bhuyan, Mafujul Hasan

Abstract:

If a person can monitor his/her heart rate regularly then he/she can detect heart disease early and thus he/she can enjoy longer life span. Therefore, this disease should be taken seriously. Hence, many health care devices and monitoring systems are being designed to keep track of the heart disease. This work reports a design and simulation processes of an Arduino microcontroller based heart rate measurement and monitoring system in Proteus environment. Clipping sensors were utilized to sense the heart rate of an individual from the finger tips. It is a digital device and uses mainly infrared (IR) transmitter (mainly IR LED) and receiver (mainly IR photo-transistor or IR photo-detector). When the heart pumps the blood and circulates it among the blood vessels of the body, the changed blood pressure is detected by the transmitter and then reflected back to the receiver accordingly. The reflected signals are then processed inside the microcontroller through a software written assembly language and appropriate heart rate (HR) is determined by it in beats per minute (bpm) from the detected signal for a duration of 10 seconds and display the same in bpm on the LCD screen in digital format. The designed system was simulated on several persons with varying ages, for example, infants, adult persons and active athletes. Simulation results were found very satisfactory.

Keywords: Heart rate measurement, design, simulation, Proteus, Arduino Uno microcontroller.

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Authors: A. Hadi-Vencheh, N. Shayesteh Moghadam

Abstract:

Data envelopment analysis (DEA) has gained great popularity in environmental performance measurement because it can provide a synthetic standardized environmental performance index when pollutants are suitably incorporated into the traditional DEA framework. Since some of the environmental performance indicators cannot be controlled by companies managers, it is necessary to develop the model in a way that it could be applied when discretionary and/or non-discretionary factors were involved. In this paper, we present a semi-radial DEA approach to measuring environmental performance, which consists of non-discretionary factors. The model, then, has been applied on a real case.

Keywords: Environmental performance, efficiency, non-discretionary variables, data envelopment analysis.

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Authors: Victoriano Valencia García, Luis Usero Aragonés, Eugenio J. Fernández Vicente

Abstract:

Nowadays, the successful implementation of ICTs is vital for almost any kind of organization. Good governance and ICT management are essential for delivering value, managing technological risks, managing resources and performance measurement. In addition, outsourcing is a strategic IT service solution which complements IT services provided internally in organizations. This paper proposes the measurement tools of a new holistic maturity model based on standards ISO/IEC 20000 and ISO/IEC 38500, and the frameworks and best practices of ITIL and COBIT, with a specific focus on IT outsourcing. These measurement tools allow independent validation and practical application in the field of higher education, using a questionnaire, metrics tables, and continuous improvement plan tables as part of the measurement process. Guidelines and standards are proposed in the model for facilitating adaptation to universities and achieving excellence in the outsourcing of IT services.

Keywords: IT Governance, IT Management, IT Services, Maturity Model, Measurement Tools, Outsourcing.

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Authors: Hussam Elias, Ninovic Perez, Holger Hirsch

Abstract:

With ever-increasing use of equipment, device or more generally any electrical or electronic system, the chance of Electromagnetic incompatibility incidents has considerably increased which demands more attention to ensure the possible risks of these technologies. Therefore, complying with certain Electromagnetic compatibility (EMC) rules and not overtaking an acceptable level of radiated emissions are utmost importance for the diffusion of electronic products. In this paper, developed measure tool and a convolutional neural network were used to propose a method to reduce the required time to carry out the final measurement phase of Electromagnetic interference (EMI) measurement according to the norm EN 55032 by predicting the radiated emission and determining the height of the antenna that meets the maximum radiation value.

Keywords: Antenna height, Convolutional Neural Network, Electromagnetic Compatibility, Mean Absolute Error, position error.

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Authors: Yassine Jadi, Lin Jie

Abstract:

In order to serve the society in an electronic manner, many developing countries have launched tremendous e-government projects. The strategies of development and implementation e-government system have reached different levels, and to ensure consistency of development, the governments need to evaluate e-government performance. The United nation has design e-government development ranking index (EGDI) that rely on three indexes, Online service index (OSI), Telecommunication Infrastructure index (TII), and human capital index( HCI) which are not reflecting the interaction between a government and their citizens. Based on data envelopment analyses (DEA) technique, we are using E-participating index (EPI) as an output of government effort to evaluate the performance of e-government system. Therefore, the ranking index can be achieved in efficiency manner.

Keywords: E-government, DEA, efficiency measurement, EGDI.

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Authors: H. Arabi, A.R. Kamali Asl

Abstract:

The purpose of this work is measurement of the system presampling MTF of a variable resolution x-ray (VRX) CT scanner. In this paper, we used the parameters of an actual VRX CT scanner for simulation and study of effect of different focal spot sizes on system presampling MTF by Monte Carlo method (GATE simulation software). Focal spot size of 0.6 mm limited the spatial resolution of the system to 5.5 cy/mm at incident angles of below 17º for cell#1. By focal spot size of 0.3 mm the spatial resolution increased up to 11 cy/mm and the limiting effect of focal spot size appeared at incident angles of below 9º. The focal spot size of 0.3 mm could improve the spatial resolution to some extent but because of magnification non-uniformity, there is a 10 cy/mm difference between spatial resolution of cell#1 and cell#256. The focal spot size of 0.1 mm acted as an ideal point source for this system. The spatial resolution increased to more than 35 cy/mm and at all incident angles the spatial resolution was a function of incident angle. By the way focal spot size of 0.1 mm minimized the effect of magnification nonuniformity.

Keywords: Focal spot, Spatial resolution, Monte Carlosimulation, Variable resolution x-ray (VRX) CT.

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Authors: N. Hadjigeorgiou, A. C. Tsalikidou, E. Hristoforou, P. P. Sotiriadis

Abstract:

During the last few decades, the continuously increasing demand for accurate and reliable magnetic measurements has paved the way for the development of different types of magnetic sensing systems as well as different measurement techniques. Sensor sensitivity and linearity, signal-to-noise ratio, measurement range, cross-talk between sensors in multi-sensor applications are only some of the aspects that have been examined in the past. In this paper, a fully analog closed loop system in order to optimize the performance of AMR sensors has been developed. The operation of the proposed system has been tested using a Helmholtz coil calibration setup in order to control both the amplitude and direction of magnetic field in the vicinity of the AMR sensor. Experimental testing indicated that improved linearity of sensor response, as well as low noise levels can be achieved, when the system is employed.

Keywords: AMR sensor, closed loop, memory effects, chopper, linearity improvement, sensitivity improvement, magnetic noise, electronic noise.

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Authors: Adrian Bostan, Nicolae Tapus, Adriana Tapus

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The purpose of this research paper is to study and develop a system that is able to help identify problems and improve human rehabilitation after traumatic injuries. Traumatic injuries in human’s lower limbs can occur over a life time and can have serious side effects if they are not treated correctly. In this paper, we developed an intelligent cane (IntelliCane) so as to help individuals in their rehabilitation process and provide feedback to the users. The first stage of the paper involves an analysis of the existing systems on the market and what can be improved. The second stage presents the design of the system. The third part, which is still under development is the validation of the system in real world setups with people in need. This paper presents mainly stages one and two.

Keywords: IntelliCane, 3D printing, microprocessor, weight measurement, rehabilitation tool.

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Authors: YongXian, JIN

Abstract:

Introducing survivability into embedded real-time system (ERTS) can improve the survivability power of the system. This paper mainly discusses about the survivability of ERTS. The first is the survivability origin of ERTS. The second is survivability analysis. According to the definition of survivability based on survivability specification and division of the entire survivability analysis process for ERTS, a survivability analysis profile is presented. The quantitative analysis model of this profile is emphasized and illuminated in detail, the quantifying analysis of system was showed helpful to evaluate system survivability more accurate. The third is platform design of survivability analysis. In terms of the profile, the analysis process is encapsulated and assembled into one platform, on which quantification, standardization and simplification of survivability analysis are all achieved. The fourth is survivability design. According to character of ERTS, strengthened design method is selected to realize system survivability design. Through the analysis of embedded mobile video-on-demand system, intrusion tolerant technology is introduced in whole survivability design.

Keywords: ERTS (embedded real-time system), survivability, quantitative analysis, survivability specification, intrusion tolerant

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Authors: Joo-Hack Lee, Jin-Seung Choi, Dong-Won Kang, Jeong-Woo Seo, Ju-Young Kim, Dae-Hyeok Kim, Seung-Tae Yang, Gye-Rae Tack

Abstract:

For cycling, the analysis of the pedal force is one of the important factors in the study of exercise ability assessment and overuse injuries. In past studies, a two-axis measurement sensor was used at the sagittal plane to measure the force only in the anterior, posterior, and vertical directions and to analyze the loss of force and the injury on the frontal plane due to the forces in the right and left directions. In this study, which is a basic study on diverse analyses of the pedal force that consider the forces on the sagittal plane and the frontal plane, a three-axis pedal force measurement sensor was developed to measure the anterior-posterior (Fx), medio-lateral (Fz), and vertical (Fy) forces. The sensor was fabricated with a size and shape similar to those of the general flat pedal, and had a 550g weight that allowed smooth pedaling. Its measurement range was ±1000 N for Fx and Fz and ±2000 N for Fy, and its non-linearity, hysteresis, and repeatability were approximately 0.5%. The data were sampled at 1000 Hz using a signal collector. To use the developed sensor, the pedaling efficiency (index of efficiency, IE) and the range of left and right (medio-lateral, ML) forces were measured with two seat heights (low and high). The results of the measurement showed that the IE was higher and the force range in the ML direction was lower with the high position than with the low position. The developed measurement sensor and its application results will be useful in understanding and explaining the complicated pedaling technique, and will enable diverse kinematic analyses of the pedal force on the sagittal plane and the frontal plane.

Keywords: Cycling, Index of effectiveness, Pedal force.

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Authors: Hsiang-Wen Hsieh, Chin-Chia Wu, Hung-Hsiu Yu, Shu-Fan Liu

Abstract:

Localization is one of the critical issues in the field of robot navigation. With an accurate estimate of the robot pose, robots will be capable of navigating in the environment autonomously and efficiently. In this paper, a hybrid Distributed Vision System (DVS) for robot localization is presented. The presented approach integrates odometry data from robot and images captured from overhead cameras installed in the environment to help reduce possibilities of fail localization due to effects of illumination, encoder accumulated errors, and low quality range data. An odometry-based motion model is applied to predict robot poses, and robot images captured by overhead cameras are then used to update pose estimates with HSV histogram-based measurement model. Experiment results show the presented approach could localize robots in a global world coordinate system with localization errors within 100mm.

Keywords: Distributed Vision System, Localization, Measurement model, Motion model

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Authors: Yung-Yuan Hsu

Abstract:

The primary objective of this paper was to construct a “kinematic parameter-independent modeling of three-axis machine tools for geometric error measurement" technique. Improving the accuracy of the geometric error for three-axis machine tools is one of the machine tools- core techniques. This paper first applied the traditional method of HTM to deduce the geometric error model for three-axis machine tools. This geometric error model was related to the three-axis kinematic parameters where the overall errors was relative to the machine reference coordinate system. Given that the measurement of the linear axis in this model should be on the ideal motion axis, there were practical difficulties. Through a measurement method consolidating translational errors and rotational errors in the geometric error model, we simplified the three-axis geometric error model to a kinematic parameter-independent model. Finally, based on the new measurement method corresponding to this error model, we established a truly practical and more accurate error measuring technique for three-axis machine tools.

Keywords: Three-axis machine tool, Geometric error, HTM, Error measuring

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Authors: Humanyun Zahir, Irtsam Ghazi

Abstract:

This paper outlines the basic installation and operation of magnetic inductive flow velocity sensors on large underground cooling water pipelines. Research on the effects of cathodic protection as well as into other factors that might influence the overall performance of the meter is presented in this paper. The experiments were carried out on an immersion type magnetic meter specially used for flow measurement of cooling water pipeline. An attempt has been made in this paper to outline guidelines that can ensure accurate measurement related to immersion type magnetic meters on underground pipelines.

Keywords: Magnetic Induction, Flow meter, Faradays law, Immersion, Cathodic protection, Anode, Cathode. Flange, Grounding, Plant information management system, Electrodes.

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Authors: Divya Haridas, C. B. Sobhan

Abstract:

Laser interferometric methods have been utilized for the measurement of natural convection heat transfer from a heated vertical flat plate, in the investigation presented here. The study mainly aims at comparing two different fringe orientations in the wedge fringe setting of Mach-Zehnder interferometer (MZI), used for the measurements. The interference fringes are set in horizontal and vertical orientations with respect to the heated surface, and two different fringe analysis methods, namely the stepping method and the method proposed by Naylor and Duarte, are used to obtain the heat transfer coefficients. The experimental system is benchmarked with theoretical results, thus validating its reliability in heat transfer measurements. The interference fringe patterns are analyzed digitally using MATLAB 7 and MOTIC Plus softwares, which ensure improved efficiency in fringe analysis, hence reducing the errors associated with conventional fringe tracing. The work also discuss the relative merits and limitations of the two methods used.

Keywords: MZI, Natural Convection, Naylor Method, Vertical Flat Plate.

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Authors: Sewon Kim, Chang Yeop Lee, Minjun Kwon

Abstract:

This study is aiming at establishing the relationship between the optical signal of flame and an equivalent ratio of flame. In this experiment, flame optical signal in a furnace is measured using photodiode. The combustion system is composed of metal fiber burner and vertical furnace, and flame chemiluminescence is measured at various experimental conditions. In this study, the flame chemiluminescence of laminar premixed flame is measured using commercially available photodiode. It is experimentally investigated the relationship between equivalent ratio and photodiode signal. In addition, the strategy of combustion control method is proposed using the optical signal and fuel pressure. The results showed that certain relationship between optical data of photodiode and equivalence ratio exists, and this leads to the successful application of this system for instantaneous measurement of equivalence ration of the combustion system.

Keywords: Flame chemiluminescence, photo diode, equivalence ratio, combustion control.

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Authors: Jadwiga Królikowska, Andrzej Królikowski, Jarosław Bajer

Abstract:

The work delineates the threats of maladjustment of the capacity of rain canals, designed and built in the early 20th century, in connection to heavy rainfall, especially in summer. This is the cause of the so called 'urban floods.' It directly relates to fierce raise of paving in the cities. Resolving this problem requires a change in philosophy of draining the rainfall by wider use of retention, infiltration and usage of rainwater.

In systemic approach to managing the safety of urban drainage systems the risk, which is directly connected to safety failures, has been accepted as a measure. The risk level defines the probability of occurrence of losses greater than the ones forecast for a given time frame. The procedure of risk modelling, enabling its numeric analysis by using appropriate weights, is a significant issue in this paper.

Keywords: Drainage system, urban areas, risk measurement.

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Authors: Dahi Ghareab Abdelsalam Ibrahim

Abstract:

Axial and lateral measurements of a step depth standard are presented. The axial measurement is performed based on the ISO 5436 profile analysis. The lateral measurement is performed based on the Hamming window band-pass filter method. The method is applied to calibrate a groove structure of a step depth standard of 60 nm. For the axial measurement, the computed results show that the depth of the groove structure is 59.7 ± 0.6 nm. For the lateral measurement, the computed results show that the difference between the two line edges of the groove structure is 151.7 ± 2.5 nm. The method can be applied to any step height/depth regardless of the sharpness of the line edges.

Keywords: Hamming window, band-pass filter, metrology, interferometry.

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